DE69123300D1 - Mehrschichtige verformbare Spiegelstruktur - Google Patents

Mehrschichtige verformbare Spiegelstruktur

Info

Publication number
DE69123300D1
DE69123300D1 DE69123300T DE69123300T DE69123300D1 DE 69123300 D1 DE69123300 D1 DE 69123300D1 DE 69123300 T DE69123300 T DE 69123300T DE 69123300 T DE69123300 T DE 69123300T DE 69123300 D1 DE69123300 D1 DE 69123300D1
Authority
DE
Germany
Prior art keywords
deformable mirror
mirror structure
layer deformable
layer
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123300T
Other languages
English (en)
Other versions
DE69123300T2 (de
Inventor
Larry J Van Hornbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69123300D1 publication Critical patent/DE69123300D1/de
Publication of DE69123300T2 publication Critical patent/DE69123300T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
DE69123300T 1990-06-29 1991-06-25 Mehrschichtige verformbare Spiegelstruktur Expired - Fee Related DE69123300T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/546,465 US5083857A (en) 1990-06-29 1990-06-29 Multi-level deformable mirror device

Publications (2)

Publication Number Publication Date
DE69123300D1 true DE69123300D1 (de) 1997-01-09
DE69123300T2 DE69123300T2 (de) 1997-04-03

Family

ID=24180538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123300T Expired - Fee Related DE69123300T2 (de) 1990-06-29 1991-06-25 Mehrschichtige verformbare Spiegelstruktur

Country Status (5)

Country Link
US (2) US5083857A (de)
EP (1) EP0469293B1 (de)
JP (1) JP2978286B2 (de)
KR (1) KR100230536B1 (de)
DE (1) DE69123300T2 (de)

Families Citing this family (667)

* Cited by examiner, † Cited by third party
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US5600383A (en) 1997-02-04
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DE69123300T2 (de) 1997-04-03
EP0469293B1 (de) 1996-11-27
KR920001967A (ko) 1992-01-30
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US5083857A (en) 1992-01-28

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