DE69328500T2 - In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken - Google Patents

In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken

Info

Publication number
DE69328500T2
DE69328500T2 DE69328500T DE69328500T DE69328500T2 DE 69328500 T2 DE69328500 T2 DE 69328500T2 DE 69328500 T DE69328500 T DE 69328500T DE 69328500 T DE69328500 T DE 69328500T DE 69328500 T2 DE69328500 T2 DE 69328500T2
Authority
DE
Germany
Prior art keywords
electric field
vibration transducer
constant electric
driven vibration
micromechanical beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69328500T
Other languages
English (en)
Other versions
DE69328500D1 (de
Inventor
D Zook
W Burns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE69328500D1 publication Critical patent/DE69328500D1/de
Publication of DE69328500T2 publication Critical patent/DE69328500T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00Measuring and testing
    • Y10S73/01Vibration
DE69328500T 1992-08-31 1993-09-07 In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken Expired - Lifetime DE69328500T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/937,068 US5275055A (en) 1992-08-31 1992-08-31 Resonant gauge with microbeam driven in constant electric field
PCT/US1993/008404 WO1995007448A1 (en) 1992-08-31 1993-09-07 Resonant gauge with microbeam driven in constant electric field

Publications (2)

Publication Number Publication Date
DE69328500D1 DE69328500D1 (de) 2000-05-31
DE69328500T2 true DE69328500T2 (de) 2000-09-21

Family

ID=47915796

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69328500T Expired - Lifetime DE69328500T2 (de) 1992-08-31 1993-09-07 In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken

Country Status (7)

Country Link
US (1) US5275055A (de)
EP (1) EP0717835B1 (de)
JP (2) JP3223358B2 (de)
AU (1) AU683850B2 (de)
CA (1) CA2171188C (de)
DE (1) DE69328500T2 (de)
WO (1) WO1995007448A1 (de)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5458000A (en) * 1993-07-20 1995-10-17 Honeywell Inc. Static pressure compensation of resonant integrated microbeam sensors
US5417115A (en) * 1993-07-23 1995-05-23 Honeywell Inc. Dielectrically isolated resonant microsensors
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
US5550516A (en) * 1994-12-16 1996-08-27 Honeywell Inc. Integrated resonant microbeam sensor and transistor oscillator
US5742222A (en) * 1995-05-26 1998-04-21 Avi Systems, Inc. Direct adhering polysilicon based strain gage
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
GB2301669B (en) * 1995-05-30 1999-11-10 Allied Signal Inc Angular rate sensor misalignment correction
US6021675A (en) * 1995-06-07 2000-02-08 Ssi Technologies, Inc. Resonating structure and method for forming the resonating structure
DE753728T1 (de) * 1995-07-14 1997-06-26 Yokogawa Electric Corp Halbleiter-Druckdifferenzmessvorrichtung
US5798502A (en) * 1996-05-10 1998-08-25 Oak Frequency Temperature controlled substrate for VLSI construction having minimal parasitic feedback
US5772322A (en) * 1996-05-31 1998-06-30 Honeywell Inc. Resonant microbeam temperature sensor
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
US6698295B1 (en) 2000-03-31 2004-03-02 Shipley Company, L.L.C. Microstructures comprising silicon nitride layer and thin conductive polysilicon layer
US7026697B2 (en) * 2000-03-31 2006-04-11 Shipley Company, L.L.C. Microstructures comprising a dielectric layer and a thin conductive layer
EP1164378B1 (de) * 2000-06-16 2012-03-14 Infineon Technologies AG Beschleunigungsaufnehmer
IT1318295B1 (it) 2000-07-31 2003-07-28 Abb Ricerca Spa Dispositivo per la misura della pressione di un fluido
US6584857B1 (en) 2000-11-20 2003-07-01 Eastman Kodak Company Optical strain gauge
US6487913B2 (en) 2000-12-18 2002-12-03 Eastman Kodak Company Strain gauge with resonant light modulator
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6714102B2 (en) * 2001-03-01 2004-03-30 Agilent Technologies, Inc. Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
US20040036378A1 (en) * 2002-08-20 2004-02-26 Rodgers Murray Steven Dust cover for MEM components
DE60316729T2 (de) * 2002-12-27 2008-07-24 Nanonord A/S Kragträgersensor sowohl mit longitudinal- als auch transversal-piezoresistenzkoeffizienten
US6739199B1 (en) 2003-03-10 2004-05-25 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for MEMS device with strain gage
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7231803B2 (en) * 2004-06-11 2007-06-19 Robert Bosch Gmbh Hybrid impact sensor
US7188511B2 (en) * 2004-06-11 2007-03-13 Robert Bosch Gmbh Stress wave sensor
US7623142B2 (en) 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7368312B1 (en) * 2004-10-15 2008-05-06 Morgan Research Corporation MEMS sensor suite on a chip
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7017418B1 (en) * 2004-12-15 2006-03-28 General Electric Company System and method for sensing pressure
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US20070017276A1 (en) * 2005-07-20 2007-01-25 Trutna William R Jr Resonant structure humidity sensor
US20070236213A1 (en) * 2006-03-30 2007-10-11 Paden Bradley E Telemetry method and apparatus using magnetically-driven mems resonant structure
FR2919067B1 (fr) * 2007-07-19 2009-08-28 Sagem Defense Securite Procede de mesure d'une acceleration au moyen d'un accelerometre vibrant piezo-electrique et dispositif de mesure correspondant
US7661313B2 (en) * 2007-11-05 2010-02-16 The United States Of America As Represented By The Secretary Of The Navy Acceleration strain transducer
US8468887B2 (en) * 2008-04-14 2013-06-25 Freescale Semiconductor, Inc. Resonant accelerometer with low sensitivity to package stress
US7589329B1 (en) 2008-04-23 2009-09-15 Honeywell International Inc. Systems and methods for remote optical sensing
US8076737B2 (en) * 2008-05-20 2011-12-13 Honeywell International Inc. Systems and methods for acoustic sensing
US8115573B2 (en) * 2009-05-29 2012-02-14 Infineon Technologies Ag Resonance frequency tunable MEMS device
DE102010030878B4 (de) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen
PT2458357E (pt) * 2010-11-29 2014-06-11 Air Prod & Chem Método e aparelho para medir a pressão de um gás
US8650963B2 (en) * 2011-08-15 2014-02-18 Pgs Geophysical As Electrostatically coupled pressure sensor
FR2995995B1 (fr) * 2012-09-26 2014-09-19 Sagem Defense Securite Capteur de pression a base de nanojauges couplees a un resonateur
JP2014115208A (ja) * 2012-12-11 2014-06-26 Seiko Epson Corp Mems素子、電子デバイス、高度計、電子機器および移動体
JP2014115210A (ja) * 2012-12-11 2014-06-26 Seiko Epson Corp Mems素子、電子デバイス、高度計、電子機器および移動体
JP6044607B2 (ja) 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
US10580605B2 (en) 2015-11-23 2020-03-03 University Of Utah Research Foundation Very low power microelectromechanical devices for the internet of everything
JP7155035B2 (ja) 2019-02-18 2022-10-18 株式会社荏原製作所 研磨装置および研磨方法
CN112710869B (zh) * 2020-12-09 2023-04-21 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) 基于附加静电刚度原理的谐振子刚性轴辨识装置及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3164987A (en) * 1961-03-28 1965-01-12 Bosch Arma Corp Electrostatic vibration transducer
US3486383A (en) * 1965-01-04 1969-12-30 Singer General Precision Vibrating beam transducer
US3413573A (en) * 1965-06-18 1968-11-26 Westinghouse Electric Corp Microelectronic frequency selective apparatus with vibratory member and means responsive thereto
US3470400A (en) * 1967-12-21 1969-09-30 Singer General Precision Single beam force transducer with integral mounting isolation
CH1494868A4 (de) * 1968-10-08 1971-03-15 Proctor Ets
US3657667A (en) * 1969-04-23 1972-04-18 Citizen Watch Co Ltd Oscillator with three-arm mechanical vibrator connected to suppress spurious vibrations
DE8712331U1 (de) * 1986-09-26 1988-01-28 Flowtec Ag, Reinach, Basel, Ch
US4901586A (en) * 1989-02-27 1990-02-20 Sundstrand Data Control, Inc. Electrostatically driven dual vibrating beam force transducer
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers

Also Published As

Publication number Publication date
AU683850B2 (en) 1997-11-27
JPH09502274A (ja) 1997-03-04
JP3223358B2 (ja) 2001-10-29
EP0717835A1 (de) 1996-06-26
AU4850293A (en) 1995-03-27
CA2171188C (en) 2006-04-18
CA2171188A1 (en) 1995-03-16
DE69328500D1 (de) 2000-05-31
US5275055A (en) 1994-01-04
EP0717835B1 (de) 2000-04-26
WO1995007448A1 (en) 1995-03-16

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