DE69106334T2 - Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element. - Google Patents

Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element.

Info

Publication number
DE69106334T2
DE69106334T2 DE69106334T DE69106334T DE69106334T2 DE 69106334 T2 DE69106334 T2 DE 69106334T2 DE 69106334 T DE69106334 T DE 69106334T DE 69106334 T DE69106334 T DE 69106334T DE 69106334 T2 DE69106334 T2 DE 69106334T2
Authority
DE
Germany
Prior art keywords
magnetoresistive
view film
effect
magnetoresistive element
magnetoresistive effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69106334T
Other languages
English (en)
Other versions
DE69106334D1 (de
Inventor
Ryoichi Nakatani
Masahiro Kitada
Yuzuru Hosoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26449808&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69106334(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP40102790A external-priority patent/JPH04214207A/ja
Priority claimed from JP11012891A external-priority patent/JPH04339309A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69106334D1 publication Critical patent/DE69106334D1/de
Application granted granted Critical
Publication of DE69106334T2 publication Critical patent/DE69106334T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/80—Constructional details
    • H10N50/85—Magnetic active materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/928—Magnetic property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1107—Magnetoresistive
    • Y10T428/1121—Multilayer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12465—All metal or with adjacent metals having magnetic properties, or preformed fiber orientation coordinate with shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12632—Four or more distinct components with alternate recurrence of each type component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12889—Au-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y10T428/1291—Next to Co-, Cu-, or Ni-base component
DE69106334T 1990-12-10 1991-12-09 Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element. Revoked DE69106334T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP40102790A JPH04214207A (ja) 1990-12-10 1990-12-10 多層磁気抵抗効果膜およびこれを用いた磁気抵抗効果素子
JP11012891A JPH04339309A (ja) 1991-05-15 1991-05-15 多層磁気抵抗効果膜を用いた磁気抵抗効果素子

Publications (2)

Publication Number Publication Date
DE69106334D1 DE69106334D1 (de) 1995-02-09
DE69106334T2 true DE69106334T2 (de) 1995-05-04

Family

ID=26449808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106334T Revoked DE69106334T2 (de) 1990-12-10 1991-12-09 Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element.

Country Status (3)

Country Link
US (1) US5998040A (de)
EP (1) EP0490327B1 (de)
DE (1) DE69106334T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004053551A1 (de) * 2004-11-05 2006-05-18 Siemens Ag Vorrichtung zum Erfassen eines beweglichen oder bewegbaren elektrisch und/oder magnetisch leitenden Teiles

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FR2693021B1 (fr) * 1992-06-26 1994-08-26 Thomson Csf Détecteur de champ magnétique.
JP3411626B2 (ja) * 1992-08-27 2003-06-03 ティーディーケイ株式会社 磁性多層膜および磁気抵抗効果素子ならびにそれらの製造方法
JP2725977B2 (ja) * 1992-08-28 1998-03-11 インターナショナル・ビジネス・マシーンズ・コーポレイション 磁気抵抗センサ及びその製造方法、磁気記憶システム
DE4401476A1 (de) * 1993-01-20 1994-07-28 Fuji Electric Co Ltd Magneto-resistives Element, magnetisches Induktionselement und solche enthaltender Dünnschicht-Magnetkopf
US5657190A (en) * 1993-03-02 1997-08-12 Tdk Corporation Apparatus for detecting a magnetic field using a giant magnetoresistance effect multilayer
FR2710753B1 (fr) * 1993-09-27 1995-10-27 Commissariat Energie Atomique Capteur de courant comprenant un ruban magnétorésistif et son procédé de réalisation.
FR2715507B1 (fr) * 1994-01-25 1996-04-05 Commissariat Energie Atomique Magnétorésistance multicouche polarisée.
US5825593A (en) * 1994-02-18 1998-10-20 Seagate Technology, Inc. Electric field modulated MR sensor
EP0675554A1 (de) * 1994-03-24 1995-10-04 Nec Corporation Element mit magnetoresistivem Effekt
DE4427495C2 (de) * 1994-08-03 2000-04-13 Siemens Ag Sensoreinrichtung mit einem GMR-Sensorelement
EP0702357B1 (de) * 1994-09-16 2003-06-18 Kabushiki Kaisha Toshiba Magnetowiderstandeffektkopf und Magnetaufzeichnungs-/Wiedergabekopf daraus
FR2725029A1 (fr) * 1994-09-26 1996-03-29 Crouzet Automatismes Capteur de courant a magnetoresistance
US7050329B2 (en) * 1995-04-21 2006-05-23 Johnson Mark B Magnetic spin based memory with inductive write lines
US6741494B2 (en) * 1995-04-21 2004-05-25 Mark B. Johnson Magnetoelectronic memory element with inductively coupled write wires
US6219205B1 (en) * 1995-10-10 2001-04-17 Read-Rite Corporation High density giant magnetoresistive transducer with recessed sensor
EP0789250A3 (de) * 1996-02-12 1997-10-01 Read Rite Corp Dünnschicht-Riesenmagnetoresistiver Wandler mit Fluxleitungsanordnung
US6256171B1 (en) 1996-09-30 2001-07-03 Kabushiki Kaisha Toshiba Thin film magnetic head having an improved heat dispersion and magnetic recording apparatus using the same
JP3528511B2 (ja) * 1997-04-14 2004-05-17 松下電器産業株式会社 薄膜磁気ヘッド
JP3838469B2 (ja) * 1998-04-20 2006-10-25 Ｔｄｋ株式会社 磁気抵抗素子の磁気特性制御方法、該素子を備えた磁気ヘッドの磁気特性制御方法、該素子を備えた磁気ヘッド装置、及び磁気ディスク装置
JP2000023423A (ja) * 1998-06-30 2000-01-21 Ykk Corp ブラシレスモータ用回転角検出器及びそれを用いたブラシレスモータ
JP2000057538A (ja) * 1998-08-05 2000-02-25 Hitachi Ltd 磁気抵抗センサを用いた磁気ヘッドおよび磁気記録再生装置
US6281538B1 (en) * 2000-03-22 2001-08-28 Motorola, Inc. Multi-layer tunneling device with a graded stoichiometry insulating layer
US7050274B2 (en) * 2001-03-15 2006-05-23 Seagate Technology Llc Multilayer permanent magnet films
JP3886802B2 (ja) * 2001-03-30 2007-02-28 株式会社東芝 磁性体のパターニング方法、磁気記録媒体、磁気ランダムアクセスメモリ
KR100447971B1 (ko) * 2001-12-18 2004-09-10 주식회사 하이닉스반도체 다층구조의 자기장 센서 제조방법
US20050013059A1 (en) * 2003-07-15 2005-01-20 International Business Machines Corporation Magnetoresistive sensor with a net magnetic moment
TWI573301B (zh) * 2014-05-22 2017-03-01 宇能電科技股份有限公司 異向性磁阻元件及其製造方法

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JPS5138885A (en) * 1974-09-27 1976-03-31 Fujitsu Ltd Jikiteikososhi
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DE3229774A1 (de) * 1981-08-10 1983-03-24 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Magnetoresistives element
JPS60251682A (ja) * 1984-05-29 1985-12-12 Hitachi Ltd 磁気抵抗効果型素子
DE3507665A1 (de) * 1985-03-05 1986-09-11 VEB Meßtechnik Mellenbach Betrieb des Kombinates VEB Elektro-Apparate-Werke Berlin-Treptow "Friedrich Ebert", DDR 6428 Mellenbach-Glasbach Messfuehler zur erfassung von oertlichen magnetfeldern
US4783711A (en) * 1985-07-12 1988-11-08 Hitachi, Ltd. Magnetoresistive sensor having magnetic shields of ferrite
DE3855322T2 (de) * 1987-08-21 1996-10-10 Nippon Denso Co Anordnung zur Detektion von Magnetismus
DE3820475C1 (de) * 1988-06-16 1989-12-21 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
JPH0223681A (ja) * 1988-07-12 1990-01-25 Nec Corp 磁気抵抗効果素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004053551A1 (de) * 2004-11-05 2006-05-18 Siemens Ag Vorrichtung zum Erfassen eines beweglichen oder bewegbaren elektrisch und/oder magnetisch leitenden Teiles

Also Published As

Publication number Publication date
US5998040A (en) 1999-12-07
DE69106334D1 (de) 1995-02-09
EP0490327B1 (de) 1994-12-28
EP0490327A1 (de) 1992-06-17

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation