DE69519941T2 - Sensor mit verschiedenen rückstell-und messfingern - Google Patents

Sensor mit verschiedenen rückstell-und messfingern

Info

Publication number
DE69519941T2
DE69519941T2 DE69519941T DE69519941T DE69519941T2 DE 69519941 T2 DE69519941 T2 DE 69519941T2 DE 69519941 T DE69519941 T DE 69519941T DE 69519941 T DE69519941 T DE 69519941T DE 69519941 T2 DE69519941 T2 DE 69519941T2
Authority
DE
Germany
Prior art keywords
sensor
different reset
measuring fingers
fingers
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69519941T
Other languages
English (en)
Other versions
DE69519941D1 (de
Inventor
T Howe
Stephen Bart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Publication of DE69519941D1 publication Critical patent/DE69519941D1/de
Application granted granted Critical
Publication of DE69519941T2 publication Critical patent/DE69519941T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
DE69519941T 1994-12-01 1995-11-29 Sensor mit verschiedenen rückstell-und messfingern Expired - Lifetime DE69519941T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/347,795 US5565625A (en) 1994-12-01 1994-12-01 Sensor with separate actuator and sense fingers
PCT/US1995/015284 WO1996017232A1 (en) 1994-12-01 1995-11-29 Sensor with separate actuator and sense fingers

Publications (2)

Publication Number Publication Date
DE69519941D1 DE69519941D1 (de) 2001-02-22
DE69519941T2 true DE69519941T2 (de) 2001-04-26

Family

ID=23365305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69519941T Expired - Lifetime DE69519941T2 (de) 1994-12-01 1995-11-29 Sensor mit verschiedenen rückstell-und messfingern

Country Status (4)

Country Link
US (2) US5565625A (de)
EP (1) EP0795122B1 (de)
DE (1) DE69519941T2 (de)
WO (1) WO1996017232A1 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US6316796B1 (en) 1995-05-24 2001-11-13 Lucas Novasensor Single crystal silicon sensor with high aspect ratio and curvilinear structures
US6084257A (en) * 1995-05-24 2000-07-04 Lucas Novasensor Single crystal silicon sensor with high aspect ratio and curvilinear structures
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
DE19719779A1 (de) * 1997-05-10 1998-11-12 Bosch Gmbh Robert Beschleunigungssensor
US6121552A (en) * 1997-06-13 2000-09-19 The Regents Of The University Of Caliofornia Microfabricated high aspect ratio device with an electrical isolation trench
US6223598B1 (en) 1997-06-18 2001-05-01 Analog Devices, Inc. Suspension arrangement for semiconductor accelerometer
US6070464A (en) * 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
US6275034B1 (en) 1998-03-11 2001-08-14 Analog Devices Inc. Micromachined semiconductor magnetic sensor
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
US6606913B1 (en) 1998-11-06 2003-08-19 Wisconsin Alumni Research Foundation Micromachined strain sensor
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
EP1083431A1 (de) * 1999-09-10 2001-03-14 STMicroelectronics S.r.l. Verfahren zur Kompensation von Positionsfehlern eines kapazitiven inertialen Sensors, und kapazitiver inertialer Sensor
DE10046958B4 (de) * 1999-09-27 2009-01-02 Denso Corp., Kariya-shi Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse
DE19959707A1 (de) * 1999-12-10 2001-06-13 Bosch Gmbh Robert Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US20010040419A1 (en) * 2000-03-24 2001-11-15 Behrang Behin Biased rotatable combdrive sensor methods
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6744173B2 (en) * 2000-03-24 2004-06-01 Analog Devices, Inc. Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
TW574128B (en) * 2002-11-29 2004-02-01 Lightuning Tech Inc Thermal bubble type micro-machined inertial sensor
US7093498B2 (en) * 2003-09-30 2006-08-22 Rockwell Automation Technologies, Inc. Microelectromechanical strain gauge with frequency detector
US20050172717A1 (en) * 2004-02-06 2005-08-11 General Electric Company Micromechanical device with thinned cantilever structure and related methods
DE602004031938D1 (de) * 2004-08-13 2011-05-05 St Microelectronics Srl Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen
CN100419655C (zh) * 2005-04-08 2008-09-17 鸿富锦精密工业（深圳）有限公司 触摸式感应装置
US20060271199A1 (en) * 2005-05-20 2006-11-30 Johnson Lanny L Navigational markers in implants
CN100370402C (zh) * 2005-08-05 2008-02-20 鸿富锦精密工业（深圳）有限公司 触摸式感应装置
WO2007127107A2 (en) * 2006-04-21 2007-11-08 Bioscale, Inc. Microfabricated devices and method for fabricating microfabricated devices
US7637160B2 (en) * 2006-06-30 2009-12-29 Freescale Semiconductor, Inc. MEMS suspension and anchoring design
US7999440B2 (en) * 2006-11-27 2011-08-16 Bioscale, Inc. Micro-fabricated devices having a suspended membrane or plate structure
US20080121042A1 (en) * 2006-11-27 2008-05-29 Bioscale, Inc. Fluid paths in etchable materials
DE102009021567A1 (de) * 2008-05-15 2009-12-31 Continental Teves Ag & Co. Ohg Mikromechanischer Beschleunigungssensor
EP2189463B1 (de) * 2008-11-25 2012-07-04 Rohm and Haas Company Synthese von Arminboranen
US8186220B2 (en) * 2009-03-09 2012-05-29 Freescale Semiconductor, Inc. Accelerometer with over-travel stop structure
JP5206709B2 (ja) * 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
US9027402B2 (en) * 2010-04-30 2015-05-12 Hewlett-Packard Development Company, L.P. Error correction in acceleration-sensing devices
JP5790297B2 (ja) * 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
US9605952B2 (en) 2012-03-08 2017-03-28 Quality Manufacturing Inc. Touch sensitive robotic gripper
US9205567B2 (en) 2012-03-08 2015-12-08 Quality Manufacturing Inc. Touch sensitive robotic gripper
US9027403B2 (en) * 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
EP2861524A4 (de) * 2012-06-13 2016-07-06 Purdue Research Foundation Mikroelektromechanisches system und verfahren zur verwendung
US20140260618A1 (en) 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
US20140260617A1 (en) 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
JP6206651B2 (ja) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体
DE102015001128B4 (de) * 2015-01-29 2021-09-30 Northrop Grumman Litef Gmbh Beschleunigungssensor mit Federkraftkompensation
US10718359B2 (en) 2015-08-21 2020-07-21 Quality Manufacturing Inc. Devices and systems for producing rotational actuation

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584885A (en) * 1984-01-20 1986-04-29 Harry E. Aine Capacitive detector for transducers
FR2560997B1 (fr) * 1984-03-06 1987-06-05 Sfena Capteur accelerometrique a structure pendulaire plane
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
US4896098A (en) * 1987-01-08 1990-01-23 Massachusetts Institute Of Technology Turbulent shear force microsensor
US5189914A (en) * 1988-02-29 1993-03-02 The Regents Of The University Of California Plate-mode ultrasonic sensor
US5083466A (en) * 1988-07-14 1992-01-28 University Of Hawaii Multidimensional force sensor
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
EP0459723B1 (de) * 1990-05-30 1996-01-17 Hitachi, Ltd. Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
JPH0644008B2 (ja) * 1990-08-17 1994-06-08 アナログ・ディバイセス・インコーポレーテッド モノリシック加速度計
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5181156A (en) * 1992-05-14 1993-01-19 Motorola Inc. Micromachined capacitor structure and method for making
US5337606A (en) * 1992-08-10 1994-08-16 Motorola, Inc. Laterally sensitive accelerometer and method for making
FR2700012B1 (fr) * 1992-12-28 1995-03-03 Commissariat Energie Atomique Accéléromètre intégré à axe sensible parallèle au substrat.
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology

Also Published As

Publication number Publication date
USRE36498E (en) 2000-01-18
US5565625A (en) 1996-10-15
WO1996017232A1 (en) 1996-06-06
EP0795122B1 (de) 2001-01-17
EP0795122A1 (de) 1997-09-17
DE69519941D1 (de) 2001-02-22

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