DE69211782T2 - Beschleunigungssensor mit Selbst-Test und dazu gehörige Schaltung - Google Patents

Beschleunigungssensor mit Selbst-Test und dazu gehörige Schaltung

Info

Publication number
DE69211782T2
DE69211782T2 DE69211782T DE69211782T DE69211782T2 DE 69211782 T2 DE69211782 T2 DE 69211782T2 DE 69211782 T DE69211782 T DE 69211782T DE 69211782 T DE69211782 T DE 69211782T DE 69211782 T2 DE69211782 T2 DE 69211782T2
Authority
DE
Germany
Prior art keywords
accelerometer
self
test
associated circuit
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69211782T
Other languages
English (en)
Other versions
DE69211782D1 (de
Inventor
Fumio Ohta
Nobuo C Oelectronic Pro Tanaka
Yoshinao C Oelectronic Mukasa
Akira C Oelectronic Pr Gohkura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Application granted granted Critical
Publication of DE69211782D1 publication Critical patent/DE69211782D1/de
Publication of DE69211782T2 publication Critical patent/DE69211782T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
DE69211782T 1991-07-19 1992-07-17 Beschleunigungssensor mit Selbst-Test und dazu gehörige Schaltung Expired - Fee Related DE69211782T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3179125A JPH0526894A (ja) 1991-07-19 1991-07-19 自己診断回路付き加速度センサ

Publications (2)

Publication Number Publication Date
DE69211782D1 DE69211782D1 (de) 1996-08-01
DE69211782T2 true DE69211782T2 (de) 1997-02-27

Family

ID=16060434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69211782T Expired - Fee Related DE69211782T2 (de) 1991-07-19 1992-07-17 Beschleunigungssensor mit Selbst-Test und dazu gehörige Schaltung

Country Status (5)

Country Link
US (1) US5377523A (de)
EP (1) EP0525549B1 (de)
JP (1) JPH0526894A (de)
CA (1) CA2074157A1 (de)
DE (1) DE69211782T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007041918A1 (de) * 2007-09-04 2009-03-05 Siemens Ag Piezoelektrischer Energiewandler mit Doppelmembran

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US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
US6308554B1 (en) * 1994-03-12 2001-10-30 Robert Bosch Gmbh Electronic device having an acceleration-sensitive sensor
JPH09510294A (ja) * 1994-03-12 1997-10-14 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 加速感応センサを有する電子装置
US6070113A (en) * 1996-06-21 2000-05-30 Automotive Systems Laboratory, Inc. Hybrid vehicle crash discrimination system
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
US6023664A (en) * 1996-10-16 2000-02-08 Automotive Systems Laboratory, Inc. Vehicle crash sensing system
US5900529A (en) * 1997-07-10 1999-05-04 Trw Inc. Apparatus and method for testing an acceleration sensor
DE19739903A1 (de) * 1997-09-11 1999-04-01 Bosch Gmbh Robert Sensorvorrichtung
DE19845185B4 (de) * 1998-10-01 2005-05-04 Eads Deutschland Gmbh Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors
JP2000346865A (ja) * 1999-03-26 2000-12-15 Ngk Insulators Ltd 加速度センサ素子の感度調整方法
DE10248736B4 (de) * 2002-10-18 2005-02-03 Litef Gmbh Verfahren zur Ermittlung eines Nullpunktfehlers eines Corioliskreisels
DE10317158B4 (de) * 2003-04-14 2007-05-10 Litef Gmbh Verfahren zur Ermittlung eines Nullpunktfehlers in einem Corioliskreisel
DE102004030380B4 (de) * 2004-06-23 2010-07-29 Eads Deutschland Gmbh Mikromechanischer Drucksensor und Verfahren zum Selbsttest eines solchen
JP2007232460A (ja) * 2006-02-28 2007-09-13 Aisin Seiki Co Ltd 加速度センサの状態検出装置
DE102006055520A1 (de) * 2006-11-24 2008-05-29 Robert Bosch Gmbh Vorrichtung und Verfahren zur Überprüfung der Funktionsfähigkeit bzw. zur Plausibilisierung eines auf einem interdigitalen Elektrodensystem basierenden Sensors sowie ein Sensor zur Detektion von Teilchen in einem Gasstrom und dessen Verwendung
DE102008040525B4 (de) * 2008-07-18 2017-05-24 Robert Bosch Gmbh Mikromechanisches Sensorelement
DE102011081026A1 (de) * 2011-08-16 2013-02-21 Robert Bosch Gmbh Verfahren zur Funktionsüberprüfung eines Inertialsensors und Inertialsensor
ES2877101T3 (es) 2013-02-14 2021-11-16 Meggitt Sa Circuito de medición
RU2593646C1 (ru) * 2015-05-22 2016-08-10 Акционерное общество "Вибро-прибор" Способ определения значения частоты установочного резонанса пьезоэлектрического вибропреобразователя и устройство для его осуществления
JP2021025926A (ja) * 2019-08-07 2021-02-22 ローム株式会社 振動センサの自己診断方法及び自己診断機能付き振動センサシステム
CN112415292B (zh) * 2019-08-20 2022-03-18 北京钛方科技有限责任公司 压电器件在线检测装置及方法
CN110596425B (zh) * 2019-09-23 2021-07-27 成都航空职业技术学院 一种无人机mems加速度传感器噪声消除方法
CN114660328B (zh) * 2022-03-15 2023-06-20 厦门乃尔电子有限公司 一种mems加速度计的自检电路

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US2808524A (en) * 1952-03-20 1957-10-01 Sylvania Electric Prod Inertia responsive electro-mechanical transducer
US3120622A (en) * 1960-03-29 1964-02-04 Gulton Ind Inc Self-calibrating accelerometer
US3390286A (en) * 1966-03-29 1968-06-25 Cons Electrodynamics Corp Hermetically sealed instrument transducer with external sensitivity selection
SU361723A1 (ru) * 1971-01-04 1976-08-05 Ростовский государственный университет Пьезоэлектрический акселерометр
DE2222038C3 (de) * 1972-05-05 1978-07-06 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Prüfschaltung für die Auslösevorrichtung einer dem Schutz der Insassen eines Fahrzeuges während eines Unfalles dienenden Sicherheitseinrichtung
SU998958A1 (ru) * 1979-07-12 1983-02-23 Предприятие П/Я А-1742 Устройство дл испытаний угловых акселерометров
DE3371417D1 (en) * 1983-02-21 1987-06-11 Vibro Meter Ag Dual accelerometer, method of manufacturing it and its application
JPS6224154A (ja) * 1985-07-25 1987-02-02 Matsushita Electric Ind Co Ltd 加速度センサ
US4950914A (en) * 1987-03-30 1990-08-21 Honda Giken Kogyo Kabushiki Kaisha Collision detection system for a vehicle
JPH07115625B2 (ja) * 1987-12-23 1995-12-13 本田技研工業株式会社 車両の衝突検知装置
JPH01287470A (ja) * 1987-12-26 1989-11-20 Aisin Seiki Co Ltd 半導体加速度センサ
US4900919A (en) * 1988-06-20 1990-02-13 Westinghouse Electric Corp. Wide bandwidth fiber optic accelerometer
JPH0715486B2 (ja) * 1988-08-01 1995-02-22 松下電器産業株式会社 加速度センサ
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
JPH03287075A (ja) * 1990-04-02 1991-12-17 Fujikura Ltd 圧電型加速度センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007041918A1 (de) * 2007-09-04 2009-03-05 Siemens Ag Piezoelektrischer Energiewandler mit Doppelmembran

Also Published As

Publication number Publication date
EP0525549A3 (en) 1993-04-21
EP0525549A2 (de) 1993-02-03
CA2074157A1 (en) 1993-01-20
US5377523A (en) 1995-01-03
EP0525549B1 (de) 1996-06-26
DE69211782D1 (de) 1996-08-01
JPH0526894A (ja) 1993-02-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee