DE69331056D1 - Modulation eines lichtstrahls - Google Patents

Modulation eines lichtstrahls

Info

Publication number
DE69331056D1
DE69331056D1 DE69331056T DE69331056T DE69331056D1 DE 69331056 D1 DE69331056 D1 DE 69331056D1 DE 69331056 T DE69331056 T DE 69331056T DE 69331056 T DE69331056 T DE 69331056T DE 69331056 D1 DE69331056 D1 DE 69331056D1
Authority
DE
Germany
Prior art keywords
beam elements
light
modulator
configuration
incident rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69331056T
Other languages
English (en)
Other versions
DE69331056T2 (de
Inventor
David M Bloom
Francisco S A Sandejas
Olav Solgaard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Priority claimed from PCT/US1993/003939 external-priority patent/WO1993022694A1/en
Publication of DE69331056D1 publication Critical patent/DE69331056D1/de
Application granted granted Critical
Publication of DE69331056T2 publication Critical patent/DE69331056T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/115—Roughening a surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
DE69331056T 1992-04-28 1993-04-28 Modulation eines lichtstrahls Expired - Lifetime DE69331056T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/876,078 US5311360A (en) 1992-04-28 1992-04-28 Method and apparatus for modulating a light beam
PCT/US1993/003939 WO1993022694A1 (en) 1992-04-28 1993-04-28 Modulating a light beam

Publications (2)

Publication Number Publication Date
DE69331056D1 true DE69331056D1 (de) 2001-12-06
DE69331056T2 DE69331056T2 (de) 2002-07-11

Family

ID=25366959

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69331056T Expired - Lifetime DE69331056T2 (de) 1992-04-28 1993-04-28 Modulation eines lichtstrahls

Country Status (9)

Country Link
US (3) US5311360A (de)
JP (1) JP3401250B2 (de)
KR (1) KR100274482B1 (de)
AT (1) ATE208048T1 (de)
AU (1) AU4118693A (de)
CA (1) CA2133335C (de)
DE (1) DE69331056T2 (de)
ES (1) ES2164661T3 (de)
PT (1) PT638177E (de)

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PT638177E (pt) 2002-03-28
DE69331056T2 (de) 2002-07-11
CA2133335A1 (en) 1993-11-11
US5459610A (en) 1995-10-17
CA2133335C (en) 2003-03-18
US5677783A (en) 1997-10-14
US5311360A (en) 1994-05-10
AU4118693A (en) 1993-11-29
ES2164661T3 (es) 2002-03-01
JP2002503351A (ja) 2002-01-29
ATE208048T1 (de) 2001-11-15
KR100274482B1 (ko) 2001-01-15
JP3401250B2 (ja) 2003-04-28

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