DE69032824T2 - Verfahren zum Laseraufdampfen - Google Patents
Verfahren zum LaseraufdampfenInfo
- Publication number
- DE69032824T2 DE69032824T2 DE69032824T DE69032824T DE69032824T2 DE 69032824 T2 DE69032824 T2 DE 69032824T2 DE 69032824 T DE69032824 T DE 69032824T DE 69032824 T DE69032824 T DE 69032824T DE 69032824 T2 DE69032824 T2 DE 69032824T2
- Authority
- DE
- Germany
- Prior art keywords
- vapor deposition
- deposition process
- laser vapor
- laser
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005019 vapor deposition process Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1176388A JP2588971B2 (ja) | 1989-07-06 | 1989-07-06 | レーザ蒸着方法及び装置 |
JP21542089 | 1989-08-22 | ||
JP2016796A JP2564197B2 (ja) | 1989-08-22 | 1990-01-25 | アモルファス金属膜及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69032824D1 DE69032824D1 (de) | 1999-01-21 |
DE69032824T2 true DE69032824T2 (de) | 1999-06-10 |
Family
ID=27281566
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69032824T Expired - Fee Related DE69032824T2 (de) | 1989-07-06 | 1990-07-05 | Verfahren zum Laseraufdampfen |
DE69028662T Expired - Fee Related DE69028662T2 (de) | 1989-07-06 | 1990-07-05 | Verfahren und Vorrichtung zum Laseraufdampfen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69028662T Expired - Fee Related DE69028662T2 (de) | 1989-07-06 | 1990-07-05 | Verfahren und Vorrichtung zum Laseraufdampfen |
Country Status (3)
Country | Link |
---|---|
US (1) | US5126165A (de) |
EP (2) | EP0406871B1 (de) |
DE (2) | DE69032824T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4022817C1 (de) * | 1990-07-18 | 1991-11-07 | Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De | |
GB2300001B (en) * | 1992-11-30 | 1997-05-28 | Mitsubishi Electric Corp | Thin film forming apparatus using laser |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
US5458686A (en) * | 1995-03-03 | 1995-10-17 | Neocera, Inc. | Pulsed laser passive filter deposition system |
AT402945B (de) * | 1995-07-03 | 1997-09-25 | Joanneum Research Forschungsge | Verfahren und vorrichtung zur beschichtung der oberfläche eines substrats |
US5617911A (en) * | 1995-09-08 | 1997-04-08 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a support material and a deposition material |
US5718951A (en) * | 1995-09-08 | 1998-02-17 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a molten metal and deposition of a powdered metal as a support material |
US5669433A (en) * | 1995-09-08 | 1997-09-23 | Aeroquip Corporation | Method for creating a free-form metal three-dimensional article using a layer-by-layer deposition of a molten metal |
US5787965A (en) * | 1995-09-08 | 1998-08-04 | Aeroquip Corporation | Apparatus for creating a free-form metal three-dimensional article using a layer-by-layer deposition of a molten metal in an evacuation chamber with inert environment |
US5746844A (en) * | 1995-09-08 | 1998-05-05 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of molten metal and using a stress-reducing annealing process on the deposited metal |
DE19620508A1 (de) * | 1996-05-22 | 1997-11-27 | Hoechst Ag | Schwefelenthaltende heterocyclische Bradykinin-Antagonisten, Verfahren zu ihrer Herstellung und ihre Verwendung |
US5906857A (en) * | 1997-05-13 | 1999-05-25 | Ultratherm, Inc. | Apparatus, system and method for controlling emission parameters attending vaporized in a HV environment |
JPH11111185A (ja) * | 1997-10-03 | 1999-04-23 | Agency Of Ind Science & Technol | レーザアブレーション型イオン源 |
US5858478A (en) * | 1997-12-02 | 1999-01-12 | The Aerospace Corporation | Magnetic field pulsed laser deposition of thin films |
US6063194A (en) * | 1998-06-10 | 2000-05-16 | Delsys Pharmaceutical Corporation | Dry powder deposition apparatus |
US6137110A (en) * | 1998-08-17 | 2000-10-24 | The United States Of America As Represented By The United States Department Of Energy | Focused ion beam source method and apparatus |
US6395624B1 (en) | 1999-02-22 | 2002-05-28 | International Business Machines Corporation | Method for forming implants in semiconductor fabrication |
US6923979B2 (en) | 1999-04-27 | 2005-08-02 | Microdose Technologies, Inc. | Method for depositing particles onto a substrate using an alternating electric field |
KR100934679B1 (ko) * | 2000-10-17 | 2009-12-31 | 네오포토닉스 코포레이션 | 반응성 증착에 의한 코팅 형성 |
US20020142612A1 (en) * | 2001-03-30 | 2002-10-03 | Han-Ming Wu | Shielding plate in plasma for uniformity improvement |
US6719847B2 (en) | 2002-02-20 | 2004-04-13 | Cinetic Automation Corporation | Masking apparatus |
US20050067389A1 (en) * | 2003-09-25 | 2005-03-31 | Greer James A. | Target manipulation for pulsed laser deposition |
US7301149B2 (en) * | 2004-05-06 | 2007-11-27 | The Board Of Trustees Of The University Of Illinois | Apparatus and method for determining a thickness of a deposited material |
US20090176034A1 (en) * | 2006-02-23 | 2009-07-09 | Picodeon Ltd. Oy | Surface Treatment Technique and Surface Treatment Apparatus Associated With Ablation Technology |
US20080254235A1 (en) * | 2007-04-10 | 2008-10-16 | Jeonggoo Kim | Pulsed laser deposition of high quality photoluminescent GaN films |
US20090008577A1 (en) * | 2007-07-07 | 2009-01-08 | Varian Semiconductor Equipment Associates, Inc. | Conformal Doping Using High Neutral Density Plasma Implant |
CN101696936B (zh) * | 2009-10-22 | 2011-07-20 | 浙江师范大学 | 激光诱导放电增强等离子体光谱检测装置 |
WO2016036941A1 (en) * | 2014-09-04 | 2016-03-10 | Northwestern University | Chemically pure zero-valent iron nanofilms from a low-purity iron source |
CN104532194B (zh) * | 2014-12-29 | 2017-05-10 | 深圳大学 | 激光沉积薄膜制备装置 |
CN104947007B (zh) * | 2015-06-23 | 2017-05-03 | 太原科技大学 | 用于制备非晶合金的系统 |
EP3587620A1 (de) | 2018-06-28 | 2020-01-01 | Solmates B.V. | Vorrichtung zur gepulsten laserabscheidung und ein substrat mit einer substratoberfläche zur reduzierung von partikeln auf dem substrat |
JP7408696B2 (ja) * | 2019-06-19 | 2024-01-05 | ボストン サイエンティフィック サイムド,インコーポレイテッド | 血管石灰の破砕のためのレーザパルスエネルギーの非水系光学ブレークダウンを介したプラズマ生成 |
CN112853278B (zh) * | 2019-11-12 | 2023-01-17 | 中国科学院微电子研究所 | 一种短脉冲激光沉积薄膜的制备方法 |
EP3964605A1 (de) * | 2020-09-03 | 2022-03-09 | Solmates B.V. | Verfahren zur gepulsten laserabscheidung |
CN115772649A (zh) * | 2023-02-10 | 2023-03-10 | 中国航空制造技术研究院 | 一种针对飞机蒙皮类结构的激光诱导沉积装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961103A (en) * | 1972-07-12 | 1976-06-01 | Space Sciences, Inc. | Film deposition |
US4281030A (en) * | 1980-05-12 | 1981-07-28 | Bell Telephone Laboratories, Incorporated | Implantation of vaporized material on melted substrates |
US4701592A (en) * | 1980-11-17 | 1987-10-20 | Rockwell International Corporation | Laser assisted deposition and annealing |
JPS59116373A (ja) * | 1982-12-22 | 1984-07-05 | Agency Of Ind Science & Technol | レ−ザ蒸着装置 |
GB2155042B (en) * | 1984-02-21 | 1987-12-31 | Hughes Technology Pty Ltd | Laser induced ion beam generator |
JPS6254005A (ja) * | 1985-09-02 | 1987-03-09 | Hitachi Ltd | 超微粒子の製造方法 |
JPS6311660A (ja) * | 1986-07-02 | 1988-01-19 | Mitsubishi Electric Corp | レ−ザビ−ム集光レンズ保護装置 |
US4987007A (en) * | 1988-04-18 | 1991-01-22 | Board Of Regents, The University Of Texas System | Method and apparatus for producing a layer of material from a laser ion source |
US5017277A (en) * | 1988-07-07 | 1991-05-21 | Matsushita Electric Industrial Co., Ltd. | Laser sputtering apparatus |
US4921348A (en) * | 1989-01-26 | 1990-05-01 | Iowa State University Research Foundation, Inc. | Method and means for a spatial and temporal probe for laser-generated plumes based on density gradients |
US5015492A (en) * | 1989-04-03 | 1991-05-14 | Rutgers University | Method and apparatus for pulsed energy induced vapor deposition of thin films |
US5019552A (en) * | 1990-02-20 | 1991-05-28 | The United States Of America As Represented By The United States Department Of Energy | Long-laser-pulse method of producing thin films |
-
1990
- 1990-07-05 EP EP90112878A patent/EP0406871B1/de not_active Expired - Lifetime
- 1990-07-05 EP EP92120852A patent/EP0534505B1/de not_active Expired - Lifetime
- 1990-07-05 DE DE69032824T patent/DE69032824T2/de not_active Expired - Fee Related
- 1990-07-05 DE DE69028662T patent/DE69028662T2/de not_active Expired - Fee Related
- 1990-07-06 US US07/549,115 patent/US5126165A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0534505A2 (de) | 1993-03-31 |
DE69028662T2 (de) | 1997-03-06 |
EP0534505A3 (en) | 1993-04-14 |
EP0406871B1 (de) | 1996-09-25 |
US5126165A (en) | 1992-06-30 |
EP0406871A2 (de) | 1991-01-09 |
EP0534505B1 (de) | 1998-12-09 |
DE69028662D1 (de) | 1996-10-31 |
EP0406871A3 (en) | 1992-03-04 |
DE69032824D1 (de) | 1999-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |