DE69424167D1 - Verfahren zur herstellung von präzisionsteilchen - Google Patents

Verfahren zur herstellung von präzisionsteilchen

Info

Publication number
DE69424167D1
DE69424167D1 DE69424167T DE69424167T DE69424167D1 DE 69424167 D1 DE69424167 D1 DE 69424167D1 DE 69424167 T DE69424167 T DE 69424167T DE 69424167 T DE69424167 T DE 69424167T DE 69424167 D1 DE69424167 D1 DE 69424167D1
Authority
DE
Germany
Prior art keywords
cavity
particles
binder
binder precursor
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69424167T
Other languages
English (en)
Other versions
DE69424167T2 (de
Inventor
Gary L Holmes
Scott R Culler
David H Hardy
Kimberly K Harmon
Robert V Heiti
William A Hendrickson
Thomas P Klun
Kathryn M Spurgeon
Charles J Studiner Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE69424167D1 publication Critical patent/DE69424167D1/de
Publication of DE69424167T2 publication Critical patent/DE69424167T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/2438—Coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24405—Polymer or resin [e.g., natural or synthetic rubber, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24413—Metal or metal compound
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24421—Silicon containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated
    • Y10T428/2998—Coated including synthetic resin or polymer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/184—Nonwoven scrim
    • Y10T442/198—Coated or impregnated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2041—Two or more non-extruded coatings or impregnations
    • Y10T442/2098—At least two coatings or impregnations of different chemical composition
    • Y10T442/2107—At least one coating or impregnation contains particulate material
    • Y10T442/2115—At least one coating or impregnation functions to fix pigments or particles on the surface of a coating or impregnation
DE1994624167 1993-06-30 1994-05-18 Verfahren zur herstellung von präzisionsteilchen Expired - Lifetime DE69424167T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/085,638 US5549962A (en) 1993-06-30 1993-06-30 Precisely shaped particles and method of making the same
PCT/US1994/005584 WO1995001241A1 (en) 1993-06-30 1994-05-18 Precisely shaped particles and method of making the same

Publications (2)

Publication Number Publication Date
DE69424167D1 true DE69424167D1 (de) 2000-05-31
DE69424167T2 DE69424167T2 (de) 2000-12-21

Family

ID=22192961

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994624167 Expired - Lifetime DE69424167T2 (de) 1993-06-30 1994-05-18 Verfahren zur herstellung von präzisionsteilchen

Country Status (14)

Country Link
US (5) US5549962A (de)
EP (2) EP0706440B1 (de)
JP (1) JP3579053B2 (de)
KR (1) KR100339099B1 (de)
CN (1) CN1081971C (de)
AT (1) ATE192059T1 (de)
AU (1) AU672316B2 (de)
BR (1) BR9406987A (de)
CA (1) CA2166398A1 (de)
DE (1) DE69424167T2 (de)
ES (1) ES2145138T3 (de)
RU (1) RU2123927C1 (de)
TW (1) TW334462B (de)
WO (1) WO1995001241A1 (de)

Families Citing this family (288)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW268969B (de) * 1992-10-02 1996-01-21 Minnesota Mining & Mfg
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5556438A (en) * 1994-09-21 1996-09-17 Norton Company Composite abrasive products
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US6352471B1 (en) 1995-11-16 2002-03-05 3M Innovative Properties Company Abrasive brush with filaments having plastic abrasive particles therein
US5903951A (en) * 1995-11-16 1999-05-18 Minnesota Mining And Manufacturing Company Molded brush segment
AU6593796A (en) * 1996-07-23 1998-02-10 Minnesota Mining And Manufacturing Company Structured abrasive article containing hollow spherical filler
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
CN1085575C (zh) * 1996-09-11 2002-05-29 美国3M公司 磨料制品及其制造方法
JP2001500068A (ja) * 1996-09-11 2001-01-09 ミネソタ・マイニング・アンド・マニュファクチャリング・カンパニー 研磨製品および製造方法
US6475253B2 (en) * 1996-09-11 2002-11-05 3M Innovative Properties Company Abrasive article and method of making
US5893935A (en) * 1997-01-09 1999-04-13 Minnesota Mining And Manufacturing Company Method for making abrasive grain using impregnation, and abrasive articles
US5776214A (en) * 1996-09-18 1998-07-07 Minnesota Mining And Manufacturing Company Method for making abrasive grain and abrasive articles
US5779743A (en) * 1996-09-18 1998-07-14 Minnesota Mining And Manufacturing Company Method for making abrasive grain and abrasive articles
US6206942B1 (en) 1997-01-09 2001-03-27 Minnesota Mining & Manufacturing Company Method for making abrasive grain using impregnation, and abrasive articles
US5917646A (en) * 1996-12-24 1999-06-29 Xerox Corporation Rotatable lens transmissive twisting ball display
US5815306A (en) * 1996-12-24 1998-09-29 Xerox Corporation "Eggcrate" substrate for a twisting ball display
US5777782A (en) * 1996-12-24 1998-07-07 Xerox Corporation Auxiliary optics for a twisting ball display
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US5851247A (en) * 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US6231629B1 (en) 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass
US5910471A (en) * 1997-03-07 1999-06-08 Minnesota Mining And Manufacturing Company Abrasive article for providing a clear surface finish on glass
US6194317B1 (en) 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
US8092707B2 (en) 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
US6224465B1 (en) 1997-06-26 2001-05-01 Stuart L. Meyer Methods and apparatus for chemical mechanical planarization using a microreplicated surface
US5866259A (en) * 1997-06-30 1999-02-02 Basf Corporation Primer coating compositions containing carbamate-functional acrylic polymers
US5983434A (en) * 1997-07-15 1999-11-16 Minnesota Mining And Manufacturing Company Rotary bristle tool with preferentially oriented bristles
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US5876470A (en) * 1997-08-01 1999-03-02 Minnesota Mining And Manufacturing Company Abrasive articles comprising a blend of abrasive particles
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US6251149B1 (en) * 1998-05-08 2001-06-26 Norton Company Abrasive grinding tools with hydrated and nonhalogenated inorganic grinding aids
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US6596041B2 (en) 2000-02-02 2003-07-22 3M Innovative Properties Company Fused AL2O3-MgO-rare earth oxide eutectic abrasive particles, abrasive articles, and methods of making and using the same
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US6669749B1 (en) 2000-02-02 2003-12-30 3M Innovative Properties Company Fused abrasive particles, abrasive articles, and methods of making and using the same
EP1280474A1 (de) 2000-05-09 2003-02-05 3M Innovative Properties Company Zahnmodelle und befestigungsverfahren dafür
US6685537B1 (en) * 2000-06-05 2004-02-03 Speedfam-Ipec Corporation Polishing pad window for a chemical mechanical polishing tool
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US6582488B1 (en) 2000-07-19 2003-06-24 3M Innovative Properties Company Fused Al2O3-rare earth oxide-ZrO2 eutectic materials
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US6454822B1 (en) 2000-07-19 2002-09-24 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-Al2O3·Y2O3 eutectic abrasive particles, abrasive articles, and methods of making and using the same
AU2001234702A1 (en) 2000-07-19 2002-02-05 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-al2o3. rare earth oxide eutectic materials, abrasive particles, abrasive articles, and methods of makingand using the same
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EP1303465A1 (de) 2000-07-19 2003-04-23 3M Innovative Properties Company Geschmolzene aluminiumoxid-seltenerdoxid-zirkonoxid eutektische materialien, schleifpartikel, schleifartikel, und verfahren zur herstellung und verwendung derselben
US6583080B1 (en) 2000-07-19 2003-06-24 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-Al2O3·rare earth oxide eutectic materials
US6458731B1 (en) 2000-07-19 2002-10-01 3M Innovative Properties Company Fused aluminum oxycarbide/nitride-AL2O3.Y2O3 eutectic materials
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CA2418078A1 (en) * 2000-09-08 2002-03-14 3M Innovative Properties Company Abrasive sheet, method of manufacturing the same and method to abrade a fiber optic connector
US6551176B1 (en) 2000-10-05 2003-04-22 Applied Materials, Inc. Pad conditioning disk
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US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
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EP0835724A3 (de) 2000-09-27
WO1995001241A1 (en) 1995-01-12
KR100339099B1 (ko) 2002-10-11
ES2145138T3 (es) 2000-07-01
JP3579053B2 (ja) 2004-10-20
CN1081971C (zh) 2002-04-03
CA2166398A1 (en) 1995-01-12
US5628952A (en) 1997-05-13
AU6953194A (en) 1995-01-24
US5500273A (en) 1996-03-19
CN1126454A (zh) 1996-07-10
BR9406987A (pt) 1996-03-12
TW334462B (en) 1998-06-21
DE69424167T2 (de) 2000-12-21
EP0706440B1 (de) 2000-04-26
AU672316B2 (en) 1996-09-26
EP0835724A2 (de) 1998-04-15
EP0706440A1 (de) 1996-04-17
RU2123927C1 (ru) 1998-12-27
JPH08512074A (ja) 1996-12-17
US5690705A (en) 1997-11-25
US5714259A (en) 1998-02-03
ATE192059T1 (de) 2000-05-15
US5549962A (en) 1996-08-27

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