DE69320699D1 - Stell- und Sensorsysteme - Google Patents

Stell- und Sensorsysteme

Info

Publication number
DE69320699D1
DE69320699D1 DE69320699T DE69320699T DE69320699D1 DE 69320699 D1 DE69320699 D1 DE 69320699D1 DE 69320699 T DE69320699 T DE 69320699T DE 69320699 T DE69320699 T DE 69320699T DE 69320699 D1 DE69320699 D1 DE 69320699D1
Authority
DE
Germany
Prior art keywords
housing
actuator
sensor systems
accelerated
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320699T
Other languages
English (en)
Other versions
DE69320699T2 (de
Inventor
Stephen C Jacobsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sarcos Group
Original Assignee
Sarcos Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos Group filed Critical Sarcos Group
Application granted granted Critical
Publication of DE69320699D1 publication Critical patent/DE69320699D1/de
Publication of DE69320699T2 publication Critical patent/DE69320699T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/002—Devices involving relative movement between electronbeam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K17/00—Use of the energy of nuclear particles in welding or related techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/24—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in magnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/483—Measuring temperature based on the expansion or contraction of a material the material being a solid using materials with a configuration memory, e.g. Ni-Ti alloys
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/133—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with piezoelectric counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/182—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by the machine tool function, e.g. thread cutting, cam making, tool direction control
    • G05B19/186—Generation of screw- or gearlike surfaces
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B1/00—Sensitive elements capable of producing movement or displacement for purposes not limited to measurement; Associated transmission mechanisms therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/162—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits the devices being mounted on two or more different substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H10N30/306—Cantilevers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69320699T 1992-06-12 1993-06-11 Stell- und Sensorsysteme Expired - Fee Related DE69320699T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/898,216 US5481184A (en) 1991-12-31 1992-06-12 Movement actuator/sensor systems

Publications (2)

Publication Number Publication Date
DE69320699D1 true DE69320699D1 (de) 1998-10-08
DE69320699T2 DE69320699T2 (de) 1999-01-21

Family

ID=25409116

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320699T Expired - Fee Related DE69320699T2 (de) 1992-06-12 1993-06-11 Stell- und Sensorsysteme

Country Status (6)

Country Link
US (10) US5481184A (de)
EP (2) EP0833163A1 (de)
JP (1) JP3824329B2 (de)
AT (1) ATE170662T1 (de)
CA (1) CA2097668C (de)
DE (1) DE69320699T2 (de)

Families Citing this family (106)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
US6027863A (en) * 1991-09-05 2000-02-22 Intratherapeutics, Inc. Method for manufacturing a tubular medical device
US6107004A (en) * 1991-09-05 2000-08-22 Intra Therapeutics, Inc. Method for making a tubular stent for use in medical applications
US5741429A (en) * 1991-09-05 1998-04-21 Cardia Catheter Company Flexible tubular device for use in medical applications
DE19539201C1 (de) * 1995-10-20 1996-11-21 Deutsche Forsch Luft Raumfahrt Schwenkantrieb
FR2745664B1 (fr) * 1996-02-29 1998-05-15 Figest Bv Moteur piezoelectrique a onde progressive
US5742113A (en) * 1996-05-07 1998-04-21 K Laser Technology, Inc. Device for tilt-free translation of one plate relative to a reference plate
US5941249A (en) * 1996-09-05 1999-08-24 Maynard; Ronald S. Distributed activator for a two-dimensional shape memory alloy
US6133547A (en) 1996-09-05 2000-10-17 Medtronic, Inc. Distributed activator for a two-dimensional shape memory alloy
US6072154A (en) 1996-09-05 2000-06-06 Medtronic, Inc. Selectively activated shape memory device
US6048581A (en) 1996-09-24 2000-04-11 Mcdonnell Douglas Corporation Elastic ground plane and method
KR100195879B1 (ko) * 1996-12-21 1999-06-15 정몽규 도어 글래스런 및 그 구동방법
US5967268A (en) * 1997-03-17 1999-10-19 Tenneco Automotive Inc. Temperature responsive damper
US6209824B1 (en) 1997-09-17 2001-04-03 The Boeing Company Control surface for an aircraft
SE9704312D0 (sv) * 1997-11-24 1997-11-24 Pacesetter Ab Sensing of heart contraction
US6063200A (en) * 1998-02-10 2000-05-16 Sarcos L.C. Three-dimensional micro fabrication device for filamentary substrates
US6024119A (en) * 1998-04-20 2000-02-15 The United States Of America As Represented By The Secretary Of The Navy Flow control system having actuated elastomeric membrane
US6275627B1 (en) 1998-09-25 2001-08-14 Corning Incorporated Optical fiber having an expanded mode field diameter and method of expanding the mode field diameter of an optical fiber
US6364496B1 (en) 1998-10-23 2002-04-02 Magna Mirror Systems, Inc. Shape memory alloy rearview mirror
US6151897A (en) * 1999-04-06 2000-11-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Shape memory alloy actuator
DE10026169C2 (de) * 1999-05-26 2003-06-05 Deutsch Zentr Luft & Raumfahrt Verwendung eines elastischen Konstruktionselements als Torsionsfeder
AU772107B2 (en) * 1999-08-12 2004-04-08 Perihelian, Llc Shape-memory alloy actuators and control methods
US6348788B1 (en) * 1999-09-28 2002-02-19 Rockwell Automation Technologies, Inc. High resolution current sensing apparatus
US6247678B1 (en) 1999-11-01 2001-06-19 Swagelok Company Shape memory alloy actuated fluid control valve
DE19956770A1 (de) * 1999-11-25 2001-06-07 Univ Muenchen Tech Positioniervorrichtung
US6576406B1 (en) 2000-06-29 2003-06-10 Sarcos Investments Lc Micro-lithographic method and apparatus using three-dimensional mask
US6534999B2 (en) 2000-11-16 2003-03-18 Measurement Specialties, Inc. Cable sensor
DE10156870A1 (de) * 2000-11-22 2002-07-11 Univ Ilmenau Tech Anordnung und Verfahren zur Erzeugung variabler Kennlinien von Antrieben
DE10225576B4 (de) * 2001-02-10 2007-05-16 Inter Control Koehler Hermann Thermisch gesteuerte Einrichtung zur Betätigung einer Ventilöffnung
ATE392551T1 (de) 2001-02-22 2008-05-15 Alfmeier Praez Ag Stellglied aus gedächtnismetall mit verbesserter temperaturregelung
US7280014B2 (en) * 2001-03-13 2007-10-09 Rochester Institute Of Technology Micro-electro-mechanical switch and a method of using and making thereof
US6791931B2 (en) * 2001-03-16 2004-09-14 Hewlett-Packard Development Company, L.P. Accelerometer using field emitter technology
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
AU2002323407A1 (en) * 2001-08-24 2003-03-10 University Of Virginia Patent Foundation Reversible shape memory multifunctional structural designs and method of using and making the same
DE20202297U1 (de) 2001-09-07 2002-08-29 Drei S Werk Praez Swerkzeuge G Flacher Aktor oder Sensor mit interner Vorspannung
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
WO2003038448A1 (en) * 2001-10-26 2003-05-08 Potter Michael D An accelerometer and methods thereof
US8127543B2 (en) * 2002-05-06 2012-03-06 Alfmeier Prazision Ag Baugruppen Und Systemlosungen Methods of manufacturing highly integrated SMA actuators
US6972659B2 (en) 2002-05-06 2005-12-06 Alfmeier Praezision Ag Reusable shape memory alloy activated latch
AU2003239367A1 (en) * 2002-05-06 2003-11-17 Nanomuscle, Inc. Actuator for two angular degrees of freedom
US7017345B2 (en) * 2002-05-06 2006-03-28 Alfmeier Prazision Ag Baugruppen And Systemlosungen High stroke, highly integrated SMA actuators
AU2003238823A1 (en) * 2002-05-30 2003-12-19 University Of Virginia Patent Foundation Active energy absorbing cellular metals and method of manufacturing and using the same
US6902549B2 (en) * 2002-07-01 2005-06-07 Koninklijke Philips Electronics, N.V. Fluid-advancing fiber
DE10307360A1 (de) * 2003-02-21 2004-10-07 Ceramics Gmbh & Co. Kg Dehnungssensor, insbesondere für einen piezokeramischen Biegewandler
US20040187864A1 (en) * 2003-03-24 2004-09-30 Cindet, Llc Inhalation device and method
AT412456B (de) * 2003-04-07 2005-03-25 Fronius Int Gmbh Nahtverfolgungssensor
KR20060005403A (ko) 2003-04-28 2006-01-17 나노머슬, 인크. 일체로 형성된 형상 기억 합금 액츄에이터를 갖는 유동제어 조립체
WO2004099730A2 (en) * 2003-05-02 2004-11-18 Alfmeier Präzision AG Baugruppen und Systemlösungen Gauge pointer with integrated shape memory alloy actuator
US7107842B2 (en) * 2003-05-10 2006-09-19 The Regents Of The University Of California Angular rate sensor using micro electromechanical haltere
US7211344B2 (en) * 2003-05-14 2007-05-01 The Gillette Company Fuel cell systems
WO2004110740A1 (en) * 2003-05-28 2004-12-23 University Of Virginia Patent Foundation Re- entrant cellular multifunctional structure for energy absorption and method of manufacturing and using the same
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
WO2005026592A2 (en) * 2003-09-05 2005-03-24 Alfmeier Präzision AG Baugruppen und Systemlösungen A system, method and apparatus for reducing frictional forces and for compensating shape memory alloy-actuated valves and valve systems at high temperatures
US7007540B2 (en) * 2003-10-31 2006-03-07 Honeywell International Inc. Methods and apparatus for conducting high g-force testing
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US7007914B2 (en) * 2004-05-14 2006-03-07 United States Gypsum Company Slurry mixer constrictor valve
JP4387987B2 (ja) * 2004-06-11 2009-12-24 株式会社オクテック 微小構造体の検査装置、微小構造体の検査方法および微小構造体の検査プログラム
GB2429196B (en) * 2004-06-11 2007-07-11 Ishida Seisakusho Display strip and package assembly
US7416534B2 (en) * 2004-06-22 2008-08-26 Boston Scientific Scimed, Inc. Medical device including actuator
CN1305644C (zh) * 2004-07-30 2007-03-21 哈尔滨工业大学 微驱动全解耦的宏微双驱动微小型机器人移动定位平台
US7185541B1 (en) * 2005-02-03 2007-03-06 The United States Of America As Represented By The Secretary Of The Army MEMS magnetic device and method
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
EP1955013B1 (de) * 2005-12-02 2018-10-10 059312 N.B. Inc. MESSEINRICHTUNG für FORM UND BESCHLEUNIGUNG, UND ENTSPRECHENDES VERFAHREN
US8360361B2 (en) 2006-05-23 2013-01-29 University Of Virginia Patent Foundation Method and apparatus for jet blast deflection
GB0624242D0 (en) * 2006-12-05 2007-01-10 Oliver Crispin Robotics Ltd Improvements in and relating to robotic arms
US7824270B2 (en) * 2007-01-23 2010-11-02 C-Flex Bearing Co., Inc. Flexible coupling
CA2681173C (en) * 2007-03-21 2013-11-12 The University Of Vermont And State Agricultural College Piezoelectric vibrational energy harvesting systems incorporating parametric bending mode energy harvesting
CZ303814B6 (cs) * 2007-09-21 2013-05-15 Ceské vysoké ucení technické v Praze, Prutový multiaxiální silový snímac
US7836760B2 (en) * 2007-10-23 2010-11-23 Saylor David J Method and device for the assessment of fluid collection networks
US7661313B2 (en) * 2007-11-05 2010-02-16 The United States Of America As Represented By The Secretary Of The Navy Acceleration strain transducer
US20090143844A1 (en) * 2007-11-29 2009-06-04 Gaymar Industries, Inc. Hose management for convective devices
ITBO20080504A1 (it) * 2008-08-05 2010-02-06 A M A S P A Metodo e dispositivo per controllare la posizione della lancetta di un indicatore
US20100227697A1 (en) * 2009-03-04 2010-09-09 C-Flex Bearing Co., Inc. Flexible coupling
US20100331919A1 (en) * 2009-06-30 2010-12-30 Boston Scientific Neuromodulation Corporation Moldable charger having hinged sections for charging an implantable pulse generator
US8260432B2 (en) * 2009-06-30 2012-09-04 Boston Scientific Neuromodulation Corporation Moldable charger with shape-sensing means for an implantable pulse generator
US9399131B2 (en) * 2009-06-30 2016-07-26 Boston Scientific Neuromodulation Corporation Moldable charger with support members for charging an implantable pulse generator
US20100331918A1 (en) * 2009-06-30 2010-12-30 Boston Scientific Neuromodulation Corporation Moldable charger with curable material for charging an implantable pulse generator
JP2011085514A (ja) * 2009-10-16 2011-04-28 Hitachi Cable Ltd 棒状体の荷重測定センサ及び荷重測定システム
WO2011050330A2 (en) 2009-10-22 2011-04-28 Coolsystems, Inc. Therapeutic wrap
JPWO2011055750A1 (ja) * 2009-11-09 2013-03-28 株式会社キッツ 回転アクチュエータ
GB2475890A (en) * 2009-12-04 2011-06-08 Ge Aviat Systems Ltd Shape memory torsion actuator
EP2420187B1 (de) * 2010-08-16 2013-02-13 Precision Bioinstrument LLC Individuell einstellbare Mehrkanalsysteme bei der In-Vivo-Aufzeichnung
CN102175892B (zh) * 2011-01-26 2013-05-01 边义祥 含芯压电棒多维加速度传感器及加速度测量方法
US9000656B2 (en) * 2011-03-15 2015-04-07 Qualcomm Mems Technologies, Inc. Microelectromechanical system device including a metal proof mass and a piezoelectric component
US10874466B2 (en) 2012-06-21 2020-12-29 Globus Medical, Inc. System and method for surgical tool insertion using multiaxis force and moment feedback
US10646280B2 (en) 2012-06-21 2020-05-12 Globus Medical, Inc. System and method for surgical tool insertion using multiaxis force and moment feedback
US9556858B2 (en) 2013-06-20 2017-01-31 Simmonds Precision Products, Inc. Rotational actuators
CN104314936B (zh) * 2014-09-02 2016-07-06 广州大学 一种检测水平轴或梁应变的光纤光栅传感器快速粘贴器
DE102014219516A1 (de) * 2014-09-26 2016-03-31 Siemens Aktiengesellschaft Optischer Stromwandler
RU2579642C1 (ru) * 2015-03-03 2016-04-10 Открытое акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Лазер с оптико-механическим затвором
RU2579548C1 (ru) * 2015-03-03 2016-04-10 Открытое акционерное общество "Научно-исследовательский институт "Полюс" им. М.Ф. Стельмаха" Лазер с модулированной добротностью резонатора
CH711008A1 (de) * 2015-04-30 2016-10-31 Kistler Holding Ag Kontaktkraft-Prüfvorrichtung, Verwendung einer solchen Kontaktkraft-Prüfvorrichtung und Verfahren zur Herstellung einer solchen Kontaktkraft-Prüfvorrichtung.
CN104858892B (zh) * 2015-06-11 2017-03-01 佛山市南海区广工大数控装备协同创新研究院 基于智能机械臂的模块化机器人
US10537863B2 (en) 2015-12-31 2020-01-21 United States Gypsum Company Constrictor valve with webbing, cementitious slurry mixing and dispensing assembly, and method for making cementitious product
JP6665723B2 (ja) * 2016-07-27 2020-03-13 株式会社デンソー アクチュエータ、センサ装置、及び、制御装置
DE102017204729B4 (de) * 2017-03-21 2019-01-10 Zf Friedrichshafen Ag Überlasterkennung bei einem Fahrwerksbauteil
JP2018159351A (ja) * 2017-03-23 2018-10-11 株式会社デンソー 可動装置
JP6794892B2 (ja) * 2017-03-23 2020-12-02 株式会社デンソー 可動装置
CN107830875B (zh) * 2017-09-14 2020-07-28 南京航空航天大学 一种形状可控的机器人仿生触须触觉传感器及检测方法
WO2019164768A1 (en) * 2018-02-20 2019-08-29 Lintec Of America, Inc. Untwisted artificial muscle
US10827246B1 (en) * 2019-07-23 2020-11-03 Bose Corporation Audio device
CN112894042B (zh) * 2021-01-25 2023-04-07 东风小康汽车有限公司重庆分公司 一种用于修复盒型件内的螺母脱焊的焊接方法
GB2608843B (en) * 2021-07-14 2024-02-14 Cambridge Mechatronics Ltd Rotary encoder
NL2032608B1 (en) * 2022-07-27 2024-02-05 Vdl Enabling Tech Group B V A positioning system for positioning an object within an XYZ-system of coordinates.

Family Cites Families (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US393132A (en) * 1888-11-20 Electric meter
US2130829A (en) * 1938-09-20 Electrical measuring instrument
US2722614A (en) * 1951-08-11 1955-11-01 Gulton Mfg Co Vibration and shock-responsive device
US2928069A (en) * 1954-10-13 1960-03-08 Gulton Ind Inc Transducer
US3234787A (en) * 1961-04-14 1966-02-15 Baldwin Lima Hamilton Corp Strain gage transducer with impedance means for compensating for the characteristic nonlinearity of the gage
US3415712A (en) * 1963-10-31 1968-12-10 Gen Electric Bimaterial thermosensitive element
US3228240A (en) * 1963-12-24 1966-01-11 Alfred N Ormond Linearization of load cells
US3304773A (en) * 1964-03-26 1967-02-21 Vernon L Rogallo Force transducer
US3363470A (en) * 1964-07-20 1968-01-16 Raphael O. Yavne Accelerometer
US3780817A (en) * 1969-02-28 1973-12-25 J Videon Weighing devices
US3663839A (en) * 1971-02-24 1972-05-16 Nasa Thermal motor
US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
US3914993A (en) 1973-06-25 1975-10-28 Us Interior Rigid testing machine
GB1490349A (en) * 1974-03-18 1977-11-02 Gooch & Co Ltd J Pinch valves
US4046005A (en) * 1976-06-14 1977-09-06 Measurement Systems, Incorporated Three axis joystick control
US4232265A (en) * 1978-04-17 1980-11-04 Smirnov Vladimir A Device for measuring intensity of magnetic or electromagnetic fields using strain gauges mounted on ferromagnetic plates
GB2065882A (en) * 1979-11-20 1981-07-01 Delta Materials Research Ltd Coated shape memory effect elements
US4281407A (en) * 1979-12-14 1981-07-28 Rca Corporation Surface acoustic wave pickup and recording device
FR2541775B1 (fr) * 1983-02-28 1985-10-04 Onera (Off Nat Aerospatiale) Accelerometres a suspension electrostatique
CH653369A5 (de) * 1983-03-14 1985-12-31 Bbc Brown Boveri & Cie Verbundwerkstoff in stab-, rohr-, band-, blech- oder plattenform mit reversiblen thermo-mechanischen eigenschaften und verfahren zu dessen herstellung.
DE3406059A1 (de) * 1983-07-27 1985-02-07 Siemens AG, 1000 Berlin und 8000 München Mehrkomponentenkraft- und -momentenmesskoerper mit dehnungsmessstreifen
JPS6062497A (ja) * 1983-09-14 1985-04-10 畑村　洋太郎 多軸力センサ
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4555955A (en) * 1984-01-27 1985-12-03 Eaton Corporation Combination loading transducer
DD222478A1 (de) * 1984-04-05 1985-05-22 Medizin Labortechnik Veb K Betaetigungsorgan fuer belueftungsklappen, -hauben und -schieber an fruehbeeten und gewaechshaeusern
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
JPS6226532A (ja) * 1985-07-19 1987-02-04 リチヤ−ド　エル．ジエンキンス アイソメトリツク制御装置
US4776844A (en) * 1986-05-02 1988-10-11 Olympus Optical Co., Ltd. Medical tube
US4660607A (en) * 1986-06-11 1987-04-28 American Sigma, Inc. Sensor controlled sampling apparatus and method
US5146129A (en) * 1986-12-01 1992-09-08 Canon Kabushiki Kaisha Vibration wave motor
DE3784903T2 (de) 1986-12-18 1993-06-24 Michael Anthony Smithard Lerngeraet.
US4744252A (en) * 1987-05-19 1988-05-17 The United States Of America As Represented By The United States Department Of Energy Triple-material stress-strain resistivity gage
SE8702613L (sv) * 1987-06-24 1988-12-25 Kaileg Ab Transportanordning
US4767973A (en) 1987-07-06 1988-08-30 Sarcos Incorporated Systems and methods for sensing position and movement
DE3801514A1 (de) * 1988-01-20 1989-08-03 Schmidt Feinmech Beschleunigungssensor und verfahren zu dessen herstellung
JP2614635B2 (ja) * 1988-04-12 1997-05-28 日立マクセル株式会社 電歪公転子及び単相超音波モータ
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
US5016481A (en) * 1989-04-03 1991-05-21 Sarcos Group Field-based movement sensor
US4964306A (en) 1989-04-03 1990-10-23 Sarcos Group Field-based movement sensor
JPH035128A (ja) * 1989-06-01 1991-01-10 Mitsubishi Heavy Ind Ltd 形状記憶部材
US5266801A (en) 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
FR2649208B1 (fr) * 1989-06-28 1991-10-11 Aerospatiale Capteur de chocs et dispositifs portant application de ce capteur
JPH03130577A (ja) * 1989-07-24 1991-06-04 Uingu Haisera:Kk 形状記憶合金の複合体
US5133379A (en) * 1990-01-31 1992-07-28 University Of Utah Research Foundation Servovalve apparatus for use in fluid systems
US5067512A (en) * 1990-01-31 1991-11-26 Sarcos Group Servovalve apparatus for use in fluid systems
JP3091766B2 (ja) * 1990-02-14 2000-09-25 エンデブコ・コーポレーション 表面取付け型圧電セラミツク式加速度計及びその製造方法
US5056370A (en) * 1990-07-19 1991-10-15 Wolfgang Maier Method and apparatus for testing a test piece
JPH0499963A (ja) * 1990-08-18 1992-03-31 Fujitsu Ltd 加速度センサ
DE69119715T2 (de) * 1990-11-29 1996-10-31 Tokin Corp Kreisel mit Rundstab als Piezovibrator
JP2607395B2 (ja) * 1990-12-06 1997-05-07 株式会社トーキン 加速度センサ
JP2607396B2 (ja) * 1990-12-06 1997-05-07 株式会社トーキン 加速度センサ
US5106455A (en) 1991-01-28 1992-04-21 Sarcos Group Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography
US5273622A (en) 1991-01-28 1993-12-28 Sarcos Group System for continuous fabrication of micro-structures and thin film semiconductor devices on elongate substrates
US5481184A (en) 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
US5269882A (en) 1991-01-28 1993-12-14 Sarcos Group Method and apparatus for fabrication of thin film semiconductor devices using non-planar, exposure beam lithography
US5270485A (en) 1991-01-28 1993-12-14 Sarcos Group High density, three-dimensional, intercoupled circuit structure
US5252870A (en) * 1991-03-01 1993-10-12 Jacobsen Stephen C Magnetic eccentric motion motor
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JPH0552572A (ja) * 1991-08-28 1993-03-02 Akai Electric Co Ltd 振動子の支持構造
JP2541891B2 (ja) * 1991-09-03 1996-10-09 龍 川邊 流体の流量制御方法及び制御装置
US5217037A (en) * 1991-11-26 1993-06-08 Apv Gaulin, Inc. Homogenizing apparatus having magnetostrictive actuator assembly
JP3118660B2 (ja) * 1991-11-28 2000-12-18 株式会社トーキン ２軸加速度センサ
US5672929A (en) 1992-03-03 1997-09-30 The Technology Partnership Public Limited Company Moving sensor using mechanical vibrations
JP3151927B2 (ja) * 1992-04-10 2001-04-03 株式会社村田製作所 加速度センサ
CH685648A5 (de) * 1992-10-23 1995-08-31 Kk Holding Ag Mehrkomponenten-Kraft- und Moment-Messanordnung.

Also Published As

Publication number Publication date
JPH077975A (ja) 1995-01-10
US6992474B2 (en) 2006-01-31
US6531861B1 (en) 2003-03-11
EP0833163A1 (de) 1998-04-01
CA2097668A1 (en) 1993-12-13
US20030222635A1 (en) 2003-12-04
US5747993A (en) 1998-05-05
EP0574022A2 (de) 1993-12-15
EP0574022B1 (de) 1998-09-02
EP0574022A3 (de) 1994-02-09
US20040221658A1 (en) 2004-11-11
US5933002A (en) 1999-08-03
CA2097668C (en) 2000-09-26
ATE170662T1 (de) 1998-09-15
US5744947A (en) 1998-04-28
US5769389A (en) 1998-06-23
US5747692A (en) 1998-05-05
JP3824329B2 (ja) 2006-09-20
DE69320699T2 (de) 1999-01-21
US6933715B2 (en) 2005-08-23
US5594330A (en) 1997-01-14
US5481184A (en) 1996-01-02

Similar Documents

Publication Publication Date Title
DE69320699T2 (de) Stell- und Sensorsysteme
EP1089011A3 (de) Aktive Schwingungskontrollevorrichtung
DE69327016D1 (de) Drosselklappen-Stellungssensorsystem
DE69222745T2 (de) Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor
PT101042A (pt) Sistema de vectores de expressao miogenicos
FR2674017B1 (fr) Dispositif de mesure de forme ou de position d'un objet.
DE69202113D1 (de) Temperaturunempfindliche Montage eines Beschleunigungssensors.
ES2141151T3 (es) Un aparato para poner en funcionamiento un dispositivo de seguridad.
FR2640557B1 (fr) Dispositif de commande electro-pneumatique d'embrayage
GB2274674A (en) Device for releasably engaging an object
KR910017190A (ko) 위치/이동 검출기
NO308051B1 (no) Mikromaskinert føleranordning
DE69001599D1 (de) Geraet zur wiederherstellung eines gliedes.
IT8947777A0 (it) Dispositivo di arresto di emergenza con comando a mezzo cavo
TW229271B (en) Sensor for detecting vibration and shock
PT89539A (pt) Sensor de direccao do escoamento do ar, que compreende um dispositivo electromagnetico de amortecimento e de posicionamento
DE69008138D1 (de) Pneumatischer Stellmotor mit Getriebe.
ATE85496T1 (de) Elektrische angelrolle.
ATE225484T1 (de) Rohrleitungsgerät
FR2695820B1 (fr) Dispositif capteur medico-chirurgical.
FR2670900B1 (fr) Capteur d'acceleration.
FR2701102B1 (fr) Dispositif autonome de lancement d'objet en milieu sous-marin.
FR2709718B1 (fr) Dispositif de commande de frein de stationnement à démultiplication de l'effort.
ATE148615T1 (de) Motorisch verstellbarer kleiderbügel
SU983440A1 (ru) Датчик контрол положени

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee