DE69505430T2 - Piezoelektrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren - Google Patents
Piezoelektrisches/elektrostriktives Dünnfilmelement und HerstellungsverfahrenInfo
- Publication number
- DE69505430T2 DE69505430T2 DE1995605430 DE69505430T DE69505430T2 DE 69505430 T2 DE69505430 T2 DE 69505430T2 DE 1995605430 DE1995605430 DE 1995605430 DE 69505430 T DE69505430 T DE 69505430T DE 69505430 T2 DE69505430 T2 DE 69505430T2
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- thin film
- manufacturing process
- film element
- electrostrictive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1769794 | 1994-02-14 | ||
JP2417494 | 1994-02-22 | ||
JP18920394 | 1994-08-11 | ||
JP24117294A JP3162584B2 (ja) | 1994-02-14 | 1994-10-05 | 圧電/電歪膜型素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69505430D1 DE69505430D1 (de) | 1998-11-26 |
DE69505430T2 true DE69505430T2 (de) | 1999-04-22 |
Family
ID=27456823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1995605430 Expired - Lifetime DE69505430T2 (de) | 1994-02-14 | 1995-02-13 | Piezoelektrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (2) | US5600197A (de) |
EP (1) | EP0667646B1 (de) |
JP (1) | JP3162584B2 (de) |
DE (1) | DE69505430T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012000275A1 (de) * | 2012-01-10 | 2013-07-11 | Nicolay Verwaltung Gmbh | Schallwandler, insbesondere Ultraschallwandler, und Verfahren zu dessen Herstellung |
Families Citing this family (67)
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US6049158A (en) * | 1994-02-14 | 2000-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same |
DE19515406C2 (de) * | 1994-04-26 | 1999-04-01 | Seiko Epson Corp | Tintenstrahl-Schreibkopf und Herstellungsverfahren für den Tintentstrahl-Schreibkopf |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3320947B2 (ja) * | 1995-05-26 | 2002-09-03 | 日本碍子株式会社 | 微細貫通孔を有するセラミック部材 |
JP3890634B2 (ja) * | 1995-09-19 | 2007-03-07 | セイコーエプソン株式会社 | 圧電体薄膜素子及びインクジェット式記録ヘッド |
JP3320596B2 (ja) * | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3343030B2 (ja) * | 1996-05-22 | 2002-11-11 | 日本碍子株式会社 | センサ素子 |
DE69714909T2 (de) * | 1996-05-27 | 2003-04-30 | Ngk Insulators Ltd | Piezoelektrisches Element des Dünnschichttyps |
EP0813254B1 (de) * | 1996-06-14 | 2001-10-17 | Ngk Insulators, Ltd. | Verfahren zur Herstellung einer keramischen Membranstruktur |
JP3517535B2 (ja) * | 1996-07-10 | 2004-04-12 | 日本碍子株式会社 | 表示装置 |
US5895702A (en) * | 1996-07-16 | 1999-04-20 | Ngk Insulators, Ltd. | Ceramic member |
US5958165A (en) * | 1996-07-19 | 1999-09-28 | Ngk Insulators, Ltd. | Method of manufacturing ceramic member |
US6072269A (en) * | 1996-07-23 | 2000-06-06 | Ngk Insulators, Ltd. | Ceramic member with an electrode and a plurality of tapered through holes for controlling the ejection of particles by switching the sign of a charge on the electrode |
US5831371A (en) * | 1996-11-22 | 1998-11-03 | Face International Corp. | Snap-action ferroelectric transducer |
US6211853B1 (en) * | 1996-12-16 | 2001-04-03 | Ngk Insulators, Ltd. | Optical waveguide display with voltage-modulated controlled movable actuators which cause light leakage in waveguide at each display element to provide gradation in a display image |
EP0853252B1 (de) * | 1996-12-16 | 2004-03-10 | Ngk Insulators, Ltd. | Anzeigegerät |
US5857974A (en) * | 1997-01-08 | 1999-01-12 | Endosonics Corporation | High resolution intravascular ultrasound transducer assembly having a flexible substrate |
JPH10326088A (ja) | 1997-03-24 | 1998-12-08 | Ngk Insulators Ltd | ディスプレイの駆動装置及びディスプレイの駆動方法 |
JP3224209B2 (ja) * | 1997-05-07 | 2001-10-29 | 日本碍子株式会社 | ディスプレイ用光導波板 |
AU2652797A (en) * | 1997-05-13 | 1998-12-08 | Mitsubishi Denki Kabushiki Kaisha | Dielectric thin film element and method for manufacturing the same |
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US6594875B2 (en) | 1998-10-14 | 2003-07-22 | Samsung Electro-Mechanics Co. | Method for producing a piezoelectric/electrostrictive actuator |
JP2000314381A (ja) | 1999-03-03 | 2000-11-14 | Ngk Insulators Ltd | ポンプ |
US6690344B1 (en) | 1999-05-14 | 2004-02-10 | Ngk Insulators, Ltd. | Method and apparatus for driving device and display |
US6222304B1 (en) * | 1999-07-28 | 2001-04-24 | The Charles Stark Draper Laboratory | Micro-shell transducer |
US6915547B2 (en) | 1999-10-01 | 2005-07-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1148560B1 (de) | 1999-10-01 | 2010-07-14 | Ngk Insulators, Ltd. | Piezoelektrisches/elektrostriktives bauelement und verfahren zu dessen herstellung |
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JP3845543B2 (ja) | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
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US6498419B1 (en) * | 1999-10-01 | 2002-12-24 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same |
US6404109B1 (en) * | 1999-10-01 | 2002-06-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having increased strength |
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JP3965515B2 (ja) * | 1999-10-01 | 2007-08-29 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
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JP3571694B2 (ja) | 1999-12-27 | 2004-09-29 | 日本碍子株式会社 | 表示装置及びその製造方法 |
DE10006352A1 (de) * | 2000-02-12 | 2001-08-30 | Bosch Gmbh Robert | Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden |
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US6453100B1 (en) | 2000-03-27 | 2002-09-17 | Ngk Insulators, Ltd. | Display device and method for producing the same |
US6823739B2 (en) * | 2001-12-20 | 2004-11-30 | National Institute Of Advanced Industrial Science And Technology | Thin pressure sensor and biological information measuring device using same, and biological information measuring method |
WO2003079461A1 (en) * | 2002-03-15 | 2003-09-25 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Electro-active device using radial electric field piezo-diaphragm for sonic applications |
WO2003081968A1 (en) * | 2002-03-19 | 2003-10-02 | California Institute Of Technology | A method for integrating microparticles into mems |
JP3555682B2 (ja) * | 2002-07-09 | 2004-08-18 | セイコーエプソン株式会社 | 液体吐出ヘッド |
EP1648038B1 (de) * | 2003-07-22 | 2011-02-16 | NGK Insulators, Ltd. | Stellgliedelement und einrichtung mit stellgliedelement |
US7141915B2 (en) * | 2003-07-22 | 2006-11-28 | Ngk Insulators, Ltd. | Actuator device |
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JP2006147839A (ja) * | 2004-11-19 | 2006-06-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
JP4963159B2 (ja) * | 2004-11-19 | 2012-06-27 | 日本碍子株式会社 | 圧電/電歪デバイス |
JP4622574B2 (ja) * | 2005-02-21 | 2011-02-02 | 株式会社デンソー | 超音波素子 |
KR100747459B1 (ko) * | 2005-10-21 | 2007-08-09 | 엘지전자 주식회사 | 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기 |
JP5006354B2 (ja) * | 2009-01-29 | 2012-08-22 | 日本碍子株式会社 | 圧電/電歪共振子 |
JP5436549B2 (ja) | 2009-04-24 | 2014-03-05 | 日本碍子株式会社 | 薄板状焼成圧電体の製造方法 |
CN103535053B (zh) * | 2011-05-17 | 2017-03-29 | 株式会社村田制作所 | 平面型扬声器以及av设备 |
JP6720669B2 (ja) * | 2016-04-22 | 2020-07-08 | 株式会社リコー | 電気機械変換装置、センサ、アクチュエータ、及びそれらの製造方法、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
JP2017000792A (ja) * | 2016-08-17 | 2017-01-05 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
JP6907539B2 (ja) * | 2017-01-06 | 2021-07-21 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、及び超音波装置 |
US10680161B1 (en) | 2017-03-29 | 2020-06-09 | Apple Inc. | Electronic Devices with Piezoelectric Ink |
CN110129785B (zh) * | 2019-06-12 | 2021-03-23 | 重庆理工大学 | 一种TiNb合金的表面处理方法 |
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JP2693291B2 (ja) * | 1990-07-26 | 1997-12-24 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3126212B2 (ja) * | 1992-03-21 | 2001-01-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
US5225126A (en) * | 1991-10-03 | 1993-07-06 | Alfred University | Piezoresistive sensor |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3120260B2 (ja) * | 1992-12-26 | 2000-12-25 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
-
1994
- 1994-10-05 JP JP24117294A patent/JP3162584B2/ja not_active Expired - Lifetime
- 1994-12-28 US US08/365,129 patent/US5600197A/en not_active Expired - Lifetime
-
1995
- 1995-02-13 EP EP19950300876 patent/EP0667646B1/de not_active Expired - Lifetime
- 1995-02-13 DE DE1995605430 patent/DE69505430T2/de not_active Expired - Lifetime
-
1996
- 1996-08-08 US US08/694,280 patent/US5774961A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012000275A1 (de) * | 2012-01-10 | 2013-07-11 | Nicolay Verwaltung Gmbh | Schallwandler, insbesondere Ultraschallwandler, und Verfahren zu dessen Herstellung |
Also Published As
Publication number | Publication date |
---|---|
US5774961A (en) | 1998-07-07 |
US5600197A (en) | 1997-02-04 |
JPH08107238A (ja) | 1996-04-23 |
EP0667646B1 (de) | 1998-10-21 |
DE69505430D1 (de) | 1998-11-26 |
JP3162584B2 (ja) | 2001-05-08 |
EP0667646A1 (de) | 1995-08-16 |
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