DE69500268T2 - Dämpfende Phasenverschiebungsmaske und Herstellungsverfahren - Google Patents

Dämpfende Phasenverschiebungsmaske und Herstellungsverfahren

Info

Publication number
DE69500268T2
DE69500268T2 DE69500268T DE69500268T DE69500268T2 DE 69500268 T2 DE69500268 T2 DE 69500268T2 DE 69500268 T DE69500268 T DE 69500268T DE 69500268 T DE69500268 T DE 69500268T DE 69500268 T2 DE69500268 T2 DE 69500268T2
Authority
DE
Germany
Prior art keywords
manufacturing process
phase shift
shift mask
damping phase
damping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69500268T
Other languages
English (en)
Other versions
DE69500268D1 (de
Inventor
Steven Daniel Flanders
David Shawn O'grady
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69500268D1 publication Critical patent/DE69500268D1/de
Application granted granted Critical
Publication of DE69500268T2 publication Critical patent/DE69500268T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
DE69500268T 1994-02-14 1995-02-07 Dämpfende Phasenverschiebungsmaske und Herstellungsverfahren Expired - Lifetime DE69500268T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19489294A 1994-02-14 1994-02-14

Publications (2)

Publication Number Publication Date
DE69500268D1 DE69500268D1 (de) 1997-06-05
DE69500268T2 true DE69500268T2 (de) 1997-10-30

Family

ID=22719284

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69500268T Expired - Lifetime DE69500268T2 (de) 1994-02-14 1995-02-07 Dämpfende Phasenverschiebungsmaske und Herstellungsverfahren

Country Status (5)

Country Link
US (1) US5503951A (de)
EP (1) EP0674223B1 (de)
JP (1) JP3119422B2 (de)
KR (1) KR0139030B1 (de)
DE (1) DE69500268T2 (de)

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US6228539B1 (en) 1996-09-18 2001-05-08 Numerical Technologies, Inc. Phase shifting circuit manufacture method and apparatus
US5780208A (en) * 1996-10-17 1998-07-14 Vlsi Technology, Inc. Method and mask design to minimize reflective notching effects
US5792578A (en) * 1997-01-13 1998-08-11 Taiwan Semiconductor Manufacturing Company Ltd. Method of forming multiple layer attenuating phase shifting masks
US5783337A (en) * 1997-05-15 1998-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. Process to fabricate a double layer attenuated phase shift mask (APSM) with chrome border
US6106979A (en) * 1997-12-30 2000-08-22 Micron Technology, Inc. Use of attenuating phase-shifting mask for improved printability of clear-field patterns
US6077630A (en) * 1998-01-08 2000-06-20 Micron Technology, Inc. Subresolution grating for attenuated phase shifting mask fabrication
KR100510447B1 (ko) * 1998-01-12 2005-10-21 삼성전자주식회사 반도체 소자의 위상 반전 마스크 및 그 제조방법
US5998069A (en) 1998-02-27 1999-12-07 Micron Technology, Inc. Electrically programmable photolithography mask
US6096457A (en) * 1998-02-27 2000-08-01 Micron Technology, Inc. Method for optimizing printing of a phase shift mask having a phase shift error
US6150058A (en) * 1998-06-12 2000-11-21 Taiwan Semiconductor Manufacturing Company Method of making attenuating phase-shifting mask using different exposure doses
US6277527B1 (en) 1999-04-29 2001-08-21 International Business Machines Corporation Method of making a twin alternating phase shift mask
US6194103B1 (en) 1999-07-08 2001-02-27 Taiwan Semiconductor Manufacturing Company E-beam double exposure method for manufacturing ASPM mask with chrome border
JP2001033938A (ja) * 1999-07-22 2001-02-09 Oki Electric Ind Co Ltd ハーフトーン位相シフトマスクの特性補正方法
US6251546B1 (en) 1999-09-16 2001-06-26 Agere Systems Guardian Corp. Method of fabricating devices using an attenuated phase-shifting mask and an attenuated phase-shifting mask
US6277528B1 (en) 2000-01-21 2001-08-21 Taiwan Semiconductor Manufacturing Company Method to change transmittance of attenuated phase-shifting masks
US6403267B1 (en) 2000-01-21 2002-06-11 Taiwan Semiconductor Manufacturing Company Method for high transmittance attenuated phase-shifting mask fabrication
US6524752B1 (en) 2000-07-05 2003-02-25 Numerical Technologies, Inc. Phase shift masking for intersecting lines
US7083879B2 (en) 2001-06-08 2006-08-01 Synopsys, Inc. Phase conflict resolution for photolithographic masks
US6681379B2 (en) 2000-07-05 2004-01-20 Numerical Technologies, Inc. Phase shifting design and layout for static random access memory
US6503666B1 (en) 2000-07-05 2003-01-07 Numerical Technologies, Inc. Phase shift masking for complex patterns
US6777141B2 (en) 2000-07-05 2004-08-17 Numerical Technologies, Inc. Phase shift mask including sub-resolution assist features for isolated spaces
US6787271B2 (en) * 2000-07-05 2004-09-07 Numerical Technologies, Inc. Design and layout of phase shifting photolithographic masks
US6541165B1 (en) 2000-07-05 2003-04-01 Numerical Technologies, Inc. Phase shift mask sub-resolution assist features
US6539521B1 (en) 2000-09-29 2003-03-25 Numerical Technologies, Inc. Dissection of corners in a fabrication layout for correcting proximity effects
US6584610B1 (en) 2000-10-25 2003-06-24 Numerical Technologies, Inc. Incrementally resolved phase-shift conflicts in layouts for phase-shifted features
US6622288B1 (en) 2000-10-25 2003-09-16 Numerical Technologies, Inc. Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features
US6653026B2 (en) 2000-12-20 2003-11-25 Numerical Technologies, Inc. Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask
US6551750B2 (en) 2001-03-16 2003-04-22 Numerical Technologies, Inc. Self-aligned fabrication technique for tri-tone attenuated phase-shifting masks
US6635393B2 (en) 2001-03-23 2003-10-21 Numerical Technologies, Inc. Blank for alternating PSM photomask with charge dissipation layer
US6566019B2 (en) 2001-04-03 2003-05-20 Numerical Technologies, Inc. Using double exposure effects during phase shifting to control line end shortening
US6553560B2 (en) 2001-04-03 2003-04-22 Numerical Technologies, Inc. Alleviating line end shortening in transistor endcaps by extending phase shifters
US6569583B2 (en) 2001-05-04 2003-05-27 Numerical Technologies, Inc. Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts
US6593038B2 (en) 2001-05-04 2003-07-15 Numerical Technologies, Inc. Method and apparatus for reducing color conflicts during trim generation for phase shifters
US6852471B2 (en) 2001-06-08 2005-02-08 Numerical Technologies, Inc. Exposure control for phase shifting photolithographic masks
US6523165B2 (en) 2001-07-13 2003-02-18 Numerical Technologies, Inc. Alternating phase shift mask design conflict resolution
US6664009B2 (en) 2001-07-27 2003-12-16 Numerical Technologies, Inc. Method and apparatus for allowing phase conflicts in phase shifting mask and chromeless phase edges
US6684382B2 (en) 2001-08-31 2004-01-27 Numerical Technologies, Inc. Microloading effect correction
US6735752B2 (en) 2001-09-10 2004-05-11 Numerical Technologies, Inc. Modifying a hierarchical representation of a circuit to process features created by interactions between cells
US6738958B2 (en) 2001-09-10 2004-05-18 Numerical Technologies, Inc. Modifying a hierarchical representation of a circuit to process composite gates
US6698007B2 (en) 2001-10-09 2004-02-24 Numerical Technologies, Inc. Method and apparatus for resolving coloring conflicts between phase shifters
US7008729B2 (en) * 2002-10-22 2006-03-07 Winbond Electronics Corporation Method for fabricating phase mask of photolithography process
US7008730B2 (en) 2003-01-07 2006-03-07 Taiwan Semiconductor Manufacturing Co., Ltd. Application of high transmittance attenuating phase shifting mask with dark tone for sub-0.1 micrometer logic device contact hole pattern in 193 NM lithography
JP2004251969A (ja) * 2003-02-18 2004-09-09 Renesas Technology Corp 位相シフトマスク、位相シフトマスクを用いたパターンの形成方法および電子デバイスの製造方法
WO2006037027A1 (en) * 2004-09-27 2006-04-06 Toppan Photomasks, Inc. Phase-shift mask providing balanced light intensity through different phase-shift apertures and method for forming such phase-shift mask
EP1876494A1 (de) * 2006-07-06 2008-01-09 ASML MaskTools B.V. Verbesserte CPL-Maske sowie Verfahren und Programm zu ihrer Erzeugung
US20080261122A1 (en) * 2007-04-20 2008-10-23 Jeffrey Peter Gambino Photolithography mask with protective capping layer
US20080261120A1 (en) * 2007-04-20 2008-10-23 Jeffrey Peter Gambino Photolithography mask with integrally formed protective capping layer
TWI450029B (zh) * 2012-09-20 2014-08-21 Univ Nat Cheng Kung 金屬嵌入光罩及其製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1313792C (en) * 1986-02-28 1993-02-23 Junji Hirokane Method of manufacturing photo-mask and photo-mask manufactured thereby
US4707218A (en) * 1986-10-28 1987-11-17 International Business Machines Corporation Lithographic image size reduction
JPH0770094B2 (ja) * 1987-12-04 1995-07-31 シャープ株式会社 ディスク状光記録媒体の製造方法および製造用フォトマスク
US4885231A (en) * 1988-05-06 1989-12-05 Bell Communications Research, Inc. Phase-shifted gratings by selective image reversal of photoresist
US5286581A (en) * 1991-08-19 1994-02-15 Motorola, Inc. Phase-shift mask and method for making
US5147812A (en) * 1992-04-01 1992-09-15 Motorola, Inc. Fabrication method for a sub-micron geometry semiconductor device
US5288569A (en) * 1992-04-23 1994-02-22 International Business Machines Corporation Feature biassing and absorptive phase-shifting techniques to improve optical projection imaging
US5225035A (en) * 1992-06-15 1993-07-06 Micron Technology, Inc. Method of fabricating a phase-shifting photolithographic mask reticle having identical light transmittance in all transparent regions

Also Published As

Publication number Publication date
US5503951A (en) 1996-04-02
EP0674223B1 (de) 1997-05-02
EP0674223A3 (de) 1995-11-08
KR950025481A (ko) 1995-09-15
JP3119422B2 (ja) 2000-12-18
DE69500268D1 (de) 1997-06-05
EP0674223A2 (de) 1995-09-27
KR0139030B1 (ko) 1998-04-28
JPH07253654A (ja) 1995-10-03

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Legal Events

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8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7