DE69214375T2 - Kodierer und Antriebssystem - Google Patents

Kodierer und Antriebssystem

Info

Publication number
DE69214375T2
DE69214375T2 DE69214375T DE69214375T DE69214375T2 DE 69214375 T2 DE69214375 T2 DE 69214375T2 DE 69214375 T DE69214375 T DE 69214375T DE 69214375 T DE69214375 T DE 69214375T DE 69214375 T2 DE69214375 T2 DE 69214375T2
Authority
DE
Germany
Prior art keywords
encoder
drive system
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69214375T
Other languages
English (en)
Other versions
DE69214375D1 (de
Inventor
Masahiko Igaki
Koh Ishizuka
Masaru Nyui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69214375D1 publication Critical patent/DE69214375D1/de
Application granted granted Critical
Publication of DE69214375T2 publication Critical patent/DE69214375T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
DE69214375T 1991-07-29 1992-07-07 Kodierer und Antriebssystem Expired - Lifetime DE69214375T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3188666A JP3066923B2 (ja) 1991-07-29 1991-07-29 エンコーダ及びこれを有するシステム

Publications (2)

Publication Number Publication Date
DE69214375D1 DE69214375D1 (de) 1996-11-14
DE69214375T2 true DE69214375T2 (de) 1997-02-27

Family

ID=16227730

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69214375T Expired - Lifetime DE69214375T2 (de) 1991-07-29 1992-07-07 Kodierer und Antriebssystem

Country Status (4)

Country Link
US (1) US5302821A (de)
EP (1) EP0525446B1 (de)
JP (1) JP3066923B2 (de)
DE (1) DE69214375T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3116535B2 (ja) * 1992-03-13 2000-12-11 キヤノン株式会社 ロータリーエンコーダー及びエンコーダー
US5390022A (en) * 1992-04-07 1995-02-14 Canon Kabushiki Kaisha Displacement information detection apparatus for receiving a divergent light beam
JP3254737B2 (ja) * 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
DE4233336C2 (de) * 1992-10-05 2001-08-23 Zeiss Carl Verfahren und Vorrichtung zur Detektion von Fokusablagen
US5652426A (en) * 1993-04-19 1997-07-29 Ricoh Company, Ltd. Optical encoder having high resolution
KR0141445B1 (ko) * 1993-06-10 1998-07-01 모리시타 요이찌 변이의 측정방법 및 측정장치
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
GB9425907D0 (en) * 1994-12-22 1995-02-22 Renishaw Plc Opto-electronic scale reading apparatus
US5590059A (en) * 1995-03-14 1996-12-31 Schier; J. Alan Position encoder system which utilites the fundamental frequency of a ruled scale on an object
US5883384A (en) * 1996-04-16 1999-03-16 Canon Kabushiki Kaisha Rotational displacement information detection apparatus
JPH10260007A (ja) * 1997-03-14 1998-09-29 Ricoh Co Ltd 相対位置検出装置
JP3672438B2 (ja) * 1998-07-08 2005-07-20 株式会社リコー 光学式エンコーダ装置
US6188058B1 (en) * 1998-09-17 2001-02-13 Agilent Technologies Inc. System for taking displacement measurements having photosensors with imaged pattern arrangement
JP4365927B2 (ja) 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
JP5345269B2 (ja) * 1999-10-26 2013-11-20 シチズンホールディングス株式会社 光学式変位測定装置
JP4337415B2 (ja) * 2003-06-10 2009-09-30 株式会社ニコン エンコーダ
GB201313751D0 (en) * 2013-08-01 2013-09-18 Renishaw Plc Rotation Detection Apparatus
CN104374334B (zh) * 2014-11-17 2016-03-09 中国航空工业第六一八研究所 自由曲面形貌三维测量方法及装置
US9651404B2 (en) * 2015-09-29 2017-05-16 Mitutoyo Corporation Optical encoder having an optical portion comprising dual lenses and an aperture portion positioned in relation to a moiré grating
TWI675187B (zh) * 2017-12-19 2019-10-21 財團法人工業技術研究院 光學編碼器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3584959A (en) * 1967-02-23 1971-06-15 Teeg Research Inc Shaft position encoders
US4034403A (en) * 1971-03-11 1977-07-05 U.S. Philips Corporation Apparatus for positional control of a reading head in a device for reproducing optically coded video disk recordings
JPH067062B2 (ja) * 1987-03-24 1994-01-26 キヤノン株式会社 位置検出装置
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
US4874245A (en) * 1988-02-26 1989-10-17 Simmonds Precision Products, Inc. Optical shaft angular and torsional displacement and speed sensing system
JPH0778433B2 (ja) * 1988-07-19 1995-08-23 キヤノン株式会社 ロータリーエンコーダ
JP2603305B2 (ja) * 1988-07-19 1997-04-23 キヤノン株式会社 変位測定装置
JP2586121B2 (ja) * 1988-09-30 1997-02-26 キヤノン株式会社 ロータリーエンコーダの原点検出系

Also Published As

Publication number Publication date
JP3066923B2 (ja) 2000-07-17
JPH0534173A (ja) 1993-02-09
DE69214375D1 (de) 1996-11-14
US5302821A (en) 1994-04-12
EP0525446A1 (de) 1993-02-03
EP0525446B1 (de) 1996-10-09

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Legal Events

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