DE69233293D1 - Superreinigung von komplizierten Mikroteilchen - Google Patents

Superreinigung von komplizierten Mikroteilchen

Info

Publication number
DE69233293D1
DE69233293D1 DE69233293T DE69233293T DE69233293D1 DE 69233293 D1 DE69233293 D1 DE 69233293D1 DE 69233293 T DE69233293 T DE 69233293T DE 69233293 T DE69233293 T DE 69233293T DE 69233293 D1 DE69233293 D1 DE 69233293D1
Authority
DE
Germany
Prior art keywords
enclosure
holding
port
cleaning
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69233293T
Other languages
English (en)
Other versions
DE69233293T2 (de
Inventor
Alan E Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CFMT Inc
Original Assignee
CFMT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CFMT Inc filed Critical CFMT Inc
Publication of DE69233293D1 publication Critical patent/DE69233293D1/de
Application granted granted Critical
Publication of DE69233293T2 publication Critical patent/DE69233293T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
DE1992633293 1991-10-04 1992-10-02 Superreinigung von komplizierten Mikroteilchen Expired - Fee Related DE69233293T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US77135291A 1991-10-04 1991-10-04
US771352 1991-10-04

Publications (2)

Publication Number Publication Date
DE69233293D1 true DE69233293D1 (de) 2004-02-26
DE69233293T2 DE69233293T2 (de) 2004-11-18

Family

ID=25091536

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992633293 Expired - Fee Related DE69233293T2 (de) 1991-10-04 1992-10-02 Superreinigung von komplizierten Mikroteilchen

Country Status (9)

Country Link
US (2) US6143087A (de)
EP (2) EP0894542B1 (de)
JP (1) JP3209426B2 (de)
KR (1) KR100254653B1 (de)
AT (1) ATE258084T1 (de)
AU (1) AU2884992A (de)
CA (1) CA2120325A1 (de)
DE (1) DE69233293T2 (de)
WO (1) WO1993006949A1 (de)

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JP5848869B2 (ja) * 2010-08-25 2016-01-27 富士フイルム株式会社 パターン形成方法
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KR102616612B1 (ko) * 2018-01-04 2023-12-26 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 처리 방법
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Also Published As

Publication number Publication date
EP0894542A1 (de) 1999-02-03
JP3209426B2 (ja) 2001-09-17
EP0608363A1 (de) 1994-08-03
US6143087A (en) 2000-11-07
KR100254653B1 (ko) 2000-05-01
CA2120325A1 (en) 1993-04-15
ATE258084T1 (de) 2004-02-15
US6348101B1 (en) 2002-02-19
WO1993006949A1 (en) 1993-04-15
DE69233293T2 (de) 2004-11-18
EP0894542B1 (de) 2004-01-21
JP2001504381A (ja) 2001-04-03
KR940702773A (ko) 1994-09-17
AU2884992A (en) 1993-05-03

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