DE69428253T2 - Haltbare Sputterschicht aus Metalloxid - Google Patents
Haltbare Sputterschicht aus MetalloxidInfo
- Publication number
- DE69428253T2 DE69428253T2 DE69428253T DE69428253T DE69428253T2 DE 69428253 T2 DE69428253 T2 DE 69428253T2 DE 69428253 T DE69428253 T DE 69428253T DE 69428253 T DE69428253 T DE 69428253T DE 69428253 T2 DE69428253 T2 DE 69428253T2
- Authority
- DE
- Germany
- Prior art keywords
- metal oxide
- durable metal
- sputter layer
- oxide sputter
- durable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2456—Coating containing TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/27—Oxides by oxidation of a coating previously applied
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0089—Reactive sputtering in metallic mode
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/322—Oxidation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12611—Oxide-containing component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/1266—O, S, or organic compound in metal component
- Y10T428/12667—Oxide of transition metal or Al
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15122993A | 1993-11-12 | 1993-11-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69428253D1 DE69428253D1 (de) | 2001-10-18 |
DE69428253T2 true DE69428253T2 (de) | 2002-06-27 |
Family
ID=22537855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69428253T Expired - Lifetime DE69428253T2 (de) | 1993-11-12 | 1994-11-02 | Haltbare Sputterschicht aus Metalloxid |
Country Status (6)
Country | Link |
---|---|
US (3) | US6346174B1 (de) |
EP (1) | EP0657562B1 (de) |
JP (1) | JP3314841B2 (de) |
CN (2) | CN1112461C (de) |
DE (1) | DE69428253T2 (de) |
HK (1) | HK1066247A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102022117697A1 (de) | 2022-07-15 | 2024-01-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Verglasungsscheibe sowie Verfahren zur Herstellung einer solchen Verglasungsscheibe |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0963960A1 (de) | 1998-06-08 | 1999-12-15 | Glaverbel | Durchsichtiges Substrat mit Silberbeschichtung |
CN1199254C (zh) * | 1999-06-28 | 2005-04-27 | 尤纳克西斯巴尔策斯公司 | 部件及其制造方法 |
US6730415B2 (en) * | 2000-08-21 | 2004-05-04 | Citizen Watch Co., Ltd. | Soft metal and method of manufacturing the soft metal, and decorative part and method of manufacturing the decorative part |
JP4093532B2 (ja) * | 2001-03-13 | 2008-06-04 | 独立行政法人理化学研究所 | アモルファス状金属酸化物の薄膜材料の製造方法 |
CN100468638C (zh) * | 2001-12-18 | 2009-03-11 | 松下电器产业株式会社 | 半导体元件的制造方法 |
EP1480920B1 (de) * | 2002-03-01 | 2006-11-02 | Cardinal CG Company | Dünnfilmbeschichtung mit einer transparenten grundierungsschicht |
US6919133B2 (en) | 2002-03-01 | 2005-07-19 | Cardinal Cg Company | Thin film coating having transparent base layer |
WO2005035822A1 (en) * | 2003-10-07 | 2005-04-21 | Deposition Sciences, Inc. | Apparatus and process for high rate deposition of rutile titanium dioxide |
EP1694275A2 (de) * | 2003-12-18 | 2006-08-30 | AFG Industries, Inc. | Schutzschicht für optische beschichtungen mit verbesserter korrosions- und kratzfestigkeit |
US9214590B2 (en) | 2003-12-19 | 2015-12-15 | The University Of North Carolina At Chapel Hill | High fidelity nano-structures and arrays for photovoltaics and methods of making the same |
EP1772535B1 (de) * | 2004-05-28 | 2013-05-22 | NGK Insulators, Ltd. | Verfahren zum färben der oberfläche eines auf zirconium basierenden metallglasbauteils |
JP2008505841A (ja) | 2004-07-12 | 2008-02-28 | 日本板硝子株式会社 | 低保守コーティング |
WO2006030254A1 (en) * | 2004-09-15 | 2006-03-23 | Kabushiki Kaisha Suzutora (Suzutora Corporation) | Metal-coated textile |
US7923114B2 (en) | 2004-12-03 | 2011-04-12 | Cardinal Cg Company | Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films |
US8092660B2 (en) | 2004-12-03 | 2012-01-10 | Cardinal Cg Company | Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films |
US20060257555A1 (en) * | 2005-05-12 | 2006-11-16 | Brady Brian K | Sub-layer for adhesion promotion of fuel cell bipolar plate coatings |
MX2007014164A (es) * | 2005-05-12 | 2008-02-25 | Agc Flat Glass North America | Recubrimiento de baja emisividad con bajo coeficiente de ganancia de calor solar, propiedades quimicas y mecanicas mejoradas y metodo para fabricar el mismo. |
JP2007102179A (ja) * | 2005-09-07 | 2007-04-19 | Sumitomo Chemical Co Ltd | 高耐久偏光板及び液晶表示装置 |
AT502526B1 (de) * | 2005-09-09 | 2009-09-15 | Boehlerit Gmbh & Co Kg | Verfahren zur herstellung von schneidplatten mit färbiger oberfläche |
US7342716B2 (en) | 2005-10-11 | 2008-03-11 | Cardinal Cg Company | Multiple cavity low-emissivity coatings |
US7339728B2 (en) * | 2005-10-11 | 2008-03-04 | Cardinal Cg Company | Low-emissivity coatings having high visible transmission and low solar heat gain coefficient |
US7572511B2 (en) * | 2005-10-11 | 2009-08-11 | Cardinal Cg Company | High infrared reflection coatings |
WO2007121211A2 (en) * | 2006-04-11 | 2007-10-25 | Cardinal Cg Company | Photocatalytic coatings having improved low-maintenance properties |
WO2007124291A2 (en) | 2006-04-19 | 2007-11-01 | Cardinal Cg Company | Opposed functional coatings having comparable single surface reflectances |
CN101573802B (zh) * | 2006-05-09 | 2012-08-08 | 北卡罗来纳-查佩尔山大学 | 光伏器件用的高保真纳米结构体和阵列及其制造方法 |
US8133591B2 (en) * | 2006-06-27 | 2012-03-13 | GM Global Technology Operations LLC | Adhesion of polymeric coatings to bipolar plate surfaces using silane coupling agents |
US20080011599A1 (en) | 2006-07-12 | 2008-01-17 | Brabender Dennis M | Sputtering apparatus including novel target mounting and/or control |
JP5474796B2 (ja) | 2007-09-14 | 2014-04-16 | 日本板硝子株式会社 | 低保守コーティングおよび低保守コーティングの製造方法 |
JP5130024B2 (ja) * | 2007-11-12 | 2013-01-30 | ローム株式会社 | 有機el発光素子 |
US7901781B2 (en) * | 2007-11-23 | 2011-03-08 | Agc Flat Glass North America, Inc. | Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same |
CN101628492B (zh) * | 2008-07-15 | 2012-09-26 | 比亚迪股份有限公司 | 一种镀膜材料及其制备方法 |
FR2950878B1 (fr) * | 2009-10-01 | 2011-10-21 | Saint Gobain | Procede de depot de couche mince |
KR101296684B1 (ko) * | 2009-11-18 | 2013-08-19 | 한국전자통신연구원 | 상 분리 현상을 이용한 유기 발광 다이오드 및 그 제조 방법 |
KR20110090408A (ko) * | 2010-02-03 | 2011-08-10 | 삼성전자주식회사 | 박막 형성 방법, 표시판용 금속 배선 및 이를 포함하는 박막 트랜지스터 표시판 및 그 제조 방법 |
CN102477533B (zh) * | 2010-11-26 | 2015-03-11 | 鸿富锦精密工业(深圳)有限公司 | 壳体及其制作方法 |
CN102560358A (zh) * | 2010-12-16 | 2012-07-11 | 鸿富锦精密工业(深圳)有限公司 | 壳体及其制备方法 |
US8557391B2 (en) | 2011-02-24 | 2013-10-15 | Guardian Industries Corp. | Coated article including low-emissivity coating, insulating glass unit including coated article, and/or methods of making the same |
US8790783B2 (en) | 2011-03-03 | 2014-07-29 | Guardian Industries Corp. | Barrier layers comprising Ni and/or Ti, coated articles including barrier layers, and methods of making the same |
US8709604B2 (en) | 2011-03-03 | 2014-04-29 | Guardian Industries Corp. | Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same |
CN102732825A (zh) * | 2011-04-06 | 2012-10-17 | 鸿富锦精密工业(深圳)有限公司 | 镀膜件的制备方法及由该方法制得的镀膜件 |
KR101278059B1 (ko) | 2011-12-12 | 2013-06-24 | 삼성코닝정밀소재 주식회사 | 써모크로믹 글라스 제조방법 |
US20140016234A1 (en) * | 2012-07-13 | 2014-01-16 | Darin D. Lindig | Hardened layer on a drive head |
CN103325921B (zh) * | 2013-06-04 | 2016-04-20 | 苏州晶品新材料股份有限公司 | 高导热荧光绝缘led封装结构 |
WO2014198668A1 (de) * | 2013-06-10 | 2014-12-18 | Limo Patentverwaltung Gmbh & Co. Kg | Verfahren zur herstellung einer kratzfesten schicht auf einem glassubstrat |
EP3541762B1 (de) | 2016-11-17 | 2022-03-02 | Cardinal CG Company | Statisch-dissipative beschichtungstechnologie |
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CN110668706B (zh) * | 2019-01-26 | 2022-07-26 | 耀华(宜宾)玻璃有限公司 | 一种低辐射镀膜玻璃的加工工艺 |
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-
1994
- 1994-11-02 DE DE69428253T patent/DE69428253T2/de not_active Expired - Lifetime
- 1994-11-02 EP EP94117241A patent/EP0657562B1/de not_active Expired - Lifetime
- 1994-11-11 CN CN94117931A patent/CN1112461C/zh not_active Expired - Lifetime
- 1994-11-11 JP JP27796594A patent/JP3314841B2/ja not_active Expired - Lifetime
- 1994-11-11 CN CNB031220347A patent/CN1239736C/zh not_active Expired - Lifetime
-
1995
- 1995-07-28 US US08/508,408 patent/US6346174B1/en not_active Expired - Lifetime
-
2002
- 2002-02-12 US US10/075,021 patent/US20020127439A1/en not_active Abandoned
-
2004
- 2004-11-24 HK HK04109274A patent/HK1066247A1/xx unknown
-
2006
- 2006-12-11 US US11/636,758 patent/US20070196695A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102022117697A1 (de) | 2022-07-15 | 2024-01-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Verglasungsscheibe sowie Verfahren zur Herstellung einer solchen Verglasungsscheibe |
Also Published As
Publication number | Publication date |
---|---|
US20070196695A1 (en) | 2007-08-23 |
HK1066247A1 (en) | 2005-03-18 |
EP0657562B1 (de) | 2001-09-12 |
US20020009621A1 (en) | 2002-01-24 |
JPH07197250A (ja) | 1995-08-01 |
US6346174B1 (en) | 2002-02-12 |
EP0657562A3 (de) | 1996-01-10 |
CN1112461C (zh) | 2003-06-25 |
CN1105712A (zh) | 1995-07-26 |
JP3314841B2 (ja) | 2002-08-19 |
CN1515701A (zh) | 2004-07-28 |
DE69428253D1 (de) | 2001-10-18 |
US20020127439A1 (en) | 2002-09-12 |
EP0657562A2 (de) | 1995-06-14 |
CN1239736C (zh) | 2006-02-01 |
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