DE69512282D1 - Herstellungsverfahren für ein mikromechanisches Element - Google Patents

Herstellungsverfahren für ein mikromechanisches Element

Info

Publication number
DE69512282D1
DE69512282D1 DE69512282T DE69512282T DE69512282D1 DE 69512282 D1 DE69512282 D1 DE 69512282D1 DE 69512282 T DE69512282 T DE 69512282T DE 69512282 T DE69512282 T DE 69512282T DE 69512282 D1 DE69512282 D1 DE 69512282D1
Authority
DE
Germany
Prior art keywords
manufacturing process
micromechanical element
micromechanical
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69512282T
Other languages
English (en)
Other versions
DE69512282T2 (de
Inventor
Takayuki Yagi
Masatake Akaike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP00900494A external-priority patent/JP3491941B2/ja
Priority claimed from JP12596794A external-priority patent/JP3181174B2/ja
Priority claimed from JP21586194A external-priority patent/JP3420350B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69512282D1 publication Critical patent/DE69512282D1/de
Publication of DE69512282T2 publication Critical patent/DE69512282T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0092For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0092For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
    • B81C1/00936Releasing the movable structure without liquid etchant
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/006Electrostatic motors of the gap-closing type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/01Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118Cantilevers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102Surface micromachining
    • B81C2201/0105Sacrificial layer
    • B81C2201/0107Sacrificial metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102Surface micromachining
    • B81C2201/0105Sacrificial layer
    • B81C2201/0109Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00Forming microstructural systems
    • B81C2203/03Bonding two components
    • B81C2203/031Anodic bondings
DE69512282T 1994-01-31 1995-01-27 Herstellungsverfahren für ein mikromechanisches Element Expired - Lifetime DE69512282T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP00900494A JP3491941B2 (ja) 1994-01-31 1994-01-31 マイクロ構造体の製造方法
JP12596794A JP3181174B2 (ja) 1994-06-08 1994-06-08 マイクロ構造体の形成方法
JP21586194A JP3420350B2 (ja) 1994-09-09 1994-09-09 マイクロ構造体の形成法

Publications (2)

Publication Number Publication Date
DE69512282D1 true DE69512282D1 (de) 1999-10-28
DE69512282T2 DE69512282T2 (de) 2000-03-30

Family

ID=27278283

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69512282T Expired - Lifetime DE69512282T2 (de) 1994-01-31 1995-01-27 Herstellungsverfahren für ein mikromechanisches Element

Country Status (3)

Country Link
US (2) US5658698A (de)
EP (1) EP0665590B1 (de)
DE (1) DE69512282T2 (de)

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US6020215A (en) 2000-02-01
EP0665590A2 (de) 1995-08-02
DE69512282T2 (de) 2000-03-30
US5658698A (en) 1997-08-19
EP0665590B1 (de) 1999-09-22

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