DE69433361D1 - Herstellungsmethode von selbstmontierenden Mikrostrukturen - Google Patents

Herstellungsmethode von selbstmontierenden Mikrostrukturen

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Publication number
DE69433361D1
DE69433361D1 DE69433361T DE69433361T DE69433361D1 DE 69433361 D1 DE69433361 D1 DE 69433361D1 DE 69433361 T DE69433361 T DE 69433361T DE 69433361 T DE69433361 T DE 69433361T DE 69433361 D1 DE69433361 D1 DE 69433361D1
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DE
Germany
Prior art keywords
self
manufacturing
assembling microstructures
microstructures
assembling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69433361T
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English (en)
Other versions
DE69433361T2 (de
Inventor
S Smith
J Yeh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
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Publication of DE69433361D1 publication Critical patent/DE69433361D1/de
Application granted granted Critical
Publication of DE69433361T2 publication Critical patent/DE69433361T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
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    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
DE69433361T 1993-12-17 1994-12-07 Herstellungsmethode von selbstmontierenden Mikrostrukturen Expired - Lifetime DE69433361T2 (de)

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US169298 1993-12-17
US08/169,298 US5545291A (en) 1993-12-17 1993-12-17 Method for fabricating self-assembling microstructures
PCT/US1994/014152 WO1995017005A1 (en) 1993-12-17 1994-12-07 Method for fabricating self-assembling microstructures

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WO1995017005A1 (en) 1995-06-22
CN100466250C (zh) 2009-03-04
JP3884426B2 (ja) 2007-02-21
JP3535166B2 (ja) 2004-06-07
CA2177276A1 (en) 1995-06-22
JPH09506742A (ja) 1997-06-30
CN1492483A (zh) 2004-04-28
EP0734586A1 (de) 1996-10-02
JP2006074062A (ja) 2006-03-16
JP2004165680A (ja) 2004-06-10
EP1463116A2 (de) 2004-09-29
US5783856A (en) 1998-07-21
EP1463116A3 (de) 2007-12-05
US5545291A (en) 1996-08-13
CA2177276C (en) 2008-04-01
CN1103118C (zh) 2003-03-12
EP0734586A4 (de) 1998-10-14
CN1137329A (zh) 1996-12-04
CN1263098C (zh) 2006-07-05
AU1304695A (en) 1995-07-03
DE69433361T2 (de) 2004-09-16
JP3828567B2 (ja) 2006-10-04
AU681928B2 (en) 1997-09-11
EP0734586B1 (de) 2003-11-26
EP1372194A1 (de) 2003-12-17
CN1893062A (zh) 2007-01-10

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