DE69208546T2 - Unterstöchiometrische Zirconnitridbeschichtung - Google Patents

Unterstöchiometrische Zirconnitridbeschichtung

Info

Publication number
DE69208546T2
DE69208546T2 DE69208546T DE69208546T DE69208546T2 DE 69208546 T2 DE69208546 T2 DE 69208546T2 DE 69208546 T DE69208546 T DE 69208546T DE 69208546 T DE69208546 T DE 69208546T DE 69208546 T2 DE69208546 T2 DE 69208546T2
Authority
DE
Germany
Prior art keywords
zirconium nitride
nitride coating
hypostoichiometric
coating
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69208546T
Other languages
English (en)
Other versions
DE69208546D1 (de
Inventor
Albert Sue Jiinjen
Henry Troue Harden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Praxair Technology Inc
Original Assignee
Praxair ST Technology Inc
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc, Praxair Technology Inc filed Critical Praxair ST Technology Inc
Application granted granted Critical
Publication of DE69208546D1 publication Critical patent/DE69208546D1/de
Publication of DE69208546T2 publication Critical patent/DE69208546T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
DE69208546T 1991-07-11 1992-07-10 Unterstöchiometrische Zirconnitridbeschichtung Expired - Fee Related DE69208546T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/728,338 US5242753A (en) 1991-07-11 1991-07-11 Substoichiometric zirconium nitride coating

Publications (2)

Publication Number Publication Date
DE69208546D1 DE69208546D1 (de) 1996-04-04
DE69208546T2 true DE69208546T2 (de) 1996-10-24

Family

ID=24926443

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69208546T Expired - Fee Related DE69208546T2 (de) 1991-07-11 1992-07-10 Unterstöchiometrische Zirconnitridbeschichtung

Country Status (7)

Country Link
US (1) US5242753A (de)
EP (1) EP0522872B1 (de)
JP (1) JP2646313B2 (de)
AT (1) ATE134721T1 (de)
CA (2) CA2073642C (de)
DE (1) DE69208546T2 (de)
SG (1) SG47604A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6062018A (en) * 1993-04-14 2000-05-16 Adroit Systems, Inc. Pulse detonation electrical power generation apparatus with water injection
US7093340B2 (en) 1997-12-16 2006-08-22 All-Clad Metalcrafters Llc Stick resistant ceramic coating for cookware
US6360423B1 (en) 1997-12-16 2002-03-26 Clad Metals Llc Stick resistant coating for cookware
US6871613B2 (en) * 2003-06-06 2005-03-29 Schulmerich Carillons, Inc. Tarnish-resistant handbell and its method of manufacture
DE10342398B4 (de) * 2003-09-13 2008-05-29 Schott Ag Schutzschicht für einen Körper sowie Verfahren zur Herstellung und Verwendung von Schutzschichten
US7211338B2 (en) * 2003-12-19 2007-05-01 Honeywell International, Inc. Hard, ductile coating system
TW201233820A (en) * 2011-02-08 2012-08-16 Chenming Mold Ind Corp Ceramic member and manufacturing thereof
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900592A (en) * 1973-07-25 1975-08-19 Airco Inc Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate
JPS51144314A (en) * 1975-06-09 1976-12-11 Sumitomo Electric Ind Ltd A super hard alloy part having a coating film containing oxygen
SE8300910L (sv) * 1983-02-18 1984-08-19 Santrade Ltd Sammansatt kropp bestaende av ett substrat belagt med hart, slitstarkt ytskikt
US4428811A (en) * 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of a group IVb metal
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4774151A (en) * 1986-05-23 1988-09-27 International Business Machines Corporation Low contact electrical resistant composition, substrates coated therewith, and process for preparing such
JPS6317277A (ja) * 1986-07-08 1988-01-25 日立金属株式会社 硬質層被覆サイアロンセラミツクスおよびその製造方法
EP0264654B1 (de) * 1986-09-25 1990-05-23 Union Carbide Corporation Substrat mit Zirkonnitrid-Überzug und Verfahren zur Herstellung dieses Überzugs
CA1333242C (en) * 1987-10-01 1994-11-29 Gte Valenite Corporation A1n coated silicon nitride-based cutting tools
US4981756A (en) * 1989-03-21 1991-01-01 Vac-Tec Systems, Inc. Method for coated surgical instruments and tools
ES2084005T3 (es) * 1989-09-11 1996-05-01 Praxair Technology Inc Revestimiento multicapa de un compuesto que contiene nitruro y su produccion.

Also Published As

Publication number Publication date
US5242753A (en) 1993-09-07
CA2073642C (en) 2001-05-08
SG47604A1 (en) 1998-04-17
EP0522872B1 (de) 1996-02-28
CA2073651C (en) 2000-06-27
CA2073642A1 (en) 1993-01-12
ATE134721T1 (de) 1996-03-15
JPH05246782A (ja) 1993-09-24
CA2073651A1 (en) 1993-01-12
EP0522872A1 (de) 1993-01-13
JP2646313B2 (ja) 1997-08-27
DE69208546D1 (de) 1996-04-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee