DE69306198T2 - Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren - Google Patents

Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren

Info

Publication number
DE69306198T2
DE69306198T2 DE69306198T DE69306198T DE69306198T2 DE 69306198 T2 DE69306198 T2 DE 69306198T2 DE 69306198 T DE69306198 T DE 69306198T DE 69306198 T DE69306198 T DE 69306198T DE 69306198 T2 DE69306198 T2 DE 69306198T2
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
recording head
jet recording
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69306198T
Other languages
English (en)
Other versions
DE69306198D1 (de
Inventor
Kohei Kitahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69306198D1 publication Critical patent/DE69306198D1/de
Publication of DE69306198T2 publication Critical patent/DE69306198T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14387Front shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14419Manifold
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making
DE69306198T 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren Expired - Lifetime DE69306198T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP22750392 1992-08-26
JP27314992 1992-10-12
JP33459292 1992-12-15
JP08007093A JP3317308B2 (ja) 1992-08-26 1993-03-15 積層型インクジェット記録ヘッド、及びその製造方法

Publications (2)

Publication Number Publication Date
DE69306198D1 DE69306198D1 (de) 1997-01-09
DE69306198T2 true DE69306198T2 (de) 1997-04-03

Family

ID=27466383

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69333824T Expired - Fee Related DE69333824T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf mit Schichtstruktur
DE69306198T Expired - Lifetime DE69306198T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69322884T Expired - Fee Related DE69322884T2 (de) 1992-08-26 1993-08-26 Druckerzeugungseinheit für einen Tintenstrahlaufzeichnungskopf
DE69329882T Expired - Fee Related DE69329882T2 (de) 1992-08-26 1993-08-26 Mehrschichtiger Tintenstrahlaufzeichnungskopf

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69333824T Expired - Fee Related DE69333824T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf mit Schichtstruktur

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69322884T Expired - Fee Related DE69322884T2 (de) 1992-08-26 1993-08-26 Druckerzeugungseinheit für einen Tintenstrahlaufzeichnungskopf
DE69329882T Expired - Fee Related DE69329882T2 (de) 1992-08-26 1993-08-26 Mehrschichtiger Tintenstrahlaufzeichnungskopf

Country Status (6)

Country Link
US (2) US6270203B1 (de)
EP (4) EP0584823B1 (de)
JP (1) JP3317308B2 (de)
DE (4) DE69333824T2 (de)
HK (2) HK1002121A1 (de)
SG (3) SG119181A1 (de)

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US6601949B1 (en) 1992-08-26 2003-08-05 Seiko Epson Corporation Actuator unit for ink jet recording head
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IT1268870B1 (it) * 1993-08-23 1997-03-13 Seiko Epson Corp Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione.
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EP0839655B1 (de) 2001-01-17
DE69322884D1 (de) 1999-02-11
EP0988972A2 (de) 2000-03-29
EP0723867A2 (de) 1996-07-31
EP0839655A2 (de) 1998-05-06
SG133440A1 (en) 2007-07-30
EP0723867A3 (de) 1996-08-28
DE69333824T2 (de) 2005-10-27
EP0584823A1 (de) 1994-03-02
DE69333824D1 (de) 2005-07-07
EP0988972A3 (de) 2000-09-06
EP0839655A3 (de) 1998-05-20
DE69329882T2 (de) 2001-08-30
HK1008315A1 (en) 1999-05-07
US6290340B1 (en) 2001-09-18
HK1002121A1 (en) 1998-07-31
DE69306198D1 (de) 1997-01-09
EP0723867B1 (de) 1998-12-30
JPH06234218A (ja) 1994-08-23
DE69322884T2 (de) 1999-08-26
EP0988972B1 (de) 2005-06-01
US6270203B1 (en) 2001-08-07
EP0584823B1 (de) 1996-11-27
JP3317308B2 (ja) 2002-08-26
SG115367A1 (en) 2005-10-28
SG119181A1 (en) 2006-02-28
DE69329882D1 (de) 2001-02-22

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