DE69017759D1 - Verschiebungsdetektor unter Verwendung eines Tunnel-Abtast-Mikroskops. - Google Patents

Verschiebungsdetektor unter Verwendung eines Tunnel-Abtast-Mikroskops.

Info

Publication number
DE69017759D1
DE69017759D1 DE69017759T DE69017759T DE69017759D1 DE 69017759 D1 DE69017759 D1 DE 69017759D1 DE 69017759 T DE69017759 T DE 69017759T DE 69017759 T DE69017759 T DE 69017759T DE 69017759 D1 DE69017759 D1 DE 69017759D1
Authority
DE
Germany
Prior art keywords
scanning microscope
displacement detector
tunnel scanning
tunnel
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69017759T
Other languages
English (en)
Other versions
DE69017759T2 (de
Inventor
Yiroyasu Nose
Toshimitsu Kawase
Toshihiko Miyazaki
Takahiro Oguchi
Akihiko Yamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69017759D1 publication Critical patent/DE69017759D1/de
Publication of DE69017759T2 publication Critical patent/DE69017759T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
DE69017759T 1989-04-27 1990-04-26 Verschiebungsdetektor unter Verwendung eines Tunnel-Abtast-Mikroskops. Expired - Fee Related DE69017759T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1105889A JP2775464B2 (ja) 1989-04-27 1989-04-27 位置検出装置

Publications (2)

Publication Number Publication Date
DE69017759D1 true DE69017759D1 (de) 1995-04-20
DE69017759T2 DE69017759T2 (de) 1995-10-05

Family

ID=14419488

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69017759T Expired - Fee Related DE69017759T2 (de) 1989-04-27 1990-04-26 Verschiebungsdetektor unter Verwendung eines Tunnel-Abtast-Mikroskops.

Country Status (4)

Country Link
US (1) US5150035A (de)
EP (1) EP0403766B1 (de)
JP (1) JP2775464B2 (de)
DE (1) DE69017759T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0304893B1 (de) * 1987-08-25 1995-07-19 Canon Kabushiki Kaisha Codiereinrichtung
JP2761801B2 (ja) * 1990-10-04 1998-06-04 キヤノン株式会社 角度的位置関係検出方法及びこれを用いたエンコーダ
JP3126409B2 (ja) * 1991-06-05 2001-01-22 キヤノン株式会社 情報記録再生方法
CA2076925C (en) * 1991-08-29 1999-08-31 Kunihiro Sakai Information processing apparatus and scanning tunnel microscope
CA2080251C (en) * 1991-10-15 1997-12-02 Shunichi Shido Information processing apparatus with tracking mechanism
JP3390173B2 (ja) * 1993-07-22 2003-03-24 ビーティージー・インターナショナル・リミテッド 近視野光学装置用インテリジェントセンサ
JP2983876B2 (ja) * 1994-03-22 1999-11-29 徹雄 大原 リアルタイムかつナノメータスケールの位置測定方法および装置
JP3698749B2 (ja) * 1995-01-11 2005-09-21 株式会社半導体エネルギー研究所 液晶セルの作製方法およびその作製装置、液晶セルの生産システム
JP3610108B2 (ja) * 1995-01-13 2005-01-12 キヤノン株式会社 情報処理装置
US6266581B1 (en) * 1996-05-10 2001-07-24 The United States Of America As Represented By The Secretary Of Commerce Spatial RAM for high precision data acquisition systems
US6838889B2 (en) * 2001-01-17 2005-01-04 Veeco Instruments Inc. Method and apparatus for reducing the parachuting of a probe
GB2401934A (en) * 2003-02-18 2004-11-24 Univ Cardiff Measurement technique and system based on sub-nano-scale reference patterns
TWI255256B (en) * 2003-12-25 2006-05-21 Ind Tech Res Inst Method and apparatus for oxidizing a nitride film
JP4276270B2 (ja) * 2007-02-20 2009-06-10 ファナック株式会社 接触検知によるワークの基準位置設定機能を有する工作機械

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994734A (ja) * 1982-11-22 1984-05-31 Oki Electric Ind Co Ltd 光記録用媒体
US4785762A (en) * 1984-04-19 1988-11-22 Canon Kabushiki Kaisha Apparatus for forming film
US4674436A (en) * 1984-04-19 1987-06-23 Canon Kabushiki Kaisha Film forming apparatus
JPS61197676A (ja) * 1985-02-27 1986-09-01 Canon Inc 画像記録方法
JPS61228988A (ja) * 1985-04-02 1986-10-13 Canon Inc 光熱変換記録媒体
US4840821A (en) * 1985-05-27 1989-06-20 Canon Kabushiki Kaisha Method of and apparatus for forming film
JPS62209302A (ja) * 1986-03-10 1987-09-14 Shimadzu Corp 平行移動量検出装置
US4835083A (en) * 1986-04-16 1989-05-30 Canon Kabushiki Kaisha Method for patterning electroconductive film and patterned electroconductive film
EP0304893B1 (de) * 1987-08-25 1995-07-19 Canon Kabushiki Kaisha Codiereinrichtung
DE3850544T2 (de) * 1987-09-24 1994-11-24 Canon Kk Mikrosonde, deren Herstellung und elektronisches Gerät, das diese Mikrosonde gebraucht.
US5001409A (en) * 1987-10-09 1991-03-19 Hitachi, Ltd. Surface metrological apparatus
JP2760508B2 (ja) * 1988-06-23 1998-06-04 工業技術院長 走査型トンネル顕微鏡
US5019707A (en) * 1989-03-23 1991-05-28 International Business Machines Corporation High speed waveform sampling with a tunneling microscope

Also Published As

Publication number Publication date
DE69017759T2 (de) 1995-10-05
EP0403766A2 (de) 1990-12-27
EP0403766A3 (de) 1993-01-13
JP2775464B2 (ja) 1998-07-16
US5150035A (en) 1992-09-22
JPH02285213A (ja) 1990-11-22
EP0403766B1 (de) 1995-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee