DE69521163T2 - Optischer Halbleitermodulator - Google Patents

Optischer Halbleitermodulator

Info

Publication number
DE69521163T2
DE69521163T2 DE69521163T DE69521163T DE69521163T2 DE 69521163 T2 DE69521163 T2 DE 69521163T2 DE 69521163 T DE69521163 T DE 69521163T DE 69521163 T DE69521163 T DE 69521163T DE 69521163 T2 DE69521163 T2 DE 69521163T2
Authority
DE
Germany
Prior art keywords
optical semiconductor
semiconductor modulator
modulator
optical
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69521163T
Other languages
English (en)
Other versions
DE69521163D1 (de
Inventor
Tatemi Ido
Hirohisa Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69521163D1 publication Critical patent/DE69521163D1/de
Application granted granted Critical
Publication of DE69521163T2 publication Critical patent/DE69521163T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/017—Structures with periodic or quasi periodic potential variation, e.g. superlattices, quantum wells
    • G02F1/01708—Structures with periodic or quasi periodic potential variation, e.g. superlattices, quantum wells in an optical wavequide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12178—Epitaxial growth
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/0155—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the optical absorption
    • G02F1/0157—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the optical absorption using electro-absorption effects, e.g. Franz-Keldysh [FK] effect or quantum confined stark effect [QCSE]
DE69521163T 1994-02-18 1995-02-13 Optischer Halbleitermodulator Expired - Fee Related DE69521163T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6020876A JPH07230066A (ja) 1994-02-18 1994-02-18 半導体光変調器

Publications (2)

Publication Number Publication Date
DE69521163D1 DE69521163D1 (de) 2001-07-12
DE69521163T2 true DE69521163T2 (de) 2002-02-28

Family

ID=12039393

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69521163T Expired - Fee Related DE69521163T2 (de) 1994-02-18 1995-02-13 Optischer Halbleitermodulator

Country Status (4)

Country Link
US (1) US5742423A (de)
EP (1) EP0672932B1 (de)
JP (1) JPH07230066A (de)
DE (1) DE69521163T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07230066A (ja) * 1994-02-18 1995-08-29 Hitachi Ltd 半導体光変調器
JP2955986B2 (ja) * 1996-05-22 1999-10-04 日本電気株式会社 半導体光変調器及びその製造方法
JPH1096879A (ja) * 1996-09-20 1998-04-14 Nec Corp 半導体光変調器とこれを用いた光通信装置
CA2218262C (en) * 1996-10-17 2001-04-24 Kenji Kawano Ultra-high-speed semiconductor optical modulator with traveling-wave electrode
JP3799062B2 (ja) 1997-09-19 2006-07-19 株式会社日立製作所 光通信装置及びシステム
JP3723333B2 (ja) * 1997-09-29 2005-12-07 日本碍子株式会社 光変調器
US6396801B1 (en) 1998-03-17 2002-05-28 Trw Inc. Arbitrary waveform modem
US6466349B1 (en) * 1998-05-14 2002-10-15 Hughes Electronics Corporation Integrated optical transmitter
KR100333482B1 (ko) 1999-09-15 2002-04-25 오길록 초고속 반도체 광변조기 및 그 제조방법
US6421161B1 (en) 2001-01-18 2002-07-16 The Boeing Company Fiber modulator and associated method
US7120183B2 (en) 2001-07-11 2006-10-10 Optium Corporation Electro-absorption modulated laser with high operating temperature tolerance
US6804421B2 (en) * 2002-01-25 2004-10-12 T-Networks, Inc. Monolithic expanded beam mode electroabsorption modulator
JP2011203662A (ja) * 2010-03-26 2011-10-13 Mitsubishi Electric Corp 光変調器とその製造方法
US8410566B2 (en) * 2011-07-21 2013-04-02 Kotura, Inc. Application of electrical field power to light-transmitting medium
US9153940B2 (en) * 2013-11-26 2015-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Electro-optic modulator device and method of making the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4802182A (en) * 1987-11-05 1989-01-31 Xerox Corporation Monolithic two dimensional waveguide coupled cavity laser/modulator
JP2633921B2 (ja) * 1988-09-12 1997-07-23 日本電信電話株式会社 導波路付光デバイス装置の製造方法
JPH03293622A (ja) * 1990-04-12 1991-12-25 Hitachi Ltd 光変調器
JPH0529602A (ja) * 1991-07-22 1993-02-05 Hitachi Ltd 半導体光集積素子及びその製造方法
US5165105A (en) * 1991-08-02 1992-11-17 Minnesota Minning And Manufacturing Company Separate confinement electroabsorption modulator utilizing the Franz-Keldysh effect
US5222162A (en) * 1991-11-27 1993-06-22 Hughes Aircraft Company Monolithic integrated optical time delay network for antenna beam steering
JP2739666B2 (ja) * 1992-06-11 1998-04-15 国際電信電話株式会社 光変調素子
US5347601A (en) * 1993-03-29 1994-09-13 United Technologies Corporation Integrated optical receiver/transmitter
JPH07230066A (ja) * 1994-02-18 1995-08-29 Hitachi Ltd 半導体光変調器

Also Published As

Publication number Publication date
EP0672932A1 (de) 1995-09-20
DE69521163D1 (de) 2001-07-12
JPH07230066A (ja) 1995-08-29
US5742423A (en) 1998-04-21
EP0672932B1 (de) 2001-06-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee