DE69214811T2 - Integrierter verteilerapparat für chemischen dampf von einer nichtgasförmigen quelle für die halbleiterherstellung - Google Patents

Integrierter verteilerapparat für chemischen dampf von einer nichtgasförmigen quelle für die halbleiterherstellung

Info

Publication number
DE69214811T2
DE69214811T2 DE69214811T DE69214811T DE69214811T2 DE 69214811 T2 DE69214811 T2 DE 69214811T2 DE 69214811 T DE69214811 T DE 69214811T DE 69214811 T DE69214811 T DE 69214811T DE 69214811 T2 DE69214811 T2 DE 69214811T2
Authority
DE
Germany
Prior art keywords
chemical vapor
semiconductor production
gaseous source
module
integrated distributor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69214811T
Other languages
English (en)
Other versions
DE69214811D1 (de
Inventor
Craig M Stauffer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69214811D1 publication Critical patent/DE69214811D1/de
Application granted granted Critical
Publication of DE69214811T2 publication Critical patent/DE69214811T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02—Discharging liquefied gases
    • F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69214811T 1991-05-31 1992-05-29 Integrierter verteilerapparat für chemischen dampf von einer nichtgasförmigen quelle für die halbleiterherstellung Expired - Fee Related DE69214811T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/708,421 US5252134A (en) 1991-05-31 1991-05-31 Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing
PCT/US1992/004466 WO1992021789A1 (en) 1991-05-31 1992-05-29 Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing

Publications (2)

Publication Number Publication Date
DE69214811D1 DE69214811D1 (de) 1996-11-28
DE69214811T2 true DE69214811T2 (de) 1997-02-20

Family

ID=24845738

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69214811T Expired - Fee Related DE69214811T2 (de) 1991-05-31 1992-05-29 Integrierter verteilerapparat für chemischen dampf von einer nichtgasförmigen quelle für die halbleiterherstellung

Country Status (8)

Country Link
US (3) US5252134A (de)
EP (1) EP0587724B1 (de)
JP (1) JPH06508402A (de)
KR (1) KR100253612B1 (de)
AT (1) ATE144561T1 (de)
DE (1) DE69214811T2 (de)
ES (1) ES2093836T3 (de)
WO (1) WO1992021789A1 (de)

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US5698037A (en) 1997-12-16
EP0587724B1 (de) 1996-10-23
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US5252134A (en) 1993-10-12
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US5505782A (en) 1996-04-09

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