DE69122746D1 - Verfahren und geräte zum lesen von identifikationsschildern auf halbleiterscheiben - Google Patents

Verfahren und geräte zum lesen von identifikationsschildern auf halbleiterscheiben

Info

Publication number
DE69122746D1
DE69122746D1 DE69122746T DE69122746T DE69122746D1 DE 69122746 D1 DE69122746 D1 DE 69122746D1 DE 69122746 T DE69122746 T DE 69122746T DE 69122746 T DE69122746 T DE 69122746T DE 69122746 D1 DE69122746 D1 DE 69122746D1
Authority
DE
Germany
Prior art keywords
devices
reading identification
identification labels
semiconductor discs
discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69122746T
Other languages
English (en)
Inventor
Derek Hine
Michael Krolak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hine Design Inc
Original Assignee
Hine Design Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hine Design Inc filed Critical Hine Design Inc
Application granted granted Critical
Publication of DE69122746D1 publication Critical patent/DE69122746D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10821—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices
    • G06K7/10861—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices sensing of data fields affixed to objects or articles, e.g. coded labels
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/147—Details of sensors, e.g. sensor lenses
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/22—Image preprocessing by selection of a specific region containing or referencing a pattern; Locating or processing of specific regions to guide the detection or recognition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette
DE69122746T 1990-01-11 1991-01-09 Verfahren und geräte zum lesen von identifikationsschildern auf halbleiterscheiben Expired - Lifetime DE69122746D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US46353990A 1990-01-11 1990-01-11
US07/597,082 US5265170A (en) 1990-01-11 1990-10-15 Devices and methods for reading identification marks on semiconductor wafers
PCT/US1991/000184 WO1991010968A1 (en) 1990-01-11 1991-01-09 Devices and methods for reading identification marks on semiconductor wafers

Publications (1)

Publication Number Publication Date
DE69122746D1 true DE69122746D1 (de) 1996-11-21

Family

ID=27040683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122746T Expired - Lifetime DE69122746D1 (de) 1990-01-11 1991-01-09 Verfahren und geräte zum lesen von identifikationsschildern auf halbleiterscheiben

Country Status (7)

Country Link
US (2) US5265170A (de)
EP (1) EP0510108B1 (de)
JP (1) JP3245155B2 (de)
KR (1) KR100207045B1 (de)
CA (1) CA2073335A1 (de)
DE (1) DE69122746D1 (de)
WO (1) WO1991010968A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469294A (en) * 1992-05-01 1995-11-21 Xrl, Inc. Illumination system for OCR of indicia on a substrate
US5737122A (en) * 1992-05-01 1998-04-07 Electro Scientific Industries, Inc. Illumination system for OCR of indicia on a substrate
US5515452A (en) * 1992-12-31 1996-05-07 Electroglas, Inc. Optical character recognition illumination method and system
US5831738A (en) * 1994-01-11 1998-11-03 Hine Design Inc. Apparatus and methods for viewing identification marks on semiconductor wafers
WO1995035506A2 (en) * 1994-06-17 1995-12-28 Kensington Laboratories, Inc. Scribe mark reader
WO1997024607A1 (en) * 1996-01-02 1997-07-10 Mitsubishi Materials Corporation Substrate reading device and method
DE69631342T2 (de) * 1996-04-02 2004-11-11 Cognex Corp., Natick Bilderzeugende vorrichtung zur visualisation von zeichen auf einem ebenen spiegelnden substrat
US5975836A (en) * 1997-03-26 1999-11-02 Lucent Technologies Inc. Apparatus for visually reading semiconductor wafer identification indicia
US5987160A (en) * 1997-04-02 1999-11-16 Delco Electronics Corporation Method and apparatus for inspecting a photoresist material by inducing and detecting fluorescence of the photoresist material
US6390754B2 (en) * 1997-05-21 2002-05-21 Tokyo Electron Limited Wafer processing apparatus, method of operating the same and wafer detecting system
US5933521A (en) * 1997-06-23 1999-08-03 Pasic Engineering, Inc. Wafer reader including a mirror assembly for reading wafer scribes without displacing wafers
DE19733412B4 (de) * 1997-08-01 2005-08-04 Infineon Technologies Ag Verfahren zur automatischen Nachbeschriftung von Wafern.
FR2778496B1 (fr) * 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
US7016539B1 (en) 1998-07-13 2006-03-21 Cognex Corporation Method for fast, robust, multi-dimensional pattern recognition
JP3384335B2 (ja) * 1998-09-02 2003-03-10 松下電器産業株式会社 自動組立装置および自動組立方法
US6075334A (en) * 1999-03-15 2000-06-13 Berkeley Process Control, Inc Automatic calibration system for wafer transfer robot
US6275742B1 (en) 1999-04-16 2001-08-14 Berkeley Process Control, Inc. Wafer aligner system
US6265684B1 (en) * 1999-10-28 2001-07-24 Promos Technologies Inc. Wafer ID optical sorting system
WO2001033492A1 (en) * 1999-11-03 2001-05-10 General Electric Company Method of objectively evaluating a surface mark
US7253428B1 (en) * 2000-04-04 2007-08-07 Micron Technology, Inc. Apparatus and method for feature edge detection in semiconductor processing
SE516239C2 (sv) * 2000-04-28 2001-12-03 Mydata Automation Ab Metod och anordning för bestämning av nominella data för elektroniska kretsar, genom att ta en digital bild och jämföra med lagrade nominella data.
FR2835337B1 (fr) * 2002-01-29 2004-08-20 Recif Sa Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation
US7119351B2 (en) * 2002-05-17 2006-10-10 Gsi Group Corporation Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system
US8081820B2 (en) 2003-07-22 2011-12-20 Cognex Technology And Investment Corporation Method for partitioning a pattern into optimized sub-patterns
US7077310B2 (en) * 2003-09-04 2006-07-18 Taiwan Semiconductor Manufacturing Co., Ltd. Dual ID verification system and switching method therefor
US20070125863A1 (en) * 2005-12-05 2007-06-07 Jakoboski Timothy A System and method for employing infrared illumination for machine vision
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
US9679224B2 (en) 2013-06-28 2017-06-13 Cognex Corporation Semi-supervised method for training multiple pattern recognition and registration tool models
EP3639038B1 (de) * 2017-05-22 2021-04-21 Diapath S.p.A. Vorrichtung und verfahren zur identifizierung einer vielzahl von kassetten oder objektträgern für proben von biologischem material
FR3092422B1 (fr) * 2019-01-31 2021-02-12 Saint Gobain Procédé d’acquisition d’images de codes marqués sur une pluralité de feuilles de verre et installation correspondante

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4427332A (en) * 1982-02-26 1984-01-24 Nanometrics, Incorporated Integrated circuit wafer transport mechanism
US4449885A (en) * 1982-05-24 1984-05-22 Varian Associates, Inc. Wafer transfer system
US4606616A (en) * 1983-05-18 1986-08-19 Parker Douglas I Microscopes
US4618938A (en) * 1984-02-22 1986-10-21 Kla Instruments Corporation Method and apparatus for automatic wafer inspection
DE3437642C2 (de) * 1984-10-13 1994-03-31 Haar Maschbau Alfons Vorschubvorrichtung zum Eingeben und Vorschieben von Tafeln in eine Stanze
DE3442218A1 (de) * 1984-11-19 1986-05-28 Fa. Carl Zeiss, 7920 Heidenheim Auflichtbeleuchtungsapparat fuer mikroskope
JPS62184908A (ja) * 1986-02-07 1987-08-13 Bridgestone Corp タイヤの自動判別方法
JPS6318209A (ja) * 1986-07-10 1988-01-26 Nec Corp 照明方式
US4845770A (en) * 1986-11-20 1989-07-04 Oki Electric Industry Co., Ltd. Method and apparatus for processing embossed card
US4872052A (en) * 1986-12-03 1989-10-03 View Engineering, Inc. Semiconductor device inspection system
US4892455A (en) * 1987-05-21 1990-01-09 Hine Derek L Wafer alignment and transport mechanism
US4757130A (en) * 1987-07-01 1988-07-12 Hoechst Celanese Corporaton Condensation polymers with pendant side chains exhibiting nonlinear optical response

Also Published As

Publication number Publication date
JP3245155B2 (ja) 2002-01-07
EP0510108A1 (de) 1992-10-28
US5265170A (en) 1993-11-23
KR100207045B1 (ko) 1999-07-01
EP0510108B1 (de) 1996-10-16
US5386481A (en) 1995-01-31
KR920704237A (ko) 1992-12-19
CA2073335A1 (en) 1991-07-12
WO1991010968A1 (en) 1991-07-25
JPH05503797A (ja) 1993-06-17
EP0510108A4 (en) 1993-09-15

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Legal Events

Date Code Title Description
8332 No legal effect for de