DE69321430D1 - Optischer Wellenleiter und dessen Herstellungsverfahren - Google Patents

Optischer Wellenleiter und dessen Herstellungsverfahren

Info

Publication number
DE69321430D1
DE69321430D1 DE69321430T DE69321430T DE69321430D1 DE 69321430 D1 DE69321430 D1 DE 69321430D1 DE 69321430 T DE69321430 T DE 69321430T DE 69321430 T DE69321430 T DE 69321430T DE 69321430 D1 DE69321430 D1 DE 69321430D1
Authority
DE
Germany
Prior art keywords
manufacturing process
optical waveguide
waveguide
optical
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69321430T
Other languages
English (en)
Other versions
DE69321430T2 (de
Inventor
Kazuo Eda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4180857A external-priority patent/JP2574602B2/ja
Priority claimed from JP4233391A external-priority patent/JP2574606B2/ja
Priority claimed from JP7661893A external-priority patent/JPH06289347A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69321430D1 publication Critical patent/DE69321430D1/de
Publication of DE69321430T2 publication Critical patent/DE69321430T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE69321430T 1992-07-08 1993-07-07 Optischer Wellenleiter und dessen Herstellungsverfahren Expired - Fee Related DE69321430T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4180857A JP2574602B2 (ja) 1992-07-08 1992-07-08 光導波路素子
JP4233391A JP2574606B2 (ja) 1992-09-01 1992-09-01 誘電体光導波路素子およびその製造方法
JP7661893A JPH06289347A (ja) 1993-04-02 1993-04-02 光導波路素子とその製造方法

Publications (2)

Publication Number Publication Date
DE69321430D1 true DE69321430D1 (de) 1998-11-12
DE69321430T2 DE69321430T2 (de) 1999-04-29

Family

ID=27302203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69321430T Expired - Fee Related DE69321430T2 (de) 1992-07-08 1993-07-07 Optischer Wellenleiter und dessen Herstellungsverfahren

Country Status (3)

Country Link
US (3) US5373579A (de)
EP (3) EP0818693A1 (de)
DE (1) DE69321430T2 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
US6002829A (en) 1992-03-23 1999-12-14 Minnesota Mining And Manufacturing Company Luminaire device
EP0616426B1 (de) * 1993-03-15 1998-09-16 Matsushita Electric Industrial Co., Ltd. Akustische Oberflächenwellenanordnung mit laminierter Struktur
JPH0736070A (ja) * 1993-06-28 1995-02-07 Pioneer Electron Corp 波長変換素子及びその製造方法
US5652674A (en) * 1994-08-31 1997-07-29 Matsushita Electric Industrial Co., Ltd. Method for manufacturing domain-inverted region, optical wavelength conversion device utilizing such domain-inverted region and method for fabricating such device
JP3432993B2 (ja) * 1996-03-29 2003-08-04 日本碍子株式会社 光導波路デバイスの製造方法
US5721801A (en) * 1996-12-17 1998-02-24 Texas Instruments Incorporated Membrane optical waveguide device and method of fabrication
GB2341454B (en) 1998-09-14 2003-01-29 Univ Southampton Optical waveguide and method of fabricating the same
US6389209B1 (en) * 1999-09-07 2002-05-14 Agere Systems Optoelectronics Guardian Corp. Strain free planar optical waveguides
US6984571B1 (en) 1999-10-01 2006-01-10 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6500694B1 (en) 2000-03-22 2002-12-31 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6902987B1 (en) 2000-02-16 2005-06-07 Ziptronix, Inc. Method for low temperature bonding and bonded structure
US6563133B1 (en) * 2000-08-09 2003-05-13 Ziptronix, Inc. Method of epitaxial-like wafer bonding at low temperature and bonded structure
GB2370409A (en) * 2000-12-14 2002-06-26 Bookham Technology Plc Integrated optical devices
US7082235B2 (en) * 2001-09-10 2006-07-25 California Institute Of Technology Structure and method for coupling light between dissimilar waveguides
US6839488B2 (en) * 2001-09-10 2005-01-04 California Institute Of Technology Tunable resonant cavity based on the field effect in semiconductors
US6917727B2 (en) * 2001-09-10 2005-07-12 California Institute Of Technology Strip loaded waveguide integrated with electronics components
WO2003034335A2 (en) * 2001-10-11 2003-04-24 Koninklijke Philips Electronics N.V. Method and apparatus for discriminating between different regions of an image
US7295742B2 (en) * 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
US7010208B1 (en) 2002-06-24 2006-03-07 Luxtera, Inc. CMOS process silicon waveguides
US7009750B1 (en) 2002-10-25 2006-03-07 Eclipse Energy Systems, Inc. Apparatus and methods for modulating refractive index
US7109092B2 (en) 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
CN100380178C (zh) * 2003-06-10 2008-04-09 日本电信电话株式会社 电光学调制元件
US7315679B2 (en) * 2004-06-07 2008-01-01 California Institute Of Technology Segmented waveguide structures
CN100541269C (zh) * 2004-09-29 2009-09-16 日本碍子株式会社 光功能器件
US7826688B1 (en) 2005-10-21 2010-11-02 Luxtera, Inc. Enhancing the sensitivity of resonant optical modulating and switching devices
US7974505B2 (en) 2007-10-17 2011-07-05 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating selectively coupled optical waveguides on a substrate
US8192638B2 (en) 2007-10-18 2012-06-05 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing multiple layers of waveguides
WO2009052479A2 (en) 2007-10-19 2009-04-23 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing vertical germanium detectors
WO2009055778A1 (en) 2007-10-25 2009-04-30 Bae Systems Information And Electronic Systems Integration Inc. Method for manufacturing lateral germanium detectors
US7811844B2 (en) 2007-10-26 2010-10-12 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating electronic and photonic devices on a semiconductor substrate
US8031343B2 (en) 2007-10-29 2011-10-04 Bae Systems Information And Electronic Systems Integration Inc. High-index contrast waveguide optical gyroscope having segmented paths
US8871554B2 (en) 2007-10-30 2014-10-28 Bae Systems Information And Electronic Systems Integration Inc. Method for fabricating butt-coupled electro-absorptive modulators
US7853101B2 (en) 2008-08-29 2010-12-14 Bae Systems Information And Electronic Systems Integration Inc. Bi-rate adaptive optical transfer engine
US7715663B2 (en) 2008-08-29 2010-05-11 Bae Systems Information And Electronic Systems Integration Inc. Integrated optical latch
US8148265B2 (en) 2008-08-29 2012-04-03 Bae Systems Information And Electronic Systems Integration Inc. Two-step hardmask fabrication methodology for silicon waveguides
US7693354B2 (en) 2008-08-29 2010-04-06 Bae Systems Information And Electronic Systems Integration Inc. Salicide structures for heat-influenced semiconductor applications
US8288290B2 (en) 2008-08-29 2012-10-16 Bae Systems Information And Electronic Systems Integration Inc. Integration CMOS compatible of micro/nano optical gain materials
US7987066B2 (en) 2008-08-29 2011-07-26 Bae Systems Information And Electronic Systems Integration Inc. Components and configurations for test and valuation of integrated optical busses
US7847353B2 (en) 2008-12-05 2010-12-07 Bae Systems Information And Electronic Systems Integration Inc. Multi-thickness semiconductor with fully depleted devices and photonic integration
US9305779B2 (en) 2009-08-11 2016-04-05 Bae Systems Information And Electronic Systems Integration Inc. Method for growing germanium epitaxial films
CN102686147B (zh) 2009-11-05 2016-01-20 格雷特巴奇有限公司 波导神经接口装置
EP3798718B1 (de) 2018-05-22 2023-05-10 NGK Insulators, Ltd. Verbundsubstrat für elektro-optisches element und verfahren zu dessen herstellung
JP2021173792A (ja) * 2020-04-21 2021-11-01 富士通オプティカルコンポーネンツ株式会社 光導波路デバイス
CN111458794B (zh) * 2020-04-28 2021-08-20 吉林大学 一种垂直耦合光波导器件及其制备方法
US11841563B2 (en) * 2021-03-31 2023-12-12 IMEC USA NANOELECTRONICS DESIGN CENTER, Inc. Electro-optic modulators that include caps for optical confinement

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038342B2 (de) * 1971-12-01 1975-12-09
US3836348A (en) * 1973-02-22 1974-09-17 Nippon Selfoc Co Ltd Method for manufacturing optical integrated circuits utilizing an external electric field
JPS5223355A (en) * 1975-08-18 1977-02-22 Nippon Telegr & Teleph Corp <Ntt> Process for fabricating a flush type light wave guiding path
US4582390A (en) * 1982-01-05 1986-04-15 At&T Bell Laboratories Dielectric optical waveguide and technique for fabricating same
GB2191603A (en) * 1986-06-13 1987-12-16 Northern Telecom Ltd Optical conductor having at least three layers
JPS63261219A (ja) * 1987-04-20 1988-10-27 Fujitsu Ltd 光変調素子
US4932743A (en) * 1988-04-18 1990-06-12 Ricoh Company, Ltd. Optical waveguide device
GB8827853D0 (en) * 1988-11-29 1988-12-29 Ares Serono Res & Dev Ltd Sensor for optical assay
US4913717A (en) * 1989-01-23 1990-04-03 Polaroid Corporation Method for fabricating buried waveguides
DE59010811D1 (de) * 1989-09-01 1998-04-23 Siemens Ag Integriert optische Anordnung mit wenigstens einem auf einem Substrat aus Halbleitermaterial integrierten optischen Wellenleiter
US5113469A (en) * 1990-03-02 1992-05-12 Kabushiki Kaisha Toshiba Optical wavelength-converting device for guided-wave second-harmonic generation in cerenkov radiation mode
EP0446999B1 (de) * 1990-03-14 1995-06-28 Philips Patentverwaltung GmbH Verfahren und Vorrichtung zum Herstellen von Glaskörpern
JPH04110831A (ja) * 1990-08-31 1992-04-13 Nec Corp 光制御デバイス
US5157748A (en) * 1990-09-28 1992-10-20 Siemens Aktiengesellschaft Controllable integrated optical directional coupler
US5291567A (en) * 1992-07-21 1994-03-01 Eastman Kodak Company Electro-optic waveguide deflector using a nonlinear optic film or liquid-crystal overlay cell for use in an optical pickup head
US5276743A (en) * 1993-03-01 1994-01-04 Eastman Kodak Company Langmuir-Blodgett films in a waveguide optical pick-up head using Mach-Zehnder interferometers

Also Published As

Publication number Publication date
US5418883A (en) 1995-05-23
EP0585565A2 (de) 1994-03-09
DE69321430T2 (de) 1999-04-29
EP0585565A3 (de) 1994-10-12
EP0585565B1 (de) 1998-10-07
US5373579A (en) 1994-12-13
EP0818693A1 (de) 1998-01-14
EP0816879A1 (de) 1998-01-07
US5546494A (en) 1996-08-13

Similar Documents

Publication Publication Date Title
DE69321430T2 (de) Optischer Wellenleiter und dessen Herstellungsverfahren
DE69323958D1 (de) Optische Wellenleiter-Anordnung und Herstellungsmethode
DE69430228D1 (de) Optisches Wellenleitermodul sowie dessen Herstellungsverfahren
DE69331487T2 (de) Ein optisches Wellenleiterbauelement und Herstellungsverfahren dafür
DE69429493T2 (de) Verbinder und dessen Herstellungsverfahren
DE69303654D1 (de) Optische Wellenleitervorrichtung und Herstellungsverfahren
BR9001859A (pt) Processo de fabricacao de embolo e embolo
KR950700558A (ko) 역반사 조립체 및 그 제조방법(retroreflective assembly and process for making same)
DE69411789T2 (de) Optischer Wellenleiter
DE69117672D1 (de) Faseroptische Spule und Herstellungsverfahren
DE69204377D1 (de) Glasfaser und Herstellungsverfahren.
DE69212427D1 (de) Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren
EP0477898A3 (en) Quartz optical waveguide and method for producing the same
DE69306699D1 (de) Faseroptischer Koppler und Herstellungsverfahren
EP0565381A3 (en) Optical element and method of fabricating the same
DE69325234T2 (de) Toner und dessen Herstellungsverfahren
EP0420173A3 (en) Rib optical waveguide and method of manufacturing the same
DE69116994T2 (de) Polarisierter optischer Wellenleiter und sein Herstellungsverfahren
DE69124649D1 (de) Optisches Wellenlängenfilter und dessen Steuerverfahren
EP0476688A3 (en) Quartz optical waveguide and method for producing the same
DE69400399D1 (de) Optischer Wellenleiterverstärker
EP0482736A3 (en) Optical wavelength converter and method of manufacturing the same
DE69507009D1 (de) Optische Faseranordnung und dessen Herstellungsverfahren
DK0667888T3 (da) Pigmentfremstillingsproces
FI932102A0 (fi) Optisk bandkabel

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee