DE69328500T2 - In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken - Google Patents
In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balkenInfo
- Publication number
- DE69328500T2 DE69328500T2 DE69328500T DE69328500T DE69328500T2 DE 69328500 T2 DE69328500 T2 DE 69328500T2 DE 69328500 T DE69328500 T DE 69328500T DE 69328500 T DE69328500 T DE 69328500T DE 69328500 T2 DE69328500 T2 DE 69328500T2
- Authority
- DE
- Germany
- Prior art keywords
- electric field
- vibration transducer
- constant electric
- driven vibration
- micromechanical beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/01—Vibration
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/937,068 US5275055A (en) | 1992-08-31 | 1992-08-31 | Resonant gauge with microbeam driven in constant electric field |
PCT/US1993/008404 WO1995007448A1 (en) | 1992-08-31 | 1993-09-07 | Resonant gauge with microbeam driven in constant electric field |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69328500D1 DE69328500D1 (de) | 2000-05-31 |
DE69328500T2 true DE69328500T2 (de) | 2000-09-21 |
Family
ID=47915796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69328500T Expired - Lifetime DE69328500T2 (de) | 1992-08-31 | 1993-09-07 | In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken |
Country Status (7)
Country | Link |
---|---|
US (1) | US5275055A (de) |
EP (1) | EP0717835B1 (de) |
JP (2) | JP3223358B2 (de) |
AU (1) | AU683850B2 (de) |
CA (1) | CA2171188C (de) |
DE (1) | DE69328500T2 (de) |
WO (1) | WO1995007448A1 (de) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5458000A (en) * | 1993-07-20 | 1995-10-17 | Honeywell Inc. | Static pressure compensation of resonant integrated microbeam sensors |
US5417115A (en) * | 1993-07-23 | 1995-05-23 | Honeywell Inc. | Dielectrically isolated resonant microsensors |
US5442962A (en) * | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
US5550516A (en) * | 1994-12-16 | 1996-08-27 | Honeywell Inc. | Integrated resonant microbeam sensor and transistor oscillator |
US5742222A (en) * | 1995-05-26 | 1998-04-21 | Avi Systems, Inc. | Direct adhering polysilicon based strain gage |
GB2301671B (en) * | 1995-05-30 | 1999-10-13 | Allied Signal Inc | Angular rate sensor electronic balance |
GB2301669B (en) * | 1995-05-30 | 1999-11-10 | Allied Signal Inc | Angular rate sensor misalignment correction |
US6021675A (en) * | 1995-06-07 | 2000-02-08 | Ssi Technologies, Inc. | Resonating structure and method for forming the resonating structure |
DE753728T1 (de) * | 1995-07-14 | 1997-06-26 | Yokogawa Electric Corp | Halbleiter-Druckdifferenzmessvorrichtung |
US5798502A (en) * | 1996-05-10 | 1998-08-25 | Oak Frequency | Temperature controlled substrate for VLSI construction having minimal parasitic feedback |
US5772322A (en) * | 1996-05-31 | 1998-06-30 | Honeywell Inc. | Resonant microbeam temperature sensor |
IT1287123B1 (it) * | 1996-10-31 | 1998-08-04 | Abb Kent Taylor Spa | Dispositivo per la misura di una pressione |
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6126311A (en) * | 1998-11-02 | 2000-10-03 | Claud S. Gordon Company | Dew point sensor using mems |
US6215221B1 (en) * | 1998-12-29 | 2001-04-10 | Honeywell International Inc. | Electrostatic/pneumatic actuators for active surfaces |
US6698295B1 (en) | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
US7026697B2 (en) * | 2000-03-31 | 2006-04-11 | Shipley Company, L.L.C. | Microstructures comprising a dielectric layer and a thin conductive layer |
EP1164378B1 (de) * | 2000-06-16 | 2012-03-14 | Infineon Technologies AG | Beschleunigungsaufnehmer |
IT1318295B1 (it) | 2000-07-31 | 2003-07-28 | Abb Ricerca Spa | Dispositivo per la misura della pressione di un fluido |
US6584857B1 (en) | 2000-11-20 | 2003-07-01 | Eastman Kodak Company | Optical strain gauge |
US6487913B2 (en) | 2000-12-18 | 2002-12-03 | Eastman Kodak Company | Strain gauge with resonant light modulator |
FR2818676B1 (fr) * | 2000-12-27 | 2003-03-07 | Freyssinet Int Stup | Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre |
US6714102B2 (en) * | 2001-03-01 | 2004-03-30 | Agilent Technologies, Inc. | Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method |
US20040036378A1 (en) * | 2002-08-20 | 2004-02-26 | Rodgers Murray Steven | Dust cover for MEM components |
DE60316729T2 (de) * | 2002-12-27 | 2008-07-24 | Nanonord A/S | Kragträgersensor sowohl mit longitudinal- als auch transversal-piezoresistenzkoeffizienten |
US6739199B1 (en) | 2003-03-10 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for MEMS device with strain gage |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
US7231803B2 (en) * | 2004-06-11 | 2007-06-19 | Robert Bosch Gmbh | Hybrid impact sensor |
US7188511B2 (en) * | 2004-06-11 | 2007-03-13 | Robert Bosch Gmbh | Stress wave sensor |
US7623142B2 (en) | 2004-09-14 | 2009-11-24 | Hewlett-Packard Development Company, L.P. | Flexure |
US7201057B2 (en) * | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7368312B1 (en) * | 2004-10-15 | 2008-05-06 | Morgan Research Corporation | MEMS sensor suite on a chip |
US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
US7499604B1 (en) | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
US7017418B1 (en) * | 2004-12-15 | 2006-03-28 | General Electric Company | System and method for sensing pressure |
US20060134510A1 (en) * | 2004-12-21 | 2006-06-22 | Cleopatra Cabuz | Air cell air flow control system and method |
US20070017276A1 (en) * | 2005-07-20 | 2007-01-25 | Trutna William R Jr | Resonant structure humidity sensor |
US20070236213A1 (en) * | 2006-03-30 | 2007-10-11 | Paden Bradley E | Telemetry method and apparatus using magnetically-driven mems resonant structure |
FR2919067B1 (fr) * | 2007-07-19 | 2009-08-28 | Sagem Defense Securite | Procede de mesure d'une acceleration au moyen d'un accelerometre vibrant piezo-electrique et dispositif de mesure correspondant |
US7661313B2 (en) * | 2007-11-05 | 2010-02-16 | The United States Of America As Represented By The Secretary Of The Navy | Acceleration strain transducer |
US8468887B2 (en) * | 2008-04-14 | 2013-06-25 | Freescale Semiconductor, Inc. | Resonant accelerometer with low sensitivity to package stress |
US7589329B1 (en) | 2008-04-23 | 2009-09-15 | Honeywell International Inc. | Systems and methods for remote optical sensing |
US8076737B2 (en) * | 2008-05-20 | 2011-12-13 | Honeywell International Inc. | Systems and methods for acoustic sensing |
US8115573B2 (en) * | 2009-05-29 | 2012-02-14 | Infineon Technologies Ag | Resonance frequency tunable MEMS device |
DE102010030878B4 (de) * | 2010-07-02 | 2023-08-17 | Robert Bosch Gmbh | Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen |
PT2458357E (pt) * | 2010-11-29 | 2014-06-11 | Air Prod & Chem | Método e aparelho para medir a pressão de um gás |
US8650963B2 (en) * | 2011-08-15 | 2014-02-18 | Pgs Geophysical As | Electrostatically coupled pressure sensor |
FR2995995B1 (fr) * | 2012-09-26 | 2014-09-19 | Sagem Defense Securite | Capteur de pression a base de nanojauges couplees a un resonateur |
JP2014115208A (ja) * | 2012-12-11 | 2014-06-26 | Seiko Epson Corp | Mems素子、電子デバイス、高度計、電子機器および移動体 |
JP2014115210A (ja) * | 2012-12-11 | 2014-06-26 | Seiko Epson Corp | Mems素子、電子デバイス、高度計、電子機器および移動体 |
JP6044607B2 (ja) | 2014-08-28 | 2016-12-14 | 横河電機株式会社 | 振動式センサ装置 |
US10580605B2 (en) | 2015-11-23 | 2020-03-03 | University Of Utah Research Foundation | Very low power microelectromechanical devices for the internet of everything |
JP7155035B2 (ja) | 2019-02-18 | 2022-10-18 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
CN112710869B (zh) * | 2020-12-09 | 2023-04-21 | 华中光电技术研究所(中国船舶重工集团公司第七一七研究所) | 基于附加静电刚度原理的谐振子刚性轴辨识装置及方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3164987A (en) * | 1961-03-28 | 1965-01-12 | Bosch Arma Corp | Electrostatic vibration transducer |
US3486383A (en) * | 1965-01-04 | 1969-12-30 | Singer General Precision | Vibrating beam transducer |
US3413573A (en) * | 1965-06-18 | 1968-11-26 | Westinghouse Electric Corp | Microelectronic frequency selective apparatus with vibratory member and means responsive thereto |
US3470400A (en) * | 1967-12-21 | 1969-09-30 | Singer General Precision | Single beam force transducer with integral mounting isolation |
CH1494868A4 (de) * | 1968-10-08 | 1971-03-15 | Proctor Ets | |
US3657667A (en) * | 1969-04-23 | 1972-04-18 | Citizen Watch Co Ltd | Oscillator with three-arm mechanical vibrator connected to suppress spurious vibrations |
DE8712331U1 (de) * | 1986-09-26 | 1988-01-28 | Flowtec Ag, Reinach, Basel, Ch | |
US4901586A (en) * | 1989-02-27 | 1990-02-20 | Sundstrand Data Control, Inc. | Electrostatically driven dual vibrating beam force transducer |
US5090254A (en) * | 1990-04-11 | 1992-02-25 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers |
-
1992
- 1992-08-31 US US07/937,068 patent/US5275055A/en not_active Expired - Lifetime
-
1993
- 1993-09-07 JP JP50864095A patent/JP3223358B2/ja not_active Expired - Lifetime
- 1993-09-07 CA CA002171188A patent/CA2171188C/en not_active Expired - Fee Related
- 1993-09-07 AU AU48502/93A patent/AU683850B2/en not_active Ceased
- 1993-09-07 WO PCT/US1993/008404 patent/WO1995007448A1/en active IP Right Grant
- 1993-09-07 DE DE69328500T patent/DE69328500T2/de not_active Expired - Lifetime
- 1993-09-07 JP JP7508640A patent/JPH09502274A/ja active Pending
- 1993-09-07 EP EP93921396A patent/EP0717835B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AU683850B2 (en) | 1997-11-27 |
JPH09502274A (ja) | 1997-03-04 |
JP3223358B2 (ja) | 2001-10-29 |
EP0717835A1 (de) | 1996-06-26 |
AU4850293A (en) | 1995-03-27 |
CA2171188C (en) | 2006-04-18 |
CA2171188A1 (en) | 1995-03-16 |
DE69328500D1 (de) | 2000-05-31 |
US5275055A (en) | 1994-01-04 |
EP0717835B1 (de) | 2000-04-26 |
WO1995007448A1 (en) | 1995-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |