DE69518657T2 - Lager- und abgabesystem für gasförmige verbindungen - Google Patents

Lager- und abgabesystem für gasförmige verbindungen

Info

Publication number
DE69518657T2
DE69518657T2 DE69518657T DE69518657T DE69518657T2 DE 69518657 T2 DE69518657 T2 DE 69518657T2 DE 69518657 T DE69518657 T DE 69518657T DE 69518657 T DE69518657 T DE 69518657T DE 69518657 T2 DE69518657 T2 DE 69518657T2
Authority
DE
Germany
Prior art keywords
laser
fluid
utilizing
gas
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69518657T
Other languages
English (en)
Other versions
DE69518657D1 (de
Inventor
Glenn M Tom
James V Mcmanus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Application granted granted Critical
Publication of DE69518657D1 publication Critical patent/DE69518657D1/de
Publication of DE69518657T2 publication Critical patent/DE69518657T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F17C11/007—Use of gas-solvents or gas-sorbents in vessels for hydrocarbon gases, such as methane or natural gas, propane, butane or mixtures thereof [LPG]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/308—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/10—Capture or disposal of greenhouse gases of nitrous oxide (N2O)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/902—Molecular sieve
DE69518657T 1994-10-13 1995-10-13 Lager- und abgabesystem für gasförmige verbindungen Expired - Lifetime DE69518657T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/322,224 US5518528A (en) 1994-10-13 1994-10-13 Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
PCT/US1995/013040 WO1996011739A1 (en) 1994-10-13 1995-10-13 Storage and delivery system for gaseous compounds

Publications (2)

Publication Number Publication Date
DE69518657D1 DE69518657D1 (de) 2000-10-05
DE69518657T2 true DE69518657T2 (de) 2001-05-03

Family

ID=23253952

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69518657T Expired - Lifetime DE69518657T2 (de) 1994-10-13 1995-10-13 Lager- und abgabesystem für gasförmige verbindungen
DE0785817T Pending DE785817T1 (de) 1994-10-13 1995-10-13 Lager- und abgabesystem für gasförmigen verbindungen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE0785817T Pending DE785817T1 (de) 1994-10-13 1995-10-13 Lager- und abgabesystem für gasförmigen verbindungen

Country Status (17)

Country Link
US (4) US5518528A (de)
EP (1) EP0785817B1 (de)
JP (4) JP3058918B2 (de)
KR (1) KR100199885B1 (de)
CN (1) CN1132662C (de)
AT (1) ATE195888T1 (de)
AU (1) AU710453B2 (de)
BR (1) BR9509134A (de)
CA (1) CA2202466C (de)
DE (2) DE69518657T2 (de)
DK (1) DK0785817T3 (de)
ES (1) ES2150588T3 (de)
GR (1) GR3034932T3 (de)
IL (1) IL115619A (de)
MX (1) MX9702722A (de)
PT (1) PT785817E (de)
WO (1) WO1996011739A1 (de)

Families Citing this family (170)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US6204180B1 (en) 1997-05-16 2001-03-20 Advanced Technology Materials, Inc. Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5961697A (en) * 1996-05-20 1999-10-05 Advanced Technology Materials, Inc. Bulk storage and dispensing system for fluids
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5882384A (en) * 1996-05-20 1999-03-16 Advanced Technology Materials, Inc. Gas source and dispensing system with in situ monitoring of pressure and temperature
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
US5858067A (en) * 1996-05-20 1999-01-12 Advanced Technology Materials, Inc. Ex situ degassing and sorbate loading system for manufacture of sorbent-based fluid storage and dispensing apparatus
US5993766A (en) * 1996-05-20 1999-11-30 Advanced Technology Materials, Inc. Gas source and dispensing system
KR100271084B1 (ko) * 1996-05-20 2000-11-01 바누치 유진 지. 작동 용량이 높은 물리적 흡착제를 포함하는 유체 저장 및 전달 시스템
CN1128652C (zh) * 1996-05-20 2003-11-26 高级技术材料公司 包含高工作量的物理吸附剂的流体贮藏和分送系统
US5917140A (en) * 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US6338312B2 (en) * 1998-04-15 2002-01-15 Advanced Technology Materials, Inc. Integrated ion implant scrubber system
US6309446B1 (en) * 1997-02-17 2001-10-30 Kanebo, Ltd. Activated carbon for adsorptive storage of gaseous compound
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US6110257A (en) * 1997-05-16 2000-08-29 Advanced Technology Materials, Inc. Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
GB9724168D0 (en) 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
US6007609A (en) * 1997-12-18 1999-12-28 Uop Llc Pressurized container with restrictor tube having multiple capillary passages
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US5929325A (en) * 1998-01-12 1999-07-27 The Dumont Company, Inc. System for containing and handling toxic gas and methods for containing and handling same
US6153150A (en) 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US6261524B1 (en) 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
WO1999041010A1 (fr) * 1998-02-17 1999-08-19 Kanebo, Limited Carbone active pour adsorption et stockage d'un compose gazeux
US6660063B2 (en) 1998-03-27 2003-12-09 Advanced Technology Materials, Inc Sorbent-based gas storage and delivery system
US6406519B1 (en) 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6453924B1 (en) 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US5937895A (en) * 1998-04-17 1999-08-17 Uop Llc Fail-safe delivery valve for pressurized tanks
US6045115A (en) * 1998-04-17 2000-04-04 Uop Llc Fail-safe delivery arrangement for pressurized containers
US6620256B1 (en) 1998-04-28 2003-09-16 Advanced Technology Materials, Inc. Non-plasma in-situ cleaning of processing chambers using static flow methods
US6101816A (en) * 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6343476B1 (en) 1998-04-28 2002-02-05 Advanced Technology Materials, Inc. Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
US6079252A (en) * 1998-05-20 2000-06-27 Advanced Technology Materials, Inc. Leak detection device, and fluid vessel assembly comprising same
US6156578A (en) * 1998-06-01 2000-12-05 Advanced Technology Materials, Inc. Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
GB9816316D0 (en) 1998-07-28 1998-09-23 Zeneca Ltd Compound storage
KR100531194B1 (ko) * 1998-08-14 2005-11-28 다카치호 가가쿠 고교 가부시키가이샤 수소화 화합물 기체 또는 할로겐화 화합물 기체의 저장방법
US6113673A (en) * 1998-09-16 2000-09-05 Materials And Electrochemical Research (Mer) Corporation Gas storage using fullerene based adsorbents
US6395070B1 (en) * 1998-10-06 2002-05-28 Matheson Tri-Gas, Inc. Methods for removal of impurity metals from gases using low metal zeolites
US6295861B1 (en) 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
US6581623B1 (en) * 1999-07-16 2003-06-24 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6302139B1 (en) * 1999-07-16 2001-10-16 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
GB9917616D0 (en) * 1999-07-27 1999-09-29 Boc Group Plc Improved metal foam container
US6277342B1 (en) 1999-08-23 2001-08-21 Air Products And Chemicals, Inc. Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
US6391385B1 (en) 1999-10-18 2002-05-21 Advanced Technology Materials, Inc. Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
US6491884B1 (en) 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
US6621848B1 (en) * 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
KR100858077B1 (ko) * 2000-05-03 2008-09-11 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비
AU2000260133A1 (en) * 2000-06-07 2001-12-17 Chemisar Laboratories Process for storage, transmission and distribution of gaseous fuel
US6500238B1 (en) 2000-08-10 2002-12-31 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6360546B1 (en) 2000-08-10 2002-03-26 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
JP3758131B2 (ja) * 2000-08-23 2006-03-22 株式会社日本製鋼所 ガス吸放出物質を用いたガス吸放出装置およびその運転方法
US6515290B1 (en) 2000-09-05 2003-02-04 Axcelis Technologies, Inc. Bulk gas delivery system for ion implanters
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
US6494343B2 (en) * 2001-02-15 2002-12-17 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly
US6879876B2 (en) 2001-06-13 2005-04-12 Advanced Technology Materials, Inc. Liquid handling system with electronic information storage
US6932945B2 (en) * 2001-06-19 2005-08-23 Air Products And Chemicals, Inc. Adsorbent based gas delivery system with integrated purifier
US6790363B2 (en) * 2001-07-24 2004-09-14 Chk Group, Inc. Method of treating arsenic-contaminated waters
US6471750B1 (en) 2001-08-08 2002-10-29 Advanced Technology Materials, Inc. Gas cabinet assembly comprising back migration scrubber unit
US7092077B2 (en) * 2001-09-24 2006-08-15 Entegris, Inc. System and method for monitoring contamination
US20040023419A1 (en) * 2001-09-24 2004-02-05 Extraction Systems, Inc System and method for monitoring contamination
US7254983B2 (en) * 2001-10-16 2007-08-14 Hera Usa Inc. Fuel gauge for hydrogen storage media
US6592653B2 (en) 2001-11-12 2003-07-15 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing low heels carbon sorbent medium
US6764755B2 (en) 2001-12-17 2004-07-20 Advanced Technology Materials, Inc. Channelized sorbent media, and methods of making same
US6620225B2 (en) * 2002-01-10 2003-09-16 Advanced Technology Materials, Inc. Adsorbents for low vapor pressure fluid storage and delivery
US6774019B2 (en) * 2002-05-17 2004-08-10 International Business Machines Corporation Incorporation of an impurity into a thin film
US6648034B1 (en) * 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
US6857447B2 (en) * 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6716271B1 (en) 2002-10-29 2004-04-06 Advanced Technology Materials, Inc. Apparatus and method for inhibiting decomposition of germane
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US6770117B2 (en) * 2002-10-31 2004-08-03 Advanced Technology Materials, Inc. Ion implantation and wet bench systems utilizing exhaust gas recirculation
US6935354B2 (en) * 2002-12-09 2005-08-30 Advanced Technology Materials, Inc. Permeable gas assembly for gas delivery
US7370661B2 (en) * 2002-12-09 2008-05-13 Advanced Technology Materials, Inc. Permeable gas assembly for gas delivery
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7494530B2 (en) * 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6997202B2 (en) * 2002-12-17 2006-02-14 Advanced Technology Materials, Inc. Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate
US6960700B1 (en) 2002-12-19 2005-11-01 Uop Llc Adsorbent beds for removal of hydrides from hydrocarbons
DE10306344B8 (de) * 2003-02-15 2013-11-21 Pharmpur Gmbh Gasspeicher zur Speicherung einer vorgegebenen Gasmenge und Freigabe des Gases für eine medizinische Applikation
US6868869B2 (en) * 2003-02-19 2005-03-22 Advanced Technology Materials, Inc. Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US7172646B2 (en) 2003-04-15 2007-02-06 Air Products And Chemicals, Inc. Reactive liquid based gas storage and delivery systems
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
JP2005024068A (ja) * 2003-07-02 2005-01-27 Toyo Tanso Kk ハロゲンガス又はハロゲン含有ガスの供給装置
US6909839B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Delivery systems for efficient vaporization of precursor source material
US6907740B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Gas charging system for fill of gas storage and dispensing vessels
US7150353B2 (en) * 2003-08-01 2006-12-19 Stephen Michael Lord Method for safe handling of unstable hydride gases
US20050053535A1 (en) * 2003-09-08 2005-03-10 Seh America, Inc. Gettering filter and associated method for removing oxygen from a gas
US6955198B2 (en) * 2003-09-09 2005-10-18 Advanced Technology Materials, Inc. Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array
US7780747B2 (en) * 2003-10-14 2010-08-24 Advanced Technology Materials, Inc. Apparatus and method for hydrogen generation from gaseous hydride
US7018448B2 (en) * 2003-10-28 2006-03-28 Advanced Technology Materials, Inc. Gas cabinet including integrated effluent scrubber
US7253002B2 (en) * 2003-11-03 2007-08-07 Advanced Technology Materials, Inc. Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same
US7306870B2 (en) * 2004-02-13 2007-12-11 The Gillette Company Fuel cell
US7303607B2 (en) * 2004-06-14 2007-12-04 Air Products And Chemicals, Inc. Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases
US7396381B2 (en) * 2004-07-08 2008-07-08 Air Products And Chemicals, Inc. Storage and delivery systems for gases held in liquid medium
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
US7404845B2 (en) * 2004-09-23 2008-07-29 Air Products And Chemicals, Inc. Ionic liquid based mixtures for gas storage and delivery
US7563308B2 (en) * 2004-09-23 2009-07-21 Air Products And Chemicals, Inc. Ionic liquid based mixtures for gas storage and delivery
US7282084B2 (en) * 2004-10-15 2007-10-16 Air Products And Chemicals, Inc. Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases
US7955797B2 (en) * 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US20060115591A1 (en) * 2004-11-29 2006-06-01 Olander W K Pentaborane(9) storage and delivery
EP1864102A2 (de) * 2005-02-28 2007-12-12 Advanced Technology Materials, Inc. Vorrichtung und prozess zur leckprüfung und qualifikation von fluidabgabebehältern
JP4681325B2 (ja) * 2005-03-04 2011-05-11 セイコーインスツル株式会社 逆流防止監視付きガス供給システムの使用方法
US7638058B2 (en) * 2005-04-07 2009-12-29 Matheson Tri-Gas Fluid storage and purification method and system
CN101213008B (zh) * 2005-05-03 2011-09-28 高级技术材料公司 流体储存和分配系统以及包含该系统的流体供应方法
TWI552797B (zh) 2005-06-22 2016-10-11 恩特葛瑞斯股份有限公司 整合式氣體混合用之裝置及方法
US7556671B2 (en) * 2005-08-08 2009-07-07 The Boc Group, Inc. System and method for purifying a gas
US20070028766A1 (en) * 2005-08-08 2007-02-08 Ravi Jain Method for removing impurities from a gas
US7481985B2 (en) * 2005-08-08 2009-01-27 The Boc Group, Inc. Method of removing impurities from a gas
US20070031302A1 (en) * 2005-08-08 2007-02-08 Carsten Wittrup Method and apparatus for purifying a gas
US20070028764A1 (en) * 2005-08-08 2007-02-08 Carsten Wittrup Method for enabling the provision of purified carbon dioxide
US20070028772A1 (en) * 2005-08-08 2007-02-08 Ravi Jain Method and system for purifying a gas
US8017405B2 (en) 2005-08-08 2011-09-13 The Boc Group, Inc. Gas analysis method
TW200722344A (en) * 2005-08-22 2007-06-16 Advanced Tech Materials Material containment system
SG165321A1 (en) 2005-08-30 2010-10-28 Advanced Tech Materials Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
WO2007027965A2 (en) * 2005-08-30 2007-03-08 Advanced Technology Materials, Inc. Delivery of low pressure dopant gas to a high voltage ion source
US20070157804A1 (en) * 2006-01-06 2007-07-12 Mcmanus James V Method and apparatus for decommissioning and recycling retired adsorbent-based fluid storage and dispensing vessels
CN101410164B (zh) * 2006-01-30 2012-05-02 高级技术材料公司 纳米多孔碳材料，以及利用其的系统和方法
US7716850B2 (en) 2006-05-03 2010-05-18 Georgia-Pacific Consumer Products Lp Energy-efficient yankee dryer hood system
KR20090018986A (ko) * 2006-06-02 2009-02-24 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 구리 박막 형성을 위한 구리(ｉ) 아미디네이트 및 구아니디네이트
TWI611313B (zh) 2006-07-10 2018-01-11 美商恩特葛瑞斯股份有限公司 用於將儲存在液體儲存容器中的液體供應至基板的材料管理系統及方法
WO2008069821A1 (en) * 2006-12-05 2008-06-12 Advanced Technology Materials, Inc. Metal aminotroponiminates, bis-oxazolinates and guanidinates
EP2174076A4 (de) 2007-06-22 2011-04-13 Advanced Tech Materials Komponente für solar-adsorptionskälteanlage und verfahren zur herstellung solch einer komponente
DE102007030106A1 (de) * 2007-06-28 2009-01-02 Intega Gmbh Verfahren und Vorrichtung zum Behandeln eines Halbleitersubstrats
EP2877773A4 (de) * 2012-07-24 2016-04-06 Paul H Smith Jr Wasserstoffenergiesysteme
WO2009079218A2 (en) 2007-12-06 2009-06-25 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material
US20100228399A1 (en) * 2007-12-06 2010-09-09 Udischas Richard J Pressure regulator assembly and system for the controlled storage and dispensing of a fluid
US8119853B2 (en) * 2008-01-10 2012-02-21 L'Air Liquide SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Low pressure acetylene storage
TWI619153B (zh) 2008-02-11 2018-03-21 恩特葛瑞斯股份有限公司 在半導體處理系統中離子源之清洗
US11634815B2 (en) 2008-07-03 2023-04-25 Rasirc, Inc. Method, system, and device for storage and delivery of process gas from a substrate
US20100290977A1 (en) * 2009-05-15 2010-11-18 Bowers Charles W Method of removing hydrocarbon impurities from a gas
US8598022B2 (en) 2009-10-27 2013-12-03 Advanced Technology Materials, Inc. Isotopically-enriched boron-containing compounds, and methods of making and using same
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
CN103079997B (zh) 2010-06-25 2016-06-01 恩特格里斯公司 氙气和其他高价值化合物的回收
US20130251913A1 (en) * 2010-11-30 2013-09-26 Advanced Technology Materials, Inc. Ion implanter system including remote dopant source, and method comprising same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
JP5899883B2 (ja) * 2011-01-26 2016-04-06 セントラル硝子株式会社 高圧ガスの供給方法、衝撃波減衰機構を有する機器及び高圧ガスの供給装置
US8795411B2 (en) 2011-02-07 2014-08-05 Air Products And Chemicals, Inc. Method for recovering high-value components from waste gas streams
WO2013028245A2 (en) * 2011-08-23 2013-02-28 Advanced Technology Materials, Inc. Systems and methods for supplying phosphine for fumigation applications
SG11201405141TA (en) * 2012-02-24 2014-09-26 Advanced Tech Materials Fluid delivery system and method
WO2013181295A1 (en) 2012-05-29 2013-12-05 Advanced Technology Materials, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent
CN102731054B (zh) * 2012-07-11 2015-09-16 中国第一汽车股份有限公司 含有分子筛的储氨混合物多孔固体样块及其制备方法
US9863581B2 (en) * 2012-08-24 2018-01-09 Nearshore Natural Gas, Llc Virtual gaseous fuel pipeline
WO2014088794A1 (en) * 2012-12-05 2014-06-12 Linde Aktiengesellschaft Diborane storage
WO2014088797A1 (en) * 2012-12-05 2014-06-12 Linde Aktiengesellschaft Diborane storage and blending
US9186650B2 (en) 2013-04-05 2015-11-17 Entegris, Inc. Adsorbent having utility for CO2 capture from gas mixtures
MY182759A (en) 2013-08-05 2021-02-05 Numat Tech Inc Metal organic frameworks for electronic gas storage
WO2016069516A1 (en) * 2014-10-27 2016-05-06 Entegris, Inc. Ion implantation processes and apparatus
US9909670B2 (en) * 2015-03-04 2018-03-06 Praxair Technology, Inc. Modified vacuum actuated valve assembly and sealing mechanism for improved flow stability for fluids sub-atmospherically dispensed from storage and delivery systems
TW202144072A (zh) * 2015-11-07 2021-12-01 美商恩特葛瑞斯股份有限公司 吸附劑與流體供應包裝及包含其之裝置
EP3471875A1 (de) * 2016-06-20 2019-04-24 Covestro Deutschland AG Speichermaterial und verfahren zur chlorspeicherung
EP3431859A1 (de) 2017-07-21 2019-01-23 Covestro Deutschland AG Verfahren zur leckage-sicheren speicherung von verflüssigtem chlor
US11098402B2 (en) 2017-08-22 2021-08-24 Praxair Technology, Inc. Storage and delivery of antimony-containing materials to an ion implanter
US10597773B2 (en) 2017-08-22 2020-03-24 Praxair Technology, Inc. Antimony-containing materials for ion implantation
KR20200087227A (ko) 2017-11-17 2020-07-20 라시크 아이엔씨. 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스
US11236863B2 (en) * 2018-01-08 2022-02-01 Ut-Battelle, Llc Automated cryogenic refilling system
US11491435B2 (en) 2019-05-24 2022-11-08 Entegris, Inc. Methods and systems for removing ammonia from a gas mixture
EP3976231A4 (de) * 2019-05-24 2023-10-11 Entegris, Inc. Verfahren und systeme zur adsorption organometallischer dämpfe
US11692671B2 (en) * 2020-05-07 2023-07-04 Numat Technologies, Inc. Apparatus and method for dispensing gas from a storage vessel
CN112744787B (zh) * 2020-12-16 2022-05-03 四川天采科技有限责任公司 一种含高浓度HF的HCl气体深度脱氟干燥的FTrPSA分离与净化方法
CN112728411A (zh) * 2020-12-31 2021-04-30 湖南理工学院 一种纯氢输运分配管网系统及其控制方法

Family Cites Families (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US240423A (en) * 1881-04-19 Alexander james
US1608155A (en) * 1920-08-02 1926-11-23 American Solvent Recovery Corp Means for transporting and storing gases
US1714245A (en) * 1927-12-23 1929-05-21 American Signs Corp Gas-purifying trap and method of restoring same
US2356334A (en) * 1941-12-18 1944-08-22 Hooker Electrochemical Co Means for storing and concentrating anhydrous hydrogen chloride
US2450289A (en) * 1944-04-15 1948-09-28 Little Inc A Gas treating apparatus
US2663626A (en) * 1949-05-14 1953-12-22 Pritchard & Co J F Method of storing gases
BE561650A (de) * 1953-09-25 1900-01-01
US3287432A (en) * 1957-04-11 1966-11-22 Texaco Inc Selective sorption process
US3080307A (en) * 1957-10-21 1963-03-05 Westinghouse Electric Corp Radioactive fluid handling system
US3093564A (en) * 1957-10-21 1963-06-11 Westinghouse Electric Corp Gas handling systems for radioactive gases
NL241272A (de) * 1958-07-14
US2997371A (en) * 1958-12-01 1961-08-22 Standard Oil Co Recovering of bf3 from admixture with hydrocarbons
US3116132A (en) * 1960-01-22 1963-12-31 Olin Mathieson Process for the adsorption and desorption of diborane
US3006153A (en) * 1960-08-29 1961-10-31 Union Carbide Corp Method and apparatus for storing and transporting ozone
NL297067A (de) * 1962-09-04 1900-01-01
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping
US3264803A (en) * 1963-01-21 1966-08-09 Gen Electric Sorption vacuum pump
US3415069A (en) * 1966-10-31 1968-12-10 Nasa High pressure helium purifier
US3469375A (en) * 1967-10-16 1969-09-30 Nasa Sorption vacuum trap
US3648194A (en) * 1969-09-10 1972-03-07 United Aircraft Corp Semiclosed cycle gas laser system
US3675392A (en) * 1970-01-30 1972-07-11 Ite Imperial Corp Adsorption-desorption method for purifying sf{11
GB1385922A (en) * 1971-03-31 1975-03-05 Yatsurugi Y Kuratomi T Preparation and use of 4-5a zeolite
US3713273A (en) * 1971-05-03 1973-01-30 R Coffee Method and apparatus for storing gases and fueling internal combustion engines
US3719026A (en) * 1971-06-01 1973-03-06 Zeochem Corp Selective sorption of non-polar molecules
US3788036A (en) * 1972-07-26 1974-01-29 D Stahl Pressure equalization and purging system for heatless adsorption systems
US4023701A (en) * 1974-03-04 1977-05-17 Dockery Denzel J Breathing apparatus for underwater use
JPS5272373A (en) * 1975-12-15 1977-06-16 Chiyoda R & D Adsorption and separation apparatus
GB1594454A (en) * 1976-12-23 1981-07-30 Boc Ltd Gas separation
US4343770A (en) * 1977-12-19 1982-08-10 Billings Energy Corporation Self-regenerating system of removing oxygen and water impurities from hydrogen gas
US4263018A (en) * 1978-02-01 1981-04-21 Greene & Kellogg Pressure swing adsorption process and system for gas separation
NL8005645A (nl) * 1980-10-13 1982-05-03 Euratom Werkwijze voor het omkeerbaar opsluiten van gassen of dampen in een natuurlijk of synthetisch zeoliet.
DE3139781A1 (de) * 1981-10-07 1983-04-21 Nyby Uddeholm AB, 64480 Torshälla Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases
US4477265A (en) * 1982-08-05 1984-10-16 Air Products And Chemicals, Inc. Argon purification
JPS6071040A (ja) * 1983-09-27 1985-04-22 Takeda Chem Ind Ltd 有害ガス吸着剤
SU1181692A1 (ru) * 1983-11-14 1985-09-30 Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева Способ очистки газов от примесей фосфина и арсина
US4552571A (en) * 1984-04-05 1985-11-12 Vbm Corporation Oxygen generator with two compressor stages
FR2575869B1 (fr) * 1984-11-23 1987-07-10 Telecommunications Sa Generateur laser a catalyseur pour le gaz laser
JPS61133116A (ja) * 1984-11-30 1986-06-20 Nippon Paionikusu Kk ガス精製装置
FR2580947B1 (fr) * 1985-04-25 1989-09-01 Air Liquide Procede et installation d'epuration par adsorption sur charbon actif, et pot adsorbeur correspondant
US4673415A (en) * 1986-05-22 1987-06-16 Vbm Corporation Oxygen production system with two stage oxygen pressurization
US4869733A (en) * 1986-05-22 1989-09-26 Vbm Corporation Super-enriched oxygen generator
JPH06104177B2 (ja) * 1986-10-02 1994-12-21 大阪瓦斯株式会社 高純度ガス貯蔵用圧力容器
US5151395A (en) * 1987-03-24 1992-09-29 Novapure Corporation Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor
US4761395A (en) * 1987-03-24 1988-08-02 Advanced Technology Materials, Inc. Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4749384A (en) * 1987-04-24 1988-06-07 Union Carbide Corporation Method and apparatus for quick filling gas cylinders
US4723967A (en) * 1987-04-27 1988-02-09 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
US4738693A (en) * 1987-04-27 1988-04-19 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
DE3729517A1 (de) * 1987-09-03 1989-03-16 Siemens Ag Adsorptionseinrichtung zur gastrennung
SU1544475A1 (ru) * 1987-12-07 1990-02-23 Предприятие П/Я Г-4567 Способ получени сорбента дл очистки газов
SU1583151A1 (ru) * 1988-05-23 1990-08-07 Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" Способ очистки газов от арсина
DE3842930A1 (de) * 1988-12-21 1990-06-28 Bayer Ag Verfahren zur adsorptiven sauerstoffanreicherung von luft mit mischungen aus ca-zeolith a molekularsieben mittels vakuum-swing-adsorption
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
JPH0316638A (ja) * 1989-06-14 1991-01-24 Mitsubishi Heavy Ind Ltd オゾン吸着済及びオゾン吸蔵装置
FR2652346B1 (fr) * 1989-09-22 1991-11-29 Air Liquide Procede de preparation de disilane.
JPH03127606A (ja) * 1989-10-09 1991-05-30 Hitachi Ltd 充填塔構造
US5202096A (en) * 1990-01-19 1993-04-13 The Boc Group, Inc. Apparatus for low temperature purification of gases
FR2659030B1 (fr) * 1990-03-02 1993-01-08 Air Liquide Enceinte et installation d'absorption pour separation des melanges gazeux.
JP3038353B2 (ja) * 1990-12-21 2000-05-08 石川島播磨重工業株式会社 オゾンの保存方法
JPH06125127A (ja) * 1991-06-04 1994-05-06 Sumitomo Heavy Ind Ltd ガスレーザ装置およびその運転法
JPH06104510A (ja) * 1991-06-04 1994-04-15 Sumitomo Heavy Ind Ltd ガスレーザ装置およびその運転法
JPH05272373A (ja) * 1992-03-27 1993-10-19 Mitsubishi Heavy Ind Ltd 内燃機関の燃焼装置
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US5224350A (en) * 1992-05-11 1993-07-06 Advanced Extraction Technologies, Inc. Process for recovering helium from a gas stream
GB9220975D0 (en) * 1992-10-06 1992-11-18 Air Prod & Chem Apparatus for supplying high purity gas
US5385689A (en) * 1993-06-29 1995-01-31 Novapure Corporation Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom
US5417742A (en) * 1993-12-03 1995-05-23 The Boc Group, Inc. Removal of perfluorocarbons from gas streams
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit

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US6125131A (en) 2000-09-26
ES2150588T3 (es) 2000-12-01
ATE195888T1 (de) 2000-09-15
EP0785817B1 (de) 2000-08-30
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JP3916788B2 (ja) 2007-05-23
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US5704965A (en) 1998-01-06
US5518528A (en) 1996-05-21
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JP4279191B2 (ja) 2009-06-17
JP3058918B2 (ja) 2000-07-04
IL115619A0 (en) 1996-01-19
DE69518657D1 (de) 2000-10-05
JPH11264500A (ja) 1999-09-28
CN1132662C (zh) 2003-12-31
WO1996011739A1 (en) 1996-04-25
DE785817T1 (de) 1998-01-29
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US5935305A (en) 1999-08-10
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AU710453B2 (en) 1999-09-23
AU3830095A (en) 1996-05-06
CA2202466C (en) 2004-07-06
PT785817E (pt) 2001-03-30
IL115619A (en) 2000-12-06
EP0785817A1 (de) 1997-07-30
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CN1177307A (zh) 1998-03-25
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JP4934526B2 (ja) 2012-05-16
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