DE69527432D1 - Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat - Google Patents

Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat

Info

Publication number
DE69527432D1
DE69527432D1 DE69527432T DE69527432T DE69527432D1 DE 69527432 D1 DE69527432 D1 DE 69527432D1 DE 69527432 T DE69527432 T DE 69527432T DE 69527432 T DE69527432 T DE 69527432T DE 69527432 D1 DE69527432 D1 DE 69527432D1
Authority
DE
Germany
Prior art keywords
mass
semiconductor substrate
spectrograph
filter
mass filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69527432T
Other languages
English (en)
Other versions
DE69527432T2 (de
Inventor
B Freidhoff
M Young
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of DE69527432D1 publication Critical patent/DE69527432D1/de
Application granted granted Critical
Publication of DE69527432T2 publication Critical patent/DE69527432T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, MicroElectro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
DE69527432T 1994-10-07 1995-09-21 Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat Expired - Lifetime DE69527432T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/320,474 US5536939A (en) 1993-09-22 1994-10-07 Miniaturized mass filter
PCT/US1995/011908 WO1996011492A1 (en) 1994-10-07 1995-09-21 Miniaturized mass filter

Publications (2)

Publication Number Publication Date
DE69527432D1 true DE69527432D1 (de) 2002-08-22
DE69527432T2 DE69527432T2 (de) 2003-02-27

Family

ID=23246588

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527432T Expired - Lifetime DE69527432T2 (de) 1994-10-07 1995-09-21 Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat

Country Status (6)

Country Link
US (1) US5536939A (de)
EP (1) EP0784863B1 (de)
JP (1) JP3713557B2 (de)
CA (1) CA2202060C (de)
DE (1) DE69527432T2 (de)
WO (1) WO1996011492A1 (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747815A (en) * 1993-09-22 1998-05-05 Northrop Grumman Corporation Micro-miniature ionizer for gas sensor applications and method of making micro-miniature ionizer
CN100435900C (zh) * 1998-09-17 2008-11-26 阿德文生物科学公司 液相色谱系统，化学分离装置及质谱分析装置和方法
KR100274871B1 (ko) * 1998-11-12 2000-12-15 김순택 발광 화합물 및 이를 발색 재료로서 채용하고 있는 표시소자2
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6690004B2 (en) * 1999-07-21 2004-02-10 The Charles Stark Draper Laboratory, Inc. Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry
US7157700B2 (en) * 2001-06-30 2007-01-02 Sionex Corporation System for collection of data and identification of unknown ion species in an electric field
US7057168B2 (en) * 1999-07-21 2006-06-06 Sionex Corporation Systems for differential ion mobility analysis
US7148477B2 (en) * 1999-07-21 2006-12-12 Sionex Corporation System for trajectory-based ion species identification
US7129482B2 (en) 1999-07-21 2006-10-31 Sionex Corporation Explosives detection using differential ion mobility spectrometry
US7399958B2 (en) * 1999-07-21 2008-07-15 Sionex Corporation Method and apparatus for enhanced ion mobility based sample analysis using various analyzer configurations
US7005632B2 (en) * 2002-04-12 2006-02-28 Sionex Corporation Method and apparatus for control of mobility-based ion species identification
US6815669B1 (en) 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Longitudinal field driven ion mobility filter and detection system
US6512224B1 (en) 1999-07-21 2003-01-28 The Charles Stark Draper Laboratory, Inc. Longitudinal field driven field asymmetric ion mobility filter and detection system
US7098449B1 (en) 1999-07-21 2006-08-29 The Charles Stark Draper Laboratory, Inc. Spectrometer chip assembly
US6806463B2 (en) * 1999-07-21 2004-10-19 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US6495823B1 (en) * 1999-07-21 2002-12-17 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6501074B1 (en) 1999-10-19 2002-12-31 Regents Of The University Of Minnesota Double-focusing mass spectrometer apparatus and methods regarding same
JP5057318B2 (ja) 1999-12-30 2012-10-24 アドビオン インコーポレイテッド 多重電気噴霧装置、システム、および方法
EP1248949B1 (de) 2000-01-18 2013-05-22 Advion, Inc. Elektrosprayvorrichtung mit array von trennsäulen sowie verfahren zur trennung von fluidproben
WO2001085312A1 (en) 2000-05-08 2001-11-15 Mass Sensors, Inc. Microscale mass spectrometric chemical-gas sensor
US6831276B2 (en) 2000-05-08 2004-12-14 Philip S. Berger Microscale mass spectrometric chemical-gas sensor
US7119328B2 (en) * 2001-06-30 2006-10-10 Sionex Corporation System for DMS peak resolution
EP1405065B1 (de) * 2001-06-30 2012-04-11 Dh Technologies Development Pte. Ltd. System zum sammeln von daten und zur identifizierung unbekannter substanzen in einem elektrischen feld
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
US7091481B2 (en) 2001-08-08 2006-08-15 Sionex Corporation Method and apparatus for plasma generation
US6727496B2 (en) * 2001-08-14 2004-04-27 Sionex Corporation Pancake spectrometer
GB2384908B (en) * 2002-02-05 2005-05-04 Microsaic Systems Ltd Mass spectrometry
US7122794B1 (en) 2002-02-21 2006-10-17 Sionex Corporation Systems and methods for ion mobility control
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
US7019291B2 (en) 2002-10-12 2006-03-28 Sionex Corporation NOx monitor using differential mobility spectrometry
EP1668298A4 (de) * 2003-09-17 2010-04-14 Sionex Corp Festkörperströmungsgenerator und verwandte systeme, anwendungen und verfahren
WO2005052546A2 (en) * 2003-11-25 2005-06-09 Sionex Corporation Mobility bases apparatus and methods using dispersion characteristics to improve analysis of a sample
EP1697024B1 (de) * 2003-12-18 2017-08-30 DH Technologies Development Pte. Ltd. Verfahren und vorrichtung zur verbesserten ionenbasierten probendetektion unter verwendung von selektiver vortrennung und verstärkung
WO2005067582A2 (en) * 2004-01-13 2005-07-28 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
CA2554997A1 (en) * 2004-02-02 2005-08-18 Sionex Corporation Compact sample analysis systems and related methods using combined chromatography and mobility spectrometry techniques
GB2411046B (en) * 2004-02-12 2006-10-25 Microsaic Systems Ltd Mass spectrometer system
US7057170B2 (en) * 2004-03-12 2006-06-06 Northrop Grumman Corporation Compact ion gauge using micromachining and MISOC devices
EP1756561A1 (de) * 2004-04-28 2007-02-28 Sionex Corporation System und verfahren zur ionenspeziesanalyse mit verbesserter zustandskontrolle und dateninterpretation unter verwendung differentieller mobilitätsspektrometer
WO2006060807A1 (en) * 2004-12-03 2006-06-08 Sionex Corporation Method and apparatus for enhanced ion based sample filtering and detection
GB2422951B (en) * 2005-02-07 2010-07-28 Microsaic Systems Ltd Integrated analytical device
US7608818B2 (en) * 2005-04-29 2009-10-27 Sionex Corporation Compact gas chromatography and ion mobility based sample analysis systems, methods, and devices
US20070001114A1 (en) * 2005-06-29 2007-01-04 Goodley Paul C Apparatus and method for ion capture and production
WO2007014303A2 (en) 2005-07-26 2007-02-01 Sionex Corporation Ultra compact ion mobility based analyzer system and method
US7402799B2 (en) * 2005-10-28 2008-07-22 Northrop Grumman Corporation MEMS mass spectrometer
WO2007120373A2 (en) * 2006-01-26 2007-10-25 Sionex Corporation Differential mobility spectrometer analyzer and pre-filter apparatus, methods and systems
WO2008094704A2 (en) 2007-02-01 2008-08-07 Sionex Corporation Differential mobility spectrometer pre-filter assembly for a mass spectrometer
EP1959476A1 (de) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
US7649171B1 (en) * 2007-05-21 2010-01-19 Northrop Grumman Corporation Miniature mass spectrometer for the analysis of biological small molecules
US9443698B2 (en) * 2008-10-06 2016-09-13 Axcelis Technologies, Inc. Hybrid scanning for ion implantation
CN103608894B (zh) * 2011-02-14 2016-08-10 麻省理工学院 用于质谱分析的方法、装置及系统
JP6624482B2 (ja) 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
US10319572B2 (en) * 2017-09-28 2019-06-11 Northrop Grumman Systems Corporation Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC voltages
US20200152437A1 (en) 2018-11-14 2020-05-14 Northrop Grumman Systems Corporation Tapered magnetic ion transport tunnel for particle collection
US10755827B1 (en) 2019-05-17 2020-08-25 Northrop Grumman Systems Corporation Radiation shield
JP7276751B2 (ja) * 2020-03-05 2023-05-18 新東工業株式会社 ガス測定器及びガス測定方法
GB2622402A (en) * 2022-09-14 2024-03-20 Thermo Fisher Scient Bremen Gmbh Simulating a mass spectrometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955084A (en) * 1974-09-09 1976-05-04 California Institute Of Technology Electro-optical detector for use in a wide mass range mass spectrometer
DE3813641A1 (de) * 1988-01-26 1989-08-03 Finnigan Mat Gmbh Doppelfokussierendes massenspektrometer und ms/ms-anordnung
US5304799A (en) * 1992-07-17 1994-04-19 Monitor Group, Inc. Cycloidal mass spectrometer and ionizer for use therein
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer

Also Published As

Publication number Publication date
DE69527432T2 (de) 2003-02-27
JPH10512996A (ja) 1998-12-08
CA2202060A1 (en) 1996-04-18
US5536939A (en) 1996-07-16
EP0784863A1 (de) 1997-07-23
WO1996011492A1 (en) 1996-04-18
CA2202060C (en) 2006-07-18
JP3713557B2 (ja) 2005-11-09
EP0784863B1 (de) 2002-07-17

Similar Documents

Publication Publication Date Title
DE69527432T2 (de) Massenspektrograph mit einem Massenfilter in einem Halbleitersubstrat
DE69737914D1 (de) Kartenförmige vorrichtung mit einem halbleiterelement
DE69725968D1 (de) Hochfrequenz-symmetriereinrichtung in einem mehrschichtsubstrat
DE69635107D1 (de) Halbleiteranordnung mit einem transparenten schaltungselement
DE69533489D1 (de) Halbleiterpackung mit einem Mehrschichsubstrat
DE69117050D1 (de) Ventilanordnung in einem sirupspender
DE69938235D1 (de) Sofortige zentrierbestimmung während der substratbehandlung in einem fertigungs-system
DE69511609T2 (de) Verbinden von einem Halbleiter mit einem Substrat
DE69318239D1 (de) Halbleiterbauelement mit planarer Grenzfläche
DE69636110D1 (de) Halbleitervorrichtung mit einem Miniband
DE69504190D1 (de) Kanne mit filter
DE69739810D1 (de) Mehrschichtiges filter mit einzelpunktmasseflächekonfiguration
DE69132263T2 (de) In einem Verbundhalbleitersubstrat gefertigter integrierter E/D Schaltkreis
DE59609905D1 (de) Halbleitervorrichtung mit einem Träger
DK0910875T3 (da) Keramisk filter med en afskærmning i samme plan
DE69624305D1 (de) Halbleiteranordnung mit einem ligbt element
DE69329139T2 (de) Halbleitervorrichtung mit einem programmierbaren Element
DE69522454D1 (de) Sofortleistungsverlustmesser in einem Leistungstransistor
DE69926576D1 (de) Betriebsmittelteilung in einem digitalen filter
DE29580388U1 (de) Vorrichtung mit einem Gehäuse
DE69517539T2 (de) Halbleiterstruktur mit virtuellem Beugungsgitter
DE59502561D1 (de) Schneidvorrichtung mit einem scheibenförmigen Schneidelement
DE9413550U1 (de) Halbleiteranordnung mit wenigstens einem Halbleiterbauelement
DE69426875D1 (de) Integrierter Crystal-Oszillator mit einem einzigen Anschluss
DE9404307U1 (de) Koffer mit wenigstens einem Einbaugerät

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN

R082 Change of representative

Ref document number: 784863

Country of ref document: EP

Representative=s name: NEUGEBAUER, JUERGEN, DIPL.-PHYS.UNIV. M.A./SUN, DE