DE69313351T2 - Gasförderer - Google Patents

Gasförderer

Info

Publication number
DE69313351T2
DE69313351T2 DE69313351T DE69313351T DE69313351T2 DE 69313351 T2 DE69313351 T2 DE 69313351T2 DE 69313351 T DE69313351 T DE 69313351T DE 69313351 T DE69313351 T DE 69313351T DE 69313351 T2 DE69313351 T2 DE 69313351T2
Authority
DE
Germany
Prior art keywords
gas conveyor
conveyor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69313351T
Other languages
English (en)
Other versions
DE69313351D1 (de
Inventor
Munenori Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69313351D1 publication Critical patent/DE69313351D1/de
Application granted granted Critical
Publication of DE69313351T2 publication Critical patent/DE69313351T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
DE69313351T 1992-05-28 1993-03-12 Gasförderer Expired - Fee Related DE69313351T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4162225A JP2703694B2 (ja) 1992-05-28 1992-05-28 ガス供給装置

Publications (2)

Publication Number Publication Date
DE69313351D1 DE69313351D1 (de) 1997-10-02
DE69313351T2 true DE69313351T2 (de) 1998-03-12

Family

ID=15750353

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69313351T Expired - Fee Related DE69313351T2 (de) 1992-05-28 1993-03-12 Gasförderer

Country Status (4)

Country Link
US (1) US5354516A (de)
EP (1) EP0572108B1 (de)
JP (1) JP2703694B2 (de)
DE (1) DE69313351T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06295862A (ja) * 1992-11-20 1994-10-21 Mitsubishi Electric Corp 化合物半導体製造装置及び有機金属材料容器
TW338174B (en) * 1995-01-06 1998-08-11 Tokyo Electron Co Ltd Apparatus for supplying a treatment material
NL1003973C2 (nl) * 1996-09-06 1998-03-09 Berkin Bv Werkwijze voor het momentaan identificeren van een gas- of vloeistofstroom en inrichting voor het uitvoeren van de werkwijze.
CA2318771A1 (en) * 1998-01-26 1999-07-29 Scimed Life Systems, Inc. Catheter assembly with distal end inductive coupler and embedded transmission line
US6810201B1 (en) * 1998-03-06 2004-10-26 Samsung Electronics Co., Ltd. Storage medium storing catalog information and apparatus and method for recording and/or playing back catalog information
US6136725A (en) * 1998-04-14 2000-10-24 Cvd Systems, Inc. Method for chemical vapor deposition of a material on a substrate
US6296711B1 (en) 1998-04-14 2001-10-02 Cvd Systems, Inc. Film processing system
CA2328295A1 (en) 1998-04-14 1999-10-21 Jack P. Salerno Film deposition system
DE10059386A1 (de) * 2000-11-30 2002-06-13 Aixtron Ag Verfahren und Vorrichtung zur dosierten Abgabe kleiner Flüssigkeitsvolumenströme
US7186385B2 (en) 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
GB0227109D0 (en) * 2002-11-20 2002-12-24 Air Prod & Chem Volume flow controller
KR20070005547A (ko) * 2003-09-22 2007-01-10 코닌클리케 필립스 일렉트로닉스 엔.브이. 디스플레이 모니터를 위한 좌표 검출 시스템
US20060113687A1 (en) * 2004-11-29 2006-06-01 Mark Castellano Remote control HVAC air freshener
US7775508B2 (en) 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
JP4525728B2 (ja) * 2007-10-24 2010-08-18 トヨタ自動車株式会社 ガス残量表示制御装置、ガス残量表示装置、および、ガス残量表示制御方法
KR100962044B1 (ko) * 2007-12-06 2010-06-08 성균관대학교산학협력단 저유전 플라즈마 중합체 박막 및 그 제조 방법
US8146896B2 (en) 2008-10-31 2012-04-03 Applied Materials, Inc. Chemical precursor ampoule for vapor deposition processes
CN102326129A (zh) * 2009-03-04 2012-01-18 株式会社堀场Stec 气体供给装置
US20130305807A1 (en) * 2012-05-16 2013-11-21 Hon Hai Precision Industry Co., Ltd. Gas detector test system and apparatus
JP2014145115A (ja) * 2013-01-29 2014-08-14 Tokyo Electron Ltd 原料ガス供給装置、成膜装置、流量の測定方法及び記憶媒体
JP6135475B2 (ja) * 2013-11-20 2017-05-31 東京エレクトロン株式会社 ガス供給装置、成膜装置、ガス供給方法及び記憶媒体
CN109724667B (zh) * 2017-10-30 2022-08-05 诺信公司 容器内液体体积百分比的检测方法和系统以及具有该系统的分配器
CN110836946B (zh) * 2019-11-19 2024-03-29 中国科学技术大学 一种可定量及可控制蒸气浓度的鼓泡装置及浓度测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033171A (en) * 1975-02-14 1977-07-05 The Foxboro Company Pneumatic detector for chromatographic analyzer
US4276243A (en) * 1978-12-08 1981-06-30 Western Electric Company, Inc. Vapor delivery control system and method
US4436674A (en) * 1981-07-30 1984-03-13 J.C. Schumacher Co. Vapor mass flow control system
SU1089460A1 (ru) * 1982-07-28 1984-04-30 Предприятие П/Я В-8495 Устройство дл измерени и регулировани количества реагента в газовой смеси
JPS611014A (ja) * 1985-05-22 1986-01-07 Hitachi Ltd 半導体プロセス装置
JPH0222472A (ja) * 1988-07-12 1990-01-25 Nec Corp 気相成長用液体原料ガス供給装置
JPH0642938B2 (ja) * 1989-04-10 1994-06-08 日本タイラン株式会社 気化ガスの流量制御装置
JPH0784662B2 (ja) * 1989-12-12 1995-09-13 アプライドマテリアルズジャパン株式会社 化学的気相成長方法とその装置

Also Published As

Publication number Publication date
JPH05329357A (ja) 1993-12-14
DE69313351D1 (de) 1997-10-02
US5354516A (en) 1994-10-11
EP0572108A3 (en) 1994-09-21
JP2703694B2 (ja) 1998-01-26
EP0572108A2 (de) 1993-12-01
EP0572108B1 (de) 1997-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee