DE69524816D1 - Verbesserte mikromechanische Geräte - Google Patents

Verbesserte mikromechanische Geräte

Info

Publication number
DE69524816D1
DE69524816D1 DE69524816T DE69524816T DE69524816D1 DE 69524816 D1 DE69524816 D1 DE 69524816D1 DE 69524816 T DE69524816 T DE 69524816T DE 69524816 T DE69524816 T DE 69524816T DE 69524816 D1 DE69524816 D1 DE 69524816D1
Authority
DE
Germany
Prior art keywords
micromechanical devices
improved micromechanical
improved
devices
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69524816T
Other languages
English (en)
Other versions
DE69524816T2 (de
Inventor
James C Baker
Scott H Prengle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69524816D1 publication Critical patent/DE69524816D1/de
Application granted granted Critical
Publication of DE69524816T2 publication Critical patent/DE69524816T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69524816T 1994-06-21 1995-06-21 Verbesserte mikromechanische Geräte Expired - Fee Related DE69524816T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/263,208 US5454906A (en) 1994-06-21 1994-06-21 Method of providing sacrificial spacer for micro-mechanical devices

Publications (2)

Publication Number Publication Date
DE69524816D1 true DE69524816D1 (de) 2002-02-07
DE69524816T2 DE69524816T2 (de) 2002-08-29

Family

ID=23000835

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69524816T Expired - Fee Related DE69524816T2 (de) 1994-06-21 1995-06-21 Verbesserte mikromechanische Geräte

Country Status (8)

Country Link
US (1) US5454906A (de)
EP (1) EP0689077B1 (de)
JP (1) JPH0862517A (de)
KR (1) KR100346876B1 (de)
CN (1) CN1099614C (de)
CA (1) CA2149932A1 (de)
DE (1) DE69524816T2 (de)
TW (1) TW284862B (de)

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TW284862B (de) 1996-09-01
CN1099614C (zh) 2003-01-22
CA2149932A1 (en) 1995-12-22
US5454906A (en) 1995-10-03
EP0689077B1 (de) 2002-01-02
JPH0862517A (ja) 1996-03-08
CN1117148A (zh) 1996-02-21
EP0689077A2 (de) 1995-12-27
KR960002496A (ko) 1996-01-26
EP0689077A3 (de) 1997-05-21
DE69524816T2 (de) 2002-08-29
KR100346876B1 (ko) 2002-11-18

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