DE69516996T2 - Verbesserungen an oder bezüglich wärmeempfindlichen Elementen - Google Patents

Verbesserungen an oder bezüglich wärmeempfindlichen Elementen

Info

Publication number
DE69516996T2
DE69516996T2 DE69516996T DE69516996T DE69516996T2 DE 69516996 T2 DE69516996 T2 DE 69516996T2 DE 69516996 T DE69516996 T DE 69516996T DE 69516996 T DE69516996 T DE 69516996T DE 69516996 T2 DE69516996 T2 DE 69516996T2
Authority
DE
Germany
Prior art keywords
heat sensitive
sensitive elements
regarding heat
regarding
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69516996T
Other languages
English (en)
Other versions
DE69516996D1 (de
Inventor
James F Belcher
Scott R Summerfelt
Howard R Beratan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
L3 Technologies Inc
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Application granted granted Critical
Publication of DE69516996D1 publication Critical patent/DE69516996D1/de
Publication of DE69516996T2 publication Critical patent/DE69516996T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
DE69516996T 1995-01-03 1995-12-29 Verbesserungen an oder bezüglich wärmeempfindlichen Elementen Expired - Fee Related DE69516996T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/367,659 US5626773A (en) 1995-01-03 1995-01-03 Structure and method including dry etching techniques for forming an array of thermal sensitive elements

Publications (2)

Publication Number Publication Date
DE69516996D1 DE69516996D1 (de) 2000-06-21
DE69516996T2 true DE69516996T2 (de) 2000-12-14

Family

ID=23448087

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69516996T Expired - Fee Related DE69516996T2 (de) 1995-01-03 1995-12-29 Verbesserungen an oder bezüglich wärmeempfindlichen Elementen

Country Status (5)

Country Link
US (2) US5626773A (de)
EP (1) EP0721226B1 (de)
JP (1) JPH08236514A (de)
DE (1) DE69516996T2 (de)
TW (1) TW293151B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7495220B2 (en) * 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor
IL124443A (en) * 1995-11-15 2001-11-25 Lockheed Martin Ir Imaging Sys Dual-band multi-level microbridge detector
JP4091979B2 (ja) * 1995-12-04 2008-05-28 ロッキード マーティン アイアール イメージング システムズ インコーポレーテッド マイクロブリッジ検出器
US5942791A (en) * 1996-03-06 1999-08-24 Gec-Marconi Limited Micromachined devices having microbridge structure
JPH1098162A (ja) * 1996-09-20 1998-04-14 Hitachi Ltd 半導体集積回路装置の製造方法
IT1291208B1 (it) 1997-03-18 1998-12-29 Skf Ind Spa Complesso di tenuta multicontatto per organi meccanici accoppiati in rotazione relativa.
US6459084B1 (en) 1997-05-30 2002-10-01 University Of Central Florida Area receiver with antenna-coupled infrared sensors
JP2001264441A (ja) * 2000-01-14 2001-09-26 Seiko Instruments Inc カロリーメーターとその製造方法
US6897892B2 (en) 2000-10-13 2005-05-24 Alexander L. Kormos System and method for forming images for display in a vehicle
US6524936B2 (en) * 2000-12-22 2003-02-25 Axcelis Technologies, Inc. Process for removal of photoresist after post ion implantation
FR2862160B1 (fr) * 2003-11-10 2006-05-12 Ulis Dispositif de detection de rayonnements infrarouges a detecteurs bolometriques
JP5483544B2 (ja) * 2009-10-21 2014-05-07 住友電工デバイス・イノベーション株式会社 半導体受光装置
TWI646672B (zh) 2017-12-01 2019-01-01 財團法人工業技術研究院 紅外線感測元件及其製造方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH534364A (de) * 1970-03-13 1973-02-28 Ciba Geigy Ag Vorrichtung zum Sichtbarmachen von Infrarotstrahlen
US3846820A (en) * 1973-06-26 1974-11-05 Westinghouse Electric Corp Mosaic for ir imaging using pyroelectric sensors in a bipolar transistor array
US4018608A (en) * 1975-10-10 1977-04-19 Versar, Inc. Infra red photography with silver halide films using infrared and visible light exposures
CA1098615A (en) * 1975-12-29 1981-03-31 George S. Hopper Ferroelectric imaging system
DE2752704A1 (de) * 1976-11-26 1978-06-01 Texas Instruments Inc Infrarotdetektoranordnung
US4379232A (en) * 1977-12-19 1983-04-05 Texas Instruments Incorporated Ferroelectric imaging system
US4142207A (en) * 1977-12-20 1979-02-27 Texas Instruments Incorporated Ferroelectric imaging system
US4162402A (en) * 1977-12-19 1979-07-24 Texas Instruments Incorporated Ferroelectric imaging system
US4143269A (en) * 1977-12-19 1979-03-06 Texas Instruments Incorporated Ferroelectric imaging system
FR2437638A1 (fr) * 1978-09-29 1980-04-25 Anvar Procede pour la transformation d'images thermiques, notamment en images visibles, et dispositif pour sa mise en oeuvre
GB2150387A (en) * 1983-10-14 1985-06-26 Secr Defence Thermal imager
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device
US4750979A (en) * 1984-11-26 1988-06-14 Hughes Aircraft Company Process for etching lithium niobate based devices without damaging optical waveguides
IE56194B1 (en) * 1985-01-07 1991-05-08 Scully Richard L Infrared imaging system
US4705361A (en) * 1985-11-27 1987-11-10 Texas Instruments Incorporated Spatial light modulator
DE3650362T2 (de) * 1986-01-06 1996-01-25 Semiconductor Energy Lab Photoelektrische Umwandlungsvorrichtung mit hoher Ansprechgeschwindigkeit und Herstellungsverfahren.
US4980338A (en) * 1987-11-16 1990-12-25 Semiconductor Energy Laboratory Co., Ltd. Method of producing superconducting ceramic patterns by etching
US4949783A (en) * 1988-05-18 1990-08-21 Veeco Instruments, Inc. Substrate transport and cooling apparatus and method for same
US5010251A (en) * 1988-08-04 1991-04-23 Hughes Aircraft Company Radiation detector array using radiation sensitive bridges
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US5051591A (en) * 1989-07-28 1991-09-24 Texas Instruments Incorporated Reflective chopper for infrared imaging systems
US5047644A (en) * 1989-07-31 1991-09-10 Texas Instruments Incorporated Polyimide thermal isolation mesa for a thermal imaging system
US5264326A (en) * 1989-07-31 1993-11-23 Texas Instruments Incorporated Polyimide thermal isolation mesa for a thermal imaging system
US4994672A (en) * 1989-09-20 1991-02-19 Pennsylvania Research Corp. Pyro-optic detector and imager
FR2671882B1 (fr) * 1989-12-28 1993-05-28 France Etat Dispositif de conversion d'un rayonnement infrarouge en un autre rayonnement d'energie superieure a celle de ce rayonnement infrarouge.
DE69123575T2 (de) * 1990-04-26 1999-09-02 Commw Of Australia Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm
DE4034792A1 (de) * 1990-11-02 1992-05-07 Hoechst Ag Fluessiges enteisungsmittel auf der basis von acetaten und verfahren zum schmelzen von schnee und eis auf verkehrsflaechen mit hilfe dieses mittels
US5242537A (en) * 1991-04-30 1993-09-07 The United States Of America As Represented By The Secretary Of The Navy Ion beam etching of metal oxide ceramics
US5196703A (en) * 1991-09-27 1993-03-23 Texas Instruments Incorporated Readout system and process for IR detector arrays
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
DE69317141T2 (de) * 1992-04-20 1998-06-25 Texas Instruments Inc Anisotropische Ätzung von Metalloxid
US5238530A (en) * 1992-04-20 1993-08-24 Texas Instruments Incorporated Anisotropic titanate etch
US5201989A (en) * 1992-04-20 1993-04-13 Texas Instruments Incorporated Anisotropic niobium pentoxide etch
US5238529A (en) * 1992-04-20 1993-08-24 Texas Instruments Incorporated Anisotropic metal oxide etch
US5485010A (en) * 1994-01-13 1996-01-16 Texas Instruments Incorporated Thermal isolation structure for hybrid thermal imaging system
US5587090A (en) * 1994-04-04 1996-12-24 Texas Instruments Incorporated Multiple level mask for patterning of ceramic materials

Also Published As

Publication number Publication date
JPH08236514A (ja) 1996-09-13
US5647946A (en) 1997-07-15
TW293151B (de) 1996-12-11
DE69516996D1 (de) 2000-06-21
EP0721226B1 (de) 2000-05-17
EP0721226A3 (de) 1998-04-08
EP0721226A2 (de) 1996-07-10
US5626773A (en) 1997-05-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: L-3 COMMUNICATIONS CORP., NEW YORK, N.Y., US

8328 Change in the person/name/address of the agent

Representative=s name: DEHMEL & BETTENHAUSEN, PATENTANWAELTE, 80331 MUENCHEN

8339 Ceased/non-payment of the annual fee