DE69320207T2 - Dreiachsenmessaufnehmer für drehgeschwindigkeit und beschleunigung - Google Patents
Dreiachsenmessaufnehmer für drehgeschwindigkeit und beschleunigungInfo
- Publication number
- DE69320207T2 DE69320207T2 DE69320207T DE69320207T DE69320207T2 DE 69320207 T2 DE69320207 T2 DE 69320207T2 DE 69320207 T DE69320207 T DE 69320207T DE 69320207 T DE69320207 T DE 69320207T DE 69320207 T2 DE69320207 T2 DE 69320207T2
- Authority
- DE
- Germany
- Prior art keywords
- acceleration
- axis sensor
- turning speed
- turning
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G1/00—Hot gas positive-displacement engine plants
- F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
- F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
- F02G1/044—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines having at least two working members, e.g. pistons, delivering power output
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
- F02G1/00—Hot gas positive-displacement engine plants
- F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
- F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
- F02G1/044—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines having at least two working members, e.g. pistons, delivering power output
- F02G1/0445—Engine plants with combined cycles, e.g. Vuilleumier
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L37/00—Couplings of the quick-acting type
- F16L37/24—Couplings of the quick-acting type in which the connection is made by inserting one member axially into the other and rotating it to a limited extent, e.g. with bayonet action
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/987,906 US5396797A (en) | 1991-02-08 | 1992-12-08 | Triaxial angular rate and acceleration sensor |
PCT/US1993/011923 WO1994014076A1 (en) | 1992-12-08 | 1993-12-08 | Triaxial angular rate and acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69320207D1 DE69320207D1 (de) | 1998-09-10 |
DE69320207T2 true DE69320207T2 (de) | 1999-01-14 |
Family
ID=25533682
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69320207T Expired - Fee Related DE69320207T2 (de) | 1992-12-08 | 1993-12-08 | Dreiachsenmessaufnehmer für drehgeschwindigkeit und beschleunigung |
DE69331850T Expired - Fee Related DE69331850T2 (de) | 1992-12-08 | 1993-12-08 | Dreiachsenmessaufnehmer für Drehgeschwindigkeit und Beschleunigung |
DE69332294T Expired - Fee Related DE69332294T2 (de) | 1992-12-08 | 1993-12-08 | Beschleunigungssensor |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69331850T Expired - Fee Related DE69331850T2 (de) | 1992-12-08 | 1993-12-08 | Dreiachsenmessaufnehmer für Drehgeschwindigkeit und Beschleunigung |
DE69332294T Expired - Fee Related DE69332294T2 (de) | 1992-12-08 | 1993-12-08 | Beschleunigungssensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US5396797A (de) |
EP (3) | EP0674767B1 (de) |
JP (1) | JPH08504275A (de) |
CA (1) | CA2151232A1 (de) |
DE (3) | DE69320207T2 (de) |
WO (1) | WO1994014076A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007054505B4 (de) * | 2007-11-15 | 2016-12-22 | Robert Bosch Gmbh | Drehratensensor |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6295870B1 (en) * | 1991-02-08 | 2001-10-02 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
US5487015A (en) * | 1993-09-13 | 1996-01-23 | Rockwell International Corporation | Self-oscillating driver circuit for a quartz resonator of an angular rate sensor |
US5987986A (en) * | 1994-07-29 | 1999-11-23 | Litton Systems, Inc. | Navigation grade micromachined rotation sensor system |
DE4442033C2 (de) * | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
US5691472A (en) * | 1995-05-30 | 1997-11-25 | Alliedsignal, Inc. | Non-gimballed angular rate sensor |
GB2301671B (en) * | 1995-05-30 | 1999-10-13 | Allied Signal Inc | Angular rate sensor electronic balance |
GB2301669B (en) * | 1995-05-30 | 1999-11-10 | Allied Signal Inc | Angular rate sensor misalignment correction |
US5635638A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Coupling for multiple masses in a micromachined device |
US5635640A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
DE19526903B4 (de) * | 1995-07-22 | 2005-03-10 | Bosch Gmbh Robert | Drehratensensor |
DE19530007C2 (de) * | 1995-08-16 | 1998-11-26 | Bosch Gmbh Robert | Drehratensensor |
EP0762128B1 (de) * | 1995-09-04 | 2000-05-17 | Murata Manufacturing Co., Ltd. | Beschleunigungsdetektionsvorrichtung |
FR2739190B1 (fr) * | 1995-09-26 | 1997-11-28 | Onera (Off Nat Aerospatiale) | Transducteur monolithique d'acceleration |
US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
US6122961A (en) | 1997-09-02 | 2000-09-26 | Analog Devices, Inc. | Micromachined gyros |
DE19750350C1 (de) * | 1997-11-13 | 1999-08-05 | Univ Dresden Tech | Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik |
WO2001025798A2 (en) | 1999-10-05 | 2001-04-12 | L-3 Communications Corporation | A method for improving the performance of micromachined devices |
US6873931B1 (en) | 2000-10-10 | 2005-03-29 | Csi Technology, Inc. | Accelerometer based angular position sensor |
DE10064170C2 (de) * | 2000-12-22 | 2002-11-07 | Stn Atlas Elektronik Gmbh | Vorrichtung zur Messung von beschleunigung und/oder Winkelgeschwindigkeit |
DE10108196A1 (de) * | 2001-02-21 | 2002-10-24 | Bosch Gmbh Robert | Drehratensensor |
DE10108198A1 (de) | 2001-02-21 | 2002-09-12 | Bosch Gmbh Robert | Drehratensensor |
DE10108197A1 (de) | 2001-02-21 | 2002-09-12 | Bosch Gmbh Robert | Drehratensensor |
EP1335232A1 (de) * | 2002-02-07 | 2003-08-13 | Corning Incorporated | Optische Schaltvorrichtungen und Verfahren zu ihrer Herstellung |
US6725719B2 (en) * | 2002-04-17 | 2004-04-27 | Milli Sensor Systems And Actuators, Inc. | MEMS-integrated inertial measurement units on a common substrate |
FR2869998B1 (fr) * | 2004-05-05 | 2006-07-07 | Onera (Off Nat Aerospatiale) | Dispositif de decouplage mecanique pour capteur vibrant differentiel monolithique |
FI116543B (fi) * | 2004-12-31 | 2005-12-15 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
US7222533B2 (en) * | 2005-06-06 | 2007-05-29 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
US7240552B2 (en) * | 2005-06-06 | 2007-07-10 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
US7228738B2 (en) * | 2005-06-06 | 2007-06-12 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
US7444883B2 (en) * | 2005-12-22 | 2008-11-04 | Honeywell International Inc. | Vibrating beam force transducer |
JP4687577B2 (ja) | 2006-06-16 | 2011-05-25 | ソニー株式会社 | 慣性センサ |
US20080046144A1 (en) * | 2006-07-25 | 2008-02-21 | Barlage Jerold L | System and method for measuring relative wheel velocity |
US20090265671A1 (en) * | 2008-04-21 | 2009-10-22 | Invensense | Mobile devices with motion gesture recognition |
US8462109B2 (en) | 2007-01-05 | 2013-06-11 | Invensense, Inc. | Controlling and accessing content using motion processing on mobile devices |
US8250921B2 (en) | 2007-07-06 | 2012-08-28 | Invensense, Inc. | Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
US7934423B2 (en) | 2007-12-10 | 2011-05-03 | Invensense, Inc. | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics |
US8952832B2 (en) * | 2008-01-18 | 2015-02-10 | Invensense, Inc. | Interfacing application programs and motion sensors of a device |
US7548318B2 (en) | 2007-04-13 | 2009-06-16 | Custom Sensors & Technologies, Inc. | Dithering mechanism for eliminating zero-rate bias in a gyroscope |
US7505140B2 (en) | 2007-04-13 | 2009-03-17 | Custom Sensors & Technologies, Inc. | Indexing dithering mechanism and method |
DE102007035806B4 (de) * | 2007-07-31 | 2011-03-17 | Sensordynamics Ag | Mikromechanischer Drehratensensor |
US9140637B2 (en) | 2011-03-31 | 2015-09-22 | Mihaly Kis, JR. | Method and apparatus for simulating head impacts for helmet testing |
IL214294A0 (en) * | 2011-07-26 | 2011-09-27 | Rafael Advanced Defense Sys | Surface micro-machined switching device |
US9128116B2 (en) * | 2013-07-05 | 2015-09-08 | Hti Ip, L.L.C. | Automatic alignment of a vehicle three-axes accelerometer |
RU2553422C1 (ru) * | 2014-03-11 | 2015-06-10 | Закрытое акционерное общество "Вибро-прибор" | Способ регулировки коэффициента преобразования пьезоэлектрического акселерометра |
CN105429607B (zh) * | 2014-09-16 | 2020-12-29 | 精工爱普生株式会社 | 振动装置、电子设备以及移动体 |
CN104597289B (zh) * | 2014-12-18 | 2017-07-04 | 歌尔股份有限公司 | 加速度传感器三轴同时测试的测试方法 |
CN107092038B (zh) * | 2017-06-19 | 2019-02-01 | 华中科技大学 | 一种mems重力仪 |
KR102134506B1 (ko) * | 2018-02-05 | 2020-07-16 | 한국건설기술연구원 | 실내외 연속 위치측정 시스템 |
US10895611B1 (en) * | 2018-03-23 | 2021-01-19 | Orbital Research Inc. | Self-calibrating fluxgate magnetometer and methods of using |
KR102526932B1 (ko) * | 2020-12-14 | 2023-04-28 | 한국생산기술연구원 | 외팔보부를 이용한 가속도계 |
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-
1992
- 1992-12-08 US US07/987,906 patent/US5396797A/en not_active Expired - Lifetime
-
1993
- 1993-12-08 JP JP6514368A patent/JPH08504275A/ja active Pending
- 1993-12-08 EP EP94903532A patent/EP0674767B1/de not_active Expired - Lifetime
- 1993-12-08 DE DE69320207T patent/DE69320207T2/de not_active Expired - Fee Related
- 1993-12-08 EP EP97122884A patent/EP0845676B1/de not_active Expired - Lifetime
- 1993-12-08 EP EP97122883A patent/EP0845675B1/de not_active Expired - Lifetime
- 1993-12-08 CA CA002151232A patent/CA2151232A1/en not_active Abandoned
- 1993-12-08 WO PCT/US1993/011923 patent/WO1994014076A1/en active IP Right Grant
- 1993-12-08 DE DE69331850T patent/DE69331850T2/de not_active Expired - Fee Related
- 1993-12-08 DE DE69332294T patent/DE69332294T2/de not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007054505B4 (de) * | 2007-11-15 | 2016-12-22 | Robert Bosch Gmbh | Drehratensensor |
US9593948B2 (en) | 2007-11-15 | 2017-03-14 | Robert Bosch Gmbh | Yaw-rate sensor |
US9593949B2 (en) | 2007-11-15 | 2017-03-14 | Robert Bosch Gmbh | Yaw-rate sensor |
US9689676B2 (en) | 2007-11-15 | 2017-06-27 | Robert Bosch Gmbh | Yaw-rate sensor |
Also Published As
Publication number | Publication date |
---|---|
EP0674767A1 (de) | 1995-10-04 |
DE69332294D1 (de) | 2002-10-17 |
EP0845676B1 (de) | 2002-09-11 |
DE69331850D1 (de) | 2002-05-29 |
DE69320207D1 (de) | 1998-09-10 |
JPH08504275A (ja) | 1996-05-07 |
DE69331850T2 (de) | 2003-01-02 |
EP0845675A3 (de) | 1998-12-23 |
CA2151232A1 (en) | 1994-06-23 |
EP0674767B1 (de) | 1998-08-05 |
DE69332294T2 (de) | 2003-04-17 |
EP0845676A3 (de) | 1998-12-23 |
US5396797A (en) | 1995-03-14 |
EP0845675B1 (de) | 2002-04-24 |
WO1994014076A1 (en) | 1994-06-23 |
EP0845675A2 (de) | 1998-06-03 |
EP0845676A2 (de) | 1998-06-03 |
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