DE69500529T2 - Mikropumpe - Google Patents

Mikropumpe

Info

Publication number
DE69500529T2
DE69500529T2 DE69500529T DE69500529T DE69500529T2 DE 69500529 T2 DE69500529 T2 DE 69500529T2 DE 69500529 T DE69500529 T DE 69500529T DE 69500529 T DE69500529 T DE 69500529T DE 69500529 T2 DE69500529 T2 DE 69500529T2
Authority
DE
Germany
Prior art keywords
micro pump
micro
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69500529T
Other languages
English (en)
Other versions
DE69500529D1 (de
Inventor
Lintel Harald Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Debiotech SA
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of DE69500529D1 publication Critical patent/DE69500529D1/de
Application granted granted Critical
Publication of DE69500529T2 publication Critical patent/DE69500529T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14212—Pumping with an aspiration and an expulsion action
    • A61M5/14224—Diaphragm type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/1052—Flap valves the valve being formed by one or more flexible elements two flexible elements oscillating around a fixed point
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272—Electro-active or magneto-active materials
    • A61M2205/0294—Piezoelectric materials
DE69500529T 1994-01-14 1995-01-12 Mikropumpe Expired - Lifetime DE69500529T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH00117/94A CH689836A5 (fr) 1994-01-14 1994-01-14 Micropompe.
PCT/IB1995/000028 WO1995019502A1 (fr) 1994-01-14 1995-01-12 Micropompe

Publications (2)

Publication Number Publication Date
DE69500529D1 DE69500529D1 (de) 1997-09-11
DE69500529T2 true DE69500529T2 (de) 1998-03-12

Family

ID=4179641

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69500529T Expired - Lifetime DE69500529T2 (de) 1994-01-14 1995-01-12 Mikropumpe

Country Status (9)

Country Link
US (1) US5759014A (de)
EP (1) EP0739451B1 (de)
JP (1) JP3948493B2 (de)
AU (1) AU679311B2 (de)
CA (1) CA2181084C (de)
CH (1) CH689836A5 (de)
DE (1) DE69500529T2 (de)
ES (1) ES2107908T3 (de)
WO (1) WO1995019502A1 (de)

Families Citing this family (237)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5919582A (en) 1995-10-18 1999-07-06 Aer Energy Resources, Inc. Diffusion controlled air vent and recirculation air manager for a metal-air battery
DE19546570C1 (de) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe
WO1997029283A1 (fr) * 1996-02-09 1997-08-14 Westonbridge International Limited Filtre micro-usine pour micropompe
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes
AU717626B2 (en) * 1996-10-03 2000-03-30 Debiotech S.A. Micro-machined device for fluids and method of manufacture
DE19648458C1 (de) * 1996-11-22 1998-07-09 Evotec Biosystems Gmbh Mikromechanische Ejektionspumpe zum Heraustrennen kleinster Fluidvolumina aus einem strömenden Probenfluid
EP0956449B1 (de) * 1996-12-11 2002-05-29 Gesim Gesellschaft für Silizium-Mikrosysteme mbH Mikroejektionspumpe
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
US6520778B1 (en) 1997-02-18 2003-02-18 Formfactor, Inc. Microelectronic contact structures, and methods of making same
DE19802367C1 (de) * 1997-02-19 1999-09-23 Hahn Schickard Ges Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben
EP1003973B1 (de) * 1997-08-20 2003-04-16 Westonbridge International Limited Mikropumpe mit einem einlasssteuerorgan zum selbstansaugen
US7485263B2 (en) * 1997-08-26 2009-02-03 Eppendorf Ag Microproportioning system
US6833242B2 (en) * 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung
US6807734B2 (en) 1998-02-13 2004-10-26 Formfactor, Inc. Microelectronic contact structures, and methods of making same
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
US6247908B1 (en) * 1998-03-05 2001-06-19 Seiko Instruments Inc. Micropump
US6780591B2 (en) 1998-05-01 2004-08-24 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US7875440B2 (en) 1998-05-01 2011-01-25 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US6148635A (en) * 1998-10-19 2000-11-21 The Board Of Trustees Of The University Of Illinois Active compressor vapor compression cycle integrated heat transfer device
US6672875B1 (en) 1998-12-02 2004-01-06 Formfactor, Inc. Spring interconnect structures
US6255126B1 (en) * 1998-12-02 2001-07-03 Formfactor, Inc. Lithographic contact elements
US6268015B1 (en) 1998-12-02 2001-07-31 Formfactor Method of making and using lithographic contact springs
US6491968B1 (en) 1998-12-02 2002-12-10 Formfactor, Inc. Methods for making spring interconnect structures
JP2002531915A (ja) * 1998-12-02 2002-09-24 フォームファクター，インコーポレイテッド リソグラフィ接触要素
US6475658B1 (en) 1998-12-18 2002-11-05 Aer Energy Resources, Inc. Air manager systems for batteries utilizing a diaphragm or bellows
US6436564B1 (en) 1998-12-18 2002-08-20 Aer Energy Resources, Inc. Air mover for a battery utilizing a variable volume enclosure
JP2000314381A (ja) * 1999-03-03 2000-11-14 Ngk Insulators Ltd ポンプ
MXPA01009999A (es) * 1999-04-06 2003-07-14 Uab Research Foundation Metodo para examinar las condiciones de cristalizacion en el crecimiento de cristales en solucion.
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US20020164812A1 (en) * 1999-04-06 2002-11-07 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7247490B2 (en) * 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
US7306672B2 (en) * 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7601270B1 (en) * 1999-06-28 2009-10-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7195670B2 (en) * 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6444106B1 (en) 1999-07-09 2002-09-03 Orchid Biosciences, Inc. Method of moving fluid in a microfluidic device
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
CA2410306C (en) * 2000-05-25 2009-12-15 Westonbridge International Limited Micromachined fluidic device and method for making same
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6824915B1 (en) 2000-06-12 2004-11-30 The Gillette Company Air managing systems and methods for gas depolarized power supplies utilizing a diaphragm
AU2001273057A1 (en) * 2000-06-27 2002-01-08 Fluidigm Corporation A microfluidic design automation method and system
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
WO2002023163A1 (en) 2000-09-15 2002-03-21 California Institute Of Technology Microfabricated crossflow devices and methods
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
WO2002029106A2 (en) * 2000-10-03 2002-04-11 California Institute Of Technology Microfluidic devices and methods of use
AU1189702A (en) * 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
EP1334279A1 (de) * 2000-11-06 2003-08-13 Nanostream, Inc. Unidirektional-durchfluss-mikrofluidkomponenten
WO2002065005A1 (en) * 2000-11-06 2002-08-22 California Institute Of Technology Electrostatic valves for microfluidic devices
US6951632B2 (en) * 2000-11-16 2005-10-04 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
EP2381116A1 (de) * 2000-11-16 2011-10-26 California Institute of Technology Vorrichtungen und Verfahren zur Durchführung von Tests und Screening mit hohem Durchsatz
US20020098122A1 (en) * 2001-01-22 2002-07-25 Angad Singh Active disposable microfluidic system with externally actuated micropump
US20050143789A1 (en) * 2001-01-30 2005-06-30 Whitehurst Todd K. Methods and systems for stimulating a peripheral nerve to treat chronic pain
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
WO2002072892A1 (en) 2001-03-12 2002-09-19 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences by asynchronous base extension
US7670429B2 (en) * 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
EP1384022A4 (de) 2001-04-06 2004-08-04 California Inst Of Techn Nukleinsäure-amplifikation verwendende mikrofluidvorrichtungen
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
WO2002081183A1 (en) 2001-04-06 2002-10-17 Fluidigm Corporation Polymer surface modification
TW561223B (en) * 2001-04-24 2003-11-11 Matsushita Electric Works Ltd Pump and its producing method
US6593192B2 (en) 2001-04-27 2003-07-15 Micron Technology, Inc. Method of forming a dual-gated semiconductor-on-insulator device
US6805841B2 (en) 2001-05-09 2004-10-19 The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin Liquid pumping system
ES2187276B1 (es) * 2001-05-16 2004-08-01 Quimica Farmaceutica Bayer,S.A. Composiciones orales para el tratamiento de humanos obesos y no diabeticos.
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
SG106631A1 (en) * 2001-08-31 2004-10-29 Agency Science Tech & Res Liquid delivering device
US7134486B2 (en) * 2001-09-28 2006-11-14 The Board Of Trustees Of The Leeland Stanford Junior University Control of electrolysis gases in electroosmotic pump systems
US6942018B2 (en) * 2001-09-28 2005-09-13 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic microchannel cooling system
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
WO2003031066A1 (en) 2001-10-11 2003-04-17 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
TW498933U (en) * 2001-10-18 2002-08-11 Ind Tech Res Inst Negative pressure balance maintaining device for micropump
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
AU2002351187A1 (en) 2001-11-30 2003-06-17 Fluidigm Corporation Microfluidic device and methods of using same
US6921253B2 (en) * 2001-12-21 2005-07-26 Cornell Research Foundation, Inc. Dual chamber micropump having checkvalves
EP1461414B1 (de) * 2001-12-31 2009-04-22 The Provost Fellows and Scholars of the College of the Holy Undivided Trinity of Queen Elizabeth Near Dublin Vorrichtung zur durchführung von auf zellen basierende analyseverfahren
US6606251B1 (en) 2002-02-07 2003-08-12 Cooligy Inc. Power conditioning module
US20030180711A1 (en) * 2002-02-21 2003-09-25 Turner Stephen W. Three dimensional microfluidic device having porous membrane
US7033148B2 (en) * 2002-03-13 2006-04-25 Cytonome, Inc. Electromagnetic pump
WO2003085379A2 (en) 2002-04-01 2003-10-16 Fluidigm Corporation Microfluidic particle-analysis systems
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US20070026528A1 (en) * 2002-05-30 2007-02-01 Delucas Lawrence J Method for screening crystallization conditions in solution crystal growth
US7867193B2 (en) * 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US20050238506A1 (en) * 2002-06-21 2005-10-27 The Charles Stark Draper Laboratory, Inc. Electromagnetically-actuated microfluidic flow regulators and related applications
US6827559B2 (en) * 2002-07-01 2004-12-07 Ventaira Pharmaceuticals, Inc. Piezoelectric micropump with diaphragm and valves
WO2004005898A1 (en) * 2002-07-10 2004-01-15 Uab Research Foundation Method for distinguishing between biomolecule and non-biomolecule crystals
US6874999B2 (en) * 2002-08-15 2005-04-05 Motorola, Inc. Micropumps with passive check valves
AU2003270882A1 (en) 2002-09-23 2004-05-04 Cooligy, Inc. Micro-fabricated electrokinetic pump with on-frit electrode
US6881039B2 (en) * 2002-09-23 2005-04-19 Cooligy, Inc. Micro-fabricated electrokinetic pump
WO2004028955A2 (en) * 2002-09-25 2004-04-08 California Institute Of Technology Microfluidic large scale integration
US8220494B2 (en) * 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
US8871446B2 (en) 2002-10-02 2014-10-28 California Institute Of Technology Microfluidic nucleic acid analysis
KR20040036173A (ko) * 2002-10-23 2004-04-30 김종원 피에조 엑츄에이터로 구동되는 마이크로 압축기
KR100483079B1 (ko) * 2002-10-23 2005-04-14 재단법인서울대학교산학협력재단 능동형 마이크로 냉각기
US6986382B2 (en) * 2002-11-01 2006-01-17 Cooligy Inc. Interwoven manifolds for pressure drop reduction in microchannel heat exchangers
US7000684B2 (en) 2002-11-01 2006-02-21 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
AU2003286855A1 (en) * 2002-11-01 2004-06-07 Cooligy, Inc. Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device
AU2003286821A1 (en) 2002-11-01 2004-06-07 Cooligy, Inc. Optimal spreader system, device and method for fluid cooled micro-scaled heat exchange
US7017654B2 (en) 2003-03-17 2006-03-28 Cooligy, Inc. Apparatus and method of forming channels in a heat-exchanging device
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7666361B2 (en) * 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
US7476363B2 (en) * 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
EP1685282A2 (de) * 2003-04-17 2006-08-02 Fluidigm Corporation Kristallziehvorrichtungen und systeme und verfahren zu deren verwendung
AU2004240944A1 (en) 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US7316543B2 (en) * 2003-05-30 2008-01-08 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic micropump with planar features
US7021369B2 (en) * 2003-07-23 2006-04-04 Cooligy, Inc. Hermetic closed loop fluid system
US7591302B1 (en) 2003-07-23 2009-09-22 Cooligy Inc. Pump and fan control concepts in a cooling system
EP1667829A4 (de) * 2003-07-28 2008-12-10 Fluidigm Corp Bildverarbeitungsverfahren und system für mikrofluidvorrichtungen
US7231839B2 (en) * 2003-08-11 2007-06-19 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic micropumps with applications to fluid dispensing and field sampling
US7413712B2 (en) * 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
US7029951B2 (en) * 2003-09-12 2006-04-18 International Business Machines Corporation Cooling system for a semiconductor device and method of fabricating same
EP1515043B1 (de) * 2003-09-12 2006-11-22 Samsung Electronics Co., Ltd. Membranpumpe für kühlluft
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
KR100519970B1 (ko) * 2003-10-07 2005-10-13 삼성전자주식회사 밸브리스 마이크로 공기공급장치
US7169560B2 (en) 2003-11-12 2007-01-30 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
US7407799B2 (en) 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
CN101914803B (zh) * 2004-01-25 2012-07-04 弗卢丁公司 晶体形成设备与系统以及制造和使用该晶体形成设备与系统的方法
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
WO2005080605A2 (en) 2004-02-19 2005-09-01 Helicos Biosciences Corporation Methods and kits for analyzing polynucleotide sequences
DE102004011726A1 (de) * 2004-03-05 2005-09-22 Ing. Erich Pfeiffer Gmbh Dosiervorrichtung
US7484940B2 (en) * 2004-04-28 2009-02-03 Kinetic Ceramics, Inc. Piezoelectric fluid pump
US7476734B2 (en) 2005-12-06 2009-01-13 Helicos Biosciences Corporation Nucleotide analogs
DE602005027700D1 (de) 2004-05-25 2011-06-09 Helicos Biosciences Corp Verfahren zur nukleinsäureimmobilisierung
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US7104767B2 (en) * 2004-07-19 2006-09-12 Wilson Greatbatch Technologies, Inc. Diaphragm pump for medical applications
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7220549B2 (en) 2004-12-30 2007-05-22 Helicos Biosciences Corporation Stabilizing a nucleic acid for nucleic acid sequencing
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7482120B2 (en) 2005-01-28 2009-01-27 Helicos Biosciences Corporation Methods and compositions for improving fidelity in a nucleic acid synthesis reaction
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
JP4668635B2 (ja) * 2005-02-02 2011-04-13 積水化学工業株式会社 マイクロバルブの流量調節方法
US20060194724A1 (en) * 2005-02-25 2006-08-31 Whitehurst Todd K Methods and systems for nerve regeneration
JP4887652B2 (ja) * 2005-04-21 2012-02-29 ソニー株式会社 噴流発生装置及び電子機器
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7666593B2 (en) 2005-08-26 2010-02-23 Helicos Biosciences Corporation Single molecule sequencing of captured nucleic acids
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US20090305248A1 (en) * 2005-12-15 2009-12-10 Lander Eric G Methods for increasing accuracy of nucleic acid sequencing
US20070140875A1 (en) * 2005-12-16 2007-06-21 Green James S Piezoelectric pump
US7815868B1 (en) * 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US20080309926A1 (en) * 2006-03-08 2008-12-18 Aaron Weber Systems and methods for reducing detected intensity non uniformity in a laser beam
US7397546B2 (en) * 2006-03-08 2008-07-08 Helicos Biosciences Corporation Systems and methods for reducing detected intensity non-uniformity in a laser beam
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
JP2009532868A (ja) 2006-03-30 2009-09-10 クーリギー インコーポレイテッド 冷却装置及び冷却装置製造方法
US7715194B2 (en) 2006-04-11 2010-05-11 Cooligy Inc. Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
WO2008094672A2 (en) * 2007-01-31 2008-08-07 Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
US20080186801A1 (en) * 2007-02-06 2008-08-07 Qisda Corporation Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same
WO2009052842A1 (de) * 2007-10-22 2009-04-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Membranpumpe
US8708961B2 (en) 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
US9297571B1 (en) 2008-03-10 2016-03-29 Liebert Corporation Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
US8250877B2 (en) 2008-03-10 2012-08-28 Cooligy Inc. Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
JP5170250B2 (ja) * 2008-09-29 2013-03-27 株式会社村田製作所 圧電ポンプ
JP5169693B2 (ja) * 2008-09-29 2013-03-27 株式会社村田製作所 圧電ポンプ
RU2484851C2 (ru) 2008-10-22 2013-06-20 Дебиотех С.А. Жидкостный насос, выполненный в виде мэмс, с встроенным датчиком давления для обнаружения нарушений функционирования
EP2333340A1 (de) * 2009-12-07 2011-06-15 Debiotech S.A. Flexibles Element für Mikropumpe
CA2786569C (en) 2010-01-29 2019-04-09 Micronics, Inc. Sample-to-answer microfluidic cartridge
EP2542810B1 (de) 2010-03-05 2015-04-15 Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. Verfahren zur herstellung einer mikropumpe und mikropumpe
US20110223253A1 (en) * 2010-03-15 2011-09-15 Artimplant Ab Physically stabilized biodegradable osteochondral implant and methods for its manufacture and implantation
DE102010040169A1 (de) * 2010-09-02 2012-03-08 Robert Bosch Gmbh Vorrichtung zur Drosselung einer Fluidströmung und korrespondierende Kolbenpumpe zur Förderung von Fluiden
EP2469089A1 (de) 2010-12-23 2012-06-27 Debiotech S.A. Elektronisches Steuerungsverfahren und System für eine piezoelektrische Pumpe
JP6162047B2 (ja) 2011-02-02 2017-07-12 ザ チャールズ スターク ドレイパー ラボラトリー インク 薬物送達装置
EP2543404A1 (de) 2011-07-04 2013-01-09 Debiotech S.A. Verfahren und System zur Detektion der Fehlfunktion einer MEMS-Mikropumpe
WO2012176171A1 (en) 2011-06-23 2012-12-27 Debiotech S.A. Vented reservoir for medical pump
EP2551523A1 (de) 2011-07-29 2013-01-30 Debiotech S.A. Verfahren und Vorrichtung zur Betätigung einer präzisen MEMS-Mikropumpe mit niedrigem Verbrauch
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9867929B2 (en) * 2012-08-15 2018-01-16 Becton, Dickinson And Company Pump engine with metering system for dispensing liquid medication
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
CN104169583B (zh) * 2012-12-21 2017-03-01 弗劳恩霍夫应用研究促进协会 包括安全阀布置的泵布置结构
US10518262B2 (en) 2012-12-21 2019-12-31 Perkinelmer Health Sciences, Inc. Low elasticity films for microfluidic use
WO2014100732A1 (en) 2012-12-21 2014-06-26 Micronics, Inc. Fluidic circuits and related manufacturing methods
EP2935559B1 (de) 2012-12-21 2020-09-16 PerkinElmer Health Sciences, Inc. Fluoreszenznachweissystem
WO2014136090A1 (en) 2013-03-07 2014-09-12 Debiotech S.A. Microfluidic valve having improved tolerance to particles
CN105189750B (zh) 2013-05-07 2020-07-28 珀金埃尔默健康科学有限公司 使用粘土矿物和碱性溶液制备含核酸样品的方法
JP6484222B2 (ja) 2013-05-07 2019-03-13 マイクロニクス， インコーポレイテッド 核酸の調製および分析のためのデバイス
US10386377B2 (en) 2013-05-07 2019-08-20 Micronics, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
TWI539076B (zh) * 2013-09-25 2016-06-21 馬小康 腔體分離式薄膜幫浦
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
EP3510284B1 (de) * 2016-09-07 2021-04-28 Robert Bosch GmbH Mikropumpen
EP3519013A1 (de) 2016-09-29 2019-08-07 Koninklijke Philips N.V. Piezoelektrische membranpumpe zur infusion von flüssigkeiten
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
DK3534002T3 (da) * 2016-10-27 2021-04-06 Nitto Kohki Co Væskepumpe
TWI625462B (zh) * 2017-01-05 2018-06-01 研能科技股份有限公司 微型氣壓動力裝置
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
CN111151311B (zh) * 2018-11-07 2021-10-12 研能科技股份有限公司 微流道结构的制造方法
WO2021072729A1 (en) * 2019-10-18 2021-04-22 Healtell (Guangzhou) Medical Technology Co., Ltd. Microfluidic chip pumps and methods thereof
CN111692069B (zh) * 2020-06-19 2021-04-09 燕山大学 一种驱动与阀控融合式流体驱动装置
NL2026780B1 (en) 2020-10-27 2022-06-21 Univ Delft Tech Precise fluid manipulation in the femtolitre range
CN113464410B (zh) * 2021-08-19 2022-03-22 浙江大学 一种压力无级可调的大流量压电泵
WO2023158618A1 (en) * 2022-02-17 2023-08-24 Aita Bio Inc. Mems micropump with piezoelectric active valve that remains closed following micropump power loss

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2933799C3 (de) * 1979-08-18 1982-05-19 Schaldach, Max, Prof. Dr.-Ing., 8520 Erlangen Vorrichtung zur Förderung und Dosierung kleinster Flüssigkeitsmengen
FR2516606B1 (fr) * 1981-11-19 1986-05-16 Bessman Samuel Pompe a diaphragme a commande piezo-electrique, notamment micro-pompe pour implantation dans le corps humain
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
ES2061042T3 (es) * 1989-06-14 1994-12-01 Westonbridge Int Ltd Microbomba perfeccionada.
ES2075459T3 (es) * 1990-08-31 1995-10-01 Westonbridge Int Ltd Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula.
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump

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EP0739451A1 (de) 1996-10-30
CA2181084C (en) 2004-09-14
JP3948493B2 (ja) 2007-07-25
ES2107908T3 (es) 1997-12-01
CA2181084A1 (en) 1995-07-20
US5759014A (en) 1998-06-02
DE69500529D1 (de) 1997-09-11
JPH09512075A (ja) 1997-12-02
AU1326395A (en) 1995-08-01
WO1995019502A1 (fr) 1995-07-20
EP0739451B1 (de) 1997-08-06
CH689836A5 (fr) 1999-12-15
AU679311B2 (en) 1997-06-26

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