DE69300334T2 - Kontaminationsmotor für überkristische Flüssigkeiten. - Google Patents

Kontaminationsmotor für überkristische Flüssigkeiten.

Info

Publication number
DE69300334T2
DE69300334T2 DE69300334T DE69300334T DE69300334T2 DE 69300334 T2 DE69300334 T2 DE 69300334T2 DE 69300334 T DE69300334 T DE 69300334T DE 69300334 T DE69300334 T DE 69300334T DE 69300334 T2 DE69300334 T2 DE 69300334T2
Authority
DE
Germany
Prior art keywords
supercritical fluid
reduced pressure
supercritical
amount
stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69300334T
Other languages
English (en)
Other versions
DE69300334D1 (de
Inventor
Milia Edward S Di
Darrell A Gleichauf
Thomas E Whiting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE69300334D1 publication Critical patent/DE69300334D1/de
Publication of DE69300334T2 publication Critical patent/DE69300334T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/20—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials
    • G01N1/2035—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials by deviating part of a fluid stream, e.g. by drawing-off or tapping
DE69300334T 1992-01-24 1993-01-12 Kontaminationsmotor für überkristische Flüssigkeiten. Expired - Lifetime DE69300334T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/828,533 US5369033A (en) 1992-01-24 1992-01-24 Supercritical fluid contamination monitor

Publications (2)

Publication Number Publication Date
DE69300334D1 DE69300334D1 (de) 1995-09-14
DE69300334T2 true DE69300334T2 (de) 1996-04-18

Family

ID=25252088

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69300334T Expired - Lifetime DE69300334T2 (de) 1992-01-24 1993-01-12 Kontaminationsmotor für überkristische Flüssigkeiten.

Country Status (9)

Country Link
US (1) US5369033A (de)
EP (1) EP0555638B1 (de)
JP (1) JP2661854B2 (de)
KR (1) KR930016777A (de)
AT (1) ATE126352T1 (de)
CA (1) CA2086709A1 (de)
DE (1) DE69300334T2 (de)
MX (1) MX9300350A (de)
TW (1) TW236002B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4404309A1 (de) * 1994-02-11 1995-08-17 Polster Schlageter Klaus Verfahren und Einrichtung zur Untersuchung und Messung von Wässern und Flüssigkeiten auf Abscheidung und/oder Auflösung von Stoffen bei Temperatur- und/oder Druckänderung
US5700695A (en) * 1994-06-30 1997-12-23 Zia Yassinzadeh Sample collection and manipulation method
US5706840A (en) * 1995-03-03 1998-01-13 Sandia Corporation Precision cleaning apparatus and method
US6053032A (en) * 1995-04-13 2000-04-25 Nalco Chemical Company System and method for determining a deposition rate in a process stream indicative of a mass build-up and for controlling feed of a product in the process stream to combat same
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US6037182A (en) * 1997-12-29 2000-03-14 Vlsi Technology, Inc. Method for detecting a location of contaminant entry in a processing fluid production and distribution system
US6360585B1 (en) 2000-03-06 2002-03-26 General Electric Company Method and apparatus for determining chemical properties
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
US7064834B2 (en) * 2002-01-22 2006-06-20 Praxair Technology, Inc. Method for analyzing impurities in carbon dioxide
US6875285B2 (en) * 2003-04-24 2005-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for dampening high pressure impact on porous materials
US7588995B2 (en) * 2005-11-14 2009-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method to create damage-free porous low-k dielectric films and structures resulting therefrom
US7951723B2 (en) * 2006-10-24 2011-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated etch and supercritical CO2 process and chamber design
US20110306152A1 (en) * 2010-06-09 2011-12-15 I Shou University System and Method for Determining Concentration of a Predetermined Osteoarthritis Biomarker in a Urine Sample
CN103712877A (zh) * 2013-12-25 2014-04-09 浙江工业大学 用于大物料量试样超临界水气化的热重特性分析系统
US10054357B2 (en) * 2016-10-12 2018-08-21 Raytheon Company Purity monitor
FR3085482B1 (fr) * 2018-08-30 2020-11-27 Esiee Paris Chambre De Commerce Et Dindustrie De Region Paris Ile De France Capteur de particules fines avec microbalances en cascade

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863495A (en) * 1973-04-16 1975-02-04 Exxon Research Engineering Co Quartz crystal solute mass detector
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids
US4434028A (en) * 1981-04-17 1984-02-28 Critical Fluid Systems, Inc. Apparatus for removing organic contaminants from inorganic-rich mineral solids
US4597943A (en) * 1984-11-29 1986-07-01 Morinaga & Co., Ltd. Apparatus for analyzing solid sample with supercritical fluid
CA1227357A (en) * 1985-02-12 1987-09-29 Minister Of National Defence Method and apparatus for detecting presence and concentration of vapours in gaseous fluids
US4917499A (en) * 1986-10-03 1990-04-17 Hughes Aircraft Company Apparatus for analyzing contamination
US4872316A (en) * 1988-02-01 1989-10-10 The Charles Stark Draper Laboratory, Inc. System for monitoring a liquid entrained in a fluid
GB8828277D0 (en) * 1988-12-03 1989-01-05 Glasgow College Enterprises Lt Dust monitors & dust monitoring
MY105421A (en) * 1990-03-02 1994-10-31 Exxon Research Engineering Co A method for quantitatively measuring saturates, olefins and aromatics in a composition.
US5009746A (en) * 1990-10-12 1991-04-23 Kimberly-Clark Corporation Method for removing stickies from secondary fibers using supercritical CO2 solvent extraction

Also Published As

Publication number Publication date
JP2661854B2 (ja) 1997-10-08
EP0555638A1 (de) 1993-08-18
ATE126352T1 (de) 1995-08-15
CA2086709A1 (en) 1993-07-25
TW236002B (de) 1994-12-11
JPH05264430A (ja) 1993-10-12
DE69300334D1 (de) 1995-09-14
US5369033A (en) 1994-11-29
KR930016777A (ko) 1993-08-30
EP0555638B1 (de) 1995-08-09
MX9300350A (es) 1993-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO. (N.D.GES.D. STAATES DELAWARE), LEXING

R071 Expiry of right

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