DE69112037D1 - Waferträger. - Google Patents

Waferträger.

Info

Publication number
DE69112037D1
DE69112037D1 DE69112037T DE69112037T DE69112037D1 DE 69112037 D1 DE69112037 D1 DE 69112037D1 DE 69112037 T DE69112037 T DE 69112037T DE 69112037 T DE69112037 T DE 69112037T DE 69112037 D1 DE69112037 D1 DE 69112037D1
Authority
DE
Germany
Prior art keywords
waitträger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69112037T
Other languages
English (en)
Other versions
DE69112037T2 (de
Inventor
Robert Kos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24485288&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69112037(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of DE69112037D1 publication Critical patent/DE69112037D1/de
Application granted granted Critical
Publication of DE69112037T2 publication Critical patent/DE69112037T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00—Special receptacle or package
    • Y10S206/832—Semiconductor wafer boat
    • Y10S206/833—Apertured side walls
DE69112037T 1990-11-30 1991-09-30 Waferträger. Expired - Fee Related DE69112037T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/620,274 US5111936A (en) 1990-11-30 1990-11-30 Wafer carrier
PCT/US1991/007182 WO1992010001A1 (en) 1990-11-30 1991-09-30 Wafer carrier

Publications (2)

Publication Number Publication Date
DE69112037D1 true DE69112037D1 (de) 1995-09-14
DE69112037T2 DE69112037T2 (de) 1996-01-11

Family

ID=24485288

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69112037T Expired - Fee Related DE69112037T2 (de) 1990-11-30 1991-09-30 Waferträger.

Country Status (6)

Country Link
US (1) US5111936A (de)
EP (1) EP0513275B1 (de)
JP (1) JP2546944B2 (de)
KR (1) KR0175918B1 (de)
DE (1) DE69112037T2 (de)
WO (1) WO1992010001A1 (de)

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US5248033A (en) * 1991-05-14 1993-09-28 Fluoroware, Inc. Hinged tilt box with inclined portion
US5351836A (en) * 1992-07-08 1994-10-04 Daifuku Co., Ltd. Container for plate-like objects
US5429251A (en) * 1993-09-22 1995-07-04 Legacy Systems, Inc. Semiconductor wafer end effector
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
TW296361B (de) * 1995-06-26 1997-01-21 Kakizaki Seisakusho Kk
USD378873S (en) * 1995-10-13 1997-04-22 Empak, Inc. 300 mm microenvironment pod with door on side
USD387903S (en) * 1995-10-13 1997-12-23 Empak, Inc. Shipping container
US6010009A (en) * 1995-10-13 2000-01-04 Empak, Inc. Shipping and transport cassette with kinematic coupling
USD383898S (en) * 1995-10-13 1997-09-23 Empak, Inc. Combination shipping and transport cassette
WO1997013709A1 (en) * 1995-10-13 1997-04-17 Empak, Inc. Shipping and transport cassette with kinematic coupling
US6039186A (en) * 1997-04-16 2000-03-21 Fluoroware, Inc. Composite transport carrier
KR100246474B1 (ko) * 1997-10-22 2000-04-01 구본준 액정표시모듈용 패킹 장치
US6214127B1 (en) * 1998-02-04 2001-04-10 Micron Technology, Inc. Methods of processing electronic device workpieces and methods of positioning electronic device workpieces within a workpiece carrier
US6808668B2 (en) * 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US6428729B1 (en) * 1998-05-28 2002-08-06 Entegris, Inc. Composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US6039187A (en) * 1998-08-17 2000-03-21 Micron Technology, Inc. Off center three point carrier for wet processing semiconductor substrates
US6520191B1 (en) 1998-10-19 2003-02-18 Memc Electronic Materials, Inc. Carrier for cleaning silicon wafers
TW469483B (en) * 1999-04-19 2001-12-21 Applied Materials Inc Method and apparatus for aligning a cassette
US6763281B2 (en) 1999-04-19 2004-07-13 Applied Materials, Inc Apparatus for alignment of automated workpiece handling systems
JP2001291698A (ja) * 2000-04-10 2001-10-19 Nec Corp 処理装置および処理方法
US6625898B2 (en) 2001-06-13 2003-09-30 Applied Materials, Inc Variable method and apparatus for alignment of automated workpiece handling systems
US6845779B2 (en) * 2001-11-13 2005-01-25 Fsi International, Inc. Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US7600359B2 (en) * 2002-05-09 2009-10-13 Seagate Technology Llc Method of merging two disks concentrically without gap between disks
US7027246B2 (en) * 2002-05-09 2006-04-11 Maxtor Corporation Method for servo pattern application on single-side processed disks in a merged state
US7180709B2 (en) * 2002-05-09 2007-02-20 Maxtor Corporation Information-storage media with dissimilar outer diameter and/or inner diameter chamfer designs on two sides
US7367773B2 (en) * 2002-05-09 2008-05-06 Maxtor Corporation Apparatus for combining or separating disk pairs simultaneously
MY138480A (en) * 2002-05-09 2009-06-30 Maxtor Corp Method of simultaneous two-disk processing of single-sided magnetic recording disks
US7165308B2 (en) * 2002-05-09 2007-01-23 Maxtor Corporation Dual disk transport mechanism processing two disks tilted toward each other
US7052739B2 (en) * 2002-05-09 2006-05-30 Maxtor Corporation Method of lubricating multiple magnetic storage disks in close proximity
US7083871B2 (en) * 2002-05-09 2006-08-01 Maxtor Corporation Single-sided sputtered magnetic recording disks
US7628895B2 (en) * 2002-05-09 2009-12-08 Seagate Technology Llc W-patterned tools for transporting/handling pairs of disks
US7083376B2 (en) * 2002-10-10 2006-08-01 Maxtor Corporation Automated merge nest for pairs of magnetic storage disks
US7168153B2 (en) * 2002-10-10 2007-01-30 Maxtor Corporation Method for manufacturing single-sided hard memory disks
US7083502B2 (en) * 2002-10-10 2006-08-01 Maxtor Corporation Method for simultaneous two-disk texturing
US7748532B2 (en) * 2002-10-10 2010-07-06 Seagate Technology Llc Cassette for holding disks of different diameters
US8172954B2 (en) * 2002-10-10 2012-05-08 Seagate Technology Llc Apparatus for simultaneous two-disk scrubbing and washing
DE10258368B4 (de) * 2002-12-12 2010-01-21 Forschungszentrum Jülich GmbH Waferhalter
US7682653B1 (en) 2004-06-17 2010-03-23 Seagate Technology Llc Magnetic disk with uniform lubricant thickness distribution
US7882616B1 (en) 2004-09-02 2011-02-08 Seagate Technology Llc Manufacturing single-sided storage media
US20060182618A1 (en) * 2004-10-05 2006-08-17 Paul Rich Methods and apparatus for processing the backsides of wafers
CN1978074B (zh) * 2005-12-02 2010-11-10 鸿富锦精密工业（深圳）有限公司 镜片清洗治具
US20080237157A1 (en) * 2007-03-30 2008-10-02 Chee Keong Chin Wafer transport system
TW201424873A (zh) * 2012-12-21 2014-07-01 Hon Hai Prec Ind Co Ltd 清洗裝置

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US2019722A (en) * 1935-11-05 Holder carrier and storage case
US1764754A (en) * 1927-08-15 1930-06-17 Holland S Scott Case for phonograph records
US1885691A (en) * 1928-04-24 1932-11-01 New Castle Refractories Compan Ware support
US2156955A (en) * 1937-02-05 1939-05-02 Shaw Walker Co Filing device for use in vertical filing systems
US2194828A (en) * 1938-03-08 1940-03-26 Valentine F Greaves Combination container and ejector
US2407021A (en) * 1943-12-04 1946-09-03 Chicago Metallic Mfg Company Multiple baking pan
US2453030A (en) * 1946-10-07 1948-11-02 Reliance Molded Plastics Inc Rack for poker chips and the like
US2729375A (en) * 1953-08-10 1956-01-03 Marvin W Pace Egg transferring and supporting device
US2774472A (en) * 1954-08-24 1956-12-18 Bell & Howell Co Slide carrying means
US2813633A (en) * 1954-10-08 1957-11-19 Alvin F Welling Holder for magnetic tape reels
US3160283A (en) * 1963-02-19 1964-12-08 American Metal Prod Endless dump display bin
US3365070A (en) * 1965-09-24 1968-01-23 Ms Ind Inc Stackable gravity flow stock bin
US3394819A (en) * 1966-05-05 1968-07-30 Fluoroware Inc Article supporting device
CH471013A (de) * 1967-03-15 1969-04-15 Ebauches Sa Halter für mit Flansch versehene Packungen
US3480151A (en) * 1967-04-05 1969-11-25 Heraeus Schott Quarzschmelze Supporting rack of quartz
US3442395A (en) * 1967-09-05 1969-05-06 Rubbermaid Inc Plastic dish drainer
US3486631A (en) * 1967-09-29 1969-12-30 John T Shaler Co Basket for polished wafers
US3473670A (en) * 1968-01-30 1969-10-21 Fluoroware Inc Article supporting basket
US3467242A (en) * 1968-03-04 1969-09-16 Dale E De Rousse Storage unit for wafer-like articles
US3498597A (en) * 1968-03-11 1970-03-03 Rolock Inc Annealing box
US3501047A (en) * 1968-06-10 1970-03-17 Rheem Mfg Co Reinforced container
US3534862A (en) * 1968-09-13 1970-10-20 Rca Corp Semiconductor wafer transporting jig
US3645581A (en) * 1968-11-26 1972-02-29 Ind Modular Systems Corp Apparatus and method for handling and treating articles
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
DE2133843A1 (de) * 1971-07-07 1973-01-18 Siemens Ag Anordnung zum eindiffundieren von dotierstoffen in halbleiterscheiben
US3701558A (en) * 1971-07-19 1972-10-31 Fluoroware Inc Detachable handle for receptacle
US3850296A (en) * 1971-07-21 1974-11-26 Shinetsu Handotai Kk Device and method for accommodating semiconductor wafers
US3737282A (en) * 1971-10-01 1973-06-05 Ibm Method for reducing crystallographic defects in semiconductor structures
US3819076A (en) * 1971-10-20 1974-06-25 C Oehler Special pallet type load transport apparatus
US3947236A (en) * 1971-11-29 1976-03-30 Lasch Jr Cecil A Fluid bearing transfer and heat treating apparatus and method
GB1334330A (en) * 1972-04-14 1973-10-17 Noguchi H Plastics trays for eggs
US3926305A (en) * 1973-07-12 1975-12-16 Fluoroware Inc Wafer basket
US3939973A (en) * 1974-01-14 1976-02-24 Fluoroware, Inc. Wafer basket and easily attached and detached carrier for same
US3923156A (en) * 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
US3923191A (en) * 1974-09-11 1975-12-02 Fluoroware Inc Wafer basket and handle
US3961877A (en) * 1974-09-11 1976-06-08 Fluoroware, Inc. Reinforced wafer basket
JPS5277590A (en) * 1975-12-24 1977-06-30 Toshiba Corp Semiconductor producing device
US4043451A (en) * 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4228902A (en) * 1979-02-21 1980-10-21 Kasper Instruments, Inc. Carrier for semiconductive wafers
JPS6032761Y2 (ja) * 1979-05-11 1985-09-30 富士通株式会社 石英ボ−ト
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
DE2937691A1 (de) * 1979-09-18 1981-04-02 Luther, Erich, Ing.(Grad.) Vorrichtung zum stapeln plattenfoermiger gegenstaende
US4318749A (en) * 1980-06-23 1982-03-09 Rca Corporation Wettable carrier in gas drying system for wafers
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US4404615A (en) * 1981-12-14 1983-09-13 United Plastics, Corp. Anti-static container for electronic components
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US4520925A (en) * 1983-08-09 1985-06-04 Empak Inc. Package
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US4724963A (en) * 1985-02-20 1988-02-16 Empak, Inc. Wafer processing cassette
AU595580B2 (en) * 1986-06-30 1990-04-05 Medical Laser Research Co., Ltd. Semiconductor laser therapeutic apparatus
US4721427A (en) * 1987-05-12 1988-01-26 Thermco Systems, Inc. Wafer transfer stand
US4817795A (en) * 1988-03-04 1989-04-04 Fluoroware, Inc. Robotic accessible wafer shipper assembly
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier

Also Published As

Publication number Publication date
KR920704331A (ko) 1992-12-19
EP0513275A1 (de) 1992-11-19
US5111936A (en) 1992-05-12
EP0513275B1 (de) 1995-08-09
WO1992010001A1 (en) 1992-06-11
JPH05503813A (ja) 1993-06-17
JP2546944B2 (ja) 1996-10-23
KR0175918B1 (ko) 1999-05-01
DE69112037T2 (de) 1996-01-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., CHASKA, MINN., US

8339 Ceased/non-payment of the annual fee