US5148945B1
(en)
*
|
1990-09-17 |
1996-07-02 |
Applied Chemical Solutions |
Apparatus and method for the transfer and delivery of high purity chemicals
|
US5803599A
(en)
*
|
1990-09-17 |
1998-09-08 |
Applied Chemical Solutions |
Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures
|
US5417346A
(en)
*
|
1990-09-17 |
1995-05-23 |
Applied Chemical Solutions |
Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
|
US5370269A
(en)
*
|
1990-09-17 |
1994-12-06 |
Applied Chemical Solutions |
Process and apparatus for precise volumetric diluting/mixing of chemicals
|
FR2683890A1
(fr)
*
|
1991-11-14 |
1993-05-21 |
Air Liquide |
Installation de distribution d'azote a tres haute purete et procede de mise en óoeuvre.
|
US5460297A
(en)
*
|
1992-03-05 |
1995-10-24 |
Abcc/Tech Corp. |
Paint tinting apparatus
|
AU730609B2
(en)
*
|
1992-09-09 |
2001-03-08 |
Sims Deltec, Inc. |
Systems and methods for communicating with ambulatory medical devices such as drug delivery devices
|
US5359787A
(en)
*
|
1993-04-16 |
1994-11-01 |
Air Products And Chemicals, Inc. |
High purity bulk chemical delivery system
|
US5607002A
(en)
*
|
1993-04-28 |
1997-03-04 |
Advanced Delivery & Chemical Systems, Inc. |
Chemical refill system for high purity chemicals
|
US6260588B1
(en)
|
1993-04-28 |
2001-07-17 |
Advanced Technology Materials, Inc. |
Bulk chemical delivery system
|
US6029717A
(en)
*
|
1993-04-28 |
2000-02-29 |
Advanced Delivery & Chemical Systems, Ltd. |
High aspect ratio containers for ultrahigh purity chemicals
|
US5878793A
(en)
*
|
1993-04-28 |
1999-03-09 |
Siegele; Stephen H. |
Refillable ampule and method re same
|
US5465766A
(en)
*
|
1993-04-28 |
1995-11-14 |
Advanced Delivery & Chemical Systems, Inc. |
Chemical refill system for high purity chemicals
|
US5964254A
(en)
*
|
1997-07-11 |
1999-10-12 |
Advanced Delivery & Chemical Systems, Ltd. |
Delivery system and manifold
|
US5950693A
(en)
*
|
1993-04-28 |
1999-09-14 |
Advanced Delivery & Chemical Systems, Ltd. |
Bulk chemical delivery system
|
US6557593B2
(en)
|
1993-04-28 |
2003-05-06 |
Advanced Technology Materials, Inc. |
Refillable ampule and method re same
|
FR2715393B1
(fr)
*
|
1994-01-25 |
1996-04-12 |
Saumur Ateliers Aeronautiques |
Procédé et dispositif pour le transfert de liquides, et leur utilisation dans un système de dialyse péritonéale.
|
US5722447A
(en)
*
|
1994-04-29 |
1998-03-03 |
Texas Instruments Incorporated |
Continuous recirculation fluid delivery system and method
|
US5485941A
(en)
*
|
1994-06-30 |
1996-01-23 |
Basf Corporation |
Recirculation system and method for automated dosing apparatus
|
US5607000A
(en)
*
|
1994-10-31 |
1997-03-04 |
Motorola, Inc. |
Hazardous material liquid dispensing system and method
|
US5875925A
(en)
*
|
1994-12-20 |
1999-03-02 |
Stevens Eva Josephine |
Methods and apparatus for transferring hazardous liquids
|
US5582366A
(en)
*
|
1995-01-19 |
1996-12-10 |
Motorola, Inc. |
Satellite fueling system and method therefor
|
US5556002A
(en)
*
|
1995-02-03 |
1996-09-17 |
Abc Techcorp |
Measured liquid dispensing system
|
US5759847A
(en)
*
|
1995-07-14 |
1998-06-02 |
Difco Laboratories |
System and apparatus for automatically transferring media
|
US5632960A
(en)
*
|
1995-11-07 |
1997-05-27 |
Applied Chemical Solutions, Inc. |
Two-stage chemical mixing system
|
US5862946A
(en)
*
|
1996-07-12 |
1999-01-26 |
Air Products And Chemicals, Inc. |
Gas dissolution under pressure
|
WO1998007509A1
(fr)
*
|
1996-08-23 |
1998-02-26 |
Nikon Corporation |
Procede et systeme d'alimentation en matiere liquide
|
DE19640664C1
(de)
*
|
1996-10-02 |
1998-02-05 |
Bosch Gmbh Robert |
Vorrichtung zum Abfüllen einer unter Druck stehenden Flüssigkeit
|
US5857589A
(en)
*
|
1996-11-20 |
1999-01-12 |
Fluid Research Corporation |
Method and apparatus for accurately dispensing liquids and solids
|
US5868278A
(en)
*
|
1996-12-09 |
1999-02-09 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Eliminating microbubbles in developer solutions to reduce photoresist residues
|
US6148846A
(en)
*
|
1996-12-20 |
2000-11-21 |
Chemand Corporation |
Waste liquid collection system
|
US5832948A
(en)
*
|
1996-12-20 |
1998-11-10 |
Chemand Corp. |
Liquid transfer system
|
KR100253281B1
(ko)
*
|
1997-03-29 |
2000-04-15 |
김영환 |
반도체장비의폐액자동회수장치
|
US5857590A
(en)
*
|
1997-04-07 |
1999-01-12 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Controlled multi-nozzle liquid dispensing system
|
US5878918A
(en)
*
|
1997-05-02 |
1999-03-09 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Photoresist supplying system for used in a semiconductor fabrication
|
KR100459685B1
(ko)
*
|
1997-05-31 |
2005-01-17 |
삼성전자주식회사 |
Cmp장비의슬러리공급장치및슬러리공급배관의세정방법
|
US5919124A
(en)
*
|
1997-06-05 |
1999-07-06 |
Lucid Treatment Systems, Inc. |
Apparatus for continuous separation of fine solid particles from a liquid by centrifugal force
|
US5928492A
(en)
*
|
1997-06-05 |
1999-07-27 |
Lucid Treatment Systems, Inc. |
Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization
|
US6199599B1
(en)
|
1997-07-11 |
2001-03-13 |
Advanced Delivery & Chemical Systems Ltd. |
Chemical delivery system having purge system utilizing multiple purge techniques
|
US6296026B1
(en)
|
1997-06-26 |
2001-10-02 |
Advanced Technology Materials, Inc. |
Chemical delivery system having purge system utilizing multiple purge techniques
|
US6637475B2
(en)
|
1997-07-11 |
2003-10-28 |
Advanced Technology Materials, Inc. |
Bulk chemical delivery system
|
ATE356314T1
(de)
*
|
1997-07-11 |
2007-03-15 |
Advanced Tech Materials |
Vorrichtung zur förderung von chemischen wirkstoffen
|
JP5346620B2
(ja)
*
|
1997-07-11 |
2013-11-20 |
アドバンスト テクノロジー マテリアルズ,インコーポレイテッド |
バルク化学物質供給システム
|
US6296025B1
(en)
|
1997-07-11 |
2001-10-02 |
Advanced Technology Materials, Inc. |
Chemical delivery system having purge system utilizing multiple purge techniques
|
US6435229B1
(en)
|
1997-07-11 |
2002-08-20 |
Advanced Technology Materials, Inc. |
Bulk chemical delivery system
|
JP3382138B2
(ja)
*
|
1997-08-21 |
2003-03-04 |
富士通株式会社 |
薬液供給装置及び薬液供給方法
|
US6019250A
(en)
*
|
1997-10-14 |
2000-02-01 |
The Boc Group, Inc. |
Liquid dispensing apparatus and method
|
US5950642A
(en)
*
|
1997-11-12 |
1999-09-14 |
Porter Company/Mechanical Contractors |
Clean connection and sampling apparatus and method
|
US7784360B2
(en)
|
1999-11-22 |
2010-08-31 |
Invensys Systems, Inc. |
Correcting for two-phase flow in a digital flowmeter
|
US8467986B2
(en)
|
1997-11-26 |
2013-06-18 |
Invensys Systems, Inc. |
Drive techniques for a digital flowmeter
|
US6076541A
(en)
|
1997-11-26 |
2000-06-20 |
Pozniak; Peter M. |
Dispensing system and method for dispensing an aqueous solution
|
US8447534B2
(en)
|
1997-11-26 |
2013-05-21 |
Invensys Systems, Inc. |
Digital flowmeter
|
US5992686A
(en)
*
|
1998-02-27 |
1999-11-30 |
Fluid Research Corporation |
Method and apparatus for dispensing liquids and solids
|
US6085762A
(en)
*
|
1998-03-30 |
2000-07-11 |
The Regents Of The University Of California |
Apparatus and method for providing pulsed fluids
|
JPH11294700A
(ja)
*
|
1998-04-08 |
1999-10-29 |
Nippon Sanso Kk |
ガス供給設備
|
US5918290A
(en)
*
|
1998-04-29 |
1999-06-29 |
The Porter Company/Mechanical Contractors |
Multi-product sampling apparatus and method
|
US6224252B1
(en)
|
1998-07-07 |
2001-05-01 |
Air Products And Chemicals, Inc. |
Chemical generator with controlled mixing and concentration feedback and adjustment
|
US6079461A
(en)
*
|
1998-08-17 |
2000-06-27 |
The Heil Co. |
Use of inert gas in transfer of comminuted product to tank
|
FR2782506B1
(fr)
*
|
1998-08-18 |
2000-09-22 |
Labeille Ets |
Dispositif et procede de distribution de suspension abrasive pour le polissage mecanique de substrat
|
US6168048B1
(en)
|
1998-09-22 |
2001-01-02 |
American Air Liquide, Inc. |
Methods and systems for distributing liquid chemicals
|
JP3728945B2
(ja)
*
|
1998-10-30 |
2005-12-21 |
オルガノ株式会社 |
フォトレジスト現像廃液からの現像液の回収再利用方法及び装置
|
US6012607A
(en)
*
|
1998-11-03 |
2000-01-11 |
United Microelectronics Corp. |
Dispense system of a photoresist coating machine
|
DE19857593A1
(de)
*
|
1998-12-14 |
2000-06-15 |
Merck Patent Gmbh |
System zur pulsationsfreien Förderung von Flüssigkeiten
|
FR2790253B1
(fr)
*
|
1999-02-26 |
2001-04-20 |
Air Liquide Electronics Sys |
Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur
|
US6148847A
(en)
*
|
1999-03-25 |
2000-11-21 |
The Boc Group, Inc. |
Low vapor pressure gas distribution system and method
|
DE19937606A1
(de)
*
|
1999-03-29 |
2000-10-12 |
Steag Hamatech Ag |
Verfahren und Vorrichtung zum Bereitstellen eines Fluids aus einem Drucktank
|
WO2001002106A1
(en)
*
|
1999-07-06 |
2001-01-11 |
Semitool, Inc. |
Chemical solutions system for processing semiconductor materials
|
US6494219B1
(en)
|
2000-03-22 |
2002-12-17 |
Applied Materials, Inc. |
Apparatus with etchant mixing assembly for removal of unwanted electroplating deposits
|
US6299753B1
(en)
*
|
1999-09-01 |
2001-10-09 |
Applied Materials, Inc. |
Double pressure vessel chemical dispenser unit
|
US6264064B1
(en)
|
1999-10-14 |
2001-07-24 |
Air Products And Chemicals, Inc. |
Chemical delivery system with ultrasonic fluid sensors
|
US6478547B1
(en)
*
|
1999-10-18 |
2002-11-12 |
Integrated Designs L.P. |
Method and apparatus for dispensing fluids
|
US6170512B1
(en)
*
|
1999-11-01 |
2001-01-09 |
United Microelectronics Corp. |
Flow control device
|
AU2001286404A1
(en)
|
2000-08-04 |
2002-02-18 |
Arch Specialty Chemicals, Inc. |
Automatic refill system for ultra pure or contamination sensitive chemicals
|
US6604555B2
(en)
|
2000-08-04 |
2003-08-12 |
Arch Specialty Chemicals, Inc. |
Automatic refill system for ultra pure or contamination sensitive chemicals
|
US6736154B2
(en)
*
|
2001-01-26 |
2004-05-18 |
American Air Liquide, Inc. |
Pressure vessel systems and methods for dispensing liquid chemical compositions
|
EP1245527B1
(de)
*
|
2001-03-29 |
2002-11-06 |
Cs Clean Systems Ag |
Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters
|
JP2003014193A
(ja)
*
|
2001-06-27 |
2003-01-15 |
Nec Corp |
シリンダキャビネット及びその配管内の残留ガスのパージ方法
|
US7334708B2
(en)
*
|
2001-07-16 |
2008-02-26 |
L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude |
Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
|
KR100454120B1
(ko)
*
|
2001-11-12 |
2004-10-26 |
삼성전자주식회사 |
화학적 기계적 연마 장비의 슬러리 공급 장치 및 방법
|
US20030098069A1
(en)
*
|
2001-11-26 |
2003-05-29 |
Sund Wesley E. |
High purity fluid delivery system
|
AU2002357504A1
(en)
*
|
2001-12-21 |
2003-07-09 |
Mitsubishi Chemical Corporation |
Device and method for handling lase-of-polymerization substance, device for extracting liquid from device under reduced pressure, and method of manufacturing lase-of-polymerization substance
|
US6732017B2
(en)
*
|
2002-02-15 |
2004-05-04 |
Lam Research Corp. |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
|
US6979397B2
(en)
*
|
2002-03-19 |
2005-12-27 |
Schroeder Industries, Llc |
Dynamic particle removing flushing system
|
US20030185690A1
(en)
|
2002-03-28 |
2003-10-02 |
Mindi Xu |
Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
|
US6769462B2
(en)
*
|
2002-04-03 |
2004-08-03 |
E. I. Du Pont De Nemours And Company |
Dispensing apparatus
|
US7188644B2
(en)
*
|
2002-05-03 |
2007-03-13 |
Advanced Technology Materials, Inc. |
Apparatus and method for minimizing the generation of particles in ultrapure liquids
|
US7611333B1
(en)
*
|
2002-05-07 |
2009-11-03 |
Harrington Steven M |
Multiple chamber pump and method
|
US7007456B2
(en)
*
|
2002-05-07 |
2006-03-07 |
Harrington Steven M |
Dual chamber pump and method
|
US6648034B1
(en)
*
|
2002-05-23 |
2003-11-18 |
Air Products And Chemicals, Inc. |
Purgeable manifold for low vapor pressure chemicals containers
|
US7077388B2
(en)
*
|
2002-07-19 |
2006-07-18 |
Asm America, Inc. |
Bubbler for substrate processing
|
TWI232281B
(en)
*
|
2002-08-16 |
2005-05-11 |
Toppoly Optoelectronics Corp |
A backlight device of a LCD display
|
US7100631B2
(en)
*
|
2002-11-06 |
2006-09-05 |
Atomic Energy Council-Institute Of Nuclear Energy Research |
Multifunction passive and continuous fluid feeding system
|
AU2003238297A1
(en)
*
|
2003-06-20 |
2005-02-04 |
Bioscan, Inc. |
Liquid dispensing system
|
US20050005968A1
(en)
*
|
2003-07-01 |
2005-01-13 |
Berry Kurtis B. |
Automated vacuum waste handling system
|
US20050146982A1
(en)
*
|
2003-12-31 |
2005-07-07 |
Carlson Stephen J. |
Quick blend module
|
EP1566464B1
(de)
|
2004-02-20 |
2011-04-13 |
Cs Clean Systems Ag |
Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers
|
KR100587682B1
(ko)
*
|
2004-05-28 |
2006-06-08 |
삼성전자주식회사 |
케미컬 공급 장치 및 그에 따른 공급방법
|
JP4486870B2
(ja)
*
|
2004-11-05 |
2010-06-23 |
アプリシアテクノロジー株式会社 |
スラリーの供給装置及びスラリーの供給方法
|
US20060107898A1
(en)
*
|
2004-11-19 |
2006-05-25 |
Blomberg Tom E |
Method and apparatus for measuring consumption of reactants
|
US7198056B2
(en)
*
|
2005-02-10 |
2007-04-03 |
David James Silva |
High purity chemical delivery system
|
US20060196541A1
(en)
*
|
2005-03-04 |
2006-09-07 |
David Gerken |
Control of fluid conditions in bulk fluid distribution systems
|
CN101208258A
(zh)
*
|
2005-03-04 |
2008-06-25 |
波克爱德华兹股份有限公司 |
容积流体分配系统中流体状态的控制
|
US7810516B2
(en)
*
|
2005-03-04 |
2010-10-12 |
Air Liquide Electronics U.S. Lp |
Control of fluid conditions in bulk fluid distribution systems
|
US7775245B2
(en)
*
|
2005-04-08 |
2010-08-17 |
Air Products And Chemicals, Inc. |
Secure loop system and method for supply and delivery of product contained in a carrier
|
WO2006116389A2
(en)
*
|
2005-04-25 |
2006-11-02 |
Advanced Technology Materials, Inc. |
Material storage and dispensing packages and methods
|
KR101297004B1
(ko)
|
2005-04-25 |
2013-08-14 |
도쿄엘렉트론가부시키가이샤 |
비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및 분배 시스템
|
JP2008539146A
(ja)
*
|
2005-04-25 |
2008-11-13 |
アドバンスド テクノロジー マテリアルズ,インコーポレイテッド |
化学試薬及び組成を保存・分配する装置及びプロセス
|
EP2388233B1
(de)
*
|
2005-06-06 |
2017-02-08 |
Advanced Technology Materials, Inc. |
Fluidspeicher- und Ausgabesysteme und Verfahren
|
US7506659B2
(en)
*
|
2005-09-19 |
2009-03-24 |
Tamko Roofing Products, Inc. |
System for liquid removal in a vacuum environment
|
CN103072933B
(zh)
*
|
2005-10-21 |
2015-10-07 |
Ch&I技术公司 |
集成材料传递和分配系统
|
US20070215639A1
(en)
*
|
2006-02-15 |
2007-09-20 |
Roberts Benjamin R |
Method and Apparatus for Dispensing Liquid with Precise Control
|
US20070205214A1
(en)
*
|
2006-03-03 |
2007-09-06 |
Roberts Benjamin R |
Liquid dispense system
|
JP4700536B2
(ja)
*
|
2006-03-22 |
2011-06-15 |
東京エレクトロン株式会社 |
液処理装置並びに液処理装置の処理液供給方法及び処理液供給プログラム。
|
CN101484782B
(zh)
|
2006-06-13 |
2013-07-17 |
高级技术材料公司 |
包含气体移出设备的液体分配系统
|
US20080085219A1
(en)
*
|
2006-10-05 |
2008-04-10 |
Beebe David J |
Microfluidic platform and method
|
US20080093762A1
(en)
*
|
2006-10-05 |
2008-04-24 |
Min Hui Wang |
Device for making multi-color foam product and method for making the same
|
US7647811B2
(en)
*
|
2006-12-21 |
2010-01-19 |
Horiba Ltd. |
Solid particle counting system with valve to allow reduction of pressure pulse at particle counter when vacuum pump is started
|
EP2097731A4
(de)
*
|
2006-12-28 |
2017-06-28 |
PECOFacet (US), Inc. |
Systeme und verfahren zur messung und analyse von pipeline-verunreinigungen
|
US7854158B2
(en)
*
|
2006-12-28 |
2010-12-21 |
Perry Equipment Corporation |
Systems and methods for measurement and analysis of pipeline contaminants
|
KR100832447B1
(ko)
*
|
2007-01-26 |
2008-05-26 |
플러스이엔지 주식회사 |
반도체 제조용 액체 저장용기
|
TW200916183A
(en)
*
|
2007-05-09 |
2009-04-16 |
Advanced Tech Materials |
Systems and methods for material blending and distribution
|
US7948621B2
(en)
*
|
2007-06-28 |
2011-05-24 |
Perry Equipment Corporation |
Systems and methods for remote monitoring of contaminants in fluids
|
WO2009010970A2
(en)
*
|
2007-07-16 |
2009-01-22 |
Mabat Chemical Systems Ltd. |
Modular chemical delivery unit
|
AU2008335308A1
(en)
*
|
2007-12-06 |
2009-06-18 |
Foresight Processing, Llc |
Systems and methods for delivery of fluid-containing process material combinations
|
TWI459489B
(zh)
*
|
2008-03-17 |
2014-11-01 |
Acm Res Shanghai Inc |
用於處理單片半導體工件的溶液製備設備和方法
|
WO2009114964A1
(en)
*
|
2008-03-17 |
2009-09-24 |
Acm Research (Shanghai) Inc. |
Solution preparation apparatus and method for treating individual semiconductor workpiece
|
CN102119116A
(zh)
*
|
2008-07-31 |
2011-07-06 |
范思特艾布力斯卡股份有限公司 |
可追踪燃料质量的远程系统
|
US8151814B2
(en)
*
|
2009-01-13 |
2012-04-10 |
Asm Japan K.K. |
Method for controlling flow and concentration of liquid precursor
|
WO2010144439A2
(en)
|
2009-06-10 |
2010-12-16 |
Advanced Technology Materials, Inc. |
Fluid processing systems and methods
|
KR101657733B1
(ko)
|
2009-07-09 |
2016-09-20 |
어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 |
라이너 베이스의 저장 시스템, 라이너 및 반도체 공정에 고순도 재료를 공급하는 방법
|
US20120291627A1
(en)
|
2010-01-06 |
2012-11-22 |
Advanced Technology Materials, Inc. |
Liquid dispensing systems with gas removal and sensing capabilities
|
JP4888580B2
(ja)
*
|
2010-04-22 |
2012-02-29 |
住友金属鉱山株式会社 |
貯液装置及びその圧力制御方法
|
FR2969994B1
(fr)
*
|
2011-01-05 |
2013-02-08 |
Hypred |
Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement
|
BR112013022316A2
(pt)
|
2011-03-01 |
2017-05-30 |
Advanced Tech Materials |
sistema baseado em revestimento interno, e, método para prover um sistema baseado em revestimento interno
|
CN103635990B
(zh)
|
2011-05-28 |
2016-11-16 |
恩特格里斯公司 |
具有净化能力的可再填充的安瓿
|
JP6397766B2
(ja)
*
|
2012-02-24 |
2018-09-26 |
インテグリス・インコーポレーテッド |
流体を配送するシステムおよび方法
|
AT13262U1
(de)
*
|
2012-05-16 |
2013-09-15 |
Koerner Chemieanlagen |
Analysevorrichtung
|
US9770804B2
(en)
|
2013-03-18 |
2017-09-26 |
Versum Materials Us, Llc |
Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
|
ES2527968B1
(es)
*
|
2013-08-02 |
2016-02-26 |
Eulen, S.A. |
Equipo de trasvase de lodos, de ciclo continuo de trabajo.
|
DE102014106129A1
(de)
*
|
2014-04-30 |
2015-11-05 |
Thyssenkrupp Ag |
Verfahren und Vorrichtung zur kontinuierlichen Präkursorzuführung
|
KR101594881B1
(ko)
|
2015-07-01 |
2016-02-17 |
태광후지킨 주식회사 |
반도체 공정용 압력용기 및 그의 제조방법
|
US10384944B2
(en)
*
|
2016-05-19 |
2019-08-20 |
L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude |
Preparation of Si—H containing iodosilanes via halide exchange reaction
|
EP3814540A4
(de)
*
|
2018-06-29 |
2022-03-30 |
Applied Materials, Inc. |
Flüssiglithiumzuführung und -regelung
|
US11236866B2
(en)
|
2018-09-03 |
2022-02-01 |
Te-Ming Chiang |
Liquid transfer apparatus
|
TWI675154B
(zh)
*
|
2018-09-03 |
2019-10-21 |
江德明 |
壓差傳輸設備
|
US11155758B2
(en)
*
|
2019-05-30 |
2021-10-26 |
Airgas, Inc. |
Method of dosing a system with HCL then evacuating and purging
|
US11761582B2
(en)
*
|
2019-09-05 |
2023-09-19 |
Dhf America, Llc |
Pressure regulation system and method for a fluidic product having particles
|
EP3865220A1
(de)
|
2020-02-12 |
2021-08-18 |
Vito NV |
Vorrichtung zur kontinuierlichen zufuhr einer flüssigen verbindung und entsprechendes verfahren
|
US11817329B2
(en)
*
|
2020-05-29 |
2023-11-14 |
Taiwan Semiconductor Manufacturing Company Limited |
Chemical dispensing system
|
CN115178167A
(zh)
*
|
2022-07-08 |
2022-10-14 |
杭州百瑞特饲料科技有限公司 |
一种饲料生产设备及方法
|