DE69420914D1 - Kraftwandler mit piezoelektrischen Elementen - Google Patents

Kraftwandler mit piezoelektrischen Elementen

Info

Publication number
DE69420914D1
DE69420914D1 DE69420914T DE69420914T DE69420914D1 DE 69420914 D1 DE69420914 D1 DE 69420914D1 DE 69420914 T DE69420914 T DE 69420914T DE 69420914 T DE69420914 T DE 69420914T DE 69420914 D1 DE69420914 D1 DE 69420914D1
Authority
DE
Germany
Prior art keywords
piezoelectric elements
force converter
converter
force
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69420914T
Other languages
English (en)
Other versions
DE69420914T2 (de
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69420914D1 publication Critical patent/DE69420914D1/de
Application granted granted Critical
Publication of DE69420914T2 publication Critical patent/DE69420914T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00Measuring and testing
    • Y10S73/04Piezoelectric
DE69420914T 1993-07-29 1994-07-28 Kraftwandler mit piezoelektrischen Elementen Expired - Fee Related DE69420914T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20711893A JP3256346B2 (ja) 1993-07-29 1993-07-29 圧電素子を用いた力・加速度・磁気のセンサ

Publications (2)

Publication Number Publication Date
DE69420914D1 true DE69420914D1 (de) 1999-11-04
DE69420914T2 DE69420914T2 (de) 2000-01-13

Family

ID=16534496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69420914T Expired - Fee Related DE69420914T2 (de) 1993-07-29 1994-07-28 Kraftwandler mit piezoelektrischen Elementen

Country Status (4)

Country Link
US (3) US5571972A (de)
EP (1) EP0636870B1 (de)
JP (1) JP3256346B2 (de)
DE (1) DE69420914T2 (de)

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US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
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US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
US6282956B1 (en) * 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
JP3256346B2 (ja) * 1993-07-29 2002-02-12 和廣 岡田 圧電素子を用いた力・加速度・磁気のセンサ
JP3549590B2 (ja) * 1994-09-28 2004-08-04 和廣 岡田 加速度・角速度センサ
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US6367326B1 (en) 1996-07-10 2002-04-09 Wacoh Corporation Angular velocity sensor
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JP4295883B2 (ja) 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
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US6853315B2 (en) * 2002-01-23 2005-02-08 Triad Sensors, Inc. Piezoelectric rate sensor system and method
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
EP1537609A2 (de) * 2002-09-04 2005-06-08 Triad Sensors Inc. Interface-elektronik für piezoelektrische bauelemente
US8111165B2 (en) * 2002-10-02 2012-02-07 Orthocare Innovations Llc Active on-patient sensor, method and system
DE10260087A1 (de) * 2002-12-19 2004-07-01 Endress + Hauser Gmbh + Co. Kg Beschleunigungssensor
US20040159166A1 (en) * 2003-02-13 2004-08-19 Schiller Peter J. Solid-state piezoelectric motion transducer
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
WO2005116580A1 (en) * 2003-05-08 2005-12-08 Triad Sensors, Inc. Force balanced piezoelectric rate sensor
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US8350345B2 (en) 2003-12-29 2013-01-08 Vladimir Vaganov Three-dimensional input control device
US9034666B2 (en) 2003-12-29 2015-05-19 Vladimir Vaganov Method of testing of MEMS devices on a wafer level
US7554167B2 (en) * 2003-12-29 2009-06-30 Vladimir Vaganov Three-dimensional analog input control device
US7772657B2 (en) * 2004-12-28 2010-08-10 Vladimir Vaganov Three-dimensional force input control device and fabrication
US20060049001A1 (en) * 2004-09-09 2006-03-09 Mark Streitman Driven pendulum apparatus and method of operation thereof
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
JP2007101531A (ja) * 2005-09-06 2007-04-19 Seiko Instruments Inc 力学量センサ
US7578189B1 (en) * 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
JP2008190931A (ja) * 2007-02-02 2008-08-21 Wacoh Corp 加速度と角速度との双方を検出するセンサ
US8593428B1 (en) * 2007-06-22 2013-11-26 Cypress Semiconductor Corporation Radial track-pad system and method
FR2919050B1 (fr) * 2007-07-20 2012-03-23 Centre Nat Rech Scient Jauge de contrainte de type structure resonante acoustique et capteur d'au moins un parametre physique utilisant une telle jauge de contrainte.
JP5439068B2 (ja) * 2009-07-08 2014-03-12 株式会社ワコー 力検出装置
US8650965B2 (en) 2010-08-31 2014-02-18 Kabushiki Kaisha Yaskawa Denki Robot, robot system, robot control device, and state determining method
JP2012051042A (ja) * 2010-08-31 2012-03-15 Yaskawa Electric Corp ロボットシステム及びロボット制御装置
US20120274577A1 (en) * 2011-04-26 2012-11-01 Research In Motion Limited Electronic device and method of controlling same
JP5836633B2 (ja) * 2011-05-10 2015-12-24 キヤノン株式会社 力覚センサ及び組立ロボット
CN103454596B (zh) * 2012-06-04 2017-04-12 国民技术股份有限公司 一种交变磁场感应装置
JP5529328B1 (ja) 2013-09-04 2014-06-25 株式会社トライフォース・マネジメント 発電素子
JP2015184005A (ja) * 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、およびロボット
US10416030B2 (en) 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
CN106255870B (zh) 2015-04-07 2018-04-27 三角力量管理株式会社 力觉传感器及用于其的结构体
CH711167A1 (de) 2015-06-05 2016-12-15 Kistler Holding Ag Komponentenaufnehmer und Mehrkomponentenaufnehmer mit solchen Komponentenaufnehmern sowie Verwendung eines solchen Mehrkomponentenaufnehmers in einer Maschinenstruktur.
TWI620920B (zh) 2015-09-23 2018-04-11 中原大學 多軸向壓電應力感測元件、多軸向壓電應力感測元件極化之方法及其壓電感應偵測系統
JP5996078B1 (ja) 2015-10-19 2016-09-21 株式会社トライフォース・マネジメント 発電素子
WO2019078144A1 (ja) 2017-10-20 2019-04-25 株式会社村田製作所 押圧検知センサ及び電子機器
US20220268582A1 (en) * 2019-07-30 2022-08-25 Kyocera Corporation Vibrometer and method for detecting vibration

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US5295386A (en) * 1989-12-28 1994-03-22 Kazuhiro Okada Apparatus for detecting acceleration and method for testing this apparatus
WO1992017759A1 (en) * 1991-03-30 1992-10-15 Kazuhiro Okada Method of testing performance of device for measuring physical quantity by using change of distance between electrodes and physical quantity measuring device provided with function of executing this method
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JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
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Also Published As

Publication number Publication date
EP0636870A2 (de) 1995-02-01
EP0636870A3 (de) 1995-06-14
JP3256346B2 (ja) 2002-02-12
US5571972A (en) 1996-11-05
US5780749A (en) 1998-07-14
JPH0743226A (ja) 1995-02-14
US5682000A (en) 1997-10-28
DE69420914T2 (de) 2000-01-13
EP0636870B1 (de) 1999-09-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee