DE69420666T2 - Anordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung - Google Patents

Anordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung

Info

Publication number
DE69420666T2
DE69420666T2 DE69420666T DE69420666T DE69420666T2 DE 69420666 T2 DE69420666 T2 DE 69420666T2 DE 69420666 T DE69420666 T DE 69420666T DE 69420666 T DE69420666 T DE 69420666T DE 69420666 T2 DE69420666 T2 DE 69420666T2
Authority
DE
Germany
Prior art keywords
arrangement
production
thin film
film mirrors
controlled thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69420666T
Other languages
English (en)
Other versions
DE69420666D1 (de
Inventor
Dong-Kuk Kim
Jeong-Beom Ji
Seok-Won Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019930022798A external-priority patent/KR970006685B1/ko
Priority claimed from KR93024398A external-priority patent/KR970006694B1/ko
Priority claimed from KR1019930025879A external-priority patent/KR970006698B1/ko
Priority claimed from KR1019930031720A external-priority patent/KR970008404B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Application granted granted Critical
Publication of DE69420666D1 publication Critical patent/DE69420666D1/de
Publication of DE69420666T2 publication Critical patent/DE69420666T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
DE69420666T 1993-10-29 1994-10-28 Anordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung Expired - Lifetime DE69420666T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1019930022798A KR970006685B1 (ko) 1993-10-29 1993-10-29 광로조절장치
KR93024398A KR970006694B1 (en) 1993-11-16 1993-11-16 A manufacturing method of an optical path regulating apparatus
KR1019930025879A KR970006698B1 (ko) 1993-11-30 1993-11-30 투사형 화상 표시 장치의 광로 조절 장치 구조
KR1019930031720A KR970008404B1 (ko) 1993-12-30 1993-12-30 투사형 화상표시장치의 광로 조절기

Publications (2)

Publication Number Publication Date
DE69420666D1 DE69420666D1 (de) 1999-10-21
DE69420666T2 true DE69420666T2 (de) 1999-12-30

Family

ID=27483016

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69420666T Expired - Lifetime DE69420666T2 (de) 1993-10-29 1994-10-28 Anordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung

Country Status (16)

Country Link
US (2) US5661611A (de)
EP (1) EP0651274B1 (de)
JP (1) JP3283881B2 (de)
CN (1) CN1047056C (de)
AU (1) AU693119B2 (de)
BR (1) BR9407923A (de)
CA (1) CA2175198A1 (de)
CZ (1) CZ288846B6 (de)
DE (1) DE69420666T2 (de)
ES (1) ES2140490T3 (de)
HU (1) HU220516B1 (de)
MY (1) MY113977A (de)
PL (1) PL176406B1 (de)
RU (1) RU2140722C1 (de)
TW (1) TW279930B (de)
WO (1) WO1995012287A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150424A1 (de) * 2001-10-11 2003-04-30 Siemens Ag Piezoelektrischer Biegewandler sowie Reflexionssystem

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US5936757A (en) * 1993-10-29 1999-08-10 Daewoo Electronics Co., Ltd. Thin film actuated mirror array
AU693119B2 (en) * 1993-10-29 1998-06-25 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and methods for its manufacture
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TW348324B (en) * 1996-01-31 1998-12-21 Daewoo Electronics Co Ltd Thin film actuated mirror array having dielectric layers
BR9709542A (pt) * 1996-06-05 2000-01-11 Remote Source Lighting Int Inc Mostrador de fibra ótica de área grande usando disparadores piezoelétricos.
BE1010327A7 (fr) * 1996-06-05 1998-06-02 Remote Source Lighting Int Inc Dispositif de modulation de la lumiere electro-optique comprenant des bimorphes.
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
WO1998033327A1 (en) * 1997-01-23 1998-07-30 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
AU722024B2 (en) * 1997-01-23 2000-07-20 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
KR19990004774A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치의 제조 방법
DE10031877C1 (de) * 2000-06-30 2001-12-20 Fraunhofer Ges Forschung Vorrichtung zur Ablenkung von optischen Strahlen
JP2002122809A (ja) * 2000-10-18 2002-04-26 Canon Inc 投射型表示装置
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6624549B2 (en) * 2001-03-02 2003-09-23 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of fabricating the same
US6721510B2 (en) * 2001-06-26 2004-04-13 Aoptix Technologies, Inc. Atmospheric optical data transmission system
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
WO2017171882A1 (en) * 2016-04-01 2017-10-05 Intel Corporation Piezoelectrically actuated mirrors for optical communications
CN114779464A (zh) * 2022-05-24 2022-07-22 北京有竹居网络技术有限公司 光学信号调制器、控制方法及投影设备

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US3758199A (en) * 1971-11-22 1973-09-11 Sperry Rand Corp Piezoelectrically actuated light deflector
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US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150424A1 (de) * 2001-10-11 2003-04-30 Siemens Ag Piezoelektrischer Biegewandler sowie Reflexionssystem
DE10150424B4 (de) * 2001-10-11 2004-07-29 Siemens Ag Reflexionssystem und Verwendung des Reflexionssystems

Also Published As

Publication number Publication date
PL176406B1 (pl) 1999-05-31
AU8005294A (en) 1995-05-22
EP0651274A1 (de) 1995-05-03
ES2140490T3 (es) 2000-03-01
WO1995012287A1 (en) 1995-05-04
RU2140722C1 (ru) 1999-10-27
JPH09504387A (ja) 1997-04-28
CN1134208A (zh) 1996-10-23
US5661611A (en) 1997-08-26
HU220516B1 (hu) 2002-03-28
CZ288846B6 (cs) 2001-09-12
AU693119B2 (en) 1998-06-25
MY113977A (en) 2002-07-31
HUT75803A (en) 1997-05-28
PL314124A1 (en) 1996-08-19
CA2175198A1 (en) 1995-05-04
US5900998A (en) 1999-05-04
CN1047056C (zh) 1999-12-01
BR9407923A (pt) 1996-11-26
JP3283881B2 (ja) 2002-05-20
DE69420666D1 (de) 1999-10-21
TW279930B (de) 1996-07-01
HU9601094D0 (en) 1996-07-29
CZ118096A3 (en) 1996-09-11
EP0651274B1 (de) 1999-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR