DE69114786D1 - Verfahren zum ätzen von mindestens einer vertiefung in einem substrat und dadurch erhaltenes substrat. - Google Patents
Verfahren zum ätzen von mindestens einer vertiefung in einem substrat und dadurch erhaltenes substrat.Info
- Publication number
- DE69114786D1 DE69114786D1 DE69114786T DE69114786T DE69114786D1 DE 69114786 D1 DE69114786 D1 DE 69114786D1 DE 69114786 T DE69114786 T DE 69114786T DE 69114786 T DE69114786 T DE 69114786T DE 69114786 D1 DE69114786 D1 DE 69114786D1
- Authority
- DE
- Germany
- Prior art keywords
- etching
- substrate
- pct
- depth
- cavities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Weting (AREA)
- Micromachines (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- ing And Chemical Polishing (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH872/90A CH682528A5 (fr) | 1990-03-16 | 1990-03-16 | Procédé de réalisation par attaque chimique d'au moins une cavité dans un substrat et substrat obtenu par ce procédé. |
PCT/EP1991/000426 WO1991014281A1 (en) | 1990-03-16 | 1991-03-07 | Etching method for obtaining at least one cavity in a substrate and substrate obtained by such method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69114786D1 true DE69114786D1 (de) | 1996-01-04 |
DE69114786T2 DE69114786T2 (de) | 1996-05-23 |
Family
ID=4197137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69114786T Expired - Fee Related DE69114786T2 (de) | 1990-03-16 | 1991-03-07 | Verfahren zum ätzen von mindestens einer vertiefung in einem substrat und dadurch erhaltenes substrat. |
Country Status (10)
Country | Link |
---|---|
US (1) | US5316618A (de) |
EP (1) | EP0472702B1 (de) |
JP (1) | JPH04506727A (de) |
AT (1) | ATE130703T1 (de) |
AU (1) | AU7475491A (de) |
CA (1) | CA2053859A1 (de) |
CH (1) | CH682528A5 (de) |
DE (1) | DE69114786T2 (de) |
ES (1) | ES2080304T3 (de) |
WO (1) | WO1991014281A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03292744A (ja) * | 1990-01-24 | 1991-12-24 | Toshiba Corp | 化合物半導体装置およびその製造方法 |
DE4340590A1 (de) * | 1992-12-03 | 1994-06-09 | Hewlett Packard Co | Grabenisolation unter Verwendung dotierter Seitenwände |
JP3205103B2 (ja) * | 1993-01-07 | 2001-09-04 | 松下電器産業株式会社 | 半導体装置の製造方法 |
US5436201A (en) * | 1993-05-28 | 1995-07-25 | Hughes Aircraft Company | Dual etchant process, particularly for gate recess fabrication in GaAs MMIC chips |
US5632908A (en) * | 1995-02-01 | 1997-05-27 | Lucent Technologies Inc. | Method for making aligned features |
US5632854A (en) * | 1995-08-21 | 1997-05-27 | Motorola, Inc. | Pressure sensor method of fabrication |
JP3734586B2 (ja) * | 1997-03-05 | 2006-01-11 | 富士通株式会社 | 半導体装置及びその製造方法 |
DE19719862A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
US6623579B1 (en) * | 1999-11-02 | 2003-09-23 | Alien Technology Corporation | Methods and apparatus for fluidic self assembly |
US6479395B1 (en) * | 1999-11-02 | 2002-11-12 | Alien Technology Corporation | Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings |
TW480621B (en) * | 2001-03-02 | 2002-03-21 | Acer Comm & Multimedia Inc | Method for producing high density chip |
US20040073175A1 (en) * | 2002-01-07 | 2004-04-15 | Jacobson James D. | Infusion system |
AU2005211226A1 (en) * | 2004-02-06 | 2005-08-18 | Karmic, Sarl | Microreplication of transitory-image relief pattern based optically variable devices |
US8070971B2 (en) * | 2004-06-04 | 2011-12-06 | Nxp B.V. | Etch method |
US7452748B1 (en) | 2004-11-08 | 2008-11-18 | Alien Technology Corporation | Strap assembly comprising functional block deposited therein and method of making same |
FR2901635A1 (fr) * | 2006-06-09 | 2007-11-30 | Commissariat Energie Atomique | Dispositif de connexion tridimensionnel dans un substrat |
US8132775B2 (en) * | 2008-04-29 | 2012-03-13 | International Business Machines Corporation | Solder mold plates used in packaging process and method of manufacturing solder mold plates |
FR2985602B1 (fr) * | 2012-01-05 | 2014-03-07 | Commissariat Energie Atomique | Procede de gravure d'un motif complexe |
US9005463B2 (en) * | 2013-05-29 | 2015-04-14 | Micron Technology, Inc. | Methods of forming a substrate opening |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3844858A (en) * | 1968-12-31 | 1974-10-29 | Texas Instruments Inc | Process for controlling the thickness of a thin layer of semiconductor material and semiconductor substrate |
JPS5898927A (ja) * | 1981-12-09 | 1983-06-13 | Hitachi Ltd | シリコン基板のエツチング方法 |
DE3225206C1 (de) * | 1982-07-06 | 1983-10-27 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verfahren zum einseitigen Ätzen von Platten |
US4761210A (en) * | 1985-09-30 | 1988-08-02 | Siemens Aktiengesellschaft | Method for generating structures in micro-mechanics |
JP2514210B2 (ja) * | 1987-07-23 | 1996-07-10 | 日産自動車株式会社 | 半導体基板のエッチング方法 |
US5024953A (en) * | 1988-03-22 | 1991-06-18 | Hitachi, Ltd. | Method for producing opto-electric transducing element |
US4899178A (en) * | 1989-02-02 | 1990-02-06 | Xerox Corporation | Thermal ink jet printhead with internally fed ink reservoir |
US4957592A (en) * | 1989-12-27 | 1990-09-18 | Xerox Corporation | Method of using erodable masks to produce partially etched structures in ODE wafer structures |
-
1990
- 1990-03-16 CH CH872/90A patent/CH682528A5/fr not_active IP Right Cessation
-
1991
- 1991-03-07 AU AU74754/91A patent/AU7475491A/en not_active Abandoned
- 1991-03-07 DE DE69114786T patent/DE69114786T2/de not_active Expired - Fee Related
- 1991-03-07 CA CA002053859A patent/CA2053859A1/en not_active Abandoned
- 1991-03-07 JP JP3505694A patent/JPH04506727A/ja active Pending
- 1991-03-07 AT AT91906200T patent/ATE130703T1/de not_active IP Right Cessation
- 1991-03-07 WO PCT/EP1991/000426 patent/WO1991014281A1/en active IP Right Grant
- 1991-03-07 ES ES91906200T patent/ES2080304T3/es not_active Expired - Lifetime
- 1991-03-07 US US07/784,430 patent/US5316618A/en not_active Expired - Fee Related
- 1991-03-07 EP EP91906200A patent/EP0472702B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2053859A1 (en) | 1991-09-17 |
CH682528A5 (fr) | 1993-09-30 |
DE69114786T2 (de) | 1996-05-23 |
ES2080304T3 (es) | 1996-02-01 |
WO1991014281A1 (en) | 1991-09-19 |
ATE130703T1 (de) | 1995-12-15 |
AU7475491A (en) | 1991-10-10 |
JPH04506727A (ja) | 1992-11-19 |
EP0472702A1 (de) | 1992-03-04 |
US5316618A (en) | 1994-05-31 |
EP0472702B1 (de) | 1995-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |