DE69016392D1 - Verfahren und Vorrichtung zur Züchtung von Kristallen. - Google Patents

Verfahren und Vorrichtung zur Züchtung von Kristallen.

Info

Publication number
DE69016392D1
DE69016392D1 DE69016392T DE69016392T DE69016392D1 DE 69016392 D1 DE69016392 D1 DE 69016392D1 DE 69016392 T DE69016392 T DE 69016392T DE 69016392 T DE69016392 T DE 69016392T DE 69016392 D1 DE69016392 D1 DE 69016392D1
Authority
DE
Germany
Prior art keywords
growing crystals
crystals
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69016392T
Other languages
English (en)
Other versions
DE69016392T2 (de
Inventor
Muhammed Afzal Shahid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69016392D1 publication Critical patent/DE69016392D1/de
Publication of DE69016392T2 publication Critical patent/DE69016392T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/14—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method characterised by the seed, e.g. its crystallographic orientation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/901—Levitation, reduced gravity, microgravity, space
    • Y10S117/902—Specified orientation, shape, crystallography, or size of seed or substrate
DE69016392T 1989-12-04 1990-11-23 Verfahren und Vorrichtung zur Züchtung von Kristallen. Expired - Lifetime DE69016392T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/445,522 US4966645A (en) 1989-12-04 1989-12-04 Crystal growth method and apparatus

Publications (2)

Publication Number Publication Date
DE69016392D1 true DE69016392D1 (de) 1995-03-09
DE69016392T2 DE69016392T2 (de) 1995-05-24

Family

ID=23769240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69016392T Expired - Lifetime DE69016392T2 (de) 1989-12-04 1990-11-23 Verfahren und Vorrichtung zur Züchtung von Kristallen.

Country Status (5)

Country Link
US (1) US4966645A (de)
EP (1) EP0435454B1 (de)
JP (1) JPH03177400A (de)
KR (1) KR0165847B1 (de)
DE (1) DE69016392T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5123996A (en) * 1991-01-28 1992-06-23 At&T Bell Laboratories Crystal growth method and apparatus
US5372088A (en) * 1991-12-30 1994-12-13 At&T Bell Laboratories Crystal growth method and apparatus
JPH07291777A (ja) * 1994-04-21 1995-11-07 Toshiba Corp 半導体単結晶製造装置及び製造方法
DE19954349A1 (de) * 1999-11-11 2001-06-07 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe
FR3095972B1 (fr) 2019-05-13 2023-07-07 Safran Aircraft Engines Moule pour la fabrication d’une pièce par coulée de métal et croissance épitaxiale et procédé de fabrication associé

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054010A (en) * 1976-01-20 1977-10-18 Headway Research, Inc. Apparatus for grinding edges of planar workpieces
US4224099A (en) * 1978-08-10 1980-09-23 Union Carbide Corporation Method for producing R-plane single crystal alpha alumina
US4344260A (en) * 1979-07-13 1982-08-17 Nagano Electronics Industrial Co., Ltd. Method for precision shaping of wafer materials
JPS56105638A (en) * 1980-01-26 1981-08-22 Sumitomo Electric Ind Ltd Manufacture of circular gallium arsenide wafer
JPS5758218U (de) * 1980-09-22 1982-04-06
US4404172A (en) * 1981-01-05 1983-09-13 Western Electric Company, Inc. Method and apparatus for forming and growing a single crystal of a semiconductor compound
FR2546912B1 (fr) * 1983-06-06 1987-07-10 Commissariat Energie Atomique Procede et dispositif d'elaboration d'un monocristal

Also Published As

Publication number Publication date
DE69016392T2 (de) 1995-05-24
JPH03177400A (ja) 1991-08-01
KR0165847B1 (ko) 1998-12-15
EP0435454A1 (de) 1991-07-03
EP0435454B1 (de) 1995-01-25
US4966645A (en) 1990-10-30
KR910013456A (ko) 1991-08-08

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