DE69213356T2 - Temperatur-Regelungssystem für ein Tempergerät mit Heizlampe - Google Patents
Temperatur-Regelungssystem für ein Tempergerät mit HeizlampeInfo
- Publication number
- DE69213356T2 DE69213356T2 DE69213356T DE69213356T DE69213356T2 DE 69213356 T2 DE69213356 T2 DE 69213356T2 DE 69213356 T DE69213356 T DE 69213356T DE 69213356 T DE69213356 T DE 69213356T DE 69213356 T2 DE69213356 T2 DE 69213356T2
- Authority
- DE
- Germany
- Prior art keywords
- control system
- temperature control
- heating lamp
- tempering device
- tempering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Temperature (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03158495A JP3096743B2 (ja) | 1991-06-28 | 1991-06-28 | ランプアニール炉の温度制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69213356D1 DE69213356D1 (de) | 1996-10-10 |
DE69213356T2 true DE69213356T2 (de) | 1997-04-10 |
Family
ID=15672990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69213356T Expired - Fee Related DE69213356T2 (de) | 1991-06-28 | 1992-06-24 | Temperatur-Regelungssystem für ein Tempergerät mit Heizlampe |
Country Status (6)
Country | Link |
---|---|
US (1) | US5332883A (de) |
EP (1) | EP0520417B1 (de) |
JP (1) | JP3096743B2 (de) |
KR (1) | KR100210741B1 (de) |
DE (1) | DE69213356T2 (de) |
TW (1) | TW209330B (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2283583B (en) * | 1993-10-15 | 1998-06-24 | Seiko Epson Corp | Temperature control in a fixing device for an image forming apparatus |
US5960158A (en) | 1997-07-11 | 1999-09-28 | Ag Associates | Apparatus and method for filtering light in a thermal processing chamber |
US6064799A (en) * | 1998-04-30 | 2000-05-16 | Applied Materials, Inc. | Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature |
US5930456A (en) | 1998-05-14 | 1999-07-27 | Ag Associates | Heating device for semiconductor wafers |
US5970214A (en) | 1998-05-14 | 1999-10-19 | Ag Associates | Heating device for semiconductor wafers |
US6210484B1 (en) | 1998-09-09 | 2001-04-03 | Steag Rtp Systems, Inc. | Heating device containing a multi-lamp cone for heating semiconductor wafers |
US6771895B2 (en) | 1999-01-06 | 2004-08-03 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |
JP2000286200A (ja) | 1999-03-31 | 2000-10-13 | Kokusai Electric Co Ltd | 熱処理方法および熱処理装置 |
KR100432135B1 (ko) * | 2001-06-30 | 2004-05-17 | 동부전자 주식회사 | 급속 열처리 장치 |
US20070179677A1 (en) * | 2003-11-25 | 2007-08-02 | Polymer Innovation, Llc | Self contained bench top enclosure temperature control system |
KR102049814B1 (ko) * | 2018-07-09 | 2019-11-28 | (주)하이비젼시스템 | 램프를 활용한 비접촉식 급속 온도 제어 장치 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3803386A (en) * | 1972-10-13 | 1974-04-09 | Kerdon Corp | Aquarium heater |
US3796858A (en) * | 1972-12-05 | 1974-03-12 | J Cohn | Decorative aquarium heater |
US3890486A (en) * | 1973-05-01 | 1975-06-17 | Equipment Dev Corp | Aquarium-tank heating control |
US3895217A (en) * | 1974-01-14 | 1975-07-15 | Odell Mfg Inc | Thermostatically controlled safety heater for aquariums |
US3896289A (en) * | 1974-11-13 | 1975-07-22 | Renna Edmond F Di | Aquarium water heater |
US4149067A (en) * | 1976-11-15 | 1979-04-10 | Erhard Boettger | Aquarium heater |
US4163145A (en) * | 1978-05-30 | 1979-07-31 | Neff Paul C | Aquarium heater |
US4379220A (en) * | 1979-05-11 | 1983-04-05 | Raychem Corporation | Method of heating liquid |
US4276466A (en) * | 1979-05-11 | 1981-06-30 | Raychem Corporation | Heater with distributed heating element |
FR2474802A1 (fr) * | 1980-01-29 | 1981-07-31 | Gloria Sa | Resistances chauffantes et thermostats pour aquariophilie |
DE3021390C2 (de) * | 1980-06-06 | 1984-06-07 | Eugen Jäger GmbH, 7156 Wüstenrot | Aquarientauchheizkörper |
JPS6298722A (ja) * | 1985-10-25 | 1987-05-08 | Koyo Seiko Co Ltd | 光加熱装置の温度制御装置 |
KR910002596B1 (ko) * | 1985-11-21 | 1991-04-27 | 다이닛뽕 스크린 세이조오 가부시기가이샤 | 온도제어방법 및 그 장치 |
JP2530124B2 (ja) * | 1986-05-12 | 1996-09-04 | 光洋精工株式会社 | ランプアニ−ル炉の温度制御装置 |
JP2729283B2 (ja) * | 1986-05-12 | 1998-03-18 | 光洋精工株式会社 | ランプアニール炉の温度制御装置 |
DE3642181C1 (de) * | 1986-12-10 | 1988-04-14 | Wolf & Co Kg Kurt | Anordnung zum Beeinflussen der Gar- bzw. Kochzeit bei einem Kochgefaess |
KR900008978B1 (ko) * | 1987-01-22 | 1990-12-15 | 마쯔시다덴기산교 가부시기가이샤 | 가열조리장치 |
FR2633481B1 (fr) * | 1988-06-22 | 1996-04-26 | Seb Sa | Procede de regulation thermique d'un appareil chauffant, dispositif pour sa mise en oeuvre et appareil chauffant comportant ce dispositif |
US4889973A (en) * | 1988-10-12 | 1989-12-26 | Farinacci Michael F | Aquarium heater |
-
1991
- 1991-06-28 JP JP03158495A patent/JP3096743B2/ja not_active Expired - Lifetime
-
1992
- 1992-06-24 EP EP92110656A patent/EP0520417B1/de not_active Expired - Lifetime
- 1992-06-24 DE DE69213356T patent/DE69213356T2/de not_active Expired - Fee Related
- 1992-06-25 TW TW081104997A patent/TW209330B/zh active
- 1992-06-26 KR KR1019920011199A patent/KR100210741B1/ko not_active IP Right Cessation
- 1992-06-29 US US07/905,433 patent/US5332883A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100210741B1 (ko) | 1999-07-15 |
DE69213356D1 (de) | 1996-10-10 |
US5332883A (en) | 1994-07-26 |
EP0520417A1 (de) | 1992-12-30 |
EP0520417B1 (de) | 1996-09-04 |
KR930001034A (ko) | 1993-01-16 |
JP3096743B2 (ja) | 2000-10-10 |
JPH055588A (ja) | 1993-01-14 |
TW209330B (de) | 1993-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |