DE69431148D1 - Methode zur Analyse von Oberflächen verunreinigungen auf Halbleitersubstraten - Google Patents

Methode zur Analyse von Oberflächen verunreinigungen auf Halbleitersubstraten

Info

Publication number
DE69431148D1
DE69431148D1 DE69431148T DE69431148T DE69431148D1 DE 69431148 D1 DE69431148 D1 DE 69431148D1 DE 69431148 T DE69431148 T DE 69431148T DE 69431148 T DE69431148 T DE 69431148T DE 69431148 D1 DE69431148 D1 DE 69431148D1
Authority
DE
Germany
Prior art keywords
analysis
semiconductor substrates
surface contamination
contamination
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69431148T
Other languages
English (en)
Other versions
DE69431148T2 (de
Inventor
Ayako Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69431148D1 publication Critical patent/DE69431148D1/de
Publication of DE69431148T2 publication Critical patent/DE69431148T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
DE69431148T 1993-12-09 1994-12-07 Methode zur Analyse von Oberflächen verunreinigungen auf Halbleitersubstraten Expired - Fee Related DE69431148T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30899793A JP3278513B2 (ja) 1993-12-09 1993-12-09 半導体基板の不純物分析方法

Publications (2)

Publication Number Publication Date
DE69431148D1 true DE69431148D1 (de) 2002-09-12
DE69431148T2 DE69431148T2 (de) 2003-03-27

Family

ID=17987683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69431148T Expired - Fee Related DE69431148T2 (de) 1993-12-09 1994-12-07 Methode zur Analyse von Oberflächen verunreinigungen auf Halbleitersubstraten

Country Status (6)

Country Link
US (1) US5633172A (de)
EP (1) EP0657924B1 (de)
JP (1) JP3278513B2 (de)
KR (1) KR100254015B1 (de)
DE (1) DE69431148T2 (de)
TW (1) TW267247B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2882377B2 (ja) * 1996-08-23 1999-04-12 日本電気株式会社 金属の回収容器及び金属の回収方法
EP0838850A3 (de) * 1996-10-24 1999-05-06 Hamamatsu Photonics K.K. Methode zur Plazierung fluoreszierender Einzelmoleküle auf und Visualisierung struktureller Defekte von Substratoberflächen
KR100230990B1 (en) * 1996-12-18 1999-11-15 Samsung Electronics Co Ltd Analysis method of aluminum layer for semiconductor wafer
JP3336898B2 (ja) * 1997-02-28 2002-10-21 三菱電機株式会社 シリコンウエハ表面の不純物回収方法およびその装置
US5922606A (en) * 1997-09-16 1999-07-13 Nalco Chemical Company Fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips
US6210640B1 (en) 1998-06-08 2001-04-03 Memc Electronic Materials, Inc. Collector for an automated on-line bath analysis system
US6420275B1 (en) 1999-08-30 2002-07-16 Micron Technology, Inc. System and method for analyzing a semiconductor surface
WO2005073692A1 (ja) * 2004-01-29 2005-08-11 Nas Giken Inc. 基板検査装置と基板検査方法と回収治具
JP4772610B2 (ja) 2006-07-19 2011-09-14 東京エレクトロン株式会社 分析方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660250A (en) * 1967-12-22 1972-05-02 Ibm Method of determining impurity profile of a semiconductor body
US4168212A (en) * 1974-05-16 1979-09-18 The Post Office Determining semiconductor characteristic
US4180439A (en) * 1976-03-15 1979-12-25 International Business Machines Corporation Anodic etching method for the detection of electrically active defects in silicon
JPH0658927B2 (ja) * 1983-09-26 1994-08-03 株式会社東芝 半導体薄膜の分析方法および分析用試料の回収装置
JPS617639A (ja) * 1984-06-22 1986-01-14 Toshiba Corp 半導体薄膜の分解装置
JPH0625717B2 (ja) * 1988-04-25 1994-04-06 株式会社東芝 不純物の測定方法
US4990459A (en) * 1988-04-25 1991-02-05 Kabushiki Kaisha Toshiba Impurity measuring method
JP2604037B2 (ja) * 1988-07-11 1997-04-23 株式会社東芝 半導体処理装置
JP2772035B2 (ja) * 1989-05-31 1998-07-02 東芝セラミックス株式会社 ウエハ表面の不純物量の測定方法
JPH03239343A (ja) * 1990-02-17 1991-10-24 Sharp Corp ウエハ表面液滴回収装置
JPH04110653A (ja) * 1990-08-31 1992-04-13 Hitachi Ltd プラズマを用いた気体試料の分析方法
GB9022003D0 (en) * 1990-10-10 1990-11-21 Interox Chemicals Ltd Purification of hydrogen peroxide
JP2568756B2 (ja) * 1990-12-27 1997-01-08 松下電器産業株式会社 半導体基板表面の不純物回収装置
JPH05343494A (ja) * 1992-06-09 1993-12-24 Nec Corp 半導体装置の製造工程における汚染物の分析法
US5385629A (en) * 1993-10-14 1995-01-31 Micron Semiconductor, Inc. After etch test method and apparatus

Also Published As

Publication number Publication date
EP0657924A3 (de) 1996-07-10
TW267247B (de) 1996-01-01
DE69431148T2 (de) 2003-03-27
EP0657924A2 (de) 1995-06-14
KR100254015B1 (ko) 2000-05-01
US5633172A (en) 1997-05-27
JPH07161791A (ja) 1995-06-23
JP3278513B2 (ja) 2002-04-30
EP0657924B1 (de) 2002-08-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee