DE69322812T2 - Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungsköpfer - Google Patents

Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungsköpfer

Info

Publication number
DE69322812T2
DE69322812T2 DE69322812T DE69322812T DE69322812T2 DE 69322812 T2 DE69322812 T2 DE 69322812T2 DE 69322812 T DE69322812 T DE 69322812T DE 69322812 T DE69322812 T DE 69322812T DE 69322812 T2 DE69322812 T2 DE 69322812T2
Authority
DE
Germany
Prior art keywords
resin layer
forming
ink discharging
jet recording
liquid jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69322812T
Other languages
English (en)
Other versions
DE69322812D1 (de
Inventor
Masashi Miyagawa
Norio Ohkuma
Hiroaki Toshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69322812D1 publication Critical patent/DE69322812D1/de
Publication of DE69322812T2 publication Critical patent/DE69322812T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
DE69322812T 1992-06-04 1993-06-02 Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungsköpfer Expired - Lifetime DE69322812T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4144502A JP2960608B2 (ja) 1992-06-04 1992-06-04 液体噴射記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69322812D1 DE69322812D1 (de) 1999-02-11
DE69322812T2 true DE69322812T2 (de) 1999-06-10

Family

ID=15363858

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69329702T Expired - Lifetime DE69329702T2 (de) 1992-06-04 1993-06-02 Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungskopf
DE69322812T Expired - Lifetime DE69322812T2 (de) 1992-06-04 1993-06-02 Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungsköpfer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69329702T Expired - Lifetime DE69329702T2 (de) 1992-06-04 1993-06-02 Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungskopf

Country Status (5)

Country Link
US (2) US5458254A (de)
EP (2) EP0573023B1 (de)
JP (1) JP2960608B2 (de)
AT (2) ATE175279T1 (de)
DE (2) DE69329702T2 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
FR2727648B1 (fr) * 1994-12-01 1997-01-03 Commissariat Energie Atomique Procede de fabrication micromecanique de buses pour jets de liquide
DE69603639T2 (de) 1995-03-31 2000-04-13 Canon Kk Verfahren zum Herstellen eines Tintenstrahlkopfes
JP3368094B2 (ja) * 1995-04-21 2003-01-20 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US5980026A (en) * 1995-06-14 1999-11-09 Canon Kabushiki Kaisha Process for production of ink jet head
JP3459703B2 (ja) * 1995-06-20 2003-10-27 キヤノン株式会社 インクジェットヘッドの製造方法、およびインクジェットヘッド
US5922518A (en) * 1995-12-05 1999-07-13 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College X-ray lithography resists
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
US5706041A (en) * 1996-03-04 1998-01-06 Xerox Corporation Thermal ink-jet printhead with a suspended heating element in each ejector
JP3647205B2 (ja) * 1996-06-07 2005-05-11 キヤノン株式会社 液体吐出方法、液供給方法、液体吐出ヘッド、該液体吐出ヘッドを用いた液体吐出ヘッドカートリッジ、及び液体吐出装置
US6808250B2 (en) * 1997-01-10 2004-10-26 Konica Corporation Production method of ink-jet head
JPH10211704A (ja) * 1997-01-31 1998-08-11 Minolta Co Ltd インクジェットヘッドおよびインクジェットヘッド用インク室形成部材の製造方法
JP3408130B2 (ja) * 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
DE19818824B4 (de) * 1998-04-27 2008-07-31 Epcos Ag Elektronisches Bauelement und Verfahren zu dessen Herstellung
TW369485B (en) * 1998-07-28 1999-09-11 Ind Tech Res Inst Monolithic producing method for chip of ink-jet printing head
US6473966B1 (en) * 1999-02-01 2002-11-05 Casio Computer Co., Ltd. Method of manufacturing ink-jet printer head
JP4497633B2 (ja) * 1999-03-15 2010-07-07 キヤノン株式会社 撥液体層の形成方法及び液体吐出ヘッドの製造方法
US6310641B1 (en) 1999-06-11 2001-10-30 Lexmark International, Inc. Integrated nozzle plate for an inkjet print head formed using a photolithographic method
IT1310099B1 (it) * 1999-07-12 2002-02-11 Olivetti Lexikon Spa Testina di stampa monolitica e relativo processo di fabbricazione.
US6482574B1 (en) 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
IT1320599B1 (it) 2000-08-23 2003-12-10 Olivetti Lexikon Spa Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione.
US6675476B2 (en) * 2000-12-05 2004-01-13 Hewlett-Packard Development Company, L.P. Slotted substrates and techniques for forming same
US6481832B2 (en) * 2001-01-29 2002-11-19 Hewlett-Packard Company Fluid-jet ejection device
US6629756B2 (en) 2001-02-20 2003-10-07 Lexmark International, Inc. Ink jet printheads and methods therefor
JP4054583B2 (ja) 2001-02-28 2008-02-27 キヤノン株式会社 インクジェットプリントヘッドの製造方法
JP4741738B2 (ja) * 2001-02-28 2011-08-10 キヤノン株式会社 プローブ担体の製造方法
US6387719B1 (en) * 2001-02-28 2002-05-14 Lexmark International, Inc. Method for improving adhesion
US6409312B1 (en) 2001-03-27 2002-06-25 Lexmark International, Inc. Ink jet printer nozzle plate and process therefor
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
US6698868B2 (en) 2001-10-31 2004-03-02 Hewlett-Packard Development Company, L.P. Thermal drop generator for ultra-small droplets
US7125731B2 (en) 2001-10-31 2006-10-24 Hewlett-Packard Development Company, L.P. Drop generator for ultra-small droplets
US6627467B2 (en) 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication
JP2003300323A (ja) * 2002-04-11 2003-10-21 Canon Inc インクジェットヘッド及びその製造方法
JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
JP4298414B2 (ja) 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
US6993840B2 (en) * 2002-07-18 2006-02-07 Canon Kabushiki Kaisha Manufacturing method of liquid jet head
TW577819B (en) * 2002-10-22 2004-03-01 Nanodynamics Inc Method for self-aligning nozzle orifice of inkjet print head
JP2004181901A (ja) 2002-12-06 2004-07-02 Fuji Xerox Co Ltd インクジェット記録ヘッド及びその製造方法
JP2004181902A (ja) * 2002-12-06 2004-07-02 Fuji Xerox Co Ltd インクジェット記録ヘッドおよびその製造方法
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
US6709805B1 (en) 2003-04-24 2004-03-23 Lexmark International, Inc. Inkjet printhead nozzle plate
AU2003304346A1 (en) * 2003-07-22 2005-02-04 Canon Kabushiki Kaisha Ink jet head and its manufacture method
DE10353767B4 (de) * 2003-11-17 2005-09-29 Infineon Technologies Ag Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben
JP4522086B2 (ja) 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
JP4455287B2 (ja) * 2003-12-26 2010-04-21 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP2005205889A (ja) 2003-12-26 2005-08-04 Canon Inc インクジェット記録ヘッドの製造方法及び該製造方法により製造されるインクジェット記録ヘッド
JP4447974B2 (ja) 2004-06-28 2010-04-07 キヤノン株式会社 インクジェットヘッドの製造方法
JP4480141B2 (ja) 2004-06-28 2010-06-16 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4484774B2 (ja) * 2004-06-28 2010-06-16 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4274554B2 (ja) 2004-07-16 2009-06-10 キヤノン株式会社 素子基板および液体吐出素子の形成方法
JP4274556B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子の製造方法
JP5027991B2 (ja) * 2004-12-03 2012-09-19 キヤノン株式会社 インクジェットヘッドおよびその製造方法
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
US7254890B2 (en) * 2004-12-30 2007-08-14 Lexmark International, Inc. Method of making a microfluid ejection head structure
US7296350B2 (en) * 2005-03-14 2007-11-20 Eastman Kodak Company Method for fabricating a drop generator
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
KR100723415B1 (ko) * 2005-12-08 2007-05-30 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
US7523553B2 (en) * 2006-02-02 2009-04-28 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
JP4850637B2 (ja) 2006-09-04 2012-01-11 キヤノン株式会社 液体吐出ヘッドの製造方法および液体吐出ヘッド
JP2008143091A (ja) 2006-12-12 2008-06-26 Canon Inc インクジェット記録装置およびインクジェット記録方法
US8152278B2 (en) 2006-12-14 2012-04-10 Canon Kabushiki Kaisha Liquid jet head chip and manufacturing method therefor
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
JP4953930B2 (ja) * 2007-06-13 2012-06-13 キヤノン株式会社 インクジェット記録ヘッド及びその製造方法
KR101155989B1 (ko) * 2007-06-21 2012-06-18 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
JP5147551B2 (ja) * 2008-06-05 2013-02-20 キヤノン株式会社 液体吐出記録ヘッドの製造方法
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
CN102470675B (zh) * 2009-07-24 2014-11-12 扎姆泰科有限公司 具有在喷墨面上的聚倍半硅氧烷涂层的打印头
JP2012016892A (ja) 2010-07-08 2012-01-26 Canon Inc 液体吐出記録ヘッド
JP6061457B2 (ja) * 2011-10-21 2017-01-18 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US10031415B1 (en) * 2017-08-21 2018-07-24 Funai Electric Co., Ltd. Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film
JP7023644B2 (ja) * 2017-09-13 2022-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5456870A (en) * 1977-10-14 1979-05-08 Seiko Epson Corp Crystal wristwatch
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
JPS57208256A (en) * 1981-06-18 1982-12-21 Canon Inc Ink jet head
JPS57208255A (en) * 1981-06-18 1982-12-21 Canon Inc Ink jet head
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
JPS6071260A (ja) * 1983-09-28 1985-04-23 Erumu:Kk 記録装置
US4727012A (en) * 1984-10-25 1988-02-23 Siemens Aktiengesellschaft Method of manufacture for print heads of ink jet printers
JPH0645242B2 (ja) * 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0729433B2 (ja) * 1986-03-05 1995-04-05 キヤノン株式会社 液体噴射記録ヘツドの作成方法
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
US4889589A (en) * 1986-06-26 1989-12-26 United Technologies Corporation Gaseous removal of ceramic coatings
EP0393855B1 (de) * 1989-03-24 1996-06-12 Canon Kabushiki Kaisha Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen
JP2697937B2 (ja) * 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
DE69123932T2 (de) * 1990-10-18 1997-05-22 Canon Kk Herstellungsverfahren eines Tintenstrahldruckkopfes
EP0491560B1 (de) * 1990-12-19 1997-10-01 Canon Kabushiki Kaisha Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf
US5290667A (en) * 1991-12-03 1994-03-01 Canon Kabushiki Kaisha Method for producing ink jet recording head

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EP0573023A1 (de) 1993-12-08
EP0814380A3 (de) 1998-01-07
DE69329702D1 (de) 2000-12-28
US5945260A (en) 1999-08-31
JP2960608B2 (ja) 1999-10-12
EP0814380B1 (de) 2000-11-22
ATE175279T1 (de) 1999-01-15
JPH05330066A (ja) 1993-12-14
DE69322812D1 (de) 1999-02-11
EP0573023B1 (de) 1998-12-30
US5458254A (en) 1995-10-17
ATE197741T1 (de) 2000-12-15
EP0814380A2 (de) 1997-12-29
DE69329702T2 (de) 2001-05-10

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