DE69027363D1 - Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen - Google Patents

Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen

Info

Publication number
DE69027363D1
DE69027363D1 DE69027363T DE69027363T DE69027363D1 DE 69027363 D1 DE69027363 D1 DE 69027363D1 DE 69027363 T DE69027363 T DE 69027363T DE 69027363 T DE69027363 T DE 69027363T DE 69027363 D1 DE69027363 D1 DE 69027363D1
Authority
DE
Germany
Prior art keywords
jet recording
manufacture
photosensitive material
ink jet
recording heads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69027363T
Other languages
English (en)
Other versions
DE69027363T2 (de
Inventor
Minoru Nozawa
Tadayoshi Inamoto
Hideaki Mashio
Masami Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1072184A external-priority patent/JP2752686B2/ja
Priority claimed from JP1084742A external-priority patent/JP2710983B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69027363D1 publication Critical patent/DE69027363D1/de
Publication of DE69027363T2 publication Critical patent/DE69027363T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14467—Multiple feed channels per ink chamber
DE69027363T 1989-03-24 1990-03-23 Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen Expired - Fee Related DE69027363T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1072184A JP2752686B2 (ja) 1989-03-24 1989-03-24 液体噴射記録ヘッドの製造方法
JP1084742A JP2710983B2 (ja) 1989-04-05 1989-04-05 液体噴射記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69027363D1 true DE69027363D1 (de) 1996-07-18
DE69027363T2 DE69027363T2 (de) 1996-11-14

Family

ID=26413307

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69027363T Expired - Fee Related DE69027363T2 (de) 1989-03-24 1990-03-23 Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen

Country Status (5)

Country Link
US (1) US5126768A (de)
EP (1) EP0393855B1 (de)
AT (1) ATE139186T1 (de)
DE (1) DE69027363T2 (de)
ES (1) ES2087890T3 (de)

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ES2120954T3 (es) * 1990-07-21 1998-11-16 Canon Kk Metodo para la fabricacion de un cabezal de impresion por chorros de tinta y cabezal para la impresion por chorros de tinta.
EP0469916B1 (de) * 1990-08-03 1995-11-29 Canon Kabushiki Kaisha Farbstrahlaufzeichnungskopfherstellungsverfahren
US5229785A (en) * 1990-11-08 1993-07-20 Hewlett-Packard Company Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate
ATE144197T1 (de) * 1991-02-20 1996-11-15 Canon Kk Tintenstrahlaufzeichnungskopf, tintenstrahlaufzeichnungsvorrichtung diesen verwendend und verfahren zu seiner herstellung
JPH0592570A (ja) 1991-10-03 1993-04-16 Canon Inc 液体噴射記録ヘツド、その製造方法、及び液体噴射記録ヘツドを備えた記録装置
JP3402618B2 (ja) * 1991-11-12 2003-05-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法および記録装置
US5311252A (en) * 1992-05-29 1994-05-10 Eastman Kodak Company Method of proximity imaging photolithographic structures for ink jet printers
ATE196199T1 (de) * 1992-06-01 2000-09-15 Canon Kk Verfahren zur herstellung eines tintenstrahlaufzeichnungskopfes
JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
EP0585854B1 (de) * 1992-08-31 1998-11-11 Canon Kabushiki Kaisha Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf
DE69315919T2 (de) * 1992-09-01 1998-05-28 Canon Kk Farbstrahldruckkopf und zugehöriges Farbstrahlgerät
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US5322594A (en) * 1993-07-20 1994-06-21 Xerox Corporation Manufacture of a one piece full width ink jet printing bar
CA2136514C (en) * 1993-11-26 2000-01-11 Masashi Kitani An ink jet recording head, an ink jet unit and an ink jet apparatus using said recording head
JP3229146B2 (ja) * 1994-12-28 2001-11-12 キヤノン株式会社 液体噴射ヘッドおよびその製造方法
JP3176249B2 (ja) * 1995-04-28 2001-06-11 キヤノン株式会社 インクジェット記録ヘッド、インクジェット記録装置および情報処理システム
US5781211A (en) * 1996-07-23 1998-07-14 Bobry; Howard H. Ink jet recording head apparatus
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JPH10119314A (ja) 1996-08-30 1998-05-12 Canon Inc 液体吐出ヘッドユニットの結合方法、液体吐出ヘッドユニットおよび液体吐出カートリッジ
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
AUPP653498A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46a)
AUPP653998A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46B)
AUPP654598A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46h)
AUPP654398A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46g)
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
US6742873B1 (en) * 2001-04-16 2004-06-01 Silverbrook Research Pty Ltd Inkjet printhead construction
US7028474B2 (en) * 1998-10-16 2006-04-18 Silverbook Research Pty Ltd Micro-electromechanical actuator with control logic circuitry
US7419250B2 (en) * 1999-10-15 2008-09-02 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US6918655B2 (en) * 1998-10-16 2005-07-19 Silverbrook Research Pty Ltd Ink jet printhead with nozzles
US7677686B2 (en) * 1998-10-16 2010-03-16 Silverbrook Research Pty Ltd High nozzle density printhead ejecting low drop volumes
US7111924B2 (en) * 1998-10-16 2006-09-26 Silverbrook Research Pty Ltd Inkjet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
US7216956B2 (en) * 1998-10-16 2007-05-15 Silverbrook Research Pty Ltd Printhead assembly with power and ground connections along single edge
ATE367927T1 (de) 1998-10-16 2007-08-15 Silverbrook Res Pty Ltd Verfahren zur herstellung einer düse für einen tintenstrahldruckkopf
US7815291B2 (en) 1998-10-16 2010-10-19 Silverbrook Research Pty Ltd Printhead integrated circuit with low drive transistor to nozzle area ratio
US7182431B2 (en) * 1999-10-19 2007-02-27 Silverbrook Research Pty Ltd Nozzle arrangement
US6863378B2 (en) * 1998-10-16 2005-03-08 Silverbrook Research Pty Ltd Inkjet printer having enclosed actuators
US6994424B2 (en) * 1998-10-16 2006-02-07 Silverbrook Research Pty Ltd Printhead assembly incorporating an array of printhead chips on an ink distribution structure
US7384131B2 (en) * 1998-10-16 2008-06-10 Silverbrook Research Pty Ltd Pagewidth printhead having small print zone
US7001007B2 (en) * 1998-10-16 2006-02-21 Silverbrook Research Pty Ltd Method of ejecting liquid from a micro-electromechanical device
US20040263551A1 (en) * 1998-10-16 2004-12-30 Kia Silverbrook Method and apparatus for firing ink from a plurality of nozzles on a printhead
WO2000023279A1 (en) * 1998-10-16 2000-04-27 Silverbrook Research Pty. Limited Improvements relating to inkjet printers
AUPP702198A0 (en) * 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Image creation method and apparatus (ART79)
US6958125B2 (en) * 1999-12-24 2005-10-25 Canon Kabushiki Kaisha Method for manufacturing liquid jet recording head
US6676250B1 (en) 2000-06-30 2004-01-13 Silverbrook Research Pty Ltd Ink supply assembly for a print engine
ATE311421T1 (de) * 2001-03-05 2005-12-15 Georg Gros Beschichtungsgemisch auf wasserbasis, verfahren zum aufbringen einer korrosionsschutzschicht mit diesem gemisch, derart beschichtete unterlage und deren verwendung
JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
WO2003084759A1 (fr) * 2002-04-10 2003-10-16 Sony Corporation Tete d'injection de liquide, dispositif d'injection de liquide et procede de fabrication de tete d'injection de liquide
CN100360596C (zh) * 2002-04-20 2008-01-09 坎梅陶尔股份有限公司 用于施涂可以低磨损方式成型的聚合物耐腐蚀涂层的混合物和用于生产该涂层的方法
US6773869B1 (en) * 2003-04-24 2004-08-10 Lexmark International, Inc. Inkjet printhead nozzle plate
JP4500552B2 (ja) * 2004-01-09 2010-07-14 富士フイルム株式会社 インクジェットヘッド及びインクジェット記録装置
TWI239121B (en) * 2004-04-26 2005-09-01 Ind Tech Res Inst Antenna
JP4724484B2 (ja) * 2005-07-08 2011-07-13 キヤノン株式会社 記録ヘッドおよびインクジェット記録装置
JP5679665B2 (ja) * 2009-02-06 2015-03-04 キヤノン株式会社 インクジェット記録ヘッド
JP5371475B2 (ja) * 2009-02-17 2013-12-18 キヤノン株式会社 インクジェット記録ヘッド及びそのクリーニング方法
JP5596954B2 (ja) * 2009-10-08 2014-09-24 キヤノン株式会社 液体供給部材、液体供給部材の製造方法及び液体吐出ヘッドの製造方法
JP6964975B2 (ja) * 2016-01-08 2021-11-10 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
US10179453B2 (en) 2016-01-08 2019-01-15 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection apparatus
TW201924950A (zh) * 2017-11-27 2019-07-01 愛爾蘭商滿捷特科技公司 形成噴墨噴嘴腔室的方法

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US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
US4587534A (en) * 1983-01-28 1986-05-06 Canon Kabushiki Kaisha Liquid injection recording apparatus
JPS6189852A (ja) * 1984-10-09 1986-05-08 Canon Inc 液体噴射記録ヘツド
JPH0645242B2 (ja) * 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法

Also Published As

Publication number Publication date
ATE139186T1 (de) 1996-06-15
US5126768A (en) 1992-06-30
DE69027363T2 (de) 1996-11-14
EP0393855B1 (de) 1996-06-12
ES2087890T3 (es) 1996-08-01
EP0393855A1 (de) 1990-10-24

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Legal Events

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8339 Ceased/non-payment of the annual fee