DE69311628T2 - Verfahren zur multiplen Phasenlichtmodulation und zugehörige Systeme oder Geräte - Google Patents

Verfahren zur multiplen Phasenlichtmodulation und zugehörige Systeme oder Geräte

Info

Publication number
DE69311628T2
DE69311628T2 DE69311628T DE69311628T DE69311628T2 DE 69311628 T2 DE69311628 T2 DE 69311628T2 DE 69311628 T DE69311628 T DE 69311628T DE 69311628 T DE69311628 T DE 69311628T DE 69311628 T2 DE69311628 T2 DE 69311628T2
Authority
DE
Germany
Prior art keywords
devices
light modulation
multiple phase
related systems
modulation methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311628T
Other languages
English (en)
Other versions
DE69311628D1 (de
Inventor
James M Florence
R Mark Boysel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69311628D1 publication Critical patent/DE69311628D1/de
Application granted granted Critical
Publication of DE69311628T2 publication Critical patent/DE69311628T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2294Addressing the hologram to an active spatial light modulator
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005Adaptation of holography to specific applications
    • G03H2001/0066Adaptation of holography to specific applications for wavefront matching wherein the hologram is arranged to convert a predetermined wavefront into a comprehensive wave, e.g. associative memory
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • G03H2001/085Kinoform, i.e. phase only encoding wherein the computed field is processed into a distribution of phase differences
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • G03H2001/0858Cell encoding wherein each computed values is represented by at least two pixels of the modulator, e.g. detour phase coding
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00Optical components
    • G03H2223/13Phase mask
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/20Nature, e.g. e-beam addressed
    • G03H2225/24Having movable pixels, e.g. microelectromechanical systems [MEMS]
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/30Modulation
    • G03H2225/31Amplitude only
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/30Modulation
    • G03H2225/32Phase only
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/55Having optical element registered to each pixel
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2240/00Hologram nature or properties
    • G03H2240/20Details of physical variations exhibited in the hologram
    • G03H2240/40Dynamic of the variations
    • G03H2240/41Binary
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2240/00Hologram nature or properties
    • G03H2240/20Details of physical variations exhibited in the hologram
    • G03H2240/40Dynamic of the variations
    • G03H2240/42Discrete level
DE69311628T 1992-04-03 1993-03-22 Verfahren zur multiplen Phasenlichtmodulation und zugehörige Systeme oder Geräte Expired - Fee Related DE69311628T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/862,933 US5312513A (en) 1992-04-03 1992-04-03 Methods of forming multiple phase light modulators

Publications (2)

Publication Number Publication Date
DE69311628D1 DE69311628D1 (de) 1997-07-24
DE69311628T2 true DE69311628T2 (de) 1997-12-18

Family

ID=25339778

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311628T Expired - Fee Related DE69311628T2 (de) 1992-04-03 1993-03-22 Verfahren zur multiplen Phasenlichtmodulation und zugehörige Systeme oder Geräte

Country Status (6)

Country Link
US (3) US5312513A (de)
EP (1) EP0568801B1 (de)
JP (1) JPH06281869A (de)
KR (2) KR100305157B1 (de)
DE (1) DE69311628T2 (de)
TW (1) TW222022B (de)

Families Citing this family (318)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7826120B2 (en) * 1994-05-05 2010-11-02 Qualcomm Mems Technologies, Inc. Method and device for multi-color interferometric modulation
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US7776631B2 (en) * 1994-05-05 2010-08-17 Qualcomm Mems Technologies, Inc. MEMS device and method of forming a MEMS device
US7800809B2 (en) * 1994-05-05 2010-09-21 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US7839556B2 (en) 1994-05-05 2010-11-23 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US5699130A (en) * 1994-05-17 1997-12-16 Taylor Group Of Companies, Inc. Digital video and audio systems using nano-mechanical structures
US5454906A (en) * 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5567334A (en) * 1995-02-27 1996-10-22 Texas Instruments Incorporated Method for creating a digital micromirror device using an aluminum hard mask
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
KR100213026B1 (ko) * 1995-07-27 1999-08-02 윤종용 디엠디 및 그 제조공정
US5757536A (en) * 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
US6525750B1 (en) 1996-03-08 2003-02-25 Duke University Projection display for computers
US5833360A (en) * 1996-10-17 1998-11-10 Compaq Computer Corporation High efficiency lamp apparatus for producing a beam of polarized light
US6390626B2 (en) 1996-10-17 2002-05-21 Duke University Image projection system engine assembly
US7929197B2 (en) * 1996-11-05 2011-04-19 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US6025951A (en) * 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US5868480A (en) * 1996-12-17 1999-02-09 Compaq Computer Corporation Image projection apparatus for producing an image supplied by parallel transmitted colored light
US6243152B1 (en) 1996-12-17 2001-06-05 Duke University Contrast polymer dispersed liquid crystal projection display system
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5977942A (en) * 1996-12-20 1999-11-02 Compaq Computer Corporation Multiplexed display element sequential color LCD panel
US6313893B1 (en) 1996-12-27 2001-11-06 Duke University Compensation for DC balancing of liquid crystal displays
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
SE9800665D0 (sv) * 1998-03-02 1998-03-02 Micronic Laser Systems Ab Improved method for projection printing using a micromirror SLM
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6421163B1 (en) 1998-11-05 2002-07-16 Comptic, Inc. Two dimensional transform generator
US6247037B1 (en) * 1999-01-28 2001-06-12 Displaytech, Inc Optical correlator having multiple active components formed on a single integrated circuit
US6222954B1 (en) 1999-09-17 2001-04-24 Light Bytes, Inc. Fault-tolerant fiber-optical beam control modules
US6563974B2 (en) 1999-09-17 2003-05-13 Nuonics, Inc. High resolution fault-tolerant fiber-optical beam control modules
JP3643508B2 (ja) * 1999-09-28 2005-04-27 株式会社東芝 可動フィルム型表示装置
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6529311B1 (en) * 1999-10-28 2003-03-04 The Trustees Of Boston University MEMS-based spatial-light modulator with integrated electronics
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
KR100389865B1 (ko) * 2001-03-02 2003-07-04 삼성전자주식회사 마이크로미러 디바이스 및 이를 채용한 프로젝터
US6934069B2 (en) 2001-04-03 2005-08-23 Cidra Corporation Chromatic dispersion compensation device having an array of micromirrors
US7123833B2 (en) 2001-08-09 2006-10-17 Cidra Corporation Dynamically reconfigurable optical smart node
US20030081321A1 (en) * 2001-09-25 2003-05-01 Cidra Corporation Optical cross-connect having an array of micro-mirrors
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
AU2002339997A1 (en) * 2001-09-25 2003-04-07 Cidra Corporation Optical channel monitor having an array of micro-mirrors
WO2003028265A2 (en) * 2001-09-25 2003-04-03 Cidra Corporation Reconfigurable optical add/drop multiplexer having an array of micro-mirrors
KR100452061B1 (ko) * 2002-01-05 2004-10-08 (주)맥스소프트 홀로그래픽 메모리 시스템에서 복소 위상 코드를 이용한 위상 코드 다중화 방법 및 장치
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US20030202264A1 (en) * 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
TWI289708B (en) * 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US6849170B2 (en) * 2003-01-27 2005-02-01 Institut National D'optique Process for making microdevice with movable microplatform
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
EP2270597B1 (de) * 2003-04-09 2017-11-01 Nikon Corporation Belichtungsmethode und -apparat sowie Methode zur Herstellung einer Vorrichtung
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
EP1636628A4 (de) * 2003-06-02 2009-04-15 Miradia Inc Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TWI232333B (en) * 2003-09-03 2005-05-11 Prime View Int Co Ltd Display unit using interferometric modulation and manufacturing method thereof
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
TWI569308B (zh) 2003-10-28 2017-02-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
TWI385414B (zh) * 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
WO2005072396A2 (en) * 2004-01-27 2005-08-11 Displaytech, Inc. Phase masks for use in holographic data storage
TWI395068B (zh) 2004-01-27 2013-05-01 尼康股份有限公司 光學系統、曝光裝置以及曝光方法
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
TWI609410B (zh) 2004-02-06 2017-12-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法以及元件製造方法
WO2005081070A1 (en) * 2004-02-25 2005-09-01 Micronic Laser Systems Ab Methods for exposing patterns and emulating masks in optical maskless lithography
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
CA2464207C (en) * 2004-04-14 2011-03-29 Institut National D'optique Light modulating microdevice
CA2563817C (en) 2004-04-23 2018-07-10 Yoram Palti Treating a tumor or the like with electric fields at different frequencies
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) * 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) * 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
EP2246726B1 (de) 2004-07-29 2013-04-03 QUALCOMM MEMS Technologies, Inc. System und Verfahren zum mikroelektromechanischen Betrieb eines interferometrischen Modulators
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
JP2006119601A (ja) * 2004-09-24 2006-05-11 Canon Inc 光変調素子及びそれを利用した光学装置
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US20060065366A1 (en) * 2004-09-27 2006-03-30 Cummings William J Portable etch chamber
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7460246B2 (en) 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US20060066596A1 (en) * 2004-09-27 2006-03-30 Sampsell Jeffrey B System and method of transmitting video data
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7420728B2 (en) 2004-09-27 2008-09-02 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
TW200628833A (en) * 2004-09-27 2006-08-16 Idc Llc Method and device for multistate interferometric light modulation
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US7561323B2 (en) * 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US20060067650A1 (en) * 2004-09-27 2006-03-30 Clarence Chui Method of making a reflective display device using thin film transistor production techniques
US20060065622A1 (en) * 2004-09-27 2006-03-30 Floyd Philip D Method and system for xenon fluoride etching with enhanced efficiency
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US20060066594A1 (en) * 2004-09-27 2006-03-30 Karen Tyger Systems and methods for driving a bi-stable display element
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US20060066586A1 (en) * 2004-09-27 2006-03-30 Gally Brian J Touchscreens for displays
US20060103643A1 (en) * 2004-09-27 2006-05-18 Mithran Mathew Measuring and modeling power consumption in displays
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US20060132383A1 (en) * 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7807488B2 (en) * 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US20060077126A1 (en) * 2004-09-27 2006-04-13 Manish Kothari Apparatus and method for arranging devices into an interconnected array
JP4492952B2 (ja) * 2004-12-03 2010-06-30 株式会社リコー 光偏向装置、光偏向アレー、光学システム、画像投影表示装置および画像形成装置
TW200923418A (en) * 2005-01-21 2009-06-01 Nikon Corp Exposure device, exposure method, fabricating method of device, exposure system, information collecting device, and measuring device
TW200628877A (en) * 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7230749B2 (en) * 2005-02-18 2007-06-12 Hewlett-Packard Development Company, L.P. Light blocking electrical interconnect
US7400382B2 (en) 2005-04-28 2008-07-15 Asml Holding N.V. Light patterning device using tilting mirrors in a superpixel form
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ic 및 디스플레이 패널 구성
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
CA2507177C (en) * 2005-05-13 2012-04-24 Institut National D'optique Image projector with flexible reflective analog modulator
US20060277486A1 (en) * 2005-06-02 2006-12-07 Skinner David N File or user interface element marking system
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
JP2009503564A (ja) 2005-07-22 2009-01-29 クアルコム,インコーポレイテッド Memsデバイスのための支持構造、およびその方法
WO2007014022A1 (en) * 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
KR20080040715A (ko) * 2005-07-22 2008-05-08 콸콤 인코포레이티드 Mems 장치를 위한 지지 구조물 및 그 방법들
EP2495212A3 (de) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
JP2009509786A (ja) 2005-09-30 2009-03-12 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Mems装置及びmems装置における相互接続
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7978388B2 (en) 2006-01-12 2011-07-12 Nippon Telegraph And Telephone Corporation Mirror device and mirror device manufacturing method incorporating a collision preventive structure
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7603001B2 (en) * 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US20070249078A1 (en) * 2006-04-19 2007-10-25 Ming-Hau Tung Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7733557B2 (en) * 2006-04-24 2010-06-08 Micron Technology, Inc. Spatial light modulators with changeable phase masks for use in holographic data storage
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
US20080043315A1 (en) * 2006-08-15 2008-02-21 Cummings William J High profile contacts for microelectromechanical systems
WO2008045207A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Light guide
EP2366945A1 (de) 2006-10-06 2011-09-21 Qualcomm Mems Technologies, Inc. Beleuchtungseinrichtung einer Anzeigevorrichtung mit darin integrierter Struktur zur Erzeugung optischer Verluste
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
DE102006057568A1 (de) * 2006-11-28 2008-05-29 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat und Verfahren zu seiner Herstellung
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US20080212152A1 (en) * 2007-03-01 2008-09-04 Scott Lerner System and method for encryption of a holographic image
US20080247017A1 (en) * 2007-04-04 2008-10-09 Wu Kuohua Angus System and method for printing a hologram
DE102007021774B4 (de) * 2007-04-30 2013-01-17 Seereal Technologies S.A. Lichtmodulator zur Darstellung komplexwertiger Informationen
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8068268B2 (en) * 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7570415B2 (en) * 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8451427B2 (en) 2007-09-14 2013-05-28 Nikon Corporation Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
US20090091730A1 (en) * 2007-10-03 2009-04-09 Nikon Corporation Spatial light modulation unit, illumination apparatus, exposure apparatus, and device manufacturing method
JP5267029B2 (ja) * 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
CN101681125B (zh) * 2007-10-16 2013-08-21 株式会社尼康 照明光学系统、曝光装置以及元件制造方法
WO2009050976A1 (en) 2007-10-16 2009-04-23 Nikon Corporation Illumination optical system, exposure apparatus, and device manufacturing method
WO2009050294A2 (en) * 2007-10-19 2009-04-23 Seereal Technologies S.A. Light modulating device
US7988297B2 (en) 2007-10-19 2011-08-02 Look Dynamics, Inc. Non-rigidly coupled, overlapping, non-feedback, optical systems for spatial filtering of fourier transform optical patterns and image shape content characterization
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
JP2010004008A (ja) * 2007-10-31 2010-01-07 Nikon Corp 光学ユニット、照明光学装置、露光装置、露光方法、およびデバイス製造方法
US9116346B2 (en) * 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
WO2009060745A1 (ja) 2007-11-06 2009-05-14 Nikon Corporation 制御装置、露光方法、及び露光装置
JP5582287B2 (ja) * 2007-11-06 2014-09-03 株式会社ニコン 照明光学装置及び露光装置
JP5326259B2 (ja) * 2007-11-08 2013-10-30 株式会社ニコン 照明光学装置、露光装置、およびデバイス製造方法
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
TW200929333A (en) * 2007-12-17 2009-07-01 Nikon Corp Illumination optical system, exposure apparatus, and device manufacturing method
WO2009078223A1 (ja) 2007-12-17 2009-06-25 Nikon Corporation 空間光変調ユニット、照明光学系、露光装置、およびデバイス製造方法
CA2715283A1 (en) * 2008-02-11 2009-08-20 Qualcomm Mems Technologies, Inc. Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same
EP2264511A4 (de) * 2008-04-11 2011-05-04 Nikon Corp Räumliche lichtmodulationseinheit, optisches beleuchtungssystem, ausrichtvorrichtung und bauelementeherstellungsverfahren
WO2009130603A2 (en) 2008-04-24 2009-10-29 Micronic Laser Systems Ab Spatial light modulator with structured mirror surfaces
CN101910817B (zh) 2008-05-28 2016-03-09 株式会社尼康 照明光学系统、曝光装置以及器件制造方法
WO2010024106A1 (ja) * 2008-08-28 2010-03-04 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法
US7864403B2 (en) * 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
KR20120030460A (ko) * 2009-05-29 2012-03-28 퀄컴 엠이엠스 테크놀로지스, 인크. 조명장치 및 그의 제조방법
US20110037962A1 (en) * 2009-08-17 2011-02-17 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
WO2011078070A1 (ja) 2009-12-23 2011-06-30 株式会社ニコン 空間光変調ユニット、照明光学系、露光装置、およびデバイス製造方法
WO2011102109A1 (ja) 2010-02-20 2011-08-25 株式会社ニコン 光源最適化方法、露光方法、デバイス製造方法、プログラム、露光装置、リソグラフィシステム、及び光源評価方法、並びに光源変調方法
US20110205519A1 (en) * 2010-02-25 2011-08-25 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
JP2013524287A (ja) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 電気機械デバイスの機械層及びその形成方法
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
KR101964407B1 (ko) 2010-09-27 2019-04-01 가부시키가이샤 니콘 공간 광변조기의 구동 방법, 노광용 패턴의 생성 방법, 노광 방법, 및 노광 장치
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US10120283B2 (en) 2011-06-06 2018-11-06 Nikon Corporation Illumination method, illumination optical device, and exposure device
US9599905B2 (en) 2011-06-07 2017-03-21 Nikon Corporation Illumination optical system, exposure apparatus, device production method, and light polarization unit
TWI652508B (zh) 2011-06-13 2019-03-01 尼康股份有限公司 照明方法
WO2013061858A1 (ja) 2011-10-24 2013-05-02 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法
EP2806451B1 (de) 2012-01-18 2023-01-25 Nikon Corporation Ansteuerverfahren für einen raumlichtmodulator, verfahren zum erzeugen eines belichtungsmusters sowie belichtungsverfahren und -vorrichtung
US20130194651A1 (en) * 2012-01-30 2013-08-01 Light Field Corporation Full Color Phase-Only Spatial Light Modulator for Holographic Video Display System
DE102012206612A1 (de) * 2012-04-23 2013-10-24 Carl Zeiss Smt Gmbh Optisches Bauelement zur Führung eines Strahlungsbündels
JPWO2013164997A1 (ja) 2012-05-02 2015-12-24 株式会社ニコン 瞳輝度分布の評価方法および改善方法、照明光学系およびその調整方法、露光装置、露光方法、並びにデバイス製造方法
US9703085B2 (en) 2013-11-22 2017-07-11 Nikon Corporation Catadioptric imaging systems for digital scanner
US9638906B2 (en) 2013-11-22 2017-05-02 Nikon Corporation Catadioptric imaging systems for digital scanner
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
EP3685320A4 (de) 2017-09-20 2021-06-16 Look Dynamics, Inc. Photonisches neuronales netzwerksystem
US10831018B2 (en) 2017-12-08 2020-11-10 Texas Instruments Incorporated Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator
GB2569206B (en) * 2018-05-25 2019-12-04 Dualitas Ltd A method of displaying a hologram on a display device comprising pixels
US11256083B2 (en) 2018-12-27 2022-02-22 Texas Instruments Incorporated MEMS electrostatic actuator with linearized displacements
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633427A (en) * 1984-06-29 1986-12-30 The United States Of America As Represented By The Secretary Of The Navy Advanced cube processor
US4710732A (en) * 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4800519A (en) * 1986-03-05 1989-01-24 Hughes Aircraft Company Optical data processing systems and methods for matrix inversion, multiplication, and addition
US5151814A (en) * 1987-08-19 1992-09-29 Hughes Aircraft Company Phased array for optical beam control
US5024508A (en) * 1989-04-04 1991-06-18 United States Of America As Represented By The Secretary Of The Air Force Amplitude encoded phase-only filters for optical correlators
US4954789A (en) * 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5121231A (en) * 1990-04-06 1992-06-09 University Of Southern California Incoherent/coherent multiplexed holographic recording for photonic interconnections and holographic optical elements
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5148157A (en) * 1990-09-28 1992-09-15 Texas Instruments Incorporated Spatial light modulator with full complex light modulation capability
US5136413A (en) * 1990-11-05 1992-08-04 Litel Instruments Imaging and illumination system with aspherization and aberration correction by phase steps
US5148496A (en) * 1990-12-24 1992-09-15 Litton Systems, Inc. Optical correlator with symmetric reflective optics
US5214534A (en) * 1991-06-19 1993-05-25 The United States Of America As Represented By The Secretary Of The Air Force Coding intensity images as phase-only images for use in an optical correlator
US5287215A (en) * 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
US5187487A (en) * 1992-03-05 1993-02-16 General Electric Company Compact wide tunable bandwidth phased array antenna controller
US5276636A (en) * 1992-09-14 1994-01-04 Cohn Robert W Method and apparatus for adaptive real-time optical correlation using phase-only spatial light modulators and interferometric detection

Also Published As

Publication number Publication date
KR100307475B1 (ko) 2001-11-03
EP0568801B1 (de) 1997-06-18
US5606441A (en) 1997-02-25
JPH06281869A (ja) 1994-10-07
KR930022124A (ko) 1993-11-23
DE69311628D1 (de) 1997-07-24
TW222022B (de) 1994-04-01
EP0568801A1 (de) 1993-11-10
KR100305157B1 (ko) 2001-11-22
US5523881A (en) 1996-06-04
US5312513A (en) 1994-05-17

Similar Documents

Publication Publication Date Title
DE69311628D1 (de) Verfahren zur multiplen Phasenlichtmodulation und zugehörige Systeme oder Geräte
DE69318944D1 (de) Lagebestimmungssystem und Verfahren
DE69428400T2 (de) Verfahren zur Konfigurationsverwaltung
DE69422575D1 (de) System zur Erklärung von Austellungsstücken
DE69215818T2 (de) Verfahren zur sicheren Zugangskontrolle
DE69327562T2 (de) Kommunikationssystem und Verfahren
DE69314334D1 (de) Vorrichtung zur osteosynthese von rückenwirbeln
DE69405408T2 (de) Objektorientiertes system und verfahren zur hardwarekonfiguration
DE69424744T2 (de) Verfahren und System zur Verwaltung von Komponentenverbindungen
DE69311039T2 (de) Verfahren zur Positionsermittlung
DE69311615T2 (de) Kühlungssystem zur Kühlung von elektronischen Vorrichtungen
DE69321357T2 (de) Steuerbares system zur zahnradprüfung
DE69127453T2 (de) Verfahren und system mit verringerter fernzugriffszeit
DE69321908T2 (de) Athermalisiertes optisches System und Verfahren
DE69430952T2 (de) Wiederverwendbares klebebandsystem
DE69315613D1 (de) Verfahren zur Verwaltung von Rundfunkübertragungen
DE9408400U1 (de) Fixiervorrichtung zur variablen Festlegung von Ladegut
DE69429476T2 (de) System zur automatischen Frequenzregelung
DE69332496T2 (de) Verfahren zur Dielektrikim-Entfernung
DE59310129D1 (de) Verfahren zur digitalen Modulation
DE69423085D1 (de) Geräte zur Übertragung von Information
DE69329166T2 (de) Silikonadditivsysteme
DE69404368D1 (de) Einrichtung zur Frequenzteilung
DE59209730D1 (de) Verfahren zur Überwachung von Gelände
DE69311802D1 (de) Verfahren zur metallbehandlung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee