DE69329882T2 - Mehrschichtiger Tintenstrahlaufzeichnungskopf - Google Patents

Mehrschichtiger Tintenstrahlaufzeichnungskopf

Info

Publication number
DE69329882T2
DE69329882T2 DE69329882T DE69329882T DE69329882T2 DE 69329882 T2 DE69329882 T2 DE 69329882T2 DE 69329882 T DE69329882 T DE 69329882T DE 69329882 T DE69329882 T DE 69329882T DE 69329882 T2 DE69329882 T2 DE 69329882T2
Authority
DE
Germany
Prior art keywords
ink jet
recording head
jet recording
layer ink
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69329882T
Other languages
English (en)
Other versions
DE69329882D1 (de
Inventor
Kohei Kitahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69329882D1 publication Critical patent/DE69329882D1/de
Publication of DE69329882T2 publication Critical patent/DE69329882T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE69329882T 1992-08-26 1993-08-26 Mehrschichtiger Tintenstrahlaufzeichnungskopf Expired - Fee Related DE69329882T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP22750392 1992-08-26
JP27314992 1992-10-12
JP33459292 1992-12-15
JP08007093A JP3317308B2 (ja) 1992-08-26 1993-03-15 積層型インクジェット記録ヘッド、及びその製造方法

Publications (2)

Publication Number Publication Date
DE69329882D1 DE69329882D1 (de) 2001-02-22
DE69329882T2 true DE69329882T2 (de) 2001-08-30

Family

ID=27466383

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69333824T Expired - Fee Related DE69333824T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf mit Schichtstruktur
DE69329882T Expired - Fee Related DE69329882T2 (de) 1992-08-26 1993-08-26 Mehrschichtiger Tintenstrahlaufzeichnungskopf
DE69306198T Expired - Lifetime DE69306198T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69322884T Expired - Fee Related DE69322884T2 (de) 1992-08-26 1993-08-26 Druckerzeugungseinheit für einen Tintenstrahlaufzeichnungskopf

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69333824T Expired - Fee Related DE69333824T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf mit Schichtstruktur

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69306198T Expired - Lifetime DE69306198T2 (de) 1992-08-26 1993-08-26 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69322884T Expired - Fee Related DE69322884T2 (de) 1992-08-26 1993-08-26 Druckerzeugungseinheit für einen Tintenstrahlaufzeichnungskopf

Country Status (6)

Country Link
US (2) US6270203B1 (de)
EP (4) EP0988972B1 (de)
JP (1) JP3317308B2 (de)
DE (4) DE69333824T2 (de)
HK (2) HK1002121A1 (de)
SG (3) SG119181A1 (de)

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DE69431036T2 (de) 1993-12-24 2002-11-07 Seiko Epson Corp Lamellenartig aufgebauter Tintenstrahlaufzeichnungskopf
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EP0584823A1 (de) 1994-03-02
EP0723867A2 (de) 1996-07-31
DE69322884D1 (de) 1999-02-11
DE69333824T2 (de) 2005-10-27
DE69306198D1 (de) 1997-01-09
DE69322884T2 (de) 1999-08-26
EP0988972B1 (de) 2005-06-01
EP0723867A3 (de) 1996-08-28
HK1008315A1 (en) 1999-05-07
US6270203B1 (en) 2001-08-07
DE69306198T2 (de) 1997-04-03
SG133440A1 (en) 2007-07-30
EP0839655A3 (de) 1998-05-20
JPH06234218A (ja) 1994-08-23
EP0988972A2 (de) 2000-03-29
JP3317308B2 (ja) 2002-08-26
SG115367A1 (en) 2005-10-28
US6290340B1 (en) 2001-09-18
EP0584823B1 (de) 1996-11-27
SG119181A1 (en) 2006-02-28
EP0839655B1 (de) 2001-01-17
DE69329882D1 (de) 2001-02-22
EP0839655A2 (de) 1998-05-06
HK1002121A1 (en) 1998-07-31
DE69333824D1 (de) 2005-07-07
EP0988972A3 (de) 2000-09-06
EP0723867B1 (de) 1998-12-30

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