DE69310259D1 - Verfahren und Vorrichtung zur elektrostatisch kontrollierten Strahlsteuerung - Google Patents

Verfahren und Vorrichtung zur elektrostatisch kontrollierten Strahlsteuerung

Info

Publication number
DE69310259D1
DE69310259D1 DE69310259T DE69310259T DE69310259D1 DE 69310259 D1 DE69310259 D1 DE 69310259D1 DE 69310259 T DE69310259 T DE 69310259T DE 69310259 T DE69310259 T DE 69310259T DE 69310259 D1 DE69310259 D1 DE 69310259D1
Authority
DE
Germany
Prior art keywords
beam control
controlled beam
electrostatically controlled
electrostatically
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69310259T
Other languages
English (en)
Other versions
DE69310259T2 (de
Inventor
William E Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69310259D1 publication Critical patent/DE69310259D1/de
Application granted granted Critical
Publication of DE69310259T2 publication Critical patent/DE69310259T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
DE69310259T 1992-03-04 1993-02-10 Verfahren und Vorrichtung zur elektrostatisch kontrollierten Strahlsteuerung Expired - Fee Related DE69310259T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/846,305 US5212582A (en) 1992-03-04 1992-03-04 Electrostatically controlled beam steering device and method

Publications (2)

Publication Number Publication Date
DE69310259D1 true DE69310259D1 (de) 1997-06-05
DE69310259T2 DE69310259T2 (de) 1997-11-06

Family

ID=25297508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310259T Expired - Fee Related DE69310259T2 (de) 1992-03-04 1993-02-10 Verfahren und Vorrichtung zur elektrostatisch kontrollierten Strahlsteuerung

Country Status (5)

Country Link
US (1) US5212582A (de)
EP (1) EP0563546B1 (de)
JP (1) JP3335698B2 (de)
KR (1) KR100277450B1 (de)
DE (1) DE69310259T2 (de)

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KR930020187A (ko) 1993-10-19
EP0563546B1 (de) 1997-05-02
US5212582A (en) 1993-05-18
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DE69310259T2 (de) 1997-11-06
JP3335698B2 (ja) 2002-10-21

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