DE69512688T2 - Methode zur Herstellung eines planaren Wellenleiters - Google Patents

Methode zur Herstellung eines planaren Wellenleiters

Info

Publication number
DE69512688T2
DE69512688T2 DE69512688T DE69512688T DE69512688T2 DE 69512688 T2 DE69512688 T2 DE 69512688T2 DE 69512688 T DE69512688 T DE 69512688T DE 69512688 T DE69512688 T DE 69512688T DE 69512688 T2 DE69512688 T2 DE 69512688T2
Authority
DE
Germany
Prior art keywords
making
planar waveguide
waveguide
planar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69512688T
Other languages
English (en)
Other versions
DE69512688D1 (de
Inventor
Graeme Douglas Maxwell
Benjamin James Ainslie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Application granted granted Critical
Publication of DE69512688D1 publication Critical patent/DE69512688D1/de
Publication of DE69512688T2 publication Critical patent/DE69512688T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Lasers (AREA)
DE69512688T 1994-09-23 1995-09-22 Methode zur Herstellung eines planaren Wellenleiters Expired - Fee Related DE69512688T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP94306987 1994-09-23

Publications (2)

Publication Number Publication Date
DE69512688D1 DE69512688D1 (de) 1999-11-11
DE69512688T2 true DE69512688T2 (de) 2000-05-04

Family

ID=8217860

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69512688T Expired - Fee Related DE69512688T2 (de) 1994-09-23 1995-09-22 Methode zur Herstellung eines planaren Wellenleiters
DE69517991T Expired - Fee Related DE69517991T2 (de) 1994-09-23 1995-09-22 Planare wellenleiter
DE69512690T Expired - Fee Related DE69512690T2 (de) 1994-09-23 1995-09-22 Methode zur Herstellung eines planaren Wellenleiters

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69517991T Expired - Fee Related DE69517991T2 (de) 1994-09-23 1995-09-22 Planare wellenleiter
DE69512690T Expired - Fee Related DE69512690T2 (de) 1994-09-23 1995-09-22 Methode zur Herstellung eines planaren Wellenleiters

Country Status (8)

Country Link
US (1) US5841928A (de)
EP (3) EP0782713B1 (de)
JP (1) JPH10505924A (de)
AU (1) AU3529295A (de)
CA (1) CA2199513C (de)
DE (3) DE69512688T2 (de)
HK (1) HK1002292A1 (de)
WO (1) WO1996009563A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU703977B2 (en) * 1995-09-07 1999-04-01 Unisearch Limited A method and apparatus for the construction of photosensitive waveguides
AUPN526895A0 (en) * 1995-09-07 1995-09-28 Unisearch Limited Improvements in control of refractive index
GB2309096A (en) * 1996-01-09 1997-07-16 Northern Telecom Ltd Optical waveguide pair with cladding on buffered substrate
WO1997028473A1 (de) * 1996-02-03 1997-08-07 Robert Bosch Gmbh Verfahren zur herstellung von optischen bauelementen und optisches bauelement
JP3649835B2 (ja) * 1996-03-18 2005-05-18 独立行政法人科学技術振興機構 光導波路の作製方法
US5930439A (en) * 1997-10-01 1999-07-27 Northern Telecom Limited Planar optical waveguide
JP3349422B2 (ja) * 1998-02-12 2002-11-25 科学技術振興事業団 光導波路アレイ及びその製造方法
US6091870A (en) * 1998-02-20 2000-07-18 Corning Incorporated Wavelength division multiplexer/demultiplexer optical device
US6573026B1 (en) 1999-07-29 2003-06-03 Corning Incorporated Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses
US6977137B2 (en) 1999-07-29 2005-12-20 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6796148B1 (en) * 1999-09-30 2004-09-28 Corning Incorporated Deep UV laser internally induced densification in silica glasses
US6368775B1 (en) 2000-01-27 2002-04-09 Sandia Corporation 3-D photo-patterning of refractive index structures in photosensitive thin film materials
EP1225458B8 (de) * 2001-01-19 2007-05-09 Centre National De La Recherche Scientifique (Cnrs) Verfahren zur Herstellung einer Wellenleiterkomponente mit mehreren Schichten auf einem Substrat und damit versehene Komponente
US6640040B2 (en) * 2001-03-15 2003-10-28 The Regents Of The University Of California Compact cladding-pumped planar waveguide amplifier and fabrication method
US6650816B2 (en) * 2001-07-06 2003-11-18 Redfern Integrated Optics Pty Ltd, Planar waveguide amplifier
TW579443B (en) * 2001-08-03 2004-03-11 Asml Us Inc Oxide structure useable for optical waveguide and method of forming the oxide structure
US20030044152A1 (en) * 2001-09-04 2003-03-06 Redfern Integrated Optics Pty Ltd Waveguide formation
US6593062B1 (en) 2001-12-07 2003-07-15 Sandia Corporation Formation of bulk refractive index structures
KR100464552B1 (ko) * 2002-03-18 2005-02-02 전남대학교산학협력단 광민감성을 이용한 평판형 도파로 광소자 제작방법
US6950591B2 (en) * 2002-05-16 2005-09-27 Corning Incorporated Laser-written cladding for waveguide formations in glass
WO2003102646A2 (en) * 2002-05-30 2003-12-11 Massachusetts Institute Of Technology Optical waveguide with non-uniform sidewall gratings
US10185084B2 (en) 2016-02-23 2019-01-22 Corning Incorporated Layered glass structures
EP3337768A1 (de) * 2015-08-21 2018-06-27 Corning Incorporated Geschichtete glasstrukturen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2191603A (en) * 1986-06-13 1987-12-16 Northern Telecom Ltd Optical conductor having at least three layers
US5125946A (en) * 1990-12-10 1992-06-30 Corning Incorporated Manufacturing method for planar optical waveguides
US5141549A (en) * 1991-05-17 1992-08-25 The Charles Stark Draper Laboratories Method of fabricating rare earth doped planar optical waveguide for integrated optical circuit
GB9202463D0 (en) * 1992-02-05 1992-03-18 British Telecomm Silica waveguide structure
US5287427A (en) * 1992-05-05 1994-02-15 At&T Bell Laboratories Method of making an article comprising an optical component, and article comprising the component

Also Published As

Publication number Publication date
DE69512690D1 (de) 1999-11-11
AU3529295A (en) 1996-04-09
HK1002292A1 (en) 1998-08-14
EP0822425B1 (de) 1999-10-06
EP0822426A3 (de) 1998-04-01
EP0782713B1 (de) 2000-07-12
EP0822425A2 (de) 1998-02-04
EP0822426A2 (de) 1998-02-04
US5841928A (en) 1998-11-24
DE69512690T2 (de) 2000-06-08
EP0782713A1 (de) 1997-07-09
DE69517991D1 (de) 2000-08-17
DE69512688D1 (de) 1999-11-11
WO1996009563A1 (en) 1996-03-28
EP0822426B1 (de) 1999-10-06
JPH10505924A (ja) 1998-06-09
EP0822425A3 (de) 1998-04-01
DE69517991T2 (de) 2001-02-08
CA2199513C (en) 2002-08-27
CA2199513A1 (en) 1996-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee