DE69228847T2 - Flüssigkeitsabgabe und Verdampfungssystem - Google Patents

Flüssigkeitsabgabe und Verdampfungssystem

Info

Publication number
DE69228847T2
DE69228847T2 DE69228847T DE69228847T DE69228847T2 DE 69228847 T2 DE69228847 T2 DE 69228847T2 DE 69228847 T DE69228847 T DE 69228847T DE 69228847 T DE69228847 T DE 69228847T DE 69228847 T2 DE69228847 T2 DE 69228847T2
Authority
DE
Germany
Prior art keywords
fluid delivery
evaporation system
evaporation
delivery
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69228847T
Other languages
English (en)
Other versions
DE69228847D1 (de
Inventor
James H Ewing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69228847D1 publication Critical patent/DE69228847D1/de
Application granted granted Critical
Publication of DE69228847T2 publication Critical patent/DE69228847T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/06—Flash distillation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/088—Machines, pumps, or pumping installations having flexible working members having tubular flexible members with two or more tubular flexible members in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7782—With manual or external control for line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7835—Valve seating in direction of flow
    • Y10T137/7836—Flexible diaphragm or bellows reactor
DE69228847T 1991-08-28 1992-07-29 Flüssigkeitsabgabe und Verdampfungssystem Expired - Lifetime DE69228847T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/751,173 US5371828A (en) 1991-08-28 1991-08-28 System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure

Publications (2)

Publication Number Publication Date
DE69228847D1 DE69228847D1 (de) 1999-05-12
DE69228847T2 true DE69228847T2 (de) 1999-08-05

Family

ID=25020809

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69228847T Expired - Lifetime DE69228847T2 (de) 1991-08-28 1992-07-29 Flüssigkeitsabgabe und Verdampfungssystem

Country Status (5)

Country Link
US (3) US5371828A (de)
EP (1) EP0529334B1 (de)
JP (4) JP2693092B2 (de)
KR (1) KR0167568B1 (de)
DE (1) DE69228847T2 (de)

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US5966499A (en) * 1997-07-28 1999-10-12 Mks Instruments, Inc. System for delivering a substantially constant vapor flow to a chemical process reactor
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GB2354528B (en) 1999-09-25 2004-03-10 Trikon Holdings Ltd Delivery of liquid precursors to semiconductor processing reactors
GB2355992B (en) 1999-06-26 2004-06-02 Trikon Holdings Ltd Method and apparatus for forming a film on a substrate
KR100649852B1 (ko) * 1999-09-09 2006-11-24 동경 엘렉트론 주식회사 기화기 및 이것을 이용한 반도체 제조 시스템
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US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
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DE102007047682B4 (de) 2007-10-05 2013-07-11 Webasto Ag Verfahren zum Pumpen einer Flüssigkeit und Verdrängerpumpe mit zwei Pumpkammern
CN102042480A (zh) * 2010-11-24 2011-05-04 安徽省电力科学研究院 用于发电机组氢气置换的二氧化碳气化器
CN102494546B (zh) * 2011-12-16 2013-03-13 亿恒节能科技江苏有限公司 空气加热盘管组冷凝水余热一效闪蒸利用系统
US9610392B2 (en) 2012-06-08 2017-04-04 Fresenius Medical Care Holdings, Inc. Medical fluid cassettes and related systems and methods
US9877509B2 (en) * 2014-03-31 2018-01-30 Westfield Limited (Ltd.) Micro-vaporizer heating element and method of vaporization
US20160123313A1 (en) * 2014-11-05 2016-05-05 Simmons Development, Llc Pneumatically-operated fluid pump with amplified fluid pressure, and related methods
KR102154867B1 (ko) 2020-02-07 2020-09-10 최규술 폴리우레탄 발포폼 및 그 제조방법
KR102154866B1 (ko) 2020-02-07 2020-09-10 최규술 준불연 폴리우레탄 폼본드 및 그 제조방법
KR102154864B1 (ko) 2020-03-17 2020-09-10 최규술 준불연 폴리우레탄 폼블록 조성물 및 그 제조방법
KR102154863B1 (ko) 2020-03-17 2020-09-10 최규술 준불연 폴리우레탄 폼본드 조성물 및 그 제조방법
KR102154865B1 (ko) 2020-03-17 2020-09-10 최규술 폴리우레탄 발포폼 제조용 키트 및 이를 이용한 폴리우레탄 발포폼 제조방법
CN111927559B (zh) * 2020-07-27 2021-05-11 北京航天发射技术研究所 一种气体喷射膨胀作动系统及控制方法

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Also Published As

Publication number Publication date
US5361800A (en) 1994-11-08
JPH05253402A (ja) 1993-10-05
EP0529334A2 (de) 1993-03-03
US5371828A (en) 1994-12-06
EP0529334A3 (de) 1994-02-23
JP2693092B2 (ja) 1997-12-17
KR930004735A (ko) 1993-03-23
JPH1030557A (ja) 1998-02-03
KR0167568B1 (ko) 1999-01-15
JPH1030558A (ja) 1998-02-03
JP3296749B2 (ja) 2002-07-02
DE69228847D1 (de) 1999-05-12
JPH1030556A (ja) 1998-02-03
EP0529334B1 (de) 1999-04-07
US5437542A (en) 1995-08-01

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