DE69508668T2 - Verdampfungssequenz für multiple flüssige Ausgangsstoffe - Google Patents
Verdampfungssequenz für multiple flüssige AusgangsstoffeInfo
- Publication number
- DE69508668T2 DE69508668T2 DE69508668T DE69508668T DE69508668T2 DE 69508668 T2 DE69508668 T2 DE 69508668T2 DE 69508668 T DE69508668 T DE 69508668T DE 69508668 T DE69508668 T DE 69508668T DE 69508668 T2 DE69508668 T2 DE 69508668T2
- Authority
- DE
- Germany
- Prior art keywords
- starting materials
- multiple liquid
- liquid starting
- evaporation sequence
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/935—Gas flow control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/274,672 US5531183A (en) | 1994-07-13 | 1994-07-13 | Vaporization sequence for multiple liquid precursors used in semiconductor thin film applications |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69508668D1 DE69508668D1 (de) | 1999-05-06 |
DE69508668T2 true DE69508668T2 (de) | 1999-12-09 |
Family
ID=23049162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69508668T Expired - Fee Related DE69508668T2 (de) | 1994-07-13 | 1995-06-30 | Verdampfungssequenz für multiple flüssige Ausgangsstoffe |
Country Status (5)
Country | Link |
---|---|
US (2) | US5531183A (de) |
EP (1) | EP0692553B1 (de) |
JP (1) | JP3745413B2 (de) |
KR (1) | KR100254760B1 (de) |
DE (1) | DE69508668T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012203212A1 (de) * | 2012-03-01 | 2013-09-05 | Osram Opto Semiconductors Gmbh | Beschichtungsanlage und verfahren zur durchführung eines aufwachsprozesses |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6489255B1 (en) * | 1995-06-05 | 2002-12-03 | International Business Machines Corporation | Low temperature/low dopant oxide glass film |
US6462394B1 (en) | 1995-12-26 | 2002-10-08 | Micron Technology, Inc. | Device configured to avoid threshold voltage shift in a dielectric film |
US7067442B1 (en) | 1995-12-26 | 2006-06-27 | Micron Technology, Inc. | Method to avoid threshold voltage shift in thicker dielectric films |
US6342277B1 (en) * | 1996-08-16 | 2002-01-29 | Licensee For Microelectronics: Asm America, Inc. | Sequential chemical vapor deposition |
US5876503A (en) * | 1996-11-27 | 1999-03-02 | Advanced Technology Materials, Inc. | Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions |
US5877072A (en) * | 1997-03-31 | 1999-03-02 | Intel Corporation | Process for forming doped regions from solid phase diffusion source |
US5985770A (en) * | 1997-08-21 | 1999-11-16 | Micron Technology, Inc. | Method of depositing silicon oxides |
US6179277B1 (en) | 1998-02-27 | 2001-01-30 | Applied Materials, Inc. | Liquid vaporizer systems and methods for their use |
US6136725A (en) * | 1998-04-14 | 2000-10-24 | Cvd Systems, Inc. | Method for chemical vapor deposition of a material on a substrate |
JP2002511529A (ja) | 1998-04-14 | 2002-04-16 | シーブイデイ・システムズ・インコーポレーテツド | 薄膜蒸着システム |
US6296711B1 (en) | 1998-04-14 | 2001-10-02 | Cvd Systems, Inc. | Film processing system |
KR100542890B1 (ko) * | 1998-12-18 | 2006-05-09 | 재단법인 포항산업과학연구원 | 인도핑 다결정 실리콘성막 제조방법_ |
US6311959B1 (en) * | 1999-04-22 | 2001-11-06 | Applied Materials, Inc. | Method and apparatus for generating controlled mixture of organic vapor and inert gas |
US6817381B2 (en) * | 1999-08-24 | 2004-11-16 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
US6589889B2 (en) * | 1999-09-09 | 2003-07-08 | Alliedsignal Inc. | Contact planarization using nanoporous silica materials |
US20050147753A1 (en) * | 1999-10-22 | 2005-07-07 | Kurt J. Lesker Company | Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum |
US6830626B1 (en) * | 1999-10-22 | 2004-12-14 | Kurt J. Lesker Company | Method and apparatus for coating a substrate in a vacuum |
US6443435B1 (en) | 2000-10-23 | 2002-09-03 | Applied Materials, Inc. | Vaporization of precursors at point of use |
US20020144784A1 (en) * | 2001-04-06 | 2002-10-10 | Curry Don E. | Wafer processing apparatus having a chamber with an upper wall having gas supply openings formed therein which promote more even processing of a wafer |
US6860138B1 (en) | 2002-02-21 | 2005-03-01 | Taiwan Semiconductor Manufacturing Company | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber |
US6896730B2 (en) * | 2002-06-05 | 2005-05-24 | Micron Technology, Inc. | Atomic layer deposition apparatus and methods |
US6955211B2 (en) | 2002-07-17 | 2005-10-18 | Applied Materials, Inc. | Method and apparatus for gas temperature control in a semiconductor processing system |
JP2004288916A (ja) * | 2003-03-24 | 2004-10-14 | Renesas Technology Corp | Cvd装置 |
US20050147749A1 (en) * | 2004-01-05 | 2005-07-07 | Msp Corporation | High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film deposition |
US7741621B2 (en) * | 2004-07-14 | 2010-06-22 | City University Of Hong Kong | Apparatus and method for focused electric field enhanced plasma-based ion implantation |
US7166544B2 (en) * | 2004-09-01 | 2007-01-23 | Applied Materials, Inc. | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors |
JP5179339B2 (ja) * | 2008-12-22 | 2013-04-10 | 東京エレクトロン株式会社 | 混合ガスの供給方法及び混合ガスの供給装置 |
JP5457021B2 (ja) * | 2008-12-22 | 2014-04-02 | 東京エレクトロン株式会社 | 混合ガスの供給方法及び混合ガスの供給装置 |
US8927066B2 (en) * | 2011-04-29 | 2015-01-06 | Applied Materials, Inc. | Method and apparatus for gas delivery |
US9631273B2 (en) * | 2012-07-25 | 2017-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for dielectric deposition process |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1461060A (fr) * | 1964-12-26 | 1966-12-10 | Fujitsu Ltd | Procédé pour la fabrication de films minces |
US4066481A (en) * | 1974-11-11 | 1978-01-03 | Rockwell International Corporation | Metalorganic chemical vapor deposition of IVA-IVA compounds and composite |
JPS5347765A (en) * | 1976-10-13 | 1978-04-28 | Matsushita Electric Ind Co Ltd | Semiconductor crystal growth method |
US4529427A (en) * | 1977-05-19 | 1985-07-16 | At&T Bell Laboratories | Method for making low-loss optical waveguides on an industrial scale |
DE3168017D1 (en) * | 1980-05-27 | 1985-02-14 | Secr Defence Brit | Manufacture of cadmium mercury telluride |
GB8428032D0 (en) * | 1984-11-06 | 1984-12-12 | Secr Defence | Growth of crystalline layers |
US4845054A (en) * | 1985-06-14 | 1989-07-04 | Focus Semiconductor Systems, Inc. | Low temperature chemical vapor deposition of silicon dioxide films |
US5186120A (en) * | 1989-03-22 | 1993-02-16 | Mitsubishi Denki Kabushiki Kaisha | Mixture thin film forming apparatus |
JPH0784662B2 (ja) * | 1989-12-12 | 1995-09-13 | アプライドマテリアルズジャパン株式会社 | 化学的気相成長方法とその装置 |
JP2626925B2 (ja) * | 1990-05-23 | 1997-07-02 | 三菱電機株式会社 | 基板処理装置および基板処理方法 |
US5308433A (en) * | 1991-04-11 | 1994-05-03 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for vapor growth |
-
1994
- 1994-07-13 US US08/274,672 patent/US5531183A/en not_active Expired - Lifetime
-
1995
- 1995-06-30 EP EP95110239A patent/EP0692553B1/de not_active Expired - Lifetime
- 1995-06-30 DE DE69508668T patent/DE69508668T2/de not_active Expired - Fee Related
- 1995-07-13 KR KR1019950020541A patent/KR100254760B1/ko not_active IP Right Cessation
- 1995-07-13 JP JP17776195A patent/JP3745413B2/ja not_active Expired - Fee Related
-
1996
- 1996-05-23 US US08/652,194 patent/US6464782B1/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012203212A1 (de) * | 2012-03-01 | 2013-09-05 | Osram Opto Semiconductors Gmbh | Beschichtungsanlage und verfahren zur durchführung eines aufwachsprozesses |
Also Published As
Publication number | Publication date |
---|---|
JPH0888191A (ja) | 1996-04-02 |
EP0692553A1 (de) | 1996-01-17 |
DE69508668D1 (de) | 1999-05-06 |
EP0692553B1 (de) | 1999-03-31 |
JP3745413B2 (ja) | 2006-02-15 |
US6464782B1 (en) | 2002-10-15 |
US5531183A (en) | 1996-07-02 |
KR960005854A (ko) | 1996-02-23 |
KR100254760B1 (ko) | 2000-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |