DE69028796D1 - Evakuierungsvorrichtung und Evakuierungsverfahren - Google Patents

Evakuierungsvorrichtung und Evakuierungsverfahren

Info

Publication number: DE69028796D1
Authority: DE; Germany
Prior art keywords: evacuation device; evacuation
Prior art date: 1989-05-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Revoked

Application number

DE69028796T

Other languages

English (en)

Other versions

DE69028796T2 (de

Inventor

Katsuya Okumura

Fumio Kuriyama

Yukio Murai

Manabu Tsujimura

Hiroshi Sobukawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Toshiba Corp

Original Assignee

Ebara Corp

Toshiba Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-05-09

Filing date

1990-05-04

Publication date

1996-11-14

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14630823&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69028796(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1990-05-04 Application filed by Ebara Corp, Toshiba Corp filed Critical Ebara Corp

1996-11-14 Publication of DE69028796D1 publication Critical patent/DE69028796D1/de

1997-05-07 Application granted granted Critical

1997-05-07 Publication of DE69028796T2 publication Critical patent/DE69028796T2/de

2010-05-05 Anticipated expiration legal-status Critical

Status Revoked legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/02—Feed or outlet devices therefor
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps

DE69028796T 1989-05-09 1990-05-04 Evakuierungsvorrichtung und Evakuierungsverfahren Revoked DE69028796T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1114166A JP2538796B2 (ja)	1989-05-09	1989-05-09	真空排気装置および真空排気方法

Publications (2)

Publication Number	Publication Date
DE69028796D1 true DE69028796D1 (de)	1996-11-14
DE69028796T2 DE69028796T2 (de)	1997-05-07

Family

ID=14630823

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69028796T Revoked DE69028796T2 (de)	1989-05-09	1990-05-04	Evakuierungsvorrichtung und Evakuierungsverfahren

Country Status (5)

Country	Link
US (1)	US5062271A (de)
EP (1)	EP0397051B1 (de)
JP (1)	JP2538796B2 (de)
KR (1)	KR0145417B1 (de)
DE (1)	DE69028796T2 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6318093B2 (en) *	1988-09-13	2001-11-20	Helix Technology Corporation	Electronically controlled cryopump
US6022195A (en) *	1988-09-13	2000-02-08	Helix Technology Corporation	Electronically controlled vacuum pump with control module
USRE36610E (en) *	1989-05-09	2000-03-14	Kabushiki Kaisha Toshiba	Evacuation apparatus and evacuation method
US5400604A (en) *	1990-11-19	1995-03-28	Leybold Ag	Cryopump and process for regenerating said cryopump
US5261244A (en) *	1992-05-21	1993-11-16	Helix Technology Corporation	Cryogenic waterpump
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system
EP0603694A1 (de) *	1992-12-24	1994-06-29	BALZERS-PFEIFFER GmbH	Vakuumpumpsystem
DE69409555T2 (de) *	1993-01-11	1998-12-03	Applied Materials Inc	Turbomolekularpumpe
US5483803A (en) *	1993-06-16	1996-01-16	Helix Technology Corporation	High conductance water pump
US6902378B2 (en) *	1993-07-16	2005-06-07	Helix Technology Corporation	Electronically controlled vacuum pump
JP2719298B2 (ja) *	1993-07-29	1998-02-25	アプライドマテリアルズインコーポレイテッド	真空装置の冷却構造
US5513499A (en) *	1994-04-08	1996-05-07	Ebara Technologies Incorporated	Method and apparatus for cryopump regeneration using turbomolecular pump
US5520002A (en) *	1995-02-01	1996-05-28	Sony Corporation	High speed pump for a processing vacuum chamber
US5537833A (en) *	1995-05-02	1996-07-23	Helix Technology Corporation	Shielded cryogenic trap
JP3125207B2 (ja) *	1995-07-07	2001-01-15	東京エレクトロン株式会社	真空処理装置
FR2739574B1 (fr) *	1995-10-04	1997-11-14	Cit Alcatel	Groupe de pompage secondaire
JPH09202973A (ja) *	1996-01-24	1997-08-05	Tokyo Electron Ltd	成膜処理装置の排気システム構造
IT1287016B1 (it) *	1996-07-18	1998-07-24	Varian Spa	Pompa da vuoto.
US5782096A (en) *	1997-02-05	1998-07-21	Helix Technology Corporation	Cryopump with improved shielding
US6217278B1 (en) *	1997-07-25	2001-04-17	Ebara Corporation	Turbomolecular pump
JP3452468B2 (ja) *	1997-08-15	2003-09-29	株式会社荏原製作所	ターボ分子ポンプ
JP3415402B2 (ja) *	1997-08-15	2003-06-09	株式会社荏原製作所	ターボ分子ポンプ
US5901558A (en) *	1997-08-20	1999-05-11	Helix Technology Corporation	Water pump with integral gate valve
US5819545A (en) *	1997-08-28	1998-10-13	Helix Technology Corporation	Cryopump with selective condensation and defrost
FR2776029B1 (fr) *	1998-03-16	2000-06-23	Alsthom Cge Alcatel	Pompe turbomoleculaire
US6362096B1 (en)	1998-07-31	2002-03-26	Streag Cvd Systems Ltd	Wafer processing with water vapor pumping
JP3010529B1 (ja) *	1998-08-28	2000-02-21	セイコー精機株式会社	真空ポンプ、及び真空装置
JP3047292B1 (ja) *	1998-11-24	2000-05-29	セイコー精機株式会社	ターボ分子ポンプ及び真空装置
US6263679B1 (en) *	2000-04-05	2001-07-24	Helix Technology Corporation	Particulate dam for cryopump flange
JP4657463B2 (ja) *	2001-02-01	2011-03-23	エドワーズ株式会社	真空ポンプ
DE10305038A1 (de) *	2003-02-07	2004-08-19	Pfeiffer Vacuum Gmbh	Vakuumpumpanordnung
US6895766B2 (en) *	2003-06-27	2005-05-24	Helix Technology Corporation	Fail-safe cryopump safety purge delay
US20040261424A1 (en) *	2003-06-27	2004-12-30	Helix Technology Corporation	Integration of automated cryopump safety purge with set point
US6920763B2 (en) *	2003-06-27	2005-07-26	Helix Technology Corporation	Integration of automated cryopump safety purge
KR101084896B1 (ko) *	2003-06-27	2011-11-17	브룩스 오토메이션, 인크.	자동화된 극저온 펌프의 통합된 안전 세정
WO2005050017A1 (ja) *	2003-11-19	2005-06-02	Sumitomo Heavy Industries, Ltd.	クライオポンプ
JP5495547B2 (ja) *	2008-12-25	2014-05-21	キヤノン株式会社	処理装置、およびデバイス製造方法
JP6616611B2 (ja) *	2015-07-23	2019-12-04	エドワーズ株式会社	排気システム
CN107489630B (zh) *	2017-08-25	2019-05-24	宏基领先科技有限公司	一种真空设备的管道结构
JP2019173613A (ja) *	2018-03-28	2019-10-10	株式会社荏原製作所	真空排気装置および真空排気方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2065782A (en) *	1934-12-31	1936-12-29	Superheater Co Ltd	Steam generating and superheating installation
GB709819A (en) *	1951-07-18	1954-06-02	Nat Res Dev	Cold traps for vacuum systems
US3536418A (en) *	1969-02-13	1970-10-27	Onezime P Breaux	Cryogenic turbo-molecular vacuum pump
US3625019A (en) *	1969-10-27	1971-12-07	Sargent Welch Scientific Co	Vacuum pump with demountable cold trap and getter pump
US4277951A (en) *	1980-04-10	1981-07-14	Air Products And Chemicals, Inc.	Cryopumping apparatus
JPS57212395A (en) *	1981-06-24	1982-12-27	Hitachi Ltd	Molecular pump
JPS5990784A (ja) *	1982-11-12	1984-05-25	Shimadzu Corp	真空排気装置
DE3512614A1 (de) *	1985-04-06	1986-10-16	Leybold-Heraeus GmbH, 5000 Köln	Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
US4597267A (en) *	1985-06-28	1986-07-01	Marin Tek, Inc.	Fast cycle water vapor cryopump
JPS62126580A (ja) *	1985-11-27	1987-06-08	早川　哲夫	面発熱体
JPS62168994A (ja) *	1985-12-26	1987-07-25	Morihiko Kimata	高真空排気装置
DE3680335D1 (de) *	1986-06-23	1991-08-22	Leybold Ag	Kryopumpe und verfahren zum betrieb dieser kryopumpe.
US4679402A (en) *	1986-08-11	1987-07-14	Helix Technology Corporation	Cooling heat exchanger
US4926648A (en) *	1988-03-07	1990-05-22	Toshiba Corp.	Turbomolecular pump and method of operating the same
US4860546A (en) *	1988-08-10	1989-08-29	Helix Technology Corporation	Vacuum system with molecular flow line

1989
- 1989-05-09 JP JP1114166A patent/JP2538796B2/ja not_active Expired - Lifetime
1990
- 1990-05-04 DE DE69028796T patent/DE69028796T2/de not_active Revoked
- 1990-05-04 EP EP90108451A patent/EP0397051B1/de not_active Revoked
- 1990-05-04 US US07/519,377 patent/US5062271A/en not_active Ceased
- 1990-05-08 KR KR1019900006431A patent/KR0145417B1/ko not_active IP Right Cessation

Also Published As

Publication number	Publication date
EP0397051B1 (de)	1996-10-09
EP0397051A1 (de)	1990-11-14
JP2538796B2 (ja)	1996-10-02
KR900017651A (ko)	1990-12-19
US5062271A (en)	1991-11-05
DE69028796T2 (de)	1997-05-07
JPH02294573A (ja)	1990-12-05
KR0145417B1 (ko)	1998-07-15

Legal Events

Date	Code	Title	Description
1997-10-02	8363	Opposition against the patent
2007-12-20	8331	Complete revocation

Publication	Publication Date	Title
DE69028796D1 (de)	1996-11-14	Evakuierungsvorrichtung und Evakuierungsverfahren
DE69032697D1 (de)	1998-11-19	Codierverfahren und Codiervorrichtung
KR910003490A (ko)	1991-02-27	병렬처리장치 및 병렬처리방법
NO902698D0 (no)	1990-06-18	Fremgangsmaate og anordning for utfoerelse av broenn-perforering.
DE69130897D1 (de)	1999-03-25	Vakuum-Behandlungsverfahren und Vorrichtung
KR910010637A (ko)	1991-06-29	에칭방법 및 에칭장치
DE69034055D1 (de)	2003-05-08	Bilderzeugungsgerät und Modulationsverfahren
DE69420880T2 (de)	2000-04-20	Birnenverarbeitungsverfahren und Gerät
DE69029534T2 (de)	1997-06-26	Aufzeichnungseinrichtung und Aufzeichnungsmethode
DE69033956D1 (de)	2002-05-29	Druckvorrichtung und -verfahren
KR920700163A (ko)	1992-02-19	찌꺼기 안정화 방법 및 장치
DE69125315D1 (de)	1997-04-30	Kodierverfahren und Kodiervorrichtung
DE69030347D1 (de)	1997-05-07	Plasmaprozess, Verfahren und Gerät
GB8924951D0 (en)	1989-12-28	Device and methods
DE69028264D1 (de)	1996-10-02	Regelungsverfahren und -vorrichtung
IT1231215B (it)	1991-11-23	Procedimento e dispositivo di formatura
KR910001906A (ko)	1991-01-31	플라즈마 처리장치 및 방법
GB9006143D0 (en)	1990-05-16	Sterilisation device and method
NO885206D0 (no)	1988-11-23	Anordning og framgangsmte for fjerning av strenger.
IT9020592A0 (it)	1990-06-08	procedimento e dispositivo
DE68904814T2 (de)	1993-05-27	Bilderzeugungsvorrichtung und bilderzeugungsverfahren.
DE69124161T2 (de)	1997-05-28	Figurverarbeitungs-verfahren und -vorrichtung
DE69001135T2 (de)	1993-09-16	Loetverfahren und loetgeraet.
DE69117787D1 (de)	1996-04-18	Zeichenverarbeitungsverfahren und Gerät
IT1234175B (it)	1992-05-05	Metodo e dispositivo survoltore.