DE69109086D1 - Kapazitieve sonde. - Google Patents

Kapazitieve sonde.

Info

Publication number
DE69109086D1
DE69109086D1 DE69109086T DE69109086T DE69109086D1 DE 69109086 D1 DE69109086 D1 DE 69109086D1 DE 69109086 T DE69109086 T DE 69109086T DE 69109086 T DE69109086 T DE 69109086T DE 69109086 D1 DE69109086 D1 DE 69109086D1
Authority
DE
Germany
Prior art keywords
capacitive probe
capacitive
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109086T
Other languages
English (en)
Other versions
DE69109086T2 (de
Inventor
David Mcmurtry
David Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE69109086D1 publication Critical patent/DE69109086D1/de
Publication of DE69109086T2 publication Critical patent/DE69109086T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
DE69109086T 1990-10-03 1991-10-02 Kapazitieve sonde. Expired - Fee Related DE69109086T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB909021448A GB9021448D0 (en) 1990-10-03 1990-10-03 Capacitance sensing probe
PCT/GB1991/001704 WO1992006351A1 (en) 1990-10-03 1991-10-02 Capacitance sensing probe

Publications (2)

Publication Number Publication Date
DE69109086D1 true DE69109086D1 (de) 1995-05-24
DE69109086T2 DE69109086T2 (de) 1995-08-31

Family

ID=10683130

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109086T Expired - Fee Related DE69109086T2 (de) 1990-10-03 1991-10-02 Kapazitieve sonde.

Country Status (6)

Country Link
US (1) US5270664A (de)
EP (1) EP0503032B1 (de)
JP (1) JPH05502730A (de)
DE (1) DE69109086T2 (de)
GB (1) GB9021448D0 (de)
WO (1) WO1992006351A1 (de)

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US5517124A (en) * 1989-07-26 1996-05-14 Extrude Hone Corporation Stylus probe for measuring workpiece surface characteristics
GB9021447D0 (en) 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
US5742167A (en) * 1991-05-23 1998-04-21 Sussex Instruments Plc. Film thickness measuring capacitive sensors
GB9221926D0 (en) * 1992-10-19 1992-12-02 Rue De Systems Ltd Conductive strip detector
US5459406A (en) * 1994-07-01 1995-10-17 Cornell Research Foundation, Inc. Guarded capacitance probes for measuring particle concentration and flow
DE19508861A1 (de) * 1995-03-11 1996-09-12 Zeiss Carl Fa Koordinatenmeßgerät mit einer Einrichtung für die Rauheitsmessung
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US5974869A (en) * 1996-11-14 1999-11-02 Georgia Tech Research Corp. Non-vibrating capacitance probe for wear monitoring
US5928475A (en) * 1996-12-13 1999-07-27 Honeywell-Measurex, Corporation High resolution system and method for measurement of traveling web
US5891306A (en) * 1996-12-13 1999-04-06 Measurex Corporation Electromagnetic field perturbation sensor and methods for measuring water content in sheetmaking systems
US6087837A (en) * 1996-12-13 2000-07-11 Honeywell-Measurex Compact high resolution under wire water weight sensor array
US6072309A (en) * 1996-12-13 2000-06-06 Honeywell-Measurex Corporation, Inc. Paper stock zeta potential measurement and control
US6341522B1 (en) * 1996-12-13 2002-01-29 Measurex Corporation Water weight sensor array imbedded in a sheetmaking machine roll
US5853543A (en) * 1997-01-27 1998-12-29 Honeywell-Measurex Corporation Method for monitoring and controlling water content in paper stock in a paper making machine
US5944955A (en) * 1998-01-15 1999-08-31 Honeywell-Measurex Corporation Fast basis weight control for papermaking machine
US6092003A (en) * 1998-01-26 2000-07-18 Honeywell-Measurex Corporation Paper stock shear and formation control
US6076022A (en) * 1998-01-26 2000-06-13 Honeywell-Measurex Corporation Paper stock shear and formation control
US6080278A (en) * 1998-01-27 2000-06-27 Honeywell-Measurex Corporation Fast CD and MD control in a sheetmaking machine
US6149770A (en) * 1998-04-14 2000-11-21 Honeywell-Measurex Corporation Underwire water weight turbulence sensor
US6168687B1 (en) * 1998-04-24 2001-01-02 Honeywell-Measurex Corporation System and method for sheet measurement and control in papermaking machine
US6006602A (en) * 1998-04-30 1999-12-28 Honeywell-Measurex Corporation Weight measurement and measurement standardization sensor
US6086716A (en) * 1998-05-11 2000-07-11 Honeywell-Measurex Corporation Wet end control for papermaking machine
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6369588B1 (en) * 1999-11-09 2002-04-09 Gerard E. Sleefe Sensor system for web inspection
US6480008B2 (en) * 1999-12-03 2002-11-12 Mitutoyo Corporation Capacitive distance sensor for surface configuration determining apparatus
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
WO2002067481A1 (en) * 2001-02-20 2002-08-29 University Of Maryland, Baltimore County Widely tunable and integrated optical system and method
US6970634B2 (en) 2001-05-04 2005-11-29 Cascade Microtech, Inc. Fiber optic wafer probe
WO2003052435A1 (en) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
ITMI20012583A1 (it) * 2001-12-10 2003-06-10 Electronic Systems Spa Sensore capacitivo per misurare lo spessore di materiali dielettrici in film
US7308367B2 (en) * 2003-02-03 2007-12-11 Qcept Technologies, Inc. Wafer inspection system
US7107158B2 (en) * 2003-02-03 2006-09-12 Qcept Technologies, Inc. Inspection system and apparatus
US7103482B2 (en) * 2003-02-03 2006-09-05 Qcept Technologies, Inc. Inspection system and apparatus
US6957154B2 (en) * 2003-02-03 2005-10-18 Qcept Technologies, Inc. Semiconductor wafer inspection system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7152476B2 (en) * 2003-07-25 2006-12-26 Qcept Technologies, Inc. Measurement of motions of rotating shafts using non-vibrating contact potential difference sensor
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
JP2007517231A (ja) 2003-12-24 2007-06-28 カスケード マイクロテック インコーポレイテッド アクティブ・ウェハプローブ
JP4427645B2 (ja) * 2004-05-27 2010-03-10 独立行政法人産業技術総合研究所 コンタクトプローブ、そのコンタクトプローブに用いる測定用パッド、及びそのコンタクトプローブの作製方法
WO2006031646A2 (en) 2004-09-13 2006-03-23 Cascade Microtech, Inc. Double sided probing structures
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7952375B2 (en) * 2006-06-06 2011-05-31 Formfactor, Inc. AC coupled parameteric test probe
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7659734B2 (en) * 2007-03-07 2010-02-09 Qcept Technologies, Inc. Semiconductor inspection system and apparatus utilizing a non-vibrating contact potential difference sensor and controlled illumination
EP2142878B1 (de) * 2007-04-30 2018-09-26 Renishaw PLC Analogsonde mit temperaturregler und bedienungsverfahren dafür
GB0708319D0 (en) * 2007-04-30 2007-06-06 Renishaw Plc A storage apparatus for a tool
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7900526B2 (en) * 2007-11-30 2011-03-08 Qcept Technologies, Inc. Defect classification utilizing data from a non-vibrating contact potential difference sensor
GB0804114D0 (en) 2008-03-05 2008-04-09 Renishaw Plc Surface sensing device
US7752000B2 (en) * 2008-05-02 2010-07-06 Qcept Technologies, Inc. Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8457794B2 (en) * 2009-08-25 2013-06-04 Analog Devices, Inc. Multi-segment linearization of micro-actuator transfer functions
JP5442479B2 (ja) 2010-02-05 2014-03-12 株式会社ワコム 指示体、位置検出装置及び位置検出方法
EP2505959A1 (de) 2011-03-28 2012-10-03 Renishaw plc Koordinatenpositionierungsmaschinensteuerung
WO2012151308A2 (en) * 2011-05-03 2012-11-08 Smaltec International, Llc Micro-electrical discharged based metrology system
DE102012003223A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss 3D Automation Gmbh Kugel-Schaft-Verbindung
WO2016207819A1 (en) * 2015-06-23 2016-12-29 Idex Asa Double-sided fingerprint sensor
US9933867B2 (en) 2015-12-30 2018-04-03 Synaptics Incorporated Active pen capacitive displacement gauge
US10713461B2 (en) 2017-09-19 2020-07-14 IDEX Biometrtics ASA Double sided sensor module suitable for integration into electronic devices
US11161281B2 (en) 2017-12-22 2021-11-02 International Business Machines Corporation Structure and method for monitoring directed self-assembly pattern formation
US10830724B2 (en) 2017-12-22 2020-11-10 International Business Machines Corporation Micro-capacitance sensor array containing spaced apart first and second overlapping and parallel electrode plates for sensing analytes
CN108387171B (zh) * 2018-05-08 2023-05-12 中国工程物理研究院总体工程研究所 一种基于电容法检测粗糙度的柔性探头及其粗糙度算法

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US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US4153998A (en) * 1972-09-21 1979-05-15 Rolls-Royce (1971) Limited Probes
DD136897B1 (de) * 1978-06-20 1981-03-25 Elektromat Veb Kapazitiver messfuehler
NL7905562A (nl) * 1979-07-17 1981-01-20 Heerens Willem Christiaan Capacitieve meter.
US4423373A (en) * 1981-03-16 1983-12-27 Lecroy Research Systems Corporation Test probe
EP0067643A3 (de) * 1981-06-12 1983-02-09 Peter Caleb Frederick Wolfendale Verfahren zur Feststellung der Dimensionen und/oder der Gestalt von Oberflächen
US4814691A (en) * 1985-08-09 1989-03-21 Washington Research Foundation Fringe field capacitive sensor for measuring profile of a surface
US4996492A (en) * 1989-03-07 1991-02-26 The Boeing Company Probe for inspecting countersunk holes in conductive bodies
EP0425823A1 (de) * 1989-09-29 1991-05-08 Antivision Systems Corp. Elektrostatische Abbildungsvorrichtung
US5189377A (en) * 1990-09-04 1993-02-23 Extrude Hone Corporation Method and apparatus for co-ordinate measuring using a capacitance probe

Also Published As

Publication number Publication date
DE69109086T2 (de) 1995-08-31
JPH05502730A (ja) 1993-05-13
GB9021448D0 (en) 1990-11-14
US5270664A (en) 1993-12-14
EP0503032A1 (de) 1992-09-16
WO1992006351A1 (en) 1992-04-16
EP0503032B1 (de) 1995-04-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee