DE69027171T2 - Elektrische Inspektionseinheit mit einer anisotropischen elektrisch leitenden Schicht und Verfahren zur Herstellung der anisotropischen elektrisch leitenden Schicht - Google Patents

Elektrische Inspektionseinheit mit einer anisotropischen elektrisch leitenden Schicht und Verfahren zur Herstellung der anisotropischen elektrisch leitenden Schicht

Info

Publication number
DE69027171T2
DE69027171T2 DE69027171T DE69027171T DE69027171T2 DE 69027171 T2 DE69027171 T2 DE 69027171T2 DE 69027171 T DE69027171 T DE 69027171T DE 69027171 T DE69027171 T DE 69027171T DE 69027171 T2 DE69027171 T2 DE 69027171T2
Authority
DE
Germany
Prior art keywords
conductive layer
electrically conductive
anisotropic electrically
producing
inspection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69027171T
Other languages
English (en)
Other versions
DE69027171D1 (de
Inventor
Shinichi Suyama
Yuiti Haruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Application granted granted Critical
Publication of DE69027171D1 publication Critical patent/DE69027171D1/de
Publication of DE69027171T2 publication Critical patent/DE69027171T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
DE69027171T 1989-09-29 1990-09-28 Elektrische Inspektionseinheit mit einer anisotropischen elektrisch leitenden Schicht und Verfahren zur Herstellung der anisotropischen elektrisch leitenden Schicht Expired - Lifetime DE69027171T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25221489 1989-09-29

Publications (2)

Publication Number Publication Date
DE69027171D1 DE69027171D1 (de) 1996-07-04
DE69027171T2 true DE69027171T2 (de) 1996-10-10

Family

ID=17234096

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69027171T Expired - Lifetime DE69027171T2 (de) 1989-09-29 1990-09-28 Elektrische Inspektionseinheit mit einer anisotropischen elektrisch leitenden Schicht und Verfahren zur Herstellung der anisotropischen elektrisch leitenden Schicht

Country Status (5)

Country Link
US (2) US5132058A (de)
EP (1) EP0420690B1 (de)
JP (3) JP3087294B2 (de)
KR (1) KR910006733A (de)
DE (1) DE69027171T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015212565A1 (de) * 2015-07-06 2017-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur reversiblen Kontaktierung

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015212565A1 (de) * 2015-07-06 2017-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur reversiblen Kontaktierung

Also Published As

Publication number Publication date
EP0420690B1 (de) 1996-05-29
JP3087294B2 (ja) 2000-09-11
JPH03183974A (ja) 1991-08-09
KR910006733A (ko) 1991-04-29
JP3332006B2 (ja) 2002-10-07
JPH11353948A (ja) 1999-12-24
US5132058A (en) 1992-07-21
DE69027171D1 (de) 1996-07-04
US5317255A (en) 1994-05-31
EP0420690A2 (de) 1991-04-03
EP0420690A3 (en) 1992-03-11
JP3038859B2 (ja) 2000-05-08
JPH03196416A (ja) 1991-08-27

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Owner name: JSR CORP., TOKIO/TOKYO, JP